53 results about "Liquid line" patented technology

A temperature control device (200) for temperature control of a position-sensitive component (102) of a lithography system (1), comprising a liquid line (208) with a line section (218) for transporting a temperature control liquid (206), and a gas bubble separator (220) with a branch line section (222) branching off from the line section (218), wherein within the branch line section (222) a fluid space (224) and a gas space (226) are formed, fluidly connected to the line section (218), and the gas space (226) is connected to the liquid space (224) by means of a gas passage unit (228) for allowing gas bubbles (216) to pass from the liquid space (224) into the gas space (226).

The application discloses a near-liquid line extrusion casting forming equipment, which comprises a support, a mold closing mechanism, a driving mechanism and a screw feeding mechanism arranged on the support, wherein the screw feeding mechanism is provided with a driving cylinder on the side away from the connection with the mold closing mechanism, and the driving cylinder is provided with an adjusting mechanism capable of controlling the gas flow and the gas pressure; the adjusting mechanism increases the gas flow to realize high-speed pre-feeding of the feeding screw rod to inject the melt into the mold closing mechanism in the injection stage when the melt does not fill the mold closing mechanism, or reduces the gas flow and increases the gas pressure to realize slight pre-feeding of the feeding screw rod to compensate the melt shrinkage by pressure in the pressure maintaining stage when the melt fills the mold closing mechanism; the adjusting mechanism is controlled by a control system, and the control system is used to automatically switch the working state of the adjusting mechanism in the injection stage or the pressure maintaining stage. The application has the beneficial effects of realizing high-quality, high-efficiency and high-stability production of the near-liquid line extrusion casting.

A liquid purification system includes a raw liquid supply line with a sorbent dispenser connected to an inlet of a filtration cartridge with a precoated layer of sorbent formed and removable by flushing and a purified liquid line connected to a purified liquid output of the filtration cartridge. The system is configured to decant spent sorbent and return most of the flushing liquid to the raw liquid supply line. A flushing liquid and sorbent separation device is connected to a flushing liquid outlet of the filtration cartridge, and a clarified flushing liquid outlet of the flushing liquid and sorbent separation device is connected to the raw liquid supply line. The filtration cartridge is made as a hollow-fiber cartridge.

Invention relates to a hydraulic compressor system for compressing gas, comprising: at least one pump for pumping liquid; a gas reservoir for storing compressed gas; at least two compression tanks, each of said compression tanks comprises an expandable bladder defining a bladder cavity, wherein the expandable bladder contains a liquid in the expandable bladder cavity and the expandable bladder is configured to expand when liquid is input into the expandable bladder cavity and a tank cavity outside of the expandable bladder, wherein the cavity comprises a compressible gas wherein the expandable bladder and the tank cavity outside the expandable bladder form interdependent volumes of liquid and gas; a liquid line configured to fluidly couple the expandable bladder cavity with at least one of the one or more pumps such that the liquid is pumped into or out of the expandable bladder via the liquid line; a gas line configured to fluidly couple the gas reservoir with the tank cavity such that the gas flows into or out of the tank cavity via the gas line; wherein, during operation of the system, liquid is pumped by the one or more pumps to the expandable bladder in the first compression tank and gas is expelled from the tank cavity of the first compression tank and directed to gas reservoir where it is compressed, characterised in that Switching from compressing the first compression tank (21) to compressing the second compression tank (22); is achieved by changing the direction of flow; wherein the pump (10) direction of rotation is reversed to reverse the flow of liquid; wherein said pump (10) comprises a variable speed pump wherein the speed of said pump (10) is adjusted so that towards the end of the compression stroke the pump speed is reduced and hence the liquid flowrate is reduced to allow a smooth change-over from one compression tank to another compression tank as the automatically controlled switch over is executed or the speed of said pump is adjusted so that the maximum efficiency of the compression cycle is maintained thought continuous speed adjustment of the pump.

The utility model discloses a vapor chamber structure with a liquid pipeline, which is used for circulation of cooling liquid and comprises a vapor chamber and the liquid pipeline. The uniform temperature plate comprises a first plate body and a second plate body, the first plate body is provided with a heated part and at least one condensation part extending from the heated part, and the first plate body and the second plate body are matched in shape and are covered with each other; the liquid pipeline is arranged outside the first plate body and is provided with a pipe body and an interface component connected to two ports of the pipe body, so that the interface component introduces the cooling liquid from the outside into the pipe body for circulation; the pipe body of the liquid pipeline is at least attached to and combined with the heated part of the first plate body.

