Ultra-high vacuum multifunctional integrated test system
An ultra-high vacuum and comprehensive testing technology, applied in the direction of measuring electricity, measuring devices, measuring electrical variables, etc., can solve problems such as no precedents, and achieve the effect of avoiding serious deviations
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[0043] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0044] The research on the characterization methods of materials and devices at the micro-nano scale is a key technical bottleneck in the development of science and technology today. Among them, the micro-nano resonator is one of the few micro-nano devices that are currently developed successfully and widely used. Research and development related Means of representation are more important and urgent. However, there is currently no system for characterizing the resonance characteristics of micro-nano resonators sold as commercial products. Several international research groups, including Stanford University, University of Michigan, University of California, Santa Barbara, Berkeley, Tohoku University, etc., are all Experime...
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