85 results about "Liquid vapor" patented technology

A vapor chamber includes a body sheet, and a first sheet stacked on the body sheet. The body sheet includes a vapor flow channel portion through which vapor of a working fluid flows and a liquid flow channel portion which is in communication with the vapor flow channel portion and through which liquid of the working fluid flows. The vapor flow channel portion includes a vapor passage extending in a first direction. The first sheet includes a first sheet inner surface facing the body sheet and a first sheet groove provided in the first sheet inner surface. The first sheet groove is provided at a position of overlapping with the vapor passage in a plan view and extends in a direction intersecting with the first direction.

A vapor chamber heatsink assembly, under vacuum, having a working fluid therein, comprising a plurality of heatsink fins and a vapor chamber is provided. The vapor chamber comprises an upper and lower casing having an upper and lower chamber surface, respectively. The upper and lower chamber surfaces define a plurality of obstructers forming a plurality of braided channels therearound. When heat from a greater temperature heat source and a lower temperature heat source is applied to respective contact surfaces of the lower casing, via the plurality of obstructers and braided channels, respectively, the working fluid and liquid vapor slugs / bubbles travel therethrough, providing an effective phase change mechanism to the greater temperature heat source, while concurrently, hindering agglomeration of working fluid thereto. An effective phase change mechanism is also concurrently provided to the lower temperature heat source due to the non-agglomeration of working fluid to the greater temperature heat source.

The invention discloses a slurry hydrogen storage fuel cell system, which comprises: a hydrogen storage slurry circulation module for storing and circulating a slurry hydrogen storage material; the slurry hydrogen storage material comprises organic liquid and metal hydride; the fuel cell adopts a liquid metal anode; the fuel cell comprises an anode inlet and an anode outlet; a separator for separating the anode discharge; the metal hydride powder feeder is used for supplementing metal hydride powder to the hydrogen storage slurry circulating module; wherein the slurry hydrogen storage material reacts on a liquid metal anode interface to generate electric energy and form organic liquid vapor; and the organic liquid vapor is discharged into the separator from the anode outlet, is separated, is conveyed into the hydrogen storage slurry circulating module, and is mixed with the metal hydride powder from the metal hydride powder feeder to form a slurry hydrogen storage material. According to the invention, direct power generation of the slurry hydrogen storage material on the fuel cell anode interface is realized, and the power density of the system is greatly improved.

The invention discloses an immersed heat dissipation structure based on porous film evaporation phase change, and belongs to the field of chip heat dissipation, and the structure comprises a heat dissipation module which is used for bearing a server assembly and providing a heat exchange environment; the condensation module is used for converting electronic fluorinated liquid steam generated by partial heat dissipation of the case into electronic fluorinated liquid; the filtering module is used for filtering and purifying the electronic fluorination liquid converted by the condensing module to remove impurities in the electronic fluorination liquid; the liquid storage module is used for storing the electronic fluorination liquid purified by the filtering module and providing the electronic fluorination liquid for a heat dissipation loop; the pressurizing module is used for providing power for the electronic fluorinated liquid; and the control module is used for collecting and processing parameter data of temperature, pressure and flow in the heat dissipation loop and adjusting the parameter data according to preset values. By the adoption of the structure, the problems that the cost is high due to the fact that the heat dissipation critical heat flux density of an existing two-phase immersed server case is low and the demanded quantity of fluorinated liquid is large, and the operation reliability of a server is affected by pressure fluctuation are solved.

