126 results about "Turbomolecular pump" patented technology

The invention discloses a multifunctional integrated gas control system for a dilution refrigerator, and particularly relates to the field of refrigeration and low-temperature engineering, which comprises a liquid nitrogen cold trap, a gas buffer tank, an integrated valve box, a dilution refrigeration internal circulation pipeline, a diaphragm compressor, a roots pump, a turbo molecular pump and a vacuum suction pump set. According to the system, a highly-integrated valve box module is used and is responsible for implementing gas circuit control on different stages such as dilution refrigeration cycle starting, operation and shutdown rewarming; according to the invention, conductance optimization and heat loss reduction are carried out on gas paths with different temperature zones and different pressures, high air tightness of a full temperature zone from room temperature to extremely low temperature is ensured, the reliability and the automation degree of the dilution refrigerating machine are improved, and very positive significance is provided for practicability of a dilution refrigerating system.

The invention relates to the technical field of molecular pumps, and discloses a fault prediction method, device, equipment and medium for a turbo molecular pump, the method comprises the following steps: collecting operation data of the turbo molecular pump according to a set sampling frequency, and transmitting the operation data through a data transmission network; performing data cleaning, denoising, normalization and format conversion processing on the historical operation data; the health index value of the turbo molecular pump is calculated according to the processed historical operation data, whether the turbo molecular pump breaks down or not is judged according to the health index value, and historical fault data are obtained; according to the method, the fault prediction model is established based on the historical fault data and the real-time operation data, the fault state of the turbo molecular pump is predicted through the fault prediction model, the fault prediction model is established to predict possible faults of the turbo molecular pump, and therefore potential fault hidden dangers can be found timely and accurately, and the fault state of the turbo molecular pump can be predicted. And a more reliable basis is provided for the maintenance decision of the turbo molecular pump.

The invention relates to the technical field of turbo molecular pump magnetic bearing dynamic performance testing, in particular to a gas loading simulation turbo molecular pump magnetic bearing dynamic performance testing device which comprises a frame, an upper three-axis moving platform is arranged on the top of the frame, and a side three-axis moving platform is arranged on one side of the frame. The upper three-axis moving platform and the side three-axis moving platform are respectively and fixedly connected with a pressure applying assembly, the pressure applying assembly is detachably connected with a simulation rotor, the simulation rotor is detachably connected with a bottom plate, the bottom plate is fixedly connected to the bottom of the frame, and one side of the top surface of the frame is fixedly connected with a visual detection assembly. Axial force and radial force are applied to the molecular pump through the upper three-axis moving platform and the side three-axis moving platform respectively, moments in different directions are applied, and the static and dynamic load performance of the molecular pump under different axial force, radial force and moment combinations can be measured.

A mass damper is connected to a vacuum pump to reduce vibrations during operation. The mass damper includes a conic portion defined by a converging end and a diverging end and a damping mass connected to the converging end of the conic portion. The vacuum pump has a pump body, a vacuum inlet in fluid communication with an internal volume of a vacuum chamber, a vacuum outlet, and a rotor assembly disposed within the pump body. The rotor assembly is configured to rotate about a rotary axis to pump gas from the internal volume of the vacuum chamber out of the vacuum outlet. The conic portion may have a cone axis that is coaxial with the rotary axis of the vacuum pump.

To provide a vacuum pump that can effectively utilize radicals, and a vacuum pump component.SOLUTION: A turbo molecular pump 100 comprises a turbo molecular pump mechanism part 138 including a rotor 103 capable of freely rotating, and fixed blades 123 combined with the rotor, and an outer cylinder 127 containing the turbo molecular pump mechanism part 138, and is provided with a radical discharge promotion structure connecting a radical introduction port 218 arranged in the outer cylinder 127, and a communication port 254 arranged in the turbo molecular pump mechanism part 138.SELECTED DRAWING: Figure 5

