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Patterned substrates and their fabrication methods, LED epitaxial wafers

PendingCN122094258AImprove reliabilityAvoid reflectionsPatterned substrateReflective layer
This invention discloses a patterned substrate and its fabrication method, as well as an epitaxial wafer for a light-emitting diode (LED), relating to the field of semiconductor optoelectronic devices. The patterned substrate includes a substrate body, a metal reflective layer, and multiple pyramidal protrusions. The substrate body has a first surface and a second surface disposed opposite to each other; the metal reflective layer covers the first surface; the multiple pyramidal protrusions are uniformly distributed on the metal reflective layer; each pyramidal protrusion includes a first AlN layer and a SiO2 layer sequentially stacked on the metal reflective layer. Implementing this invention can improve the luminous efficiency of the LED.
Owner:FOSHAN NATIONSTAR SEMICONDUCTOR CO LTD