Vacuum pumping system design for vacuum container

A vacuum container and vacuum pumping technology, applied in the direction of elastic fluid rotary piston type/swing piston type pump combination, steam condensation, mechanical equipment, etc., can solve the problems of normal use and maintenance, and achieve full range Pressure measurement, improve system operation reliability, and prevent anti-oil effect

Inactive Publication Date: 2010-06-09
BEIHANG UNIV
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  • Abstract
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AI Technical Summary

Problems solved by technology

The entry of oil molecules into the vacuum container can have a great negative effect on the vacuum degree in the vacuum container, the cleaning of the vacuum container, and the normal use and maintenance of the instrument.

Method used

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  • Vacuum pumping system design for vacuum container
  • Vacuum pumping system design for vacuum container

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Embodiment Construction

[0017] The present invention will be further described below in conjunction with the accompanying drawings.

[0018] figure 1 The vacuum pumping system shown mainly includes a low vacuum pumping system, a high vacuum pumping system, an ultra-high vacuum pumping system, a vacuum container measuring system and a vacuum container repressurization system.

[0019] The low vacuum pumping system mainly consists of dry pumps (1, 2), heat transfer vacuum gauges (3, 4, 17), valves (5, 6, 7, 8, 11, 12, 13, 14, 15, 18), Luo It consists of mechanical pump (9,10) and liquid nitrogen cold trap (16).

[0020] The high vacuum pumping system mainly includes cryopump regenerative pumping system, cryopump high vacuum pumping system, molecular pump leak detection (auxiliary) pumping system. The high vacuum pumping system mainly consists of valves (26, 27, 28, 29, 38, 39, 40, 41, 43, 45, 48, 42), cold cathode ionization vacuum gauges (30, 31, 32, 33), refrigeration Mechanical cryopump (34,37), ...

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Abstract

The invention relates to a vacuum pumping system for a vacuum container, which comprises a low vacuum pumping system, a high vacuum pumping system, an ultra-high vacuum pumping system, a measuring system of the vacuum container and a repressing system of the vacuum container. A liquid nitrogen cold trap is mounted in a vacuum pumping pipeline, thereby preventing oil return of the system and avoiding polluting the vacuum container; two sets of low vacuum pumping mechanical pumps which can work simultaneously or independently are adopted, thereby improving the running reliability of the system;two sets of turbo-molecular pumps which can work simultaneously or independently are adopted, thereby improving the running reliability of the system; two sets of refrigeration machine low-temperature pumps which can work simultaneously or independently are adopted, thereby improving the running reliability of the system; a low-temperature pump regeneration pumping system is matched, thereby being capable of carrying out precooling before the start-up of the low-temperature pumps; the vacuum pumping system is matched with an air relief valve, thereby preventing the oil return of the system; the whole pumping system is clean; and a variety of vacuum gauges are mounted in the pipeline of the vacuum pumping system and the vacuum container, thereby realizing full-range pressure measurement.

Description

【Technical field】 [0001] The invention relates to a design of a vacuum pumping system for a vacuum container. The invention is especially applied to the design of the vacuum pumping system of the large vacuum container. 【Background technique】 [0002] The main function of the vacuum pumping system is to pump the pressure of the vacuum container to a certain degree of vacuum through various pumps that make up the system. According to the vacuum degree to be achieved, the pumping system can be divided into low vacuum pumping system, high vacuum pumping system and ultra-high vacuum pumping system. According to whether the vacuum pumping system will cause oil pollution to the vacuum container, the vacuum pumping system can be divided into oil vacuum pumping system and oil-free pumping system. [0003] The low-vacuum pumping system refers to the pressure of the vacuum container from 10 5 Pa drawn to 10 -1 Pa's extraction system. The function of the low vacuum pumping system ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B37/10F04B37/14F04B41/06F04C23/00F04D19/04F04B37/08B01D8/00
Inventor 蔡国飙王文龙李晓娟黄本诚张国舟
Owner BEIHANG UNIV
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