Device and method for calibrating flow-dividing vacuum leaking hole

Abstract

The invention relates to a device and a method for calibrating a flow-dividing vacuum leaking hole, in particular to the device and the method for calibrating the vacuum leaking hole, the leakage value of which is less than 1*10-8 Pa.m3/s by adopting flow-dividing technology, and belongs to the field of measuring technology. The device consists of the calibrated leaking hole, a valve, an ionization gauge, a small hole, a flow-dividing chamber, a non-evaporable getter pump, an ultrahigh vacuum calibrating chamber, a metering hole, a very high vacuum pumping chamber, an oil-free bi-turbo molecular pump air exhauster set, a quadrupole mass spectrometer, a flow meter, a super-high vacuum calibrating chamber, the metering hole, a super-high vacuum pumping chamber and a common molecular pump air exhauster set. The method adopts a fixed flow method gas micro-flow meter to provide a known gas flow rate, so the measuring range of the flow rate is wide and uncertainty of the measurement is low; and by adopting a flow-dividing method to calibrate the vacuum leaking hole, the method of the invention completely avoids a nonlinear error of the quadrupole mass spectrometer and can precisely calibrate the vacuum leaking hole the leakage value of which is less than 1*10-8 Pa.m3/s.

Description

technical field [0001] A device and method for calibrating a split-type vacuum leak of the present invention, especially adopting split-flow technology to achieve a leak rate value less than 1×10 -8 Pa.m 3 The invention relates to a device and method for calibrating a vacuum leak per second, belonging to the technical field of measurement. Background technique [0002] In metrology laboratories, high-precision gas micro-flow meters are mostly used to measure and provide known gas flow rates. High-precision gas micro-flow meters mostly use constant-pressure gas micro-flow meters with a measuring range of 1×10 -8 ~1×10 -4 Pa.m 3 / s. In practical applications, the leak rate of most vacuum leaks is less than 1×10 -8 Pa.m 3 / s, so it is impossible to directly measure the leak rate of the vacuum leak with a constant pressure gas microflow meter. [0003] The document "Li Detian. Several Progresses in Vacuum Measurement. Vacuum and Low Temperature 9(3), 2003." introduces th...

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Problems solved by technology

This is difficult to do in practice, so the result of the calibration of the vacuum leak depends on the non-linearity of the quadrupole mass spectrometer

[0004] The disadvantage of this method is that when the calibration leak rate is less than 1×10 -8 Pa.m 3 / s vacuum leak, the nonlinearity of the quadrupole mass spectrometer often causes a large measurement uncertainty

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