The invention relates to a system for the purification and / or desalination of liquids, in particular water from various sources, and for the domestic and / or drinking water supply in domestic and / or industrial applications in personal lands and gardens. The liquid purification system includes: a source liquid line having an inlet valve mounted thereon; the reverse osmosis membrane is provided with a liquid discharge pipeline and a purified liquid pipeline which are connected with the reverse osmosis membrane; a purified liquid supply line and a purified liquid tank, wherein the purified liquid supply line supplies the purified liquid to a customer; a secondary purified liquid line connected to the purified liquid tank and the stock solution line; and a control unit, in which the liquid purification system is designed to be able to almost completely remove a debris layer on the reverse osmosis membrane by intensively and repeatedly flushing the reverse osmosis membrane with the purified liquid.

A lavage assembly (2) has an applicator housing (4) which comprises a handle (6) and an application opening (8) for dispensing a rinsing liquid (SF) and which encloses a drive receiving area (10). In addition, the lavage assembly has a liquid line (16), by means of which the application opening (8) can be connected to a supply (V) of rinsing liquid (SF), and a drive unit (12), accommodated in the drive receiving area (10), for a pump (14), which is used to convey the rinsing liquid (SF) from the supply (V) to the application opening (8), the drive unit (12) having a drive controller (22). According to the invention, an application module (24, 24A, 24B), which has a dispensing characteristic, can be releasably attached to the application opening (8), the drive controller (22) being adjustable in accordance with the attached application module (24, 24A, 24B).

A container head with a mouthpiece, longitudinally elongate in a longitudinal extent direction, and a main body. The main body has a first connector for a first container and a second connector for a second container, and the mouthpiece is fastened in the main body in an operating position. A first liquid line for transporting a first drinkable liquid in the operating position leads from the first connector through the interior of the mouthpiece to a first outlet opening in the mouthpiece, and a second liquid line for transporting a second drinkable liquid in the operating position leads from the second connector through the interior of the mouthpiece to a second outlet opening in the mouthpiece. The first outlet opening is arranged further away from an end of the mouthpiece which lies opposite the main body in the operating position than the second outlet opening.

This invention proposes a production process for protein mesh dressings, comprising the following steps: S1, firstly, pressing out several grooves of a preset pattern using an embossing process, the groove depth being 0.3-0.5 times the thickness of the formed protein thread; modifying the surface of the embossed release paper, the modification process including first using plasma activation treatment, followed by coating the release paper surface with a hydrophobic material; S2, preparing the active material; S3, coating the active material along the groove trajectory; S4, gradient drying and curing; firstly, pre-curing the release paper coated with the active material at low temperature, and then drying and curing using a gradient temperature rise mode; S5, post-treatment; the grooves in this invention not only provide physical boundaries, but also construct directional boundary tension constraints through the sidewalls, breaking the tension balance of disordered diffusion of liquid lines; while the hydrophobic modification further optimizes the boundary tension distribution of the solid-liquid interface, weakening the spreading driving force; thus avoiding the problems of coarsening of the wire diameter and sparse mesh in existing processes.

The invention relates to a measuring sensor for process and automation technology, designed to detect measurement variables of a medium, comprising: a measuring tube (MR) for conducting the medium (ME), wherein the measuring tube (MR) has at least two bores (B1, B2) in the tube wall (RW); at least one sensor (SE, SE', SE'') arranged in a first bore (B1, B1', B1''), designed to detect at least one measurement signal dependent on the medium (ME) and / or to feed a signal into the medium; at least one flushing device (SV) arranged in a second bore (B2), wherein the flushing device (SV) has at least one flushing nozzle (SD1; SD2; SD3) with an orientation (A1; A2; A3) towards the at least one sensor (SE), wherein the flushing device (SV) is designed to be connected to a flushing liquid line (FL), wherein the flushing liquid line (FL) is designed to conduct a flushing liquid (F), wherein the at least one flushing nozzle (SD1; SD2; SD3) is designed to accelerate the flushing liquid (F) along the orientation (A1; A2; A3).

