47 results about "Turbomolecular pump" patented technology

A vacuum pump (1), preferably a turbo molecular pump, comprises a rotor shaft (9) configured to have one or more rotor blades (8) coupled thereto, and the rotor shaft (9) defines a bearing seat (7) housing a permanent magnet bearing in an interference fit configuration, the magnetic bearing insert comprises one or more permanent magnet alloy rings (3, 4, 5) of a rotor bearing half of a permanent magnet bearing and a radially outwardly extending sleeve (16) coupled thereto around an outer periphery of the or each permanent magnet alloy ring (3, 4, 5), and the outer surface of the permanent magnet bearing insert (3) engages with the inwardly facing wall of the bearing seat (7) to provide an interference fit wherein the coefficient of thermal expansion of the radially outwardly extending sleeve (16) is at least substantially the same as the coefficient of thermal expansion of the material of the rotor shaft (9) defining the engaged bearing seat wall.

This invention discloses an online detection method and device for the interlayer vacuum degree of multi-layer insulation in cryogenic containers, belonging to the field of cryogenic insulation vacuum detection technology. The method includes: installing a vacuum-sealed base on the outer wall of the container; penetrating the outer liner with a piercing capillary probe and inserting it into the interlayer gap; constructing a two-stage high-vacuum differential system consisting of an oil-free dry forepump, a turbomolecular pump, a fine-tuning needle valve, a flow-limiting capillary, a differential chamber, and a residual gas analyzer to form a low-speed drainage loop; after pre-evacuating the background gas, adjusting the fine-tuning needle valve to extract the interlayer gas at low speed, simultaneously collecting the total pressure and component partial pressures; calculating the true vacuum degree by combining flow resistance, gas resistance, permeation resistance, and temperature correction; after detection, leaving the end of the piercing capillary probe inside the layer without removing it, and permanently sealing the base port; repeating the detection at different points and depths to complete a full-area scan. This application has the advantages of direct online detection, minimally invasive and leak-free operation, repeatable testing, and accurate tracing of failure causes.

The utility model relates to photoresist production auxiliary equipment technical field, concretely relates to an insulating carbon black storage device for photoresist, including storage box, the top of storage box is connected with feed inlet, the first solenoid valve is installed in the communication of feed inlet and storage box, the output port department of storage box bottom is provided with the second solenoid valve, still including fixed mounting on the turbine molecular pump of storage box outer side wall, the output end of turbine molecular pump is connected with the air cylinder of fixed mounting in the outer side wall of storage box, the top lift sliding of air cylinder is inserted with nitrogen tube, the output end of nitrogen tube is inserted to storage box, and is equipped with one -way exhaust valve, the utility model discloses nitrogen tube height is adjusted dynamically through lift cylinder, makes it always close carbon black material surface, and nitrogen fills the space not being occupied by material directly, and replacement efficiency improves 30% or more, and nitrogen consumption reduces 20%-40%, and turbine molecular pump provides high -purity nitrogen delivery, prevents the back flow in combination one -way exhaust valve, ensures the inert environment of fast establishment.

The utility model belongs to vacuum equipment technical field especially for multistage turbine molecular pump, including the casing, the front and back of casing all are equipped with the air inlet of equal distance arrangement, and the left side of casing is provided with the controller, and the inside of casing is provided with multistage turbine molecular pump, refrigeration pipe frame and two heating pipes respectively, and the inner bottom wall of casing is fixedly connected with two temperature sensors, and the right side of casing is provided with refrigeration module, and the output of refrigeration module penetrates casing and is fixedly communicated with the right -hand end of refrigeration pipe frame, and the upper surface of casing is fixedly communicated with two air ducts, and the inside of every air duct is provided with the exhaust fan motor, and the air inlet of equal distance arrangement is set up in the front and back of casing, and cooperate the exhaust fan motor in the air duct to form forced convection heat dissipation channel, thereby can accelerate air flow, effectively promote the heat dissipation efficiency of motor and bearing operation, avoid the overheating protection shutdown problem caused by the environment temperature is too high.

