81 results about "Turbomolecular pump" patented technology

The invention discloses a multifunctional integrated gas control system for a dilution refrigerator, and particularly relates to the field of refrigeration and low-temperature engineering, which comprises a liquid nitrogen cold trap, a gas buffer tank, an integrated valve box, a dilution refrigeration internal circulation pipeline, a diaphragm compressor, a roots pump, a turbo molecular pump and a vacuum suction pump set. According to the system, a highly-integrated valve box module is used and is responsible for implementing gas circuit control on different stages such as dilution refrigeration cycle starting, operation and shutdown rewarming; according to the invention, conductance optimization and heat loss reduction are carried out on gas paths with different temperature zones and different pressures, high air tightness of a full temperature zone from room temperature to extremely low temperature is ensured, the reliability and the automation degree of the dilution refrigerating machine are improved, and very positive significance is provided for practicability of a dilution refrigerating system.

A mass damper is connected to a vacuum pump to reduce vibrations during operation. The mass damper includes a conic portion defined by a converging end and a diverging end and a damping mass connected to the converging end of the conic portion. The vacuum pump has a pump body, a vacuum inlet in fluid communication with an internal volume of a vacuum chamber, a vacuum outlet, and a rotor assembly disposed within the pump body. The rotor assembly is configured to rotate about a rotary axis to pump gas from the internal volume of the vacuum chamber out of the vacuum outlet. The conic portion may have a cone axis that is coaxial with the rotary axis of the vacuum pump.

An ion implantation system including an ion source for generating an ion beam, an end station for holding a substrate to be implanted by the ion beam, and a linear accelerator disposed between the ion source and the end station and adapted to accelerate the ion beam, the linear accelerator including a beam tube for transmitting the ion beam, the beam tube having at least five adjoining sidewalls, at least one resonator coupled to the beam tube, and at least one turbomolecular pump coupled to the beam tube, wherein at least one of the at least five adjoining sidewalls of the beam tube has an opening formed therein for providing access to an interior of the beam tube.

An ion implantation system including an ion source for generating an ion beam, an end station for holding a substrate to be implanted by the ion beam, and a linear accelerator disposed between the ion source and the end station and adapted to accelerate the ion beam, the linear accelerator including a beam tube for transmitting the ion beam, the beam tube having at least five adjoining sidewalls, at least one resonator coupled to the beam tube, and at least one turbomolecular pump coupled to the beam tube, wherein at least one of the at least five adjoining sidewalls of the beam tube has an opening formed therein for providing access to an interior of the beam tube.

A vacuum pump (1), preferably a turbo molecular pump, comprises a rotor shaft (9) configured to have one or more rotor blades (8) coupled thereto, and the rotor shaft (9) defines a bearing seat (7) housing a permanent magnet bearing in an interference fit configuration, the magnetic bearing insert comprises one or more permanent magnet alloy rings (3, 4, 5) of a rotor bearing half of a permanent magnet bearing and a radially outwardly extending sleeve (16) coupled thereto around an outer periphery of the or each permanent magnet alloy ring (3, 4, 5), and the outer surface of the permanent magnet bearing insert (3) engages with the inwardly facing wall of the bearing seat (7) to provide an interference fit wherein the coefficient of thermal expansion of the radially outwardly extending sleeve (16) is at least substantially the same as the coefficient of thermal expansion of the material of the rotor shaft (9) defining the engaged bearing seat wall.

This invention discloses an online detection method and device for the interlayer vacuum degree of multi-layer insulation in cryogenic containers, belonging to the field of cryogenic insulation vacuum detection technology. The method includes: installing a vacuum-sealed base on the outer wall of the container; penetrating the outer liner with a piercing capillary probe and inserting it into the interlayer gap; constructing a two-stage high-vacuum differential system consisting of an oil-free dry forepump, a turbomolecular pump, a fine-tuning needle valve, a flow-limiting capillary, a differential chamber, and a residual gas analyzer to form a low-speed drainage loop; after pre-evacuating the background gas, adjusting the fine-tuning needle valve to extract the interlayer gas at low speed, simultaneously collecting the total pressure and component partial pressures; calculating the true vacuum degree by combining flow resistance, gas resistance, permeation resistance, and temperature correction; after detection, leaving the end of the piercing capillary probe inside the layer without removing it, and permanently sealing the base port; repeating the detection at different points and depths to complete a full-area scan. This application has the advantages of direct online detection, minimally invasive and leak-free operation, repeatable testing, and accurate tracing of failure causes.

The utility model relates to photoresist production auxiliary equipment technical field, concretely relates to an insulating carbon black storage device for photoresist, including storage box, the top of storage box is connected with feed inlet, the first solenoid valve is installed in the communication of feed inlet and storage box, the output port department of storage box bottom is provided with the second solenoid valve, still including fixed mounting on the turbine molecular pump of storage box outer side wall, the output end of turbine molecular pump is connected with the air cylinder of fixed mounting in the outer side wall of storage box, the top lift sliding of air cylinder is inserted with nitrogen tube, the output end of nitrogen tube is inserted to storage box, and is equipped with one -way exhaust valve, the utility model discloses nitrogen tube height is adjusted dynamically through lift cylinder, makes it always close carbon black material surface, and nitrogen fills the space not being occupied by material directly, and replacement efficiency improves 30% or more, and nitrogen consumption reduces 20%-40%, and turbine molecular pump provides high -purity nitrogen delivery, prevents the back flow in combination one -way exhaust valve, ensures the inert environment of fast establishment.

The utility model belongs to vacuum equipment technical field especially for multistage turbine molecular pump, including the casing, the front and back of casing all are equipped with the air inlet of equal distance arrangement, and the left side of casing is provided with the controller, and the inside of casing is provided with multistage turbine molecular pump, refrigeration pipe frame and two heating pipes respectively, and the inner bottom wall of casing is fixedly connected with two temperature sensors, and the right side of casing is provided with refrigeration module, and the output of refrigeration module penetrates casing and is fixedly communicated with the right -hand end of refrigeration pipe frame, and the upper surface of casing is fixedly communicated with two air ducts, and the inside of every air duct is provided with the exhaust fan motor, and the air inlet of equal distance arrangement is set up in the front and back of casing, and cooperate the exhaust fan motor in the air duct to form forced convection heat dissipation channel, thereby can accelerate air flow, effectively promote the heat dissipation efficiency of motor and bearing operation, avoid the overheating protection shutdown problem caused by the environment temperature is too high.

A vacuum exhaust system (10) for exhausting a process gas from a plurality of chambers (10-1 to 10-n) is provided with: a plurality of turbo molecular pumps (100-1 to 100-n); a manifold (14) connecting the exhaust ports of the plurality of turbo molecular pumps in parallel; one or more dry pumps (16) connected to the collecting tube (14); and chamber introduction valve devices (30-1 to 30-n) for controlling the flow rate of gas introduced into the plurality of chambers (10-1 to 10-n). Setting an exhaust flow rate threshold value (T) for the process gas on the basis of the exhaust flow rates of the plurality of turbo molecular pumps (100-1 to 100-n); at least one of the introduction timing and the flow rate of the gas is controlled so as not to exceed the exhaust gas flow rate threshold value (T) by means of the chamber introduction valve devices (30-1 to 30-n).

A magnetic bearing device including a rotating body, a magnetic bearing portion which levitates the rotating body in air and supports the rotating body by a magnetic force, and a control portion which controls drive of the magnetic bearing portion, in which the control portion includes a tuning portion which tunes the magnetic bearing portion, a power-source detecting portion which detects a state of a power source of the magnetic bearing device, and a stationary-levitated detecting portion which detects whether the rotating body is in a stationary-levitated state or not, and the tuning portion is configured to perform tuning of the magnetic bearing portion at least in either one of (A) a case where the power-source detecting portion detects that a power source of the magnetic bearing device has been switched from OFF to ON, and (B) a case where the stationary-levitated detecting portion detects that the rotating body is in the stationary-levitated state.

A vacuum pump 10, such as a turbomolecular pump, comprises a rotor 12 in a housing 26 and comprising a rotor shaft 32. A stator 14 in the housing cooperatives with the rotor. A magnet device 16 acts o

[Problem] To provide a vacuum pump having superior mechanical characteristics. [Solution] Provided is a turbo-molecular pump that includes a rotor blade 114 disposed on a rotor shaft and rotating together with the rotor shaft, and that exhausts a process gas by the rotation of the rotor shaft with exhaust elements (such as a rotary turbine blade 102 and a rotor body 103a) provided on the rotor blade. The rotor blade 114 is made from a first metal material and a second metal material, and at least some of constituent parts are produced using a 3D printer. A portion to be a joint 212 of the first metal material and the second metal material has an inclusion coupling structure in which one of the first metal material and the second metal material contains at least a portion of the other.