The invention discloses a method for preparing three-dimensional graphene foam from organic silicon waste liquid, the three-dimensional graphene foam and application, and the preparation method comprises the following steps: (1) preheating and evaporating the organic silicon waste liquid to obtain organic silicon waste liquid steam, and mixing the organic silicon waste liquid steam with water vapor to obtain organic silicon waste liquid steam; then hydrolyzing in an inert atmosphere with a carrier gas flow rate of 100-1000 sccm, cooling, filtering to obtain synthesis gas, and passing the synthesis gas through an alkaline substance to obtain purified synthesis gas; (2) introducing the purified synthesis gas into a reaction furnace, carrying out a chemical vapor deposition reaction by taking foamed nickel as a substrate to obtain a three-dimensional graphene foam initial product and hydrogen-rich synthesis gas, and then preparing the hydrogen-rich synthesis gas on the surface of the three-dimensional graphene foam initial product according to the dosage per unit area of 0.2-1.0 mL / cm < 2 >, an anisole solution proppant of polymethyl methacrylate with the mass content of 5%-10% is coated, and then the three-dimensional graphene foam is obtained through acid etching. The three-dimensional graphene foam prepared by the method has excellent conductivity, is suitable for the field of functional materials such as electromagnetic shielding materials, and has a good industrial application prospect.

The invention provides a wafer pre-wetting method and device, and the method comprises the steps: carrying out the vacuum pumping of a cavity, enabling the vacuum degree in the cavity to reach a preset value, and enabling the cavity to contain a wafer; vaporizing the liquid into vapor; and conveying the steam to the surface of the wafer, so that the steam enters the holes in the wafer and is condensed on the surface of the wafer to form a liquid adsorption layer. According to the wafer pre-wetting method and the wafer pre-wetting device, the gas in the holes in the wafer can be removed, so that the pre-wetting effect is improved in a vacuum environment; aiming at a high aspect ratio structure, the pre-wetting process time can be effectively shortened while the pre-wetting effect is ensured, and the productivity is improved; meanwhile, due to the good hole filling performance of vapor molecules, a pre-wetting process does not need to be carried out in a high-vacuum environment, the cavity vacuum treatment time is shortened, and the productivity is further improved; due to small interaction force between molecules in a vacuum environment, the average free path of the molecules is increased, the effective contact area of vapor molecules can be enlarged, and the wafer pre-wetting uniformity is improved.

A vapor-generating system includes a pump having an inlet and an outlet, the inlet configured to be connected to a liquid storage portion. The system includes a fluid channel fluidly connected to the pump and a fluid sensor. The fluid sensor is configured to determine a presence of liquid vapor-forming substrate in the fluid channel based on measuring an electrical property of the fluid in the fluid channel.

A bellows assembly and related methods are described. The bellows assembly can be used in a two-phase immersion-cooling system to regulate pressure in an immersion tank's headspace above a coolant liquid. The bellows assembly can include a flexible container and valves to reduce emissions of coolant-liquid vapor into an ambient environment. The bellows assembly can further include a drain port to recover coolant-liquid condensate. Also described are a dehumidifier and gas replacement system for use in an immersion cooling system. The dehumidifier can be fluidically coupled to a headspace of the immersion tank to capture and remove water molecules from inside immersion tank. The gas replacement system can supply a dry gas into the immersion tank to replace removed water molecules and other gases, such as oxygen, removed from the tank.

An iron powder random hydrogen making device comprises an iron powder box, iron powder, an electrical bar, a machine shell, a purifier, a hydrogen storage tank, a cooler, a recovery valve, vaporizing liquid and the like, and is characterized in that the iron powder is filled in the iron powder box, the electrical bar is arranged in a chute of the machine shell and outside the bottom of the machine shell, the vaporizing liquid is filled at the lower part in the machine shell, and the purifier, the cooler and the hydrogen storage tank are communicated through pipelines. The working process is as follows: iron powder and vaporized liquid are simultaneously heated by the electrical bar in the rampway of the shell, vaporized liquid steam encounters the hot iron powder in the rampway of the shell to generate chemical reaction, and H2 and Fe3O4 are generated. H2 enters the hydrogen storage tank for later use after being treated by the cooler and the purifier, and Fe3O4 slides to the lower part in the shell and is recycled by the recycling valve. The vaporized liquid is mainly composed of water and a catalyst. Fe2O4 is an important chemical raw material for pigment, antirust paint, recording tape, radiation protection and the like. Iron powder made of scrap iron is used as a raw material, and the device for producing hydrogen by using the iron powder is a new technology in the field of producing hydrogen by using the iron powder and has zero pollution. Hydrogen which is produced and used at any time can replace diesel oil to drive vehicles, ships and the like. The raw materials are sufficient and cheap, the hydrogen production device is easy to manufacture and low in cost, the power cost is about half of that of diesel oil, and the market is large and long.