A vacuum exhaust system (10) for exhausting a process gas from a plurality of chambers (10-1 to 10-n) is provided with: a plurality of turbo molecular pumps (100-1 to 100-n); a manifold (14) connecting the exhaust ports of the plurality of turbo molecular pumps in parallel; one or more dry pumps (16) connected to the collecting tube (14); and chamber introduction valve devices (30-1 to 30-n) for controlling the flow rate of gas introduced into the plurality of chambers (10-1 to 10-n). Setting an exhaust flow rate threshold value (T) for the process gas on the basis of the exhaust flow rates of the plurality of turbo molecular pumps (100-1 to 100-n); at least one of the introduction timing and the flow rate of the gas is controlled so as not to exceed the exhaust gas flow rate threshold value (T) by means of the chamber introduction valve devices (30-1 to 30-n).

A vacuum pump 10, such as a turbomolecular pump, comprises a rotor 12 in a housing 26 and comprising a rotor shaft 32. A stator 14 in the housing cooperatives with the rotor. A magnet device 16 acts o

To provide a turbomolecular pump with variable intermediate gas inlet for a counterflow leak detector in a gas detection instrument. The turbomolecular pump (14) comprises a housing (abbreviation: H) (16), an internal structure including a pump stator (28) and a pump rotor within the H, a gas inlet (18) opening into the internal structure through the H, a gas outlet (20) opening to the outside of the internal structure through the H, and an intermediate gas inlet (22) opening into the internal structure through the H between the gas inlet and the outlet. The gas inlet is connected to a gas detector (12), and the intermediate gas inlet is connected to a test connection (24) for a test specimen or a test chamber containing the test specimen. The H has a longitudinally extending elongated slot (30) that can be partially covered by a movable cover such that the uncovered portion of the slot constitutes the intermediate gas inlet, and moving the cover changes the position and / or cross-sectional area of ​​the intermediate gas inlet.

A device for detecting and adjusting comprehensive dynamic balance of turbomolecular pump rotors is provided. The device includes a test platform; a supporting mechanism arranged in the test platform, a detection mechanism arranged in the test platform and configured for detecting a dynamic balance of the turbine rotor to be tested in a rotating process, a driving mechanism arranged at a bottom of the test platform and configured for driving the turbine rotor to be tested to rotate, and a weight removing mechanism arranged at the top of a test platform and configured for reducing a weight of the traction tube. A front end of a turbine rotor to be tested is in transmission connection with the supporting mechanism through a connecting block, and a traction tube at a rear end of the turbine rotor to be tested is in transmission connection with the supporting mechanism.

An integrated dynamic balance detection and adjustment device for a turbomolecular pump rotor, belonging to the technical field of dynamic balancing for turbomolecular pump rotors, comprising a test platform (1); a support mechanism, which is arranged inside the test platform (1), wherein the front end of a turbine rotor under test is in transmission connection with the support mechanism via a connecting block (2), and a drag cylinder (3) at the rear end of the turbine rotor under test is in transmission connection with the support mechanism; a detection mechanism, which is arranged inside the test platform (1) and is used for detecting the dynamic balance of the turbine rotor under test during rotation; a driving mechanism, which is arranged at the bottom of the test platform (1) and is used for driving the turbine rotor under test to rotate; and a weight removal mechanism, which is arranged on the top of the test platform (1) and is used for reducing the weight of the drag cylinder. By adding the connecting block (2) at one end of the rotor, dynamic balancing of a rotating shaft and the turbine rotor are conducted together, replacing conventional dynamic balancing methods where dynamic balancing of a rotating shaft and a turbine rotor need to be conducted separately. The integration of the weight removal mechanism and the dynamic balancing device achieves the goal of weight removal without the need to dismount the rotor.

[Problem] To suppress an influence of noise from a motor on a sensor. [Means of Solution] A magnetic bearing device includes: a rotating body; a motor including poles whose number is an even number and is not a multiple of 4; a radial electromagnet; a radial displacement sensor; a first oscillator; a second oscillator; and a demodulation circuit, in which the radial displacement sensor includes a first sensor magnetic pole pair and a second sensor magnetic pole pair, each coil of the sensor magnetic pole pair is connected such that polarities of respective magnetic poles are different from each other, one end of the first sensor magnetic pole pair is connected to one end of the second sensor magnetic pole pair such that polarities of a pair of sensor magnetic poles radially facing each other, among the sensor magnetic poles of the first sensor magnetic pole pair and the second sensor magnetic pole pair, are opposite to each other, the other end of the first sensor magnetic pole pair is connected to the first oscillator, and the other end of the second sensor magnetic pole pair is connected to the second oscillator, and a midpoint voltage of the two sensor magnetic pole pairs is input to the demodulation circuit.

