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647results about How to "Operation efficiency can be improved" patented technology

Etching apparatus for manufacturing semiconductor devices

An etching apparatus for manufacturing semiconductor devices which reduces contamination of the processing surface of a wafer by transporting a plurality of wafers stacked in a cassette with their processing surfaces facing down from the cassette supply chamber to one or more process chambers where the etching operation is performed on each wafer, one at a time. The apparatus has a load lock chamber for transferring the wafers stacked in the cassette from the cassette supply chamber, which is maintained under atmospheric conditions, to the process chamber, which is maintained under a strong vacuum. The process chamber has a cathode to which a wafer is clamped by a wafer holder with its processing surface facing down; the process chamber may also have a removable lower cover for easy repair and cleaning. The apparatus may also have a wafer aligning chamber installed between the cassette supply chamber and the load lock chamber for simultaneously aligning all of the wafers n the cassette before they are transported to the load lock chamber. The wafer aligning chamber also has a cassette transport mechanism for transferring the cassette from a cassette supply table in the cassette supply chamber to an elevator installed in the load lock chamber.
Owner:SAMSUNG ELECTRONICS CO LTD

Etching apparatus for manufacturing semiconductor devices

An etching apparatus for manufacturing semiconductor devices which reduces contamination of the processing surface of a wafer by transporting a plurality of wafers stacked in a cassette with their processing surfaces facing down from the cassette supply chamber to one or more process chambers where the etching operation is performed on each wafer, one at a time. The apparatus has a load lock chamber for transferring the wafers stacked in the cassette from the cassette supply chamber, which is maintained under atmospheric conditions, to the process chamber, which is maintained under a strong vacuum. The process chamber has a cathode to which a wafer is clamped by a wafer holder with its processing surface facing down; the process chamber may also have a removable lower cover for easy repair and cleaning. The apparatus may also have a wafer aligning chamber installed between the cassette supply chamber and the load lock chamber for simultaneously aligning all of the wafers n the cassette before they are transported to the load lock chamber. The wafer aligning chamber also has a cassette transport mechanism for transferring the cassette from a cassette supply table in the cassette supply chamber to an elevator installed in the load lock chamber.
Owner:SAMSUNG ELECTRONICS CO LTD

Method of movement authority calculation for communications-based train control system

The present invention discloses a calculation method of movement authority for communications-based train control system, comprising: handling a route information for a train, and determining a searching range of the train according to the route information; initializing the limit of movement authority with the end position of the searching range; searching for static obstacles within the searching range, and successively determining whether each static obstacle meets the safety requirements for train operating, if not, setting the position of the last static obstacle within the searching range as the limit of the movement authority; if so, modifying the limit of movement authority as the end of route having been matched; searching for dynamic obstacles within the searching range, and determining whether there is a train, if so, modifying the end of movement authority as the beginning point of the track section where the train is occupying; if there is no dynamic obstacle within the searching range, modifying the final end is of movement authority as the position of the last static obstacle within the searching range. In accordance with the present invention, it is possible to increase line capacity and improve traffic fluidity for rail transit.
Owner:BEIJING JIAOTONG UNIV
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