To provide a vacuum exhaust device capable of performing excellent plasma cleaning without providing a pressure control valve.SOLUTION: A vacuum exhaust device 10 comprises a turbo molecular pump 100, and a plasma generation device 210, and comprises a throttling unit 244 that can increase an internal pressure of the plasma generation device 210 until it satisfies the relation of P≥0.3 / D. P represents pressure [Pa], and D represents a distance [m] between electrodes in the plasma generation device. Also, the throttling unit can increase the internal pressure of the plasma generation device 210 until it satisfies the relation of P≤1.5 / D.SELECTED DRAWING: Figure 5

The invention discloses a comprehensive dynamic balance detection and adjustment device for a turbo molecular pump rotor, and belongs to the technical field of dynamic balance of turbo molecular pump rotors. The supporting mechanism is arranged in the testing platform, the front end of the to-be-tested turbine rotor is in transmission connection with the supporting mechanism through a connecting block, and a traction cylinder at the rear end of the to-be-tested turbine rotor is in transmission connection with the supporting mechanism; the detection mechanism is arranged in the test platform and is used for detecting the dynamic balance of the turbine rotor to be tested in the rotating process; the driving mechanism is arranged at the bottom of the testing platform and is used for driving the turbine rotor to be tested to rotate; and the weight reduction mechanism is arranged at the top of the test platform and is used for reducing the weight of the traction cylinder. By additionally arranging the connecting blocks at the ends of the rotors, dynamic balance of the rotating shaft and the turbine rotor is achieved together, the method that in a transmission dynamic balance scheme, the rotating shaft and the turbine rotor need to be separated for dynamic balance is replaced, a de-weight mechanism and a dynamic balance device are integrated together, and the purpose of de-weight without getting off a machine is achieved.

An ion implantation system including an ion source for generating an ion beam, an end station for holding a substrate to be implanted by the ion beam, and a linear accelerator disposed between the ion source and the end station and adapted to accelerate the ion beam, the linear accelerator including a beam tube for transmitting the ion beam, the beam tube having at least five adjoining sidewalls, at least one resonator coupled to the beam tube, and at least one turbomolecular pump coupled to the beam tube, wherein at least one of the at least five adjoining sidewalls of the beam tube has an opening formed therein for providing access to an interior of the beam tube.

The present disclosure relates to a protective mounting structure for a turbo molecular pump. The protective mounting structure for the turbo molecular pump comprises a shell, a driving assembly, a rotating assembly, a moving assembly, a heat dissipation assembly, a flow guide assembly and a mounting assembly. Compared with a traditional turbo molecular pump which can generate more heat to abrade an internal mechanical structure during operation, the device can enable the multiple heat dissipation structures to linearly move at the same time through the two sliding structures which are rotationally connected with each other so as to fix the turbo molecular pump; and heat is guided out through the heat dissipation structure and is taken away in an air cooling mode, so that the turbo molecular pump is fixedly installed and meanwhile subjected to heat dissipation protection treatment through the protection installation structure.

An ion implantation system including an ion source for generating an ion beam, an end station for holding a substrate to be implanted by the ion beam, and a linear accelerator disposed between the ion source and the end station and adapted to accelerate the ion beam, the linear accelerator including a beam tube for transmitting the ion beam, the beam tube having at least five adjoining sidewalls, at least one resonator coupled to the beam tube, and at least one turbomolecular pump coupled to the beam tube, wherein at least one of the at least five adjoining sidewalls of the beam tube has an opening formed therein for providing access to an interior of the beam tube.

A vacuum pump (1), preferably a turbo molecular pump, comprises a rotor shaft (9) configured to have one or more rotor blades (8) coupled thereto, and the rotor shaft (9) defines a bearing seat (7) housing a permanent magnet bearing in an interference fit configuration, the magnetic bearing insert comprises one or more permanent magnet alloy rings (3, 4, 5) of a rotor bearing half of a permanent magnet bearing and a radially outwardly extending sleeve (16) coupled thereto around an outer periphery of the or each permanent magnet alloy ring (3, 4, 5), and the outer surface of the permanent magnet bearing insert (3) engages with the inwardly facing wall of the bearing seat (7) to provide an interference fit wherein the coefficient of thermal expansion of the radially outwardly extending sleeve (16) is at least substantially the same as the coefficient of thermal expansion of the material of the rotor shaft (9) defining the engaged bearing seat wall.