A lavage assembly (2) has an applicator housing (4), the applicator housing comprising a handle region (6) and an application opening (8), which is provided on an application side (A), for dispensing a rinsing liquid (SF), and the applicator housing enclosing a drive receiving area (10), which is accessible via a housing opening (12); a liquid line (36), by means of which the application opening (8) can be connected to a supply (V) of rinsing liquid (SF); and a drive unit (18), which can be inserted into the drive receiving area (10), for a pump (20) for conveying the rinsing liquid (SF) from the supply (V) to the application opening (8), the drive unit (18) having, for this purpose, a motor (24), a power supply device (26), and a rotor (30) which can be driven by the motor (24), and the pump (20) being in the form of a hose pump which is substantially formed by the rotor (30) and an elastically deformable hose portion (34). According to the invention, the applicator housing (4) has a rod-type housing portion (16) which extends in the shape of a rod along a housing longitudinal axis (AG) and forms the handle region (6), the handle region extending at least partly about the housing longitudinal axis (AG), and the housing opening (12) being provided on a rear side (R) of the applicator housing (4) facing away from the application side (A).

The present invention aims to provide a monitoring and control system for a centrifuge that can quickly detect a decrease in separation performance by detecting a sudden increase in solid content, thereby preventing equipment malfunction. The system comprises a centrifuge 2 in which a liquid to be treated flows in from an inlet 20 and is introduced into the interior, a separation plate is rotated by an electric motor 21, the introduced liquid to be treated is separated into sludge and separated liquid, and the separated liquid is discharged to the outside from a separated liquid discharge section 22, the separated liquid discharged from the separated liquid discharge section 22 is introduced into a separated liquid line 3 equipped with at least a back pressure valve 31 and a pressure gauge PG, a portion of the separated liquid introduced into the separated liquid line 3 is guided to a detection line 4 equipped with at least a detection filtering unit 40, a constant flow valve 41 and a flow meter 42 by adjusting the back pressure valve 31, and when it is determined that the value measured by the flow meter 42, which measures the flow rate adjusted by the constant flow valve 41 provided downstream of the detection filtering unit 40, is below a predetermined flow rate lower limit threshold, the electric motor 21 is stopped.

The refrigerant system comprises an outdoor unit, the outdoor unit is provided with a compressor, a rubber pad is arranged at the bottom of the compressor, a capillary tube is wound outside the rubber pad, one end of the capillary tube is connected to an air return port of the compressor through a first pipeline, and the other end of the capillary tube is connected with an electronic expansion valve EEVX through a second pipeline. And the liquid pipe is connected to the outdoor unit. And when the unit has the start-up requirement and the compressor is closed for more than 3 minutes, the electronic expansion valve EEVX is opened for a first step number and lasts for a first time, and then PID adjustment of the valve opening degree is carried out according to the temperature sensor THO-X2-THO-X1 = 8 DEG C. The temperature of the rubber pad of the compressor is kept at a relatively low temperature, so that the temperature of the rubber pad is prevented from being uncontrollable due to the influence of body vibration and environment during operation of the compressor, the loss factor of the rubber pad is further improved, the vibration reduction effect is improved, the system reliability is improved, and noise radiation is reduced.

Device for use in an elongated shipping container for the selective transport of solid cargo and liquid bulk cargo, comprising a frame rigidly attached to the elongated shipping container. The frame includes at least two side elements and at least one end element connected to the side elements. A collapsible liquid container is detachably connected to the frame, the liquid container having a liquid-impermeable outer liner and a liquid-impermeable inner bladder arranged within the outer liner. A liquid line is in liquid communication with the inner bladder and is detachably connected to the frame. At least one deflector plate is arranged in operation to be detachably attached to the frame and to the top of the collapsible liquid container.

To provide a waste heat recovery system of exhaust gas for a ship for recovering energy usable in the ship from waste heat of exhaust gas exhausted from an engine.SOLUTION: A vaporizer 100 and a gas-liquid separator 200 provided in a heat medium circulation line RCL installed in a ship and configured to heat a working fluid by exchanging heat with an exhaust gas discharged from an engine and configured to separate the working fluid heated by the vaporizer into gas and liquid, an expansion turbine 300 configured to generate shaft power by expanding the working fluid in a gas state separated by the gas-liquid separator 200, a condenser 500 configured to cool and condense the working fluid cooled by the expansion turbine 300, and a supply pump 600 provided in the heat medium circulation line RCL configured to pressurize the working fluid condensed by the condenser 500; And a liquid line LLa for supplying the working fluid in the liquid state separated by the gas-liquid separator 200 to the downstream side of the expansion turbine 300, and supplies liquefied gas of a low flash point to the engine as fuel.SELECTED DRAWING: Figure 3

