175results about "Cold traps/baffles" patented technology

The invention provides a polymer devolatilization process and a devolatilization system. The devolatilization process comprises the following steps: heating a polymer raw material containing volatile components to obtain a molten polymer, pressurizing the molten polymer, mixing with an entrainer, and feeding into a falling film device; after sudden pressure drop and heating, the entrainer carries volatile components to be separated from the system, and a devolatilization product is obtained; the mass ratio of the polymer raw material to the entrainer is (10: 1)-(10000: 1). According to the polymer devolatilization process provided by the invention, the entrainer with a low boiling point is introduced into a reaction system, a large number of microbubbles are formed through vaporization of the entrainer and azeotropy of volatile components, removal of the volatile components in the material is enhanced through pressure swing flash evaporation, and extremely low pressure does not need to be reached in a devolatilization device.

The invention provides a vacuumizing system and a cold trap thereof. The cold trap comprises an inner container, a first shell and a second shell which are sequentially arranged at intervals from inside to outside. A storage cavity used for containing a low-temperature medium is formed in the inner container in a hollow mode. The outer side face of the inner container forms a first cold face. The inner side face of the first shell and the outer side face of the inner container are enclosed to form a gas flow interlayer for gas to flow. The first shell is provided with an air inlet and an air outlet which are communicated with the airflow interlayer. A containing cavity is defined by the inner side face of the second shell and the outer side face of the first shell, the containing cavity is used for containing a low-temperature medium, and a second cold face is formed by the inner side face of the first shell. The first cold surface and the second cold surface are formed in the cold trap at the same time, so that the cold surface area of the cold trap is increased, the temperature difference between the inner side and the outer side of the airflow interlayer can be balanced, the guiding effect of the cold trap on the gas is enhanced, the adsorption and trapping capacity of the cold trap on impurity gas molecules in the gas is enhanced, and therefore the efficiency of the cold trap is improved.

The invention discloses a low-temperature cold trap water removal device which comprises more than two water removal channels which are connected in parallel; each water removal channel comprises a refrigeration water removal gas path and an ice melting purging gas path which are connected in series; each refrigeration and water removal gas path is also connected with an inlet of a dry gas collection gas path, and an outlet of the dry gas collection gas path is used for being connected with an analyzer; and each water removal channel is connected with a controller, and the controller is used for controlling the refrigeration water removal gas paths and the ice melting purging gas paths of the different water removal channels to operate in a staggered mode. According to the application, moisture in the gas to be dewatered can be effectively removed, frost can be timely removed, and related phenomena such as relatively large dead volume of the cold trap can be avoided.

The utility model provides a gas purification device and a gas purification system, and the gas purification device comprises a cold trap mechanism which comprises a cold trap main body which is installed on a cold head of a first refrigerating machine and forms heat conduction with the cold head so as to be cooled by the cold head to a first temperature suitable for adsorbing impurities; the vacuum cover covers the outer side of the cold trap main body, and a vacuum cavity suitable for being pumped to be in a vacuum state is limited in the vacuum cover, so that the cold trap main body is thermally isolated from the external environment; the pipeline mechanism comprises a first branch which is suitable for arranging the cold trap main body on a circulating pipeline of a gas source to be purified in parallel and is configured to be selectively communicated with the circulating pipeline; and the desorption mechanism is configured to respond to the cut-off state of the first branch, heat the cold trap main body to a second temperature suitable for desorbing the impurities, and extract the impurities in the cold trap main body.

The invention relates to the field of cold trap adsorption, provides a cold trap device and a vacuum system, is applied to a vacuum chamber, and comprises a mounting seat, a refrigeration part and a condensation part. The mounting base comprises a cold trap cavity, the mounting base is provided with a connector used for communicating the vacuum cavity with the cold trap cavity, the refrigeration part is arranged on the mounting base, the refrigeration part is provided with a heat conduction part, and the heat conduction part is located in the cold trap cavity; the condensation part is arranged on the mounting seat and is positioned in the cold trap cavity; wherein the refrigeration part and the condensation part are arranged independently, the condensation part comprises a heat conduction shaft connected with the heat conduction part, and a plurality of heat conduction pieces are arranged on the peripheral wall of the heat conduction shaft. Due to the fact that the condensation part and the refrigeration part are independently arranged, the design allows the condensation part to concentrate on increasing the surface area so as to improve the condensation adsorption area and the heat absorption effect, and the overall performance of the system is improved. No cooling liquid exists in the condensation part, so that the problem of internal pressure does not need to be considered.