The invention discloses a medicine fumigating device which comprises a heating cylinder, a guide pipe and a fumigator. The fumigator comprises a fumigating base, a placing assembly, a spraying head and a driving assembly, an arc-shaped working groove is formed in the top of the fumigating base, a flow channel with a plurality of liquid outlets is formed in the fumigating base, and the heating cylinder communicates with the liquid inlets of the flow channel through guide pipes; the placing assembly is erected on the working groove and used for placing arms of a patient, the spraying heads are located in the working groove and communicate with the corresponding liquid outlets, and the placing assembly is provided with a ventilation structure; each driving assembly comprises a rotating seat and a rotating structure, the rotating seats are arranged in the working grooves, corresponding spraying heads are installed on the rotating seats, and one ends of the rotating structures penetrate through the fumigation base and the rotating seats and then are connected with the spraying heads so as to drive the spraying heads to rotate in the horizontal direction. The treatment pertinence and the utilization rate of liquid medicine steam are improved, and meanwhile, due to the fact that the adjusting angle of the spraying head is controllable, personalized treatment requirements can be met conveniently.

The invention relates to the technical field of deacidification liquid vapor recovery, and discloses a volatile deacidification liquid vapor recovery device which comprises a deacidification container, a multi-stage low-temperature cold trap, a low-temperature refrigerating unit, a vacuum unit, a deacidification liquid recovery tank, a tail gas recovery tank, a gas compressor, a medium-temperature cold trap, a medium-temperature refrigerating unit, a pipeline and a control valve. The deacidification container is used for carrying out deacidification treatment on the paper documents; the multi-stage low-temperature cold trap is used for condensing and recycling steam of the deacidification liquid and is connected with the deacidification container through a pipeline, and a heat exchange disc is mounted in the multi-stage low-temperature cold trap; and the low-temperature refrigerating unit is used for providing a circulating refrigerant and refrigerating capacity for the heat exchange coil in the multi-stage low-temperature cold trap. The invention provides a volatile deacidification liquid vapor recovery device and a control method thereof, and condensation recovery of deacidification liquid vapor is realized through a multi-stage low-temperature cold trap device, a medium-temperature cold trap device and a control method matched with the multi-stage low-temperature cold trap device and the medium-temperature cold trap device.

To provide a heat medium liquid vapor discharge prevention device that prevents vapor of a heat medium liquid for exchanging heat inside a semiconductor manufacturing apparatus from being discharged into the atmosphere.SOLUTION: A heat medium liquid vapor discharge prevention device 6 includes: a heat medium liquid circulation line 22 for circulating a heat medium liquid between a semiconductor manufacturing apparatus 2 and a temperature adjusting device 5 for adjusting temperature of the heat medium liquid; and a sealed expansion tank 32 connected to the heat medium liquid circulation line 22 and absorbing a volume change of the heat medium liquid due to fluctuation of the temperature. The heat medium liquid circulation line 22 and the sealed expansion tank 32 are filled with the heat medium liquid.SELECTED DRAWING: Figure 1