The present disclosure relates to a tube insert for a dialysis liquid line or a hydraulic tubing set, the tube insert including at least one housing; a first connection point for connecting a tube section of the hydraulic tubing set to the tube insert; a second connection point for connecting a second tube section of the hydraulic tubing set to the tube insert; a third connection point for connecting a fluid receptacle to the tube insert; a main line in fluid communication with the first connection point and with the second connection point; a secondary line in fluid communication with the third connection point; and a deflection element for deflecting the liquid, or parts thereof, flowing in the main line out of the flow direction and towards the secondary line.

This invention provides a liquid line detection device and method for a sedimentation tank sludge layer interface, relating to the field of alumina production technology. The device includes a control cabinet, a lifting mechanism, a fiber optic cable turntable, a fiber optic cable, a fixing device including guide wheels, and a composite photoelectric probe. The lifting mechanism drives the composite photoelectric probe to perform multi-depth scanning within the sedimentation tank, while a rotating rod drives the fiber optic cable turntable to rotate synchronously, achieving automatic extension and retraction of the fiber optic cable. The fiber optic cable transmits the signals collected by the composite photoelectric probe to the control cabinet, which calculates the actual transmittance based on the signals. This invention, through a dual-optical-path adaptive calibration design of the composite photoelectric probe combined with the actual transmittance calculation method, effectively eliminates system errors, ensuring that the final output transmittance value is only related to the slurry concentration, greatly improving the detection accuracy and repeatability of the clear liquid layer, turbid liquid layer, and sludge layer interface positions.

The invention provides a liquid pipeline interference characteristic characterization method and system considering dispersibility, and belongs to the technical field of pipeline design and interference detection. The method comprises the steps that parameters are extracted based on liquid pipeline functions and geometric features, and a parameterized three-dimensional model is established; performing interference analysis by using the model, and outputting interference characterization parameters; characteristic parameter statistical distribution is determined, and processing assembly dispersibility is simulated; monte Carlo sampling is adopted, the model is updated, and interference parameter probability distribution is counted; global sensitivity analysis is carried out, and characteristic parameter sensitivity indexes are calculated and sorted; and constraining the distribution range of the feature parameters ranked in the front. According to the liquid pipeline interference feature characterization method and system considering dispersity, pipeline interference can be quantitatively evaluated, pipeline layout can be optimized, the reliability and assembly quality of a pipeline system can be improved, and the method and system are suitable for design and evaluation of various mechanical equipment liquid pipelines.

An immersion cooling system includes an immersion cooling tank defining a cavity sized and shaped for retaining a liquid volume of an immersion fluid and at least one electrical component to be immersed in the liquid volume of the immersion fluid, and for defining a vapor clearance above the liquid volume of the immersion fluid, and a direct immersion fluid cooling system operable in conjunction with the immersion cooling tank. The cooling system includes a vapor intake line positioned within the vapor clearance of the immersion cooling tank and operable to draw vapor phase of the immersion fluid therein, a heat exchanger positioned downstream from the vapor intake line and operable to reject heat from the immersion fluid, and a liquid line connected between the heat exchanger and the immersion tank for returning the immersion fluid from the heat exchanger to the immersion tank.

The present invention addresses the problem of providing a monitoring control system for a centrifugal separator, the monitoring control system detecting a rapid increase in solid content, thereby making it possible to quickly detect a decrease in separation performance and to prevent equipment failure. The system is provided with a centrifugal separator 2 into which a liquid to be treated is caused to flow and be introduced from an introduction part 20, and in which a separation plate is rotated by an electric motor 21 and the introduced liquid to be treated is separated into sludge and a separated liquid, the separated liquid being discharged to the outside from a separated liquid discharge part 22. The separated liquid discharged from the separated liquid discharge part 22 is introduced into a separated liquid line 3 provided with at least a back pressure valve 31 and a pressure gauge PG. The back pressure valve 31 is adjusted to guide a part of the separated liquid introduced into the separated liquid line 3 to a detection line 4 provided with at least a detection filtering unit 40, a constant flow rate valve 41, and a flowmeter 42. When it is determined that a measurement value by the flowmeter 42 that measures a flow rate adjusted by the constant flow rate valve 41 provided on the downstream side of the detection filtering unit 40 is equal to or less than a predetermined flow rate lower limit threshold, the electric motor 21 is stopped. In this way, the problem is solved.