The invention discloses a double-cold-trap operation monitoring method, a double-cold-trap control system, a medium and a product, and relates to electric digital data processing.The method comprises the steps that first cold trap temperature and humidity data, first condensate water cumulant, second cold trap temperature and humidity data and second condensate water cumulant are obtained; determining a first cold trap dehumidification efficiency, a second cold trap dehumidification efficiency, a first temperature gradient, a second temperature gradient and a condensate water cumulant change rate; determining a first operation defect of the first cold trap and / or a second operation defect of the second cold trap according to a preset parameter standard value; and based on the first operation defect of the first cold trap and / or the second operation defect of the second cold trap, searching a double-cold-trap processing scheme of which the relevancy is higher than a preset relevancy threshold in a preset operation defect processing scheme database. By implementing the method, the accuracy of double-cold-trap operation monitoring can be improved.

The utility model relates to a cold trap device capable of generating high pressure in situ, which comprises a cold trap barrel body, an air inlet pipe, an air inlet pipe vacuum valve, an air outlet pipe, an air outlet pipe vacuum valve and a pressure gauge, and is characterized in that the cold trap barrel body is arranged in a liquid nitrogen Dewar; the device can utilize a low-temperature environment created by the liquid nitrogen Dewar to form a low-temperature space capable of effectively compressing or liquefying gas in the cold trap barrel body, so that the gas entering the cold trap barrel body is compressed or converted into a liquid state, and the internal temperature of the gas gradually rises along with the slow removal of the cold trap barrel body from the liquid nitrogen environment; the previously compressed or liquefied gas begins to expand, creating a higher pressure. External impurities are not introduced, extra energy input is not needed, energy consumption is reduced, the environmental protection performance is improved, and the operation efficiency of the whole system can be remarkably improved.

The present invention relates to the technical field of ultra-low temperature cold traps, and in particular to an ultra-low temperature cold trap device. It comprises: a shell; a liquid storage tank, mounted on the shell; a rotating frame, rotatably connected to the shell, the rotating frame being provided with a plurality of first chambers; a baffle, fixedly connected to the shell, a collecting chamber being provided between the baffle and the shell, and the shell being provided with an external drain pipe. The present invention reduces the liquid content in the first chamber through which the airflow passes by continuously replacing the first chamber connected to the air inlet pipe, thereby ensuring the stability of the liquid separation in the airflow, so as to reduce the influence of the liquid in the gas on the vacuum pump, and discharge the liquid in the collecting chamber through the external drain pipe. Without disassembling the device, the liquid in the device is simply removed to reduce the disassembly and assembly frequency of the device, thereby reducing the probability of sealing failure of the device due to frequent disassembly and assembly, and extending the service life of the device.

To provide systems and methods that may be useful in the context of gas reuse thin film deposition equipment.SOLUTION: The present disclosure particularly relates to separate collection and recycling of gases such as precursors, reactants, and purge gases. A system 100 includes: a reaction chamber 110; a precursor source 120 operationally connected to the reaction chamber by means of a precursor line 125, the precursor line being disposed with a precursor valve 126 that is operable to open and close the precursor line; a reactant source 130 operationally connected to the reaction chamber by means of a reactant line 135, the reactant line being disposed with a valve 136 that is operable to open and close the reactant line; a precursor side stream line disposed with a valve 123 that is operable to open and close a precursor side stream line 122; and a reactant side stream line disposed with a valve 133 that is operable to open and close a reactant side stream line 132.SELECTED DRAWING: Figure 1

The utility model provides a vacuum tail gas cold trap, and belongs to the technical field of tail gas treatment. The problem that an existing tail gas treatment cooling effect is poor is solved. The vacuum tail gas cold trap comprises a shell with a liquid outlet in the bottom, a heat exchange pipe arranged in the shell, a barrel body fixedly connected in the shell and an air inlet pipe, an air outlet is formed in the top of the shell, an air inlet is formed in the bottom of the shell, the top of the barrel body is blocked, and an opening is formed in the bottom of the barrel body. A first gas passing channel for tail gas to pass through is arranged between the outer peripheral wall of the barrel body and the inner peripheral wall of the shell, the bottom of the gas inlet pipe is communicated with the gas inlet of the shell, the top of the gas inlet pipe extends into the top in the barrel body from the bottom of the barrel body, and a second gas passing channel for tail gas to pass through is arranged between the outer peripheral wall of the gas inlet pipe and the inner peripheral wall of the barrel body; part of the heat exchange pipe is located in the first air passing channel, and the other part is located in the second air passing channel. The vacuum tail gas cold trap has the advantage of improving the cooling effect of tail gas.

The invention relates to the field of vacuum technology and low-temperature engineering, and discloses a low-temperature cold trap device and a vacuum system.The low-temperature cold trap device comprises a shell provided with an extraction opening; the adapter piece is communicated with the shell and is provided with a channel which can be opened or closed; the condensation assembly is arranged in the shell; the cold source is arranged on the shell and exchanges heat with the condensation assembly; the driving mechanism is arranged on the shell and used for driving the condensation assembly to enter and exit from the shell along the channel. The driving mechanism drives the condensation assembly to enter and exit from the shell along the channel, the low-temperature cold trap device can be arranged in the air exhaust pipeline to achieve high cold trap working efficiency during working, the cold trap can be moved out of the air exhaust pipeline during regeneration, shutdown of the air exhaust pipeline is avoided, air exhaust work is not affected, and the service life of the low-temperature cold trap device is prolonged. Therefore, the air exhaust efficiency and the air exhaust performance of the air exhaust pipeline can be ensured.

The invention relates to a secondary fluorination system for synthesizing PF3. The secondary fluorination system comprises a main reactor, a condenser pipe, a secondary fluorination reactor and a cold trap, the invention also discloses a secondary fluorination process for synthesizing PF3, which comprises the following steps: introducing gas-phase HF into a liquid-phase PC13 raw material to generate gas-phase main products PF3 and HCl and a small amount of by-product fluorine chloride, carrying out secondary fluorination reaction on the products through a fluorinating agent ZnF2, almost completely converting the by-products into the target product PF3, and collecting the final product in a cold trap. According to the invention, the content of by-products in the cold trap is greatly reduced, the conversion rate of raw materials is improved, and the purification efficiency of the crude phosphorus trifluoride is improved.

The present invention provides a trifluoromethyl fluoroformate synthesis system and method. The trifluoromethyl fluoroformate synthesis system comprises a reaction unit, a heat exchange unit, a cold trap unit, a low-temperature rectification unit, and a recycling unit that are arranged in sequence. The reaction unit comprises a feed pipe, a discharge pipe, and a reactor. The discharge pipe is communicated with the cold trap unit by means of a third heat exchange tube, the cold trap unit is communicated with the low-temperature rectification unit, and the low-temperature rectification unit is communicated with the recycling unit. The heat exchange unit comprises a heat exchanger. The low-temperature rectification unit comprises a rectifying section and a stripping section. The recycling unit comprises a first circulating pipe and a second circulating pipe that are used for recycling a product from the rectifying section, wherein the first circulating pipe and the second circulating pipe are respectively communicated with the feed pipe by means of a second heat exchange tube and a first heat exchange tube, and the first heat exchange tube, the second heat exchange tube, and the third heat exchange tube all pass through the heat exchanger. By recycling the product from the rectifying section, the present invention reduces the loss of raw materials, and improves the product yield.