The embodiment of the utility model provides a turbo molecular pump which comprises a shell provided with a containing cavity and comprising an air inlet port and an air outlet port; the rotating shaft is arranged in the accommodating cavity; the first end of the rotating shaft is close to the intake port; the second end of the rotating shaft is close to the exhaust port; the extension direction of the exhaust port is parallel to the axial direction of the rotating shaft; or a first included angle is formed between the extension direction of the exhaust port and the axial direction of the rotating shaft; the first included angle is smaller than or equal to 30 degrees; the plurality of rotors are axially distributed along the rotating shaft; each rotor is distributed along the circumferential direction of the rotating shaft; when the rotating shaft rotates, the rotating shaft drives the multiple rotors to move together so as to drive airflow in the containing cavity to flow from the air inlet port to the air outlet port.

This invention discloses an online detection method and device for the interlayer vacuum degree of multi-layer insulation in cryogenic containers, belonging to the field of cryogenic insulation vacuum detection technology. The method includes: installing a vacuum-sealed base on the outer wall of the container; penetrating the outer liner with a piercing capillary probe and inserting it into the interlayer gap; constructing a two-stage high-vacuum differential system consisting of an oil-free dry forepump, a turbomolecular pump, a fine-tuning needle valve, a flow-limiting capillary, a differential chamber, and a residual gas analyzer to form a low-speed drainage loop; after pre-evacuating the background gas, adjusting the fine-tuning needle valve to extract the interlayer gas at low speed, simultaneously collecting the total pressure and component partial pressures; calculating the true vacuum degree by combining flow resistance, gas resistance, permeation resistance, and temperature correction; after detection, leaving the end of the piercing capillary probe inside the layer without removing it, and permanently sealing the base port; repeating the detection at different points and depths to complete a full-area scan. This application has the advantages of direct online detection, minimally invasive and leak-free operation, repeatable testing, and accurate tracing of failure causes.

There are provided a vacuum pump which can effectively prevent stress corrosion cracking of a rotating body and has excellent corrosion resistance, and a rotating body of the vacuum pump. In a vacuum pump (e.g., a turbo-molecular pump 100) exhausting gas by rotation of a rotating body 103, the rotating body 103 has, on a surface thereof, a first area 1 covered with a first surface treatment layer 1A and a second area 2 covered with a second surface treatment layer 2A, and a boundary portion 3 between the first area 1 and the second area 2 has an area in which the surface treatment layers 1A and 1B of the first and second areas 1 and 2 overlap each other.

The utility model relates to photoresist production auxiliary equipment technical field, concretely relates to an insulating carbon black storage device for photoresist, including storage box, the top of storage box is connected with feed inlet, the first solenoid valve is installed in the communication of feed inlet and storage box, the output port department of storage box bottom is provided with the second solenoid valve, still including fixed mounting on the turbine molecular pump of storage box outer side wall, the output end of turbine molecular pump is connected with the air cylinder of fixed mounting in the outer side wall of storage box, the top lift sliding of air cylinder is inserted with nitrogen tube, the output end of nitrogen tube is inserted to storage box, and is equipped with one -way exhaust valve, the utility model discloses nitrogen tube height is adjusted dynamically through lift cylinder, makes it always close carbon black material surface, and nitrogen fills the space not being occupied by material directly, and replacement efficiency improves 30% or more, and nitrogen consumption reduces 20%-40%, and turbine molecular pump provides high -purity nitrogen delivery, prevents the back flow in combination one -way exhaust valve, ensures the inert environment of fast establishment.

The utility model belongs to vacuum equipment technical field especially for multistage turbine molecular pump, including the casing, the front and back of casing all are equipped with the air inlet of equal distance arrangement, and the left side of casing is provided with the controller, and the inside of casing is provided with multistage turbine molecular pump, refrigeration pipe frame and two heating pipes respectively, and the inner bottom wall of casing is fixedly connected with two temperature sensors, and the right side of casing is provided with refrigeration module, and the output of refrigeration module penetrates casing and is fixedly communicated with the right -hand end of refrigeration pipe frame, and the upper surface of casing is fixedly communicated with two air ducts, and the inside of every air duct is provided with the exhaust fan motor, and the air inlet of equal distance arrangement is set up in the front and back of casing, and cooperate the exhaust fan motor in the air duct to form forced convection heat dissipation channel, thereby can accelerate air flow, effectively promote the heat dissipation efficiency of motor and bearing operation, avoid the overheating protection shutdown problem caused by the environment temperature is too high.

A vacuum exhaust system (10) for exhausting a process gas from a plurality of chambers (10-1 to 10-n) is provided with: a plurality of turbo molecular pumps (100-1 to 100-n); a manifold (14) connecting the exhaust ports of the plurality of turbo molecular pumps in parallel; one or more dry pumps (16) connected to the collecting tube (14); and chamber introduction valve devices (30-1 to 30-n) for controlling the flow rate of gas introduced into the plurality of chambers (10-1 to 10-n). Setting an exhaust flow rate threshold value (T) for the process gas on the basis of the exhaust flow rates of the plurality of turbo molecular pumps (100-1 to 100-n); at least one of the introduction timing and the flow rate of the gas is controlled so as not to exceed the exhaust gas flow rate threshold value (T) by means of the chamber introduction valve devices (30-1 to 30-n).

A magnetic bearing device including a rotating body, a magnetic bearing portion which levitates the rotating body in air and supports the rotating body by a magnetic force, and a control portion which controls drive of the magnetic bearing portion, in which the control portion includes a tuning portion which tunes the magnetic bearing portion, a power-source detecting portion which detects a state of a power source of the magnetic bearing device, and a stationary-levitated detecting portion which detects whether the rotating body is in a stationary-levitated state or not, and the tuning portion is configured to perform tuning of the magnetic bearing portion at least in either one of (A) a case where the power-source detecting portion detects that a power source of the magnetic bearing device has been switched from OFF to ON, and (B) a case where the stationary-levitated detecting portion detects that the rotating body is in the stationary-levitated state.

A vacuum pump 10, such as a turbomolecular pump, comprises a rotor 12 in a housing 26 and comprising a rotor shaft 32. A stator 14 in the housing cooperatives with the rotor. A magnet device 16 acts o

[Problem] To provide a vacuum pump having superior mechanical characteristics. [Solution] Provided is a turbo-molecular pump that includes a rotor blade 114 disposed on a rotor shaft and rotating together with the rotor shaft, and that exhausts a process gas by the rotation of the rotor shaft with exhaust elements (such as a rotary turbine blade 102 and a rotor body 103a) provided on the rotor blade. The rotor blade 114 is made from a first metal material and a second metal material, and at least some of constituent parts are produced using a 3D printer. A portion to be a joint 212 of the first metal material and the second metal material has an inclusion coupling structure in which one of the first metal material and the second metal material contains at least a portion of the other.

A turbomolecular pump bladed disc, comprising: a central hub configured to be rotated about an axis, the axis defining an axial direction; and one or more blades radially extending from the central hub; wherein each of the one or more blades has a cross-section that: tapers to a first point in a first direction, the first direction being parallel with the axial direction, tapers to a second point in a second direction, the second direction being parallel with the axial direction and opposite to the first direction; and is substantially a parallelogram in shape.

