High resolution micro infrared spectrometer based on MEMS scanning micromirror

An infrared spectrometer and scanning micromirror technology, which is used in color/spectral property measurement, spectrometry/spectrophotometry/monochromator, instruments, etc. Reduced movement amplitude, effect of high spectral resolution accuracy

Inactive Publication Date: 2012-02-22
CHONGQING UNIV
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  • Abstract
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Problems solved by technology

For a spectrometer with such an optical structure, the optical structure is relatively simple, but because there is no collimating mirror, the light always presents a

Method used

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  • High resolution micro infrared spectrometer based on MEMS scanning micromirror
  • High resolution micro infrared spectrometer based on MEMS scanning micromirror

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Embodiment Construction

[0023] Such as figure 1 As shown, the spectrometer consists of an optical fiber connection device 1, an incident slit 2, a collimating mirror 3, a scanning micromirror 4 based on MEMS technology, a blazed grating 5, spherical focusing mirrors 6, 7, an exit slit 8 and a unit infrared The detector consists of 9 components. The scanning micromirror 4 based on MEMS technology has a micro optical element that can periodically swing the mirror around a fixed central axis. After the optical signal to be measured enters the spectrometer through the optical fiber connection device 1 and the incident slit 2, it is collimated into a parallel beam by the concave collimating mirror 3, and the mirror surface of the scanning micromirror 4 based on MEMS technology reflects the collimated parallel beam Light of a certain wavelength is diffracted at a specific diffraction angle and then focused to the front of the exit slit 8 by the spherical focusing mirrors 6 and 7, and then output to the ph...

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Abstract

The invention discloses a high resolution micro infrared spectrometer based on an MEMS scanning micromirror. The high resolution micro infrared spectrometer comprises a fiber connecting device, an incident slit, a collimation reflector, a scanning micromirror, a blazed grating, a spherical surface focusing reflectors, an emitting slit and a high sensitivity unit infrared detector. A novel optical path structure is employed by the high resolution micro infrared spectrometer: an external optical signal to be measured is coupled into a spectrometer through the fiber and the slit and collimated by the spherical surface collimation reflector; the MEMS scanning micromirror and a diffraction grating are utilized to substitute a scanning raster in a traditional scanning raster spectrometer to realize optical splitting and spectrum scanning functions together; during torsional pendulum of the micromirror surface, a combination of two spherical surface reflectors carries out focusing and imaging on the spectrum, so that light with different wavelengths is focused and imaged and irradiates on the detector through the emitting slit successively to realize continuous detection of spectrum. The spectrometer based on the MEMS scanning micromirror provided by the invention has advantages of small volume, wide spectrum measurement scope, high resolution and low cost, etc.

Description

technical field [0001] The invention belongs to the technical field of spectrum measurement, and relates to a miniature infrared spectrometer based on MEMS scanning micromirror technology. Background technique [0002] Infrared spectroscopy is one of the most important optical instruments. It is the basic equipment for observing, analyzing and processing the structure and composition of substances by applying the principle of optical technology and spectral detection technology. It has the advantages of high analysis precision, large measurement range, fast measurement speed and less sample consumption. It is widely used in Metallurgy, geology, petrochemical, medical and health, environmental protection and other departments are also indispensable instruments for aerospace, space exploration, resources and hydrological survey, with extremely important application value and broad market prospects. However, due to the harsh conditions of use of laboratory Fourier transform in...

Claims

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Application Information

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IPC IPC(8): G01N21/35G01J3/02G01J3/06G01N21/25
Inventor 温志渝张中卫曾甜玲陈刚魏康林
Owner CHONGQING UNIV
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