The present application relates to the technical field of cleaning device, specifically a sliding type semi-closed cleaning device and a cleaning method, comprising: a cleaning mechanism; a protection mechanism arranged along the circumference of the cleaning mechanism, and the inner side of the protection mechanism is provided with a circumferential air pipe, the air outlet direction of the circumferential air pipe is inclinedly directed to the direction of the protection mechanism from top to bottom; and a bearing mechanism, the bearing mechanism is provided with a bearing position, the bottom of the bearing position is provided with an inclined liquid discharge surface, and the bottom of the liquid discharge surface is provided with a liquid discharge hole. Compared with the prior art, the present application has the advantages that: the cleaning of the to-be-cleaned objects on the work position can be realized, the air showering and air drying functions can be realized; the bearing mechanism has the function of automatically adsorbing the to-be-cleaned objects, and the absolute fixation of the to-be-cleaned objects can be realized; the cleaning liquid can be prevented from polluting other work positions and equipment; the rapid recovery of waste liquid can be realized, the waste liquid can be quickly extracted to prevent accumulation; residual gas can be extracted to reduce the influence on the external environment and prevent waste liquid vapor from polluting the working environment.

The invention relates to the technical field of cleaning, and particularly provides a window cleaning robot and an operation method thereof. The cleaning device is used for cleaning the surface to be cleaned; the steam generating device is used for enabling the cleaning liquid to form cleaning liquid steam; the spraying head is arranged on the machine body; at least one of the cleaning device and the spraying head is used for spraying cleaning liquid steam. By adding the steam cleaning function to the window cleaning robot, the problem that oil stains and oil films are not suitable to be removed can be solved under the condition that no chemical cleaning agent is used, and the cleaning effect is greatly enhanced.

A cartridge for a stick-shaped aerosol-generating article is provided, the article being for an inductively heating aerosol-generating device, the cartridge including: a vaporization chamber at a distal end portion of the cartridge to vaporize aerosol-forming liquid; a reservoir chamber proximal the vaporization chamber to store the liquid; a liquid-conveying susceptor arrangement to convey the liquid from the reservoir chamber into the vaporization chamber and to be inductively heated with the device in order to vaporize the liquid within the vaporization chamber; a vapor-conveying conduit providing a fluid communication for vaporized liquid from the vaporization chamber to a region proximal the reservoir chamber; a septum forming a common wall of the vaporization chamber and the reservoir chamber, the septum including a filling hole for filling the liquid into the reservoir chamber via the vaporization chamber; and a plug-shaped distal end cap forming a distal end wall of the vaporization chamber.

Provided are methods of making a liquid and liquid vapor-proof material, and relates long-term implantable electronic devices. The method comprises providing a first substrate having a first-side encapsulating layer supported by at least a portion of the first substrate; providing a material onto the first-side encapsulating layer; providing a second substrate having a second-side encapsulating layer supported by at least a portion of the second substrate; covering an exposed surface of the material provided onto the first-side encapsulation layer with the second-side encapsulating layer; wherein said encapsulating layers are substantially defect free so that liquid or liquid vapor is prevented from passing through each of the encapsulating layers; thereby making the liquid or liquid vapor-proof material.

The invention discloses a sulfide-based composite solid electrolyte membrane as well as a full-dry preparation method and application thereof, and the method comprises the following steps: (1) forming a lithium borate coating layer on the surface of a sulfide electrolyte by adopting an atomic layer deposition process to obtain coated powder; (2) adsorbing vinyl-containing ionic liquid steam by the coated powder to obtain adsorbed powder; (3) ball-milling and mixing the adsorbed powder, a fluorine-containing polymer binder and a photoinitiator to obtain mixed powder; and (4) maintaining the pressure of the mixed powder, and performing double-sided irradiation with ultraviolet light to obtain the sulfide-based composite solid electrolyte membrane. The sulfide electrolyte is subjected to surface coating through atomic layer deposition, and the full-dry preparation of the sulfide-based composite solid electrolyte membrane is realized on the premise of avoiding solvent contact in combination with gas phase adsorption polymerization and a hot pressing-ultraviolet synergistic curing process.