An EUV lithographic apparatus includes a wafer stage and a particle removing assembly for cleaning a wafer for an extreme ultraviolet (EUV) lithographic apparatus. The wafer stage includes a measurement side and an exposure side. The particle removing assembly includes particle removing electrodes, an exhaust device and turbomolecular pumps. The particle removing electrodes is configured to direct debris from the chamber by suppressing turbulence such that the debris can be exhausted from the wafer stage to the outside of the processing apparatus. In some embodiments, turbomolecular pumps are turned off in the measurement side of the wafer stage so that an exhaust flow can be guided to an exposure side of the wafer stage. In some embodiments, the speed of voltage rise to the electrodes of the wafer chuck is adjusted.

A magnetic bearing device including a rotating body, a magnetic bearing portion which levitates the rotating body in air and supports the rotating body by a magnetic force, and a control portion which controls drive of the magnetic bearing portion, in which the control portion includes a tuning portion which tunes the magnetic bearing portion, a power-source detecting portion which detects a state of a power source of the magnetic bearing device, and a stationary-levitated detecting portion which detects whether the rotating body is in a stationary-levitated state or not, and the tuning portion is configured to perform tuning of the magnetic bearing portion at least in either one of (A) a case where the power-source detecting portion detects that a power source of the magnetic bearing device has been switched from OFF to ON, and (B) a case where the stationary-levitated detecting portion detects that the rotating body is in the stationary-levitated state.

The invention provides a method, device and equipment for determining a blade array structure of a turbo molecular pump. The method comprises the steps that the expected pumping speed and the expected compression ratio are obtained; blade rows of the turbo molecular pump are increased step by step, and parameter adjustment is carried out on the blade rows increased in each step until a target first blade row cascade structure meeting the expected pumping speed is obtained; on the basis of the target first blade array cascade structure, turbine molecular pump blade arrays are increased step by step, and parameter adjustment is conducted on the blade arrays increased in each step until a target second blade array cascade structure meeting the expected compression ratio is obtained; and performing overall fine tuning optimization on the target second blade array cascade structure, and determining a final blade array structure. According to the effect of each stage of the turbo molecular pump blade array and the inter-stage cascading characteristic, performance improvement of the pumping speed and the compression ratio is decoupled, meanwhile, in the process of inspecting the performance of the blade array cascading structure, the optimal balance point between the compression ratio and the pumping speed can be quickly found out by optimizing the parameters of the turbo molecular pump blade array stage by stage, and the performance of the turbo molecular pump blade array is improved. And the calculation complexity is reduced.

The invention relates to the technical field of turbo molecular pumps, in particular to a turbo molecular pump and a molecular pump using method based on a damping mechanism, the turbo molecular pump comprises a damping protection device installed on the outer side of the turbo molecular pump, and the damping protection device comprises an encircling damping device and a damping placement seat; the damping placement seat is horizontally mounted on the workbench, and a top buffer supporting end of the damping placement seat is in contact with the bottom of the turbo molecular pump; the encircling damping device comprises a contraction adjusting device, a buffer detection strip and a height adjusting mechanism; the height adjusting mechanism is fixedly mounted on the damping placement seat, and the movable end of the height adjusting mechanism can be adjusted to move in a lifting manner; the contraction adjusting device is installed at the movable end of the height adjusting mechanism, and the contraction end of the contraction adjusting device is provided with a transmission contraction strip. The buffer detection strip is installed on a transmission contraction strip of the contraction adjusting device, the buffer detection strip is tightly attached to the inner wall of the transmission contraction strip, the operation stability is effectively ensured, meanwhile, timely maintenance is facilitated, and the service life is prolonged.

[Problem] Provided is a vacuum pump system and an interface circuit in which one interface circuit can monitor and control a plurality of vacuum pumps when the plurality of vacuum pumps are monitored and controlled from a customer supervisory control tool via the interface circuit [Solving Means] Turbomolecular pumps 100 and control devices 300 are provided in pairs. An interface circuit 23 and AC / DC power supply circuits 15A, 15B, and 15C are not included in the control devices 300 but are configured in a separate integration unit 400. Conventional interface circuits 13A, 13B, and 13C are provided for respective turbomolecular pumps 100 in order to monitor and control respective control devices 200A, 200B, and 200C. In contrast, the interface circuit 23 integrally monitor and control the control devices 300A, 300B, and 300C. Thus, one interface circuit 23 is configured for three turbomolecular pumps 100.