The invention relates to the technical field of condensation systems of vacuum dryers, and discloses a condensation system of a vacuum dryer, which comprises a vacuum maintaining module, a condensation trapping module, a refrigeration cycle module and a control module, the vacuum maintaining module comprises a vacuum main pump, a front-stage roots pump, an auxiliary vacuum pump, a stainless steel corrugated pipe, a vacuum valve and a vacuum pipeline, the condensation trapping module comprises a condenser, a heat exchanger and a cold trap, and the refrigeration cycle module comprises a refrigeration compressor, an expansion valve, an evaporator and a condensing coil; the roots pump is connected with the vacuum main pump in series through a stainless steel corrugated pipe, the cold trap is connected with the condenser in series, and an air inlet of the vacuum main pump is connected with an outlet of the condenser through a vacuum pipeline; by means of the system, interruption of the drying process can be avoided, the drying effect is guaranteed, and condensation trapping is optimized.

The present disclosure provides a radial flow cold trap, which includes a housing, a heat exchange assembly, a flow splitting manifold group, a flow collecting manifold group and a gas collecting pipe. The housing has an open end, and a first end plate and a second end plate are oppositely arranged inside it. The central connection line of the first end plate and the second end plate forms a first central axis, and the first central axis is parallel or coincident with the central axis of the housing. The heat exchange assembly is arranged inside the housing. The heat exchange assembly includes multiple groups of heat exchange tube bundles connected in parallel. Each heat exchange tube bundle includes multiple heat exchange tubes connected in series, and the axes of the multiple heat exchange tubes are radially symmetrically arranged relative to the first central axis. The structure of this radial flow cold trap enables the air flow entering the housing to enter from the periphery of the space surrounded by the first end plate and the second end plate and flow in the radially inward direction. The condensable steam sublimates on the surface of the heat exchange tubes, and the non-condensable gas is collected in the gas collecting pipe and extracted, which can solve the technical problems of large occupied space, low utilization rate of heat exchange area, easy occurrence of ice blockage and large air flow resistance in the prior art.

The present application relates to the technical field of cold trap, and particularly relates to a high-efficiency diffusion pump cold trap, which comprises a cold trap shell, the cold trap shell comprises a cold trap shell body and a cold trap cover body; further comprising a condensing assembly, the condensing assembly comprises a cylindrical main condensing cavity, a plurality of sub-condensing cavities and a coil condensing pipe; the inside of the main condensing cavity forms a main condensing cavity; one end of the sub-condensing cavity extends into the main condensing cavity along the radial direction of the main condensing cavity to form a condensing connecting part, and the other end of the sub-condensing cavity extends out of the condensing diffusion part along the radial direction of the main condensing cavity; the inside of the sub-condensing cavity forms a sub-condensing cavity; the plurality of sub-condensing cavities are respectively communicated with the main condensing cavity; the coil condensing pipe is in contact with the inner wall of the main condensing cavity; and the coil condensing pipe is also respectively in contact with the condensing connecting parts of the plurality of sub-condensing cavities. The present application can efficiently condense the oil vapor and other gas molecules generated by the diffusion pump, and significantly improves the efficiency of the oil vapor trapping, adsorbing and condensing.

The invention discloses a carbon monoxide purification system and a purification method, and relates to the technical field of carbon monoxide preparation. The carbon monoxide purification system comprises a gas source, a low-temperature cold trap and a purification device. Wherein the gas source is tower top gas of an isotope primary rectifying tower; the low-temperature cold trap is communicated with a gas source and is used for removing part of impurities in tower top gas; the purification device is communicated with the output end of the low-temperature cold trap and is used for reducing metal ions in the tower top gas. According to the carbon monoxide purification system provided by the invention, the combination of the low-temperature cold trap and the purifier is adopted, so that gas-phase impurities and metal ions in carbon monoxide gas can be effectively removed, the investment cost of using low-temperature rectification equipment is avoided, the liquid nitrogen energy consumption caused by using the low-temperature rectification equipment is also reduced, and the whole process is simpler and more efficient.