The invention discloses a nasal olfaction detection device, which comprises a liquid storage cylinder and a test assembly, olfactory liquid is stored in the liquid storage cylinder, the top end of the liquid storage cylinder is provided with a pair of connecting seats, the opposite sides of the two connecting seats are connected with annular frames, the inner sides of the two annular frames are rotatably provided with clamping rings in a clamping manner, and the two clamping rings are connected through a rotating cylinder. The outer side of the rotating drum is communicated with a connecting pipe, the free end of the connecting pipe is connected with a moving seat through a telescopic pipe, the free end of the moving seat is communicated with a testing drum and a pair of inserting rods, and the outer sides of the two inserting rods are sleeved with blocking sleeves; the test assembly can block and paralyze the nasal cavity on the other side of the patient when the patient is subjected to single-side olfaction detection, and meanwhile, the impeller is arranged to guide volatilized olfactory liquid steam, so that the residual smell in the nasal cavity on the first test side is reduced, and the test precision is further improved.

The application discloses an antibacterial and antiviral four-piece processing equipment, relating to the technical field of textile equipment, which comprises a base piece, an outer shell, winding shafts, a material passing assembly, an evaporation assembly, a feeding assembly, a material pushing assembly and a first driving part, wherein the base piece comprises an outer frame, a limiting clamping plate and a sealing part, the limiting clamping plate is arranged on the outer frame, the sealing part is arranged on the outer frame, the outer shell is arranged on the outer frame, the winding shafts are in multiple groups, the multiple groups of winding shafts are rotatably arranged on the outer shell, the material passing assembly is arranged in the outer shell, the evaporation assembly is arranged on the outer frame, dyeing liquid vapor can be attached to the surface of the four-piece fabric, the feeding assembly is movably arranged on the outer frame, and the material pushing assembly is arranged on the outer frame. Thus, the solid dye can be uniformly evaporated and attached to the four-piece fabric during evaporation, the attachment force is stable, the color depth of the four-piece fabric after dyeing is ensured, the four-piece fabric has the characteristics of antibacterial and antiviral properties, and the excess material can be conveniently collected.

The invention provides a rheumatism immune arthropathy rehabilitation physiotherapy device, and relates to the technical field of joint disease rehabilitation physiotherapy, the rheumatism immune arthropathy rehabilitation physiotherapy device comprises a physiotherapy fumigation assembly, the physiotherapy fumigation assembly is a closed cavity formed by a physiotherapy fumigation cover and a sealing layer through a hot melting technology, and an adjustable bandage is integrated on the outer surface of the physiotherapy fumigation cover; the flow guide mechanism is used for heating the concentrated liquid medicine and conveying effective components in the liquid medicine to pass through the joint surface through airflow to promote absorption of the medicine by the skin outside the joint, and heat in the gaseous liquid medicine is used for continuously preserving heat of the joint so as to realize the effects of hot compress and fumigation. Loss of effective components in the liquid medicine can be reduced, indoor air pollution caused by diffusion of peculiar smell of the liquid medicine is reduced, and the problems that most of liquid medicine steam cannot make contact with joints of a patient, steam dispersion causes large waste, the effective utilization rate of the liquid medicine is low, and peculiar smell generated by steam diffusion affects indoor air are solved.

A system and method of ultra-high purity (UHP) oxygen production from an argon and oxygen producing cryogenic air separation unit incorporating a dedicated methane rejection column or column section having a liquid to vapor (L / V) ratio lower than the L / V ratio in the associated argon rectifier is provided.

