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1717results about How to "Reduce decomposition" patented technology

Method and deposition system for increasing deposition rates of metal layers from metal-carbonyl precursors

A method and a deposition system for increasing deposition rates of metal layers from metal-carbonyl precursors using CO gas and a dilution gas. The method includes providing a substrate in a process chamber of a processing system, forming a process gas containing a metal-carbonyl precursor vapor and a CO gas, diluting the process gas in the process chamber, and exposing the substrate to the diluted process gas to deposit a metal layer on the substrate by a thermal chemical vapor deposition process. The deposition system contains a substrate holder configured for supporting and heating a substrate in a process chamber having a vapor distribution system, a precursor delivery system configured for forming a process gas containing a metal-carbonyl precursor vapor and a CO gas and for introducing the process gas to the vapor distribution system, a dilution gas source configured for adding a dilution gas to the process gas in the process chamber, and a controller configured for controlling the deposition system during exposure of the substrate to the diluted process gas to deposit a metal layer on the substrate by a thermal chemical vapor deposition process.
Owner:TOKYO ELECTRON LTD

Wastewater evaporation concentration process and device system

The invention discloses a wastewater evaporation concentration process and a wastewater evaporation concentration device system. The process comprises the following steps of: delivering softened wastewater to be treated to a mechanical vapor recompression (MVR) system to perform evaporation and concentration, compressing the generated secondary steam and then delivering the compressed steam to an evaporator to recycle, delivering the concentrate to a triple-effect mixed flow forced circulating evaporation crystallization system to perform evaporation and crystallization, performing solid-liquid centrifugal separation on the crystallized concentrate and crystal grains, returning the separated mother solution to a stock solution tank or continuously performing evaporation and crystallization, and reclaiming the separated crystal, wherein the secondary steam generated by evaporation and crystallization is recycled for the evaporation crystallization system. After the wastewater is evaporated and concentrated by adopting the process of mechanical vapor recompression circulating evaporation and triple-effect mixed flow forced circulating evaporation crystallization, the wastewater does not need to be discharged to the ground water area, and the wastewater is discharged in a form of steam or closed and embedded in a form of sludge or the like, so the purpose of zero discharge of the wastewater can be fulfilled; and the process system has high heat efficiency, low energy consumption, energy conservation, great reduction in running cost, low temperature difference, low corrosion, difficult scale formation and long equipment service life.
Owner:华电水务工程有限公司 +1

Wastewater evaporating process and device system

The invention discloses a wastewater evaporating process and device system. The wastewater evaporating process comprises the following steps: the wastewater to be treated firstly enters a pretreatment softening system for softening treatment and secondly enters a mechanical vapor recompression (MVR) system for evaporation concentration; the generated secondary steam is compressed and enters an evaporator for recycling; the concentrated solution enters a triple effect flow-mixing forced circulation evaporation and crystallization system for evaporation and crystallization; the generated secondary steam is reused by the evaporation and crystallization system; the concentrated solution and crystalline grains obtained through crystallization are subject to solid-liquid centrifugal separation; the separated mother solution is sent back to a raw liquor tank or evaporated continuously for crystallization; and the separated crystals enter a centrifugal drying and packaging system for weighting and packaging. After the process disclosed by the invention is adopted to soften, evaporate and crystallize wastewater and dry and package the obtained crystals, wastewater is not discharged to the water bodies of the surface of earth and the aim of zero wastewater discharge can be realized; the process system is low-carbon and environmentally friendly; the material can be recycled, the thermal efficiency is high, the energy consumption is low, the energy can be saved, the operating cost can be greatly reduced, the range of temperature is small, the corrosion is low and the service life of the equipment is long, and the scaling has small possibility of occurrence.
Owner:华电水务工程有限公司 +1

Manufacturing method of lithium ion mixed type capacitor and lithium ion mixed type capacitor

A manufacturing method of a lithium ion mixed type capacitor comprises the following steps that (a) electrode pieces and a separation film are stacked or wound to form a cell according to the sequence of positive electrode/separation film/negative electrode; (b) the cell is put into an aluminum compound packing film shell body, the top edge and a first lateral edge of the aluminum compound packing film shell body are sealed in a heating mode, the electrode lugs of the positive electrode and the negative electrode of the cell extend out of the aluminum compound packing film shell body from the top edge; (c) a metal lithium electrode is put into the aluminum compound packing film shell body, is adjacent to the cell and is separated from the cell by the separation film, and the electrode lug of the metal lithium electrode extends out of the aluminum compound packing film shell body from a second lateral edge; (d) excessive electrolyte is injected into the aluminum compound packing film shell body, and then the second lateral edge of the aluminum compound packing film shell body is sealed in a heating mode; (e) in a constant current mode, the negative electrode serves as a working electrode, the metal lithium electrode serves as a counter electrode, and the negative electrode is pre-embedded; (f) the metal lithium electrode is taken out, the superfluous electrolyte is poured out, the second lateral edge of the aluminum compound packing film shell body is sealed in a vacuum heating mode, and the lithium ion mixed type capacitor is obtained.
Owner:INST OF ELECTRICAL ENG CHINESE ACAD OF SCI

Genetically engineered bacterium for high-yielding L-valine and method for producing L-valine by fermentation

The invention provides a genetically engineered bacterium for high-yielding L-valine. A construction method of the genetically engineered bacterium comprises the steps that starting from an escherichia coli W3110, an acetolactate synthase gene alsS of a bacillus subtilis is integrated on a genome of the escherichia coli W3110 and subjected to high expression; an escherichia coli ppGpp 3'-pyrophosphoric acid hydrolytic enzyme mutant R290E/K292D gene spoT is integrated on the genome of the escherichia coli W3110 and subjected to high expression; genes of frdA, frdB, frdC and frdD of four subunits of a lactic dehydrogenase gene ldhA, a pyruvate formate lyase I gene pflB and fumaric reductase on the genome of the escherichia coli W3110 are knocked out; a branched chain amino acid transaminasegene ilvE of the escherichia coli is replaced with leucine dehydrogenase gene bcd of the bacillus subtilis; and an acetyl-hydroxyl acid isomerized reductase gene ilvC of the escherichia coli is replaced with an encoding gene of a mutant L67E/R68F/K75E. According to the genetically engineered bacterium for the high-yielding L-valine, an L-valine fermentation method is further modified. Double-phasedissolved oxygen control is adopted, and the L-valine yield and the saccharic acid conversion rate are improved.
Owner:TIANJIN UNIV OF SCI & TECH
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