A magnetic bearing device including a rotating body, a magnetic bearing portion which levitates the rotating body in air and supports the rotating body by a magnetic force, and a control portion which controls drive of the magnetic bearing portion, in which the control portion includes a tuning portion which tunes the magnetic bearing portion, a power-source detecting portion which detects a state of a power source of the magnetic bearing device, and a stationary-levitated detecting portion which detects whether the rotating body is in a stationary-levitated state or not, and the tuning portion is configured to perform tuning of the magnetic bearing portion at least in either one of (A) a case where the power-source detecting portion detects that a power source of the magnetic bearing device has been switched from OFF to ON, and (B) a case where the stationary-levitated detecting portion detects that the rotating body is in the stationary-levitated state.

[Problem] Provided is a vacuum pump system and an interface circuit in which one interface circuit can monitor and control a plurality of vacuum pumps when the plurality of vacuum pumps are monitored and controlled from a customer supervisory control tool via the interface circuit [Solving Means] Turbomolecular pumps 100 and control devices 300 are provided in pairs. An interface circuit 23 and AC / DC power supply circuits 15A, 15B, and 15C are not included in the control devices 300 but are configured in a separate integration unit 400. Conventional interface circuits 13A, 13B, and 13C are provided for respective turbomolecular pumps 100 in order to monitor and control respective control devices 200A, 200B, and 200C. In contrast, the interface circuit 23 integrally monitor and control the control devices 300A, 300B, and 300C. Thus, one interface circuit 23 is configured for three turbomolecular pumps 100.

The present invention relates to the technical field of dynamic performance testing of magnetic bearings of turbomolecular pumps, and in particular to a dynamic performance testing device for magnetic bearings of turbomolecular pumps with simulated gas loading, comprising a frame, an upper three-axis mobile platform provided on the top of the frame, a side three-axis mobile platform provided on one side of the frame, the upper three-axis mobile platform and the side three-axis mobile platform respectively being fixedly connected with a pressure applying assembly, the pressure applying assembly being detachably connected with a simulated rotor, the simulated rotor being detachably connected with a base plate, the base plate being fixedly connected to the bottom of the frame, and a visual detection assembly being fixedly connected to one side of the top surface of the frame. The present invention applies axial force and radial force to the molecular pump respectively, as well as torques in different directions, through the upper three-axis mobile platform and the side three-axis mobile platform, and can measure the static and dynamic load performance of the molecular pump under different combinations of axial force, radial force and torque.

The invention provides an atmosphere-free celestial body surface environment simulation device, which comprises a vacuum container assembly which comprises a vacuum cabin and a vacuum unit and is used for providing a closed environment required by a test for a test sample, and the vacuum unit comprises a vortex pump and a turbo molecular pump; the low-temperature helium circulation assembly is used for providing a cold black background environment for the test sample in the vacuum container assembly; the sample cup assembly is arranged in the vacuum cabin and comprises a sample container used for arranging a plurality of sample cups, a heating module and a calibration black body, and the heating module is used for heating the sample cups and controlling the sample cups to different temperatures so as to simulate temperature changes of the moon and the asteroid; and the low-temperature off-axis parabolic mirror is arranged on the vacuum cabin and is used for converting heat radiation signals of the test sample and the calibration black body in the sample cup into parallel light and inputting the parallel light into the Fourier transform infrared spectrometer for spectral analysis. The invention further provides a thermal infrared spectrum testing method which is applied to the atmosphere-free celestial body surface environment simulation device.

To provide a turbomolecular pump with variable intermediate gas inlet for a counterflow leak detector in a gas detection instrument. The turbomolecular pump (14) comprises a housing (abbreviation: H) (16), an internal structure including a pump stator (28) and a pump rotor within the H, a gas inlet (18) opening into the internal structure through the H, a gas outlet (20) opening to the outside of the internal structure through the H, and an intermediate gas inlet (22) opening into the internal structure through the H between the gas inlet and the outlet. The gas inlet is connected to a gas detector (12), and the intermediate gas inlet is connected to a test connection (24) for a test specimen or a test chamber containing the test specimen. The H has a longitudinally extending elongated slot (30) that can be partially covered by a movable cover such that the uncovered portion of the slot constitutes the intermediate gas inlet, and moving the cover changes the position and / or cross-sectional area of ​​the intermediate gas inlet.

The present invention relates to an atmosphere control device for a vacuum friction tester. The device comprises at least two compressed air circuits, a collecting air circuit, a first air circuit, a second air circuit, a liquid container, a gas mixing container, a connecting pipe, a third air circuit, a first humidity sensor, a first branch circuit, a second branch circuit, a third branch circuit, a fourth branch circuit, a mechanical pump, a gas concentration sensor, a second humidity sensor, an ionization vacuum gauge, a first thermal conductivity vacuum gauge, a vacuum partial pressure gauge, a first baffle valve, a second baffle valve, a turbomolecular pump, a third baffle valve, a plug valve, and a second thermal conductivity vacuum gauge. The device is capable of controlling the humidity of the air atmosphere, the vacuum level of different single gases, the vacuum level of volatile liquids with different saturated vapor pressures, and atmospheric pressure mixing and vacuum level control of mixed gases of different proportions, thereby facilitating testing under different working conditions.