The present invention relates to the technical field of dynamic performance testing of magnetic bearings of turbomolecular pumps, and in particular to a dynamic performance testing device for magnetic bearings of turbomolecular pumps with simulated gas loading, comprising a frame, an upper three-axis mobile platform provided on the top of the frame, a side three-axis mobile platform provided on one side of the frame, the upper three-axis mobile platform and the side three-axis mobile platform respectively being fixedly connected with a pressure applying assembly, the pressure applying assembly being detachably connected with a simulated rotor, the simulated rotor being detachably connected with a base plate, the base plate being fixedly connected to the bottom of the frame, and a visual detection assembly being fixedly connected to one side of the top surface of the frame. The present invention applies axial force and radial force to the molecular pump respectively, as well as torques in different directions, through the upper three-axis mobile platform and the side three-axis mobile platform, and can measure the static and dynamic load performance of the molecular pump under different combinations of axial force, radial force and torque.

The invention provides an atmosphere-free celestial body surface environment simulation device, which comprises a vacuum container assembly which comprises a vacuum cabin and a vacuum unit and is used for providing a closed environment required by a test for a test sample, and the vacuum unit comprises a vortex pump and a turbo molecular pump; the low-temperature helium circulation assembly is used for providing a cold black background environment for the test sample in the vacuum container assembly; the sample cup assembly is arranged in the vacuum cabin and comprises a sample container used for arranging a plurality of sample cups, a heating module and a calibration black body, and the heating module is used for heating the sample cups and controlling the sample cups to different temperatures so as to simulate temperature changes of the moon and the asteroid; and the low-temperature off-axis parabolic mirror is arranged on the vacuum cabin and is used for converting heat radiation signals of the test sample and the calibration black body in the sample cup into parallel light and inputting the parallel light into the Fourier transform infrared spectrometer for spectral analysis. The invention further provides a thermal infrared spectrum testing method which is applied to the atmosphere-free celestial body surface environment simulation device.

To provide a light-weight, robust and economical vacuum pump that can be used flexibly.SOLUTION: A vacuum pump, especially a turbo molecular pump, includes a pump housing. The pump housing includes a housing part 12 for housing a component that exerts a pumping action of the vacuum pump, and a flange part 10 for forming an attaching plane 44. The flange part is provided for connecting the vacuum pump to a recipient, and preferably, the flange part is formed in an integrated manner. The housing part and the flange part are configured as separate components. The housing part includes a support part 16, and the flange part includes a connection part 18 that can be connected to the recipient and an attaching part 14 joined to the support part. The attaching part is configured in a vertical direction at least with respect to the attaching plane without interruption.SELECTED DRAWING: Figure 6A

Provided is a vacuum exhaust system (10) for exhausting process gas from a plurality of chambers (10-1 to 10-n), the vacuum exhaust system (10) comprising a plurality of turbo molecular pumps (100-1 to 100-n), a collecting pipe (14) for connecting the exhaust ports of the plurality of turbo molecular pumps in parallel, one or more dry pumps (16) connected to the collecting pipe (14), and chamber introduction valve devices (30-1 to 30-n) that control the flow rate of the gas introduced into the plurality of chambers (10-1 to 10-n). A threshold value (T) for the process gas exhaust flow rate is set on the basis of the exhaust flow rates that the plurality of turbo molecular pumps (100-1 to 100-n) can achieve, and the gas introduction timing and / or flow rate are / is controlled by the chamber introduction valve devices (30-1 to 30-n) so as not to exceed the exhaust flow rate threshold value (T).