Container attachment with a container lid (9) provided with a lid top (7) and a lid bottom (8), a pressurized gas line (10) extending through the container lid (9) which has a pressurized gas inlet opening (11) on the lid top side (7) and a pressurized gas outlet opening (12) on the lid bottom side (8), a liquid line (17) extending through the container lid (9) which has a liquid outlet opening (18) on the lid top side (7) and a liquid inlet opening (19) on the lid bottom side (8), a shut-off valve (23) connected in the liquid line (17) and a shut-off valve actuating element (24) mounted on the container lid (9) by means of which the shut-off valve (23) can be actuated, characterized by an aroma capsule that can be detachably connected to and / or attached to the container lid (9) on the lid top side (7). (29), which has a capsule outlet opening (30),a capsule inlet opening (31) and a capsule interior (32) connecting these capsule openings (30, 31) to each other, wherein the capsule inlet opening (31) is connected to the liquid outlet opening (18) in the state of the aroma capsule (29) connected to the container lid (9).

The invention relates to a liquid line device housing (3) with the features of claim 1, a liquid line device (2) with the features of claim 6, a vehicle (1) with the features of claim 7, a method (20, 30) with the features of claim 8 or 9, a screw device (9) with the features of claim 10, a computer program (12) with the features of claim 11 and a computer-readable medium (11) with the features of claim 12.

The invention belongs to the technical field of high-entropy alloy brazing filler metal, and particularly relates to low-liquidus-temperature Ti-Zr-Nb-Ni high-entropy alloy brazing filler metal and a preparation method thereof.The high-entropy alloy brazing filler metal is of an amorphous structure or an amorphous / nanocrystalline structure and comprises, by atomic percent, 30%-40% of Ti, 20%-25% of Zr, 20%-25% of Nb and 20%-25% of Ni or comprises, by atomic percent, 20%-25% of Ti, 30%-40% of Zr, 20%-25% of Nb and 20%-25% of Ni. The high-entropy alloy brazing filler metal has low liquidus temperature (870-939 DEG C) and good amorphous forming ability, a Ti2AlNb joint brazed by the high-entropy alloy brazing filler metal is mainly composed of a beta-(Ti, Nb) solid solution and a Laves phase and shows excellent room-temperature and high-temperature (650 DEG C) mechanical property, and the compression shear strength of the high-entropy alloy brazing filler metal reaches 260 MPa and 243 MPa respectively.

This heat source unit (10) comprises: a first switching valve (35) that switches between a first state to allow communication between the discharge side of a compressor (11) and a high / low pressure gas connection tube (3), and a second state to allow communication between the high / low pressure gas connection tube (3) and the intake side of the compressor (11); a second switching valve (36) that switches between a third state to allow communication between the discharge side of the compressor (11) and a gas-side end of a first heat exchange unit (21), and a fourth state to allow communication between the intake side of the compressor (11) and the gas-side end of the first heat exchange unit (21);and a refrigerant flow conduit (27) in which a second heat exchange unit (22) is provided, and whose end is connected to the discharge side of the compressor (11) and the other end is connected to the upstream side of a receiver (25) in a liquid line (28).;

An energy system (1) arranged to generate and to use thermal energy is described. The energy system (1) comprises a mechanical vapor recompression (MVR) unit (3). Thermal energy of a working liquid is obtained during an MVR process performed by said MVR-unit (3) and is utilized externally outside of said energy system, preferably for heating processes, spaces, or objects. The MVR unit comprises a primary heat exchanger (5), a compressor (9), a primary vapor line (11) and a condenser (13). The MVR-unit (3) preferably also comprises at least one liquid line (15) arranged in connection to the condenser (13) and to the primary heat exchanger (5) for transport of the condensed working liquid back to the primary heat exchanger (5) for re-evaporation in the primary heat exchanger (5). The energy system (1), in one embodiment, comprises at least one secondary heat exchanger (17) arranged for heat exchange between the condensed working liquid flowing in the at least one liquid line (15) and an external working fluid flowing in at least one external fluid line (19) to use thermal energy generated by the MVR-unit (3).

The utility model discloses a kind of full liquid cooling systems for liquid cooling back door and cold water machine combination, including cold water set and the multiple cabinet connected in sequence, liquid cooling back door is set on each cabinet, cooling pipe assembly is set inside the liquid cooling back door, supply liquid line and return liquid line that are mutually communicated with cooling pipe assembly are set on cabinet, the side corresponding with cabinet inside of liquid cooling back door is provided with air inlet plate, air inlet structure and air outlet structure are set on air inlet plate, movable adjusting plate is set on liquid cooling back door.The improved full liquid cooling system for liquid cooling back door and cold water machine combination provided by the utility model, in use process, the supply liquid line of each cabinet is sequentially communicated to form a communication supply liquid line, the return liquid line of each cabinet is also sequentially communicated to form a communication return liquid line, the communication supply liquid line and communication return liquid line are connected with the return liquid port of cold water set by return liquid pipe, so increase or reduce cabinet operation simple.

A hydro-pneumatic apparatus is disclosed and configured for storing and using clean energy derived from hydro-pneumatic fluid displacement. In at least one embodiment, the apparatus provides at least one support frame configured for supporting at least one control container, at least one stationary container, at least one first counterbalance container, and at least one second counterbalance container connected in series with one another via liquid lines and gas lines, with each being airtight and configured for containing one or both of a volume of a liquid and a volume of a gas. The at least one stationary container has a substantially static vertical position relative to the support frame, while each of the at least one control container, first counterbalance container and second counterbalance container have a dynamic vertical position relative to the support frame.

The present application provides an auxiliary region setting device capable of reducing power consumption used in manufacturing semiconductors. The auxiliary region setting device is provided with: a vacuum pump (6) for exhausting process gas from a processing chamber (2) of a semiconductor manufacturing device; a cooling unit (7) for cooling a first circulation liquid used in the processing chamber (2); a heating unit (8) for heating a second circulation liquid used in the processing chamber (2); a decontamination device (10) for decontaminating the process gas exhausted from the vacuum pump (6); and a cooling liquid line (12) for flowing a cooling liquid supplied from a cooling source (15). The cooling liquid line (12) has a first downstream side line (26) for supplying the cooling liquid after passing through the decontamination device (10), the vacuum pump (6) and the cooling unit (7) to the heating unit (8), a second downstream side line (27) and a third downstream side line (28).

The utility model discloses a building exhaust energy recycling system, including a plurality of exhaust unit, still include exhaust energy recycling unit, and exhaust unit includes the exhaust branch pipe of installation in the room, vertical exhaust shaft, exhaust main pipe, is provided with exhaust air valve, heat exchanger and exhaust fan on exhaust main pipe, and exhaust energy recycling unit includes main liquid supply line and main return liquid line, and heat exchanger is connected with main liquid supply line through first liquid supply branch pipe, and heat exchanger is connected with main return liquid line through first return liquid branch pipe. The utility model discloses the exhaust energy recycling unit of closed loop circuit can through heat exchange indirect recovery heat or cold content in building exhaust, and can with the heat exchange device in the recovery section of air conditioning system heat exchange, and then will heat or cold content transfer to air conditioning system, realizes the indirect recovery and reuse of building exhaust energy, avoids the cross -contamination caused by building exhaust direct into air conditioning system.

Method for cleaning a pipeline of a single-wafer processing wafer cleaning device (100), wherein the device comprises: a rotatable platform (11) on which a wafer is arranged, Feed nozzles (12, 12a, 12b) for chemical solutions, through which a chemical solution is fed to the wafer (W) arranged on the platform (11) from one or both of the wafer front and wafer back, Pure water supply nozzles (13, 13a, 13b) through which pure water is supplied to the wafer (W) arranged on the platform (11) from one or both of the wafer front and wafer back, a supply line (14) for chemical solutions, through which the chemical solution is supplied to the supply nozzles (12, 12a, 12b) for chemical solutions, a clean water supply line (15) through which the clean water is supplied to the clean water supply nozzles (13, 13a, 13b), and a waste liquid line (17) through which the supplied chemical solution and the supplied purified water are collected and discharged, the method comprising: a pipeline cleaning step of introducing purified water containing micro-nano bubbles into the purified water supply line (15) to clean a pipeline of the purified water supply line (15), wherein in the pipeline cleaning step the purified water containing micro-nano bubbles is delivered elsewhere than to the wafer (W) to prevent the purified water containing micro-nano bubbles from contacting the surfaces of the wafer (W).