The present invention relates to a multi-capture device for reaction by-products in semiconductor engineering, characterized in that: in order to capture the mixed reaction by-products contained in the gas discharged after the process of performing multiple depositions in a process chamber in semiconductor manufacturing engineering to form different thin film layers, by means of the vertical temperature distribution difference based on the distance from the heater and the flow path direction conversion and multi-vortex generation structure of the capture structure to separate the capture area, so that in the upper region, the reaction by-products that condense in the form of a thin film in a relatively high temperature region are captured by the first capture part, and in the lower region, the reaction by-products that condense in the form of powder in a relatively low temperature region are captured by the second capture part, and thereby the reaction by-products are captured in one capture device.

The utility model relates to the technical field of material collection and condensation, and discloses a collection cold trap. The collecting cold trap comprises a shell, a first cooling medium layer, a material collecting layer, a second cooling medium layer and a heat preservation shielding layer are defined in the shell, the material collecting layer is used for collecting materials, and the first cooling medium layer and the second cooling medium layer are used for introducing cooling media; the heat preservation shielding layer, the second cooling medium layer, the material collecting layer and the first cooling medium layer are sequentially arranged in a sleeved mode from outside to inside. In this way, the collecting cold trap can be rapidly heated and cooled within a large temperature range, and the temperature of the material collecting layer can be accurately regulated and controlled by adjusting the temperature of the two cooling medium layers.

An apparatus is for trapping multiple reaction by-products for a semiconductor process, in which a trapping region is divided by a difference in vertical temperature distribution according to a distance spaced apart from a heater and by structures for switching flow path directions and generating multiple vortices using a trapping structure, and reaction by-product mixtures contained in a gas, which is discharged after a process of depositing multiple different thin film layers is performed in a process chamber during a semiconductor manufacturing process, is trapped by a single trapping apparatus, such that a reaction by-product, which is aggregated in the form of a thin film in a relatively high-temperature region, is trapped by a first trapping part in an upper region, and a reaction by-product, which is aggregated in the form of powder in a relatively low-temperature region, is trapped by a second trapping part in a lower region.

Provided here are methods and systems for converting pyrolysis oil with silicon-based compounds to a substantially silicon-free pyrolysis oil by treatment with an inert gas. A method of treating a pyrolysis oil to remove silicon-based compounds includes supplying an inert gas stream to a storage vessel containing a pyrolysis oil with silicon-based compounds to produce a silicon- enriched inert gas stream and a desiliconized pyrolysis oil containing at least five weight percent less of the silicon-based compounds as compared to the pyrolysis oil. The method also includes supplying the silicon-enriched inert gas stream to a cryogenic unit to recover hydrocarbons or the silicon-based compounds from the silicon-enriched inert gas stream.

Provided is an agglomeration method, an agglomeration device, and an ejection device. The present invention solves the problem that a method for separating a pigment (G) from a cleaning solution containing the pigment (G) has not been established. The present invention is an agglomeration method for a liquid containing a pigment (G) and a cleaning solution (C) that is recovered from a printer (10). The agglomeration method has the following content: storing the recovered liquid (K) containing the pigment (G) and the cleaning solution (C); cooling the recovered liquid (K) in such a manner that at least a portion of the recovered liquid (K) solidifies; and heating a solid (S) generated by solidification of at least a portion of the recovered liquid (K) in such a manner that the solid (S) liquefies.

The invention relates to the technical field of deacidification liquid vapor recovery, and discloses a volatile deacidification liquid vapor recovery device which comprises a deacidification container, a multi-stage low-temperature cold trap, a low-temperature refrigerating unit, a vacuum unit, a deacidification liquid recovery tank, a tail gas recovery tank, a gas compressor, a medium-temperature cold trap, a medium-temperature refrigerating unit, a pipeline and a control valve. The deacidification container is used for carrying out deacidification treatment on the paper documents; the multi-stage low-temperature cold trap is used for condensing and recycling steam of the deacidification liquid and is connected with the deacidification container through a pipeline, and a heat exchange disc is mounted in the multi-stage low-temperature cold trap; and the low-temperature refrigerating unit is used for providing a circulating refrigerant and refrigerating capacity for the heat exchange coil in the multi-stage low-temperature cold trap. The invention provides a volatile deacidification liquid vapor recovery device and a control method thereof, and condensation recovery of deacidification liquid vapor is realized through a multi-stage low-temperature cold trap device, a medium-temperature cold trap device and a control method matched with the multi-stage low-temperature cold trap device and the medium-temperature cold trap device.