A combined heater, comprising a heater body (1) and a mouthpiece (2) detachably provided at one end of the heater body (1). The heater body (1) comprises a first atomization mechanism and at least one second atomization mechanism. A mixing cavity (3) and a vapor outlet channel (4) are provided in the mouthpiece (2), and the vapor outlet channel (4) is communicated with the mixing cavity (3); the first atomization mechanism comprises a heating chamber (5), the heating chamber (5) is used for placing a solid vapor-generating substance and heating the solid vapor-generating substance to generate an aerosol, one side of the heating chamber (5) is communicated with the mixing cavity (3), and the other side of the heating chamber (5) is communicated with a first air inlet channel (6); the second atomization mechanism comprises an e-liquid chamber (7) and an atomization chamber (8), a liquid guide member (9) is provided in the atomization chamber (8), one end of the liquid guide member (9) is communicated with the e-liquid chamber (7), one side of the atomization chamber (8) is communicated with the mixing cavity (3), and the other side of the atomization chamber (8) is communicated with the second air inlet channel (10). The heater can simultaneously heat tobacco and an e-liquid vapor-generating substance, and can achieve full mixing of two or more aerosols to enhance the aroma of an aerosol in the mouth and restore the natural tobacco flavor, thereby diversifying the vaping taste.

The utility model provides an air regulating structure and an atomizer, the air regulating structure comprises an air regulating piece and a seat body assembly used for being assembled on the atomizer, the seat body assembly is provided with an air inlet, an atomizing cavity used for mixing air and atomized liquid steam, and an air inlet channel communicated with the air inlet and the atomizing cavity, an air adjusting piece is arranged at the position, close to the atomizing core in the atomizing cavity, in the air inlet channel, and a plurality of vent holes are formed in the air adjusting piece. After external air flows into the air inlet channel through the air inlet in a high-speed, disordered and non-uniform air channel section speed distribution state, the external air can be divided into a plurality of neat and uniform small air flows in the process of flowing through the plurality of vent holes uniformly distributed in the air adjusting piece, and the air flows can be linearly guided; the atomization device reduces or even eliminates transverse flow of airflow, improves airflow pulsation, reduces airflow turbulence, ensures that the speed of the airflow flowing into the atomization cavity tends to be uniform and stable, and effectively ensures that atomized liquid steam and air are efficiently and uniformly mixed in the atomization cavity.

A vapor chamber heatsink assembly, under vacuum, having a working fluid therein, comprising a plurality of heatsink fins and a vapor chamber is provided. The vapor chamber and the plurality of heatsink fins each comprise a plurality of obstructers defining a plurality of braided channels therein. Thus, the condenser regions of the vapor chamber are expanded to the plurality of heatsink fins. When heat from a greater temperature heat source and a lower temperature heat source is applied to the vapor chamber, via the plurality of obstructers and braided channels, the working fluid and liquid vapor travel therethrough, providing an effective phase change mechanism to the greater temperature heat source, while concurrently, hindering agglomeration of working fluid thereto. An effective phase change mechanism is also concurrently provided to the lower temperature heat source due to the non-agglomeration of working fluid to the greater temperature heat source.

The utility model provides a deoxygenization device for a steam circulation system, which comprises a water tank and a deoxygenization head mounted at the top of the water tank, the deoxygenization head is internally provided with a rotating film device, a water spraying assembly and a filler liquid steam net from top to bottom in sequence, the top of the deoxygenization head is provided with an exhaust port, the side of the deoxygenization head is provided with a water inlet and a steam inlet, and the water inlet is communicated with the water tank. The water inlet comprises a condensed water inlet and a make-up water inlet which are communicated with the rotating film device, and a high-pressure heater drainage inlet formed above the water spraying assembly, and the steam inlet comprises a first-stage steam inlet communicated with the rotating film device and a second-stage steam inlet formed below the filler liquid-steam net; the high-pressure heater drainage inlet is connected with a water inlet pipe, and the water inlet pipe comprises a water inlet connector and a flow stabilizing cover arranged at the tail end of the water inlet connector. According to the deoxygenization device, the water inlet pipe is arranged at the high-pressure heater drain water inlet, the flow stabilizing cover is arranged at the tail end of the water inlet pipe, the high-speed flow state of high-pressure heater drain water is changed, and the deoxygenization rate and the system operation stability are effectively improved.