The invention relates to the field of vacuum pump design, in particular to a structural parameter configuration method and device of a turbo molecular pump and the turbo molecular pump. The method comprises the steps that design variables are determined according to the blade row type of a target turbo molecular pump; creating a parameter population corresponding to the design variable; generating a new parameter population by using a genetic algorithm; respectively determining performance index values in the new parameter population by adopting a simulation algorithm; and screening out a target parameter group from the new parameter population according to the performance index value, and determining the structure of the target turbo molecular pump. According to the scheme provided by the invention, the corresponding structure parameters can be selected in advance according to the design, so that the blade array structure parameters are optimized in a targeted manner; a genetic algorithm is adopted to find an optimal turbo molecular pump structure, so that blindness and low efficiency of a traditional traversal method are effectively avoided; the genetic algorithm can intelligently search a parameter space and quickly find a parameter combination with excellent performance, so that the efficiency of structural parameter configuration is remarkably improved.

A device for detecting and adjusting comprehensive dynamic balance of turbomolecular pump rotors is provided. The device includes a test platform; a supporting mechanism arranged in the test platform, a detection mechanism arranged in the test platform and configured for detecting a dynamic balance of the turbine rotor to be tested in a rotating process, a driving mechanism arranged at a bottom of the test platform and configured for driving the turbine rotor to be tested to rotate, and a weight removing mechanism arranged at the top of a test platform and configured for reducing a weight of the traction tube. A front end of a turbine rotor to be tested is in transmission connection with the supporting mechanism through a connecting block, and a traction tube at a rear end of the turbine rotor to be tested is in transmission connection with the supporting mechanism.

An integrated dynamic balance detection and adjustment device for a turbomolecular pump rotor, belonging to the technical field of dynamic balancing for turbomolecular pump rotors, comprising a test platform (1); a support mechanism, which is arranged inside the test platform (1), wherein the front end of a turbine rotor under test is in transmission connection with the support mechanism via a connecting block (2), and a drag cylinder (3) at the rear end of the turbine rotor under test is in transmission connection with the support mechanism; a detection mechanism, which is arranged inside the test platform (1) and is used for detecting the dynamic balance of the turbine rotor under test during rotation; a driving mechanism, which is arranged at the bottom of the test platform (1) and is used for driving the turbine rotor under test to rotate; and a weight removal mechanism, which is arranged on the top of the test platform (1) and is used for reducing the weight of the drag cylinder. By adding the connecting block (2) at one end of the rotor, dynamic balancing of a rotating shaft and the turbine rotor are conducted together, replacing conventional dynamic balancing methods where dynamic balancing of a rotating shaft and a turbine rotor need to be conducted separately. The integration of the weight removal mechanism and the dynamic balancing device achieves the goal of weight removal without the need to dismount the rotor.

[Problem] To suppress an influence of noise from a motor on a sensor. [Means of Solution] A magnetic bearing device includes: a rotating body; a motor including poles whose number is an even number and is not a multiple of 4; a radial electromagnet; a radial displacement sensor; a first oscillator; a second oscillator; and a demodulation circuit, in which the radial displacement sensor includes a first sensor magnetic pole pair and a second sensor magnetic pole pair, each coil of the sensor magnetic pole pair is connected such that polarities of respective magnetic poles are different from each other, one end of the first sensor magnetic pole pair is connected to one end of the second sensor magnetic pole pair such that polarities of a pair of sensor magnetic poles radially facing each other, among the sensor magnetic poles of the first sensor magnetic pole pair and the second sensor magnetic pole pair, are opposite to each other, the other end of the first sensor magnetic pole pair is connected to the first oscillator, and the other end of the second sensor magnetic pole pair is connected to the second oscillator, and a midpoint voltage of the two sensor magnetic pole pairs is input to the demodulation circuit.

A pump management system may determine an operating mode for a mass spectrometer; set, based on the operating mode, a pump speed of a turbo pump used to create one or more vacuum stages for the mass spectrometer; and cause the turbo pump to operate at the pump speed while the mass spectrometer operates in accordance with the operating mode. Additionally or alternatively, the pump management system may monitor, using one or more instruments external to the turbo pump, a condition associated with the mass spectrometer while the mass spectrometer operates in accordance with the operating mode; determine, based on the monitoring, that the condition changes by more than a threshold value; and adjust, based on the condition changing by more than the threshold value and while the mass spectrometer is in operation, the pump speed.