The invention discloses a low-temperature cold trap, and relates to the technical field of cold traps, the low-temperature cold trap comprises a cold trap machine body, the top of the cold trap machine body is vertically provided with a liquid inlet pipe communicated with an inner cavity of the cold trap machine body, the lower part of the cold trap machine body is horizontally provided with a liquid outlet pipe communicated with the inner cavity of the cold trap machine body, and the inner wall of the liquid inlet pipe is slidably connected with a moving frame and a mounting frame which are arranged up and down; an upper filter plate is mounted in the movable frame, and a lower filter plate is mounted in the mounting frame. Liquid impurities in gas entering the cold trap machine body are subjected to multi-stage filtration through the upper filter plate and the lower filter plate in the liquid inlet pipe, the liquid impurities are prevented from entering the cold trap machine body, the risk that channels in the cold trap machine body are blocked is reduced, the working efficiency and stability of a whole cold trap are improved, and the service life of the cold trap machine is prolonged. Meanwhile, by arranging a limiting mechanism, the moving frame and the mounting frame can be limited, so that the upper filter plate and the lower filter plate can be limited, the upper filter plate and the lower filter plate can be conveniently detached, cleaned or replaced, and the normal filtering function of the upper filter plate and the lower filter plate is guaranteed.

The invention relates to the field of preparation of organic raw materials, in particular to a method and a device for preparing neopentane. The invention provides a neopentane preparation method and device, and the preparation method comprises the following steps: adding tert-butyl magnesium chloride, methyl iodide and an anhydrous organic solvent as raw materials into a reactor under the protection of inert gas for reaction; according to the method, tert-butylmagnesium chloride and iodomethane are used as raw materials to perform chemical reaction to generate the neopentane, a catalyst cuprous iodide and a catalyst complex 1, 3-butadiene can also be added to participate in the reaction to improve the purity of the neopentane, the reaction temperature is 20-30 DEG C, the reaction conditions are mild, and the purity of the neopentane is high and can reach 60%. The problems that in the prior art, reaction conditions for preparing neopentane are harsh, the reaction cost is high, and the process is not easy to amplify are solved.

Provided is a system for treating moisture in exhaust gas that can prevent, even in a case where there is not a space for disposing a pipe having a water sealing function, the exhaust gas from leaking to outside when the moisture or the like contained in the exhaust gas is removed, while preventing backflow of water resulting from liquefaction of the moisture in the removal process. Whether or not water stored in a tank exceeds a higher water level is determined by a valve control unit. Upon determining that the higher water level is exceeded, the valve control unit transmits an open signal to a drain valve to open the drain valve. Thus, the water in the tank is drained. As the drainage proceeds, the water level gradually lowers, and whether or not the water level is not higher than a lower water level set by the valve control unit is determined by the valve control unit. Upon determining that the water level is not higher than the lower water level, the valve control unit transmits a close signal to the drain valve to close the drain valve. Due to the setting of the lower water level, the exhaust gas is unlikely to enter a drain pipe.