A pump management system may determine an operating mode for a mass spectrometer; set, based on the operating mode, a pump speed of a turbo pump used to create one or more vacuum stages for the mass spectrometer; and cause the turbo pump to operate at the pump speed while the mass spectrometer operates in accordance with the operating mode. Additionally or alternatively, the pump management system may monitor, using one or more instruments external to the turbo pump, a condition associated with the mass spectrometer while the mass spectrometer operates in accordance with the operating mode; determine, based on the monitoring, that the condition changes by more than a threshold value; and adjust, based on the condition changing by more than the threshold value and while the mass spectrometer is in operation, the pump speed.

A passive magnetic bearing assembly 10 for a vacuum pump, preferably a turbomolecular pump, is disclosed. The passive magnetic bearing assembly 10 has a plurality of pairs of ring magnets arranged 20

The present invention relates to a turbo molecular vacuum pump, comprising: a housing having a pump inlet and a pump outlet; a first pump mechanism having at least one turbo molecular pump stage in the housing; a second pump mechanism downstream of the first pump mechanism, the second pump mechanism having at least one Holvinke pump stage in the housing; the rotor comprises a rotor shaft and is used for the first pump mechanism and the second pump mechanism; and a motor for driving the rotor shaft. The motor is disposed in a motor chamber within the second pump mechanism, the motor chamber being surrounded by a cylindrical partition wall and being delimited on a side facing the first pump mechanism by a radially extending partition wall, the partition wall surrounding the rotor and forming an annular gap. The rotor shaft extends from the first pump mechanism, through the second pump mechanism and the motor chamber to an end supported in the housing by means of a rolling bearing. The housing has at least one shielding gas connection for introducing shielding gas in order to protect the electric motor. According to the invention, an introduction channel is provided in the cylindrical partition wall, which is connected to the shield gas connection on the one hand and is in fluid communication with the annular space via a flow path on the other hand.

The present invention provides a vacuum pump (1), preferably a turbomolecular pump, comprising a rotor shaft (9) configured to have one or more rotor blades (8) coupled to the rotor shaft, wherein the rotor shaft (9) defines a bearing well (7) that receives a permanent magnet bearing insert in an interference fit configuration, the permanent magnet bearing insert comprising one or more permanent magnet alloy rings (3, 4, 5) of the rotor bearing half of the permanent magnet bearing, and a radially outward-extending sleeve (16) coupled to the or each permanent magnet alloy ring, wherein the outer surface of the permanent magnet bearing insert (3) engages with the inward-facing wall of the bearing well (7) to provide an interference fit, and the radially outward-extending sleeve (16) has a coefficient of thermal expansion at least substantially the same as the coefficient of thermal expansion of the material of the rotor shaft (9) that defines the bearing well wall to be engaged.

The application discloses a multifunctional integrated gas control system for a dilution refrigerator, and particularly relates to the field of refrigeration and cryogenics, and comprises a liquid nitrogen cold trap, a gas buffer tank, an integrated valve box, a dilution refrigeration inner circulation pipeline, a diaphragm compressor, a Roots pump, a turbo molecular pump and a vacuum pumping pump group. The system uses a highly integrated valve box module, which is responsible for gas path control in different stages such as starting, running, stopping and rewarming of the dilution refrigeration cycle; the application optimizes the flow conductance of the gas path in different temperature zones and under different pressures, reduces heat loss, and ensures high airtightness in the whole temperature zone from room temperature to extremely low temperature, thereby improving the reliability and automation degree of the dilution refrigerator and having a very positive significance for practical application of the dilution refrigeration system.

[Problem] To provide a turbo molecular pump that can improve exhaust performance. [Solving Means] A turbo molecular pump includes: a rotor shaft (113); and 5 a rotor blade (102) that is fixed to the rotor shaft (113), is rotatable integrally, and includes a plurality of stages of blade rows. The turbo molecular pump sucks in and exhausts exhaust gas through rotation of the rotor blade (102). Among the plurality of stages of blade rows, blade rows (102a and 102b) at first and second stages from the top are made of 10 a magnesium alloy, which is a first material, while remaining blade rows (102c, 102d, ・・・) at third and subsequent stages are made of an aluminum alloy, which is a second material. Specific strength of the first material is higher than that of the second material.