A passive magnetic bearing assembly 10 for a vacuum pump, preferably a turbomolecular pump, is disclosed. The passive magnetic bearing assembly 10 has a plurality of pairs of ring magnets arranged 20

The present invention relates to a turbo molecular vacuum pump, comprising: a housing having a pump inlet and a pump outlet; a first pump mechanism having at least one turbo molecular pump stage in the housing; a second pump mechanism downstream of the first pump mechanism, the second pump mechanism having at least one Holvinke pump stage in the housing; the rotor comprises a rotor shaft and is used for the first pump mechanism and the second pump mechanism; and a motor for driving the rotor shaft. The motor is disposed in a motor chamber within the second pump mechanism, the motor chamber being surrounded by a cylindrical partition wall and being delimited on a side facing the first pump mechanism by a radially extending partition wall, the partition wall surrounding the rotor and forming an annular gap. The rotor shaft extends from the first pump mechanism, through the second pump mechanism and the motor chamber to an end supported in the housing by means of a rolling bearing. The housing has at least one shielding gas connection for introducing shielding gas in order to protect the electric motor. According to the invention, an introduction channel is provided in the cylindrical partition wall, which is connected to the shield gas connection on the one hand and is in fluid communication with the annular space via a flow path on the other hand.

The present invention provides a vacuum pump (1), preferably a turbomolecular pump, comprising a rotor shaft (9) configured to have one or more rotor blades (8) coupled to the rotor shaft, wherein the rotor shaft (9) defines a bearing well (7) that receives a permanent magnet bearing insert in an interference fit configuration, the permanent magnet bearing insert comprising one or more permanent magnet alloy rings (3, 4, 5) of the rotor bearing half of the permanent magnet bearing, and a radially outward-extending sleeve (16) coupled to the or each permanent magnet alloy ring, wherein the outer surface of the permanent magnet bearing insert (3) engages with the inward-facing wall of the bearing well (7) to provide an interference fit, and the radially outward-extending sleeve (16) has a coefficient of thermal expansion at least substantially the same as the coefficient of thermal expansion of the material of the rotor shaft (9) that defines the bearing well wall to be engaged.

The application discloses a multifunctional integrated gas control system for a dilution refrigerator, and particularly relates to the field of refrigeration and cryogenics, and comprises a liquid nitrogen cold trap, a gas buffer tank, an integrated valve box, a dilution refrigeration inner circulation pipeline, a diaphragm compressor, a Roots pump, a turbo molecular pump and a vacuum pumping pump group. The system uses a highly integrated valve box module, which is responsible for gas path control in different stages such as starting, running, stopping and rewarming of the dilution refrigeration cycle; the application optimizes the flow conductance of the gas path in different temperature zones and under different pressures, reduces heat loss, and ensures high airtightness in the whole temperature zone from room temperature to extremely low temperature, thereby improving the reliability and automation degree of the dilution refrigerator and having a very positive significance for practical application of the dilution refrigeration system.

A process chamber and a method of etching a semiconductor substrate are provided. The process chamber is symmetric in which the centerlines of the chuck and rod portion of the stage for holding the semiconductor substrate are aligned with the centerlines of the channels located in the core of the pump for evacuating the process chamber and with the centerlines of the gas ports through which the gas is directed to the process chamber. The rod portion extends through the channel, and a helical groove is formed in the channel and only in one of the inner surfaces of the rod portion or the core portion to provide a pumping action to counteract backflow of gas from an exhaust port of the pump in an intermediate and viscous flow state within a gap between the rod portion and the core portion.

A mass spectrometer (10), (10A), (10B) is provided with: an ion source (30); a vacuum chamber (40) into which the sample ionized by the ion source (30) is introduced; and turbo molecular pumps (50), (50A), (50B) that hold the vacuum chamber (40) in a vacuum state, the turbo molecular pumps (50), (50A), (50B) being provided above the vacuum chamber (40) in the vertical direction.

[Problem] To provide a turbo molecular pump that can improve exhaust performance. [Solving Means] A turbo molecular pump includes: a rotor shaft (113); and 5 a rotor blade (102) that is fixed to the rotor shaft (113), is rotatable integrally, and includes a plurality of stages of blade rows. The turbo molecular pump sucks in and exhausts exhaust gas through rotation of the rotor blade (102). Among the plurality of stages of blade rows, blade rows (102a and 102b) at first and second stages from the top are made of 10 a magnesium alloy, which is a first material, while remaining blade rows (102c, 102d, ・・・) at third and subsequent stages are made of an aluminum alloy, which is a second material. Specific strength of the first material is higher than that of the second material.