A compressed air refrigeration dryer for dehumidifying compressed air by means of a refrigerant circuit with carbon dioxide as the refrigerant, comprising at least one compressor (1), a gas cooler (3), at least one evaporator (2) configured to dehumidify compressed air passed on its secondary side at its cold surface, a refrigerant receiver (5.1, 11), an expansion valve (6) or an ejector, and a heat exchanger (8, 18) for heating the dried compressed air, which is connected downstream of the evaporator (2) at its air-side outlet, characterized in that the compressed air refrigeration dryer further comprises a control unit, at least one frequency converter connected upstream of each electrical power input of the at least one compressor (1), and a temperature sensor at a cooling water inlet of the gas cooler (3) for detecting a cooling water temperature.a temperature sensor for detecting a compressed air temperature at a compressed air inlet provided for introducing compressed air to be dehumidified into the compressed air refrigeration dryer, at least one pressure dew point sensor for detecting air humidity and a volume flow sensor for detecting a compressed air volume flow at the compressed air inlet, and at least one pressure sensor for detecting the refrigerant pressure at the compressor inlets, wherein the control unit is connected to the at least one compressor (1), the at least one frequency converter, the temperature sensors, the at least one pressure dew point sensor, the volume flow sensor and the at least one pressure sensor and is configured in such a way as tothat it can continuously read and store measured values ​​acquired by the sensors and that it can regulate the cooling capacity generated by the refrigerant circuit by controlling the at least one compressor (1) and / or the at least one frequency converter in such a way that dehumidified compressed air flowing out of the compressed air outlet of the refrigerated dryer constantly has a predetermined pressure dew point during operation of the compressed air refrigerated dryer.

Disclosed are a high pressure substrate processing apparatus and a cold trap used therefor. The cold trap may include a casing, a cooling plate, and a cooling medium line. The casing may have an internal space communicating with an inlet and an outlet. The cooling plate may be disposed in the internal space and cool and primarily capture byproducts included in mixed gas flowing into the internal space from a substrate processing area through the inlet. The cooling medium line may accommodate a cooling medium while being disposed behind the cooling plate along a flow direction of the mixed gas from the inlet toward the outlet in the internal space and connected to the cooling plate and may be configured to discharge heat from the mixed gas to the cooling medium. The cooling medium line may define a well space configured to cool and secondarily capture the byproducts.

A diffusion pump, in particular an energy-efficient diffusion pump, comprising a housing (10) and a boiling chamber (14) connected to the housing (10). A heating element (16) is arranged in the boiling chamber (14). A nozzle (20, 22) is also arranged in the housing (10) and connected to the boiling chamber (14). A condenser (24) is arranged on an inner surface of the housing (10) in the area of ​​the nozzle (20, 22), and a cooling element (26) is provided in the area of ​​the condenser (24) for cooling the condenser (24). The boiling chamber (14) is thermally separated from the condenser (24) by an insulator (52). Alternatively or additionally, the cooling element (26) of the condenser (24) is at least partially a water cooling element. Alternatively or additionally, the cooling (26) of the condenser (24) is connected to the heating element (16) via a heat pump (40), so that heat is transferred from the condenser (24) to the heating element (16).Alternatively or additionally, a temperature sensor (34) is provided that measures the condenser temperature, wherein the temperature sensor (34) is connected to a condenser cooling control for controlling the cooling (26) of the condenser (24). Alternatively or additionally, a heating element control is connected to the heating element (16) for adjusting the heating power of the heating element (16) to the current pumping situation.

The utility model relates to the technical field of gas collecting devices, in particular to a dichloromethane adsorbing and collecting device which comprises a heating kettle, a reaction container, a waste liquid collecting bottle, a low-temperature cooling circulating pump, a cold trap and a vacuum bottle, the heating pot is used for heating a reaction container containing a mixture; the reaction container is connected with a gas inlet of the waste liquid collecting bottle; a gas outlet of the waste liquid collecting bottle is connected with a gas inlet of the cold trap; the cold trap is arranged in a thermos bottle filled with dry ice; the low-temperature cooling circulating pump is connected with the waste liquid collecting bottle and is used for cooling the waste liquid collecting bottle. Heating the mixture through a heating pot to generate dichloromethane gas, and then carrying out primary liquefaction and collection on the dichloromethane gas in a waste liquid collection bottle; carrying out secondary liquefaction on the dichloromethane gas in the cold trap and collecting the dichloromethane gas; in the secondary liquefaction process, the cooling temperature of the dry ice is lower than the liquefaction temperature of the dichloromethane, and the liquefaction effect on the dichloromethane is better.