The invention provides a wafer-level vacuum encapsulating method for a micro-electromechanical device, which sequentially comprises the following steps of: 1, preparing a capping wafer and a device wafer, wherein the capping wafer is insulated silicon consisting of a front silicon layer, a back silicon layer and a middle silicon dioxide layer; 2, growing sealing rings on the front of the device wafer and the front of the capping wafer; 3, growing solder on the sealing ring on the front of the capping wafer; 4, performing deep silicon etching on the capping wafer by taking the sealing ring as a mask to obtain a groove; 5, growing a getter film on the front of the capping wafer, wherein the pattern of the getter film is obtained by a maskplate during growth; 6, heating to activate the getter film and bonding the capping wafer and the device wafer together by using bonding equipment; 7, growing an antireflection film on the back of the capping wafer, wherein the pattern of the antireflection film is obtained by the maskplate during growth; and 8, cutting the wafers. By adjusting process order, the influence of a next process on a result of a previous process is avoided, and the method is particularly suitable for encapsulating infrared devices.