The present invention discloses a
phosphorus trifluoride purification device, comprising an adsorption
tower body, an upper cover, a plurality of air inlet ends, and an air outlet end, and further comprising: a double-position sliding
molecular sieve structure, comprising a first
molecular sieve adsorption cylinder and a second
molecular sieve adsorption cylinder; a pressure variable
diameter adjustment structure arranged between the first molecular
sieve adsorption cylinder and the second molecular
sieve adsorption cylinder, the pressure variable
diameter adjustment structure comprising an elastic adjustment component arranged on the inner wall of the adsorption
tower body, the upper and lower ends of the elastic adjustment component being respectively connected to the first molecular
sieve adsorption cylinder and the second molecular sieve adsorption cylinder, a pressure adjustment disk being connected to the middle part of the elastic adjustment component, the pressure adjustment disk being provided with a plurality of holes for
phosphorus trifluoride to pass through, the holes being provided with internal barrier structures, and a top bone component being fixedly provided on the top of the first molecular sieve adsorption cylinder. The present invention maximizes the extension of the service life of the adsorption structure while ensuring adsorption efficiency.