A device for leak detection on a test specimen, comprising a mass spectrometer (12), an at least three-stage turbomolecular pump (14), the input stage (18) of which is connected to the mass spectrometer (12) and which has a first intermediate gas inlet arranged between the input pump stage and the intermediate pump stage (26) and a second intermediate gas inlet arranged between the intermediate pump stage (26) and the output pump stage (24), an at least two-stage booster pump, the input pump stage (46) of which can be connected to the test specimen to be examined and which has an intermediate gas outlet (54) arranged between the input pump stage (46) and the output pump stage (48) and a pre-vacuum pump (22) which is connected to the outlet (20) of the output pump stage (24) of the turbomolecular pump (14) and is configured to generate a pre-vacuum pressure of less than 50 mbar at the outlet (20) of the turbomolecular pump (14) and to evacuate it against atmospheric pressure, characterized in that the intermediate gas outlet (54) of the booster pump is connected in a gas-conducting manner to the first intermediate gas inlet (36) of the turbomolecular pump (14) via a first connecting branch (62), and in that the outlet of the output pump stage (48) of the booster pump is connected in a gas-conducting manner to the second intermediate gas inlet of the turbomolecular pump (14) via a second connecting branch (64).

To provide a foreign matter accumulation amount estimation device capable of estimating an accumulation amount of foreign matter.SOLUTION: A foreign matter accumulation amount estimation device 210 is used in a turbo-molecular pump 100 including an intake port and an exhaust port, and includes an exhaust member 212 connectable to the exhaust port 133, and is disposed inside the exhaust member 212, and at least a part thereof has a gap t with respect to an inner peripheral surface 213 of the exhaust member 212. The turbo molecular pump 100 includes a conductor member 214 to which a voltage for detecting an electrostatic capacity is applied between an exhaust member 212 and itself, a measuring device 216 for measuring the electrostatic capacity between the exhaust member 212 and the conductor member 214, and an arithmetic device 218 for estimating a deposition amount of foreign matter inside the turbo molecular pump 100 from a change in the electrostatic capacity.SELECTED DRAWING: Figure 5

The present application relates to the technical field of turbo molecular pump, in particular to a kind of turbo molecular pump blade, turbo rotor and turbo molecular pump.Turbo molecular pump blade, the pressure surface and suction surface of blade body are both curved surface, the thickness of the blade body gradually decreases from root to top, the blade thickness of the blade body root is 3.5mm-4.5mm, the blade thickness of the blade body top is 1.5mm-2.5mm, the inlet angle of the blade body is 25°-35°, the outlet angle of the blade body is 40°-50°, the blade inclination of the blade body is 0°-20°.Design as smaller inlet angle and larger outlet angle, can improve the ability of capture, discharge and reverse to prevent backflow to the gas pumping capacity.In the case where other parameters are the same, it can improve the pumping speed and compression ratio of turbo molecular pump, can greatly improve the pumping capacity of turbo molecular pump under low pressure working condition.

An apparatus for leak detection of a sample, comprising: a mass spectrometer (12); at least a three-stage turbomolecular pump (14) having an input pump stage (18) connected to the mass spectrometer (12) and having a first intermediate gas inlet (36) arranged between the input pump stage (18) and an intermediate pump stage (26) and a second intermediate gas inlet (42) arranged between the intermediate pump stage (26) and an output pump stage (24); at least a two-stage booster pump (44) having an input pump stage (46) connectable to the sample to be checked and having an intermediate gas outlet (54) arranged between the input pump stage (46) and an output pump stage (48); and a pre-vacuum pump (22) connected to the outlet (20) of the output pump stage (24) of the turbomolecular pump (14) and configured to generate a pre-vacuum pressure of less than 50 mbar at the outlet (20) of the turbomolecular pump (14) and to evacuate it against atmospheric pressure; characterized in that the intermediate gas outlet (54) of the booster pump is connected in gas-conducting manner to the first intermediate gas inlet (36) of the turbomolecular pump (14) by a first connecting branch (62) and the outlet (56) of the output pump stage (48) of the booster pump (44) is connected in gas-conducting manner to the second intermediate gas inlet (42) of the turbomolecular pump (14) by a second connecting branch (64).

Mass spectrometry systems for performing mass analysis on ion samples include a vacuum region comprising a mass analyser configured to provide a detection signal for the ion sample. A turbomolecular pump is configured to maintain the vacuum region at a vacuum pressure and a controller is configured to control the pressure within the mass analyser to control the rate of decay over time of the detection signal for the ion sample by: controlling a pumping speed of the turbomolecular pump. The turbomolecular pump can be configured to maintain the vacuum region at a first pressure when the mass analyser is being operated in a mass analysis mode of operation and a second pressure when the mass analyser is being operated in a collision cross section analysis mode of operation, wherein the second pressure is greater than the first pressure.

The invention relates to the technical field of automatic control, and discloses a turbo molecular pump driving controller control method based on a self-adaptive control algorithm, and the method comprises the steps: obtaining gas parameters, collected by a miniature gas sensor in real time, in a pump body of a turbo molecular pump; calculating an optimal power output value by using an improved radial basis function neural network algorithm, and determining the optimal power output value as a power reference of the turbo molecular pump driving controller; the operation mode of the turbo molecular pump driving controller is automatically switched according to the real-time pressure intensity; according to the method, adaptive power is dynamically output by using an improved radial basis function neural network algorithm, power output is matched with gas characteristics, operation efficiency is optimized, an operation mode is automatically switched, a traditional single operation mode is replaced, and the method has the advantages that the adaptive power is dynamically output by using the improved radial basis function neural network algorithm; precise adaptation to different process stages is achieved, the PWM duty ratio is adjusted to compensate the power deviation when the load is suddenly changed, and self-adaptive control is achieved.

The turbine molecular pump comprises a pump body, a motor arranged in the pump body, a motor moving shaft connected with the motor, a rotating shaft arranged in the pump body, a threaded area arranged on the rotating shaft, and a screw thread connected with a screw hole on a power block. The rotating of the rotating handle drives the rotating of the rotating shaft, the threaded area is screwed with the screw hole on the power block, the power column passes through the pump body, the movement of the arc-shaped clamping rod is driven, and the motor moving shaft is protected. The rotating of the rotating disc drives the rope winding and pulling, the movement of the prompt sliding block is driven, the sliding rod moves, the dynamic contact piece and the static contact piece contact, and the alarm of the alarm device is realized.

Provided is a vacuum exhaust device capable of satisfactorily performing plasma cleaning without providing a pressure adjustment valve. A vacuum exhaust device (10) is provided with a turbo-molecular pump (100) and a plasma generation device (210), and is provided with a throttle part (244) capable of increasing the internal pressure of the plasma generation device (210) to satisfy the relationship P > = 0.3 / D. Here, P is the pressure [Pa], and D is the inter-electrode distance [m] within the plasma generating device. In addition, the internal pressure of the plasma generating device (210) can be increased to a pressure satisfying the relationship P < = 1.5 / D by means of the throttle portion.

A vacuum pump, a vacuum pump controller, and a remote controller are provided that can reduce the workload of users and field service engineers. A vacuum pump 10 includes a turbomolecular pump 100 that exhausts gas inside a semiconductor manufacturing apparatus X, and a controller 200 that performs control on the turbomolecular pump 100. The controller 200 includes a remote signal receiving means that receives a command signal from a remote controller 300, which remotely controls the turbomolecular pump 100, and changes a setting relating to an operating specification of the turbomolecular pump 100 on the basis of the command signal received by the remote signal receiving means.

This suppresses the influence of motor noise on the sensor. [Solution] A magnetic bearing device comprising a rotating body, a motor with an even number of poles that is not a multiple of 4, a radial electromagnet, a radial displacement sensor, a first oscillator, a second oscillator, and a demodulation circuit, wherein the radial displacement sensor has a first sensor pole pair and a second sensor pole pair, and each coil of the sensor pole pair is wired so that the polarity of each pole is different, one end of the first sensor pole pair is connected to one end of the second sensor pole pair such that pairs of sensor poles that are radially opposite to each other are opposite poles, the other end of the first sensor pole pair is connected to the first oscillator, the other end of the second sensor pole pair is connected to the second oscillator, and the midpoint voltage of the two sensor pole pairs is input to the demodulation circuit.

The utility model discloses a multistage vacuumizing device, including the device body, be equipped with workstation in the device body, be equipped with the rotary -vane vacuum pump, roots vacuum pump, turbine molecular pump and vacuum chamber on the workstation, be connected pipeline no.

A bearing allows accurate monitoring of bearing conditions and includes a printed circuit board, which is fitted to the bearing and on which one or more sensors are preassembled. The bearing facilitates removal and replacement operations and includes a first electrical cable and a second electrical cable removably connected to each other. The bearing is particularly suitable for applications to rotary vacuum pumps, especially turbomolecular pumps, in which the bearing is under vacuum conditions and the rotating shaft rotates at very high speed, so that high precision in the design and operation of the bearing is required and risks of contamination and / or of losing vacuum tightness must be carefully avoided.