The utility model discloses a gas phase liquid filtering tank with a condensation function, which comprises a filtering tank main body, a filtering assembly and a cooling assembly, the upper end and the lower end of the filtering tank main body are respectively communicated with a recovery pipe and a liquid discharge pipe, the filtering assembly comprises a plurality of layers of filtering plates, and the plurality of layers of filtering plates are distributed in the filtering tank main body from top to bottom; and the cooling assembly is positioned between two adjacent layers of filter plates. According to the utility model, the filtering assembly and the cooling assembly are directly arranged in the filtering tank main body, so that a gas-liquid mixture entering the filtering tank can be quickly cooled and filtered, the situation that gas-phase liquid is wasted due to the fact that gas-phase liquid steam cannot be recycled is avoided, and a manner of primarily filtering, cooling and filtering again is adopted, so that the gas-phase liquid steam can be recycled. And meanwhile, the internal space of the filtering tank main body is fully utilized, so that the whole gas-phase liquid filtering tank is compact in structure, small in occupied area and convenient to install and arrange.

A vapor-generating system includes a cartridge, a vapor-generating device and a piercing element. The cartridge includes a cartridge housing configured to hold a solid vapor-forming substrate within the cartridge housing interior, a liquid storage housing configured to hold a liquid vapor-forming substrate within the liquid storage housing interior, and a frangible seal on the liquid storage housing. The vapor-generating device includes a device housing at least partially defining a cavity, an electric heater, and a power supply. The piercing element is configured to pierce the frangible seal of the cartridge to expose the liquid storage housing interior to be in fluid communication with the electric heater based on the vapor-generating device coupling with the cartridge such that the device housing at least partially receives the cartridge into the cavity. The electric heater is located externally from the piercing element.

A method for selective removal of a titanium aluminum carbide film against titanium aluminum nitride films by using near atmospheric pressure plasma that is a rich non-halogen radical source to produce various radicals (e.g. NH, H, CHx, N, Ar, OH, O) from Ar and liquid vapor for film surface modification. The modified layer is able to form volatile products that can be easily removed by heating.

The present application discloses a one-way heat conduction device for a micro-heating element and a processing method thereof, and relates to the field of heat dissipation technology of electrical components. The one-way heat conduction device for a micro-heating element comprises a heat conduction cavity, the heat conduction cavity is a flat structure, the heat conduction cavity has two opposite main sides, the side wall of the heat conduction cavity close to one of the main sides is used as the bottom wall, and the side wall of the heat conduction cavity close to the other main side is used as the top wall, and the heat conduction cavity contains a liquid-gas phase change medium; the inner side of the heat conduction cavity is provided with a plurality of liquid wicks, the liquid wicks have loose pores, the two ends of the liquid wicks are respectively connected to the bottom wall and the top wall of the heat conduction cavity, and the cross-sectional size of the liquid wicks gradually decreases in the direction away from the bottom wall. The present application can improve the heat dissipation effect of micro-heating elements in electronic products.

The application discloses a method for reducing defects of photoresist after development and a semiconductor structure manufacturing method, and belongs to the semiconductor field. The application brings forward the microwave heating to the evaporation development liquid process, and inert gas is introduced to reduce the pressure difference inside and outside the photoresist pattern. The development liquid on the semiconductor structure is evaporated by microwave heating, and the inert gas is introduced and the air exhaust device of the drying chamber is opened at the same time, so that the development liquid vapor is exhausted. The drying chamber is maintained in a slightly positive pressure state by the inert gas to protect the semiconductor structure. The microwave heating heats the photoresist to further cross-link and solidify at the same time of evaporating the development liquid. The photoresist pattern is cleaned to remove the residues after the evaporation of the development liquid. The application integrates the development liquid cleaning replacement, the development liquid evaporation and the hard baking into one process, so that the hard baking time of the application can be shortened or even the hard baking process can be removed. The obtained photoresist pattern is more compact and firm, and therefore, the photoresist pattern is not easy to collapse in the subsequent cleaning process.