A filter for preparing phosphorus trifluoride

Abstract

The present invention discloses a filter for preparing phosphorus trifluoride, comprising: a fixed cylinder with closed ends, one end of the fixed cylinder being upwardly provided with a feed pipe and the other end being downwardly connected to a discharge pipe; a filtering mechanism comprising a first sealed bearing and a second sealed bearing fixedly connected to the fixed cylinder, the first sealed bearing and the second sealed bearing being respectively fixedly connected to corresponding fixed ring plates, a baffle being sealed and fixedly connected to the fixed ring plate mounted on the first sealed bearing, and corresponding filter plates being fixedly connected in a serrated shape between the fixed ring plates; a dust removal mechanism comprising a dust removal notch, the bottom of the fixed cylinder outside the dust removal notch being downwardly connected to a dust removal pipe, the outer end of the filter plate being fixedly connected to a spiral dust removal plate; and a driving mechanism for driving the baffle to rotate. The present invention can effectively discharge and collect filtered particulate matter without disassembling the filter, and can effectively improve the overall structural stability of the filtering mechanism.

Description

Technical Field

[0001] The invention relates to purification auxiliary equipment for preparing phosphorus trifluoride, in particular to a filter for preparing phosphorus trifluoride, which can effectively filter out particulate matter mixed in phosphorus trifluoride materials. Background Art

[0002] Phosphorus trifluoride can be used as a fluorinating agent, capable of ion transfer, and is used in the electronics industry, battery manufacturing, polymer materials, and catalysts. In semiconductor manufacturing, phosphorus trifluoride is converted into a plasma gas under the action of microwaves and doped into semiconductors, significantly improving semiconductor performance. The semiconductor industry is very sensitive to product purity and impurity content, so it is necessary to purify the phosphorus trifluoride material after preparation. Among them, filtering to remove particulate matter mixed in the phosphorus trifluoride material is an indispensable part of the purification process.

[0003] Because phosphorus trifluoride is a toxic and corrosive gas under normal conditions, the filtration process must be completely sealed. Existing filters used for phosphorus trifluoride preparation suffer from the following deficiencies in actual use: 1) The filter must be disassembled and assembled during the removal of filtered particulate matter, which can compromise its tightness; 2) The filter mechanism lacks structural stability and is prone to deformation over time, resulting in filtration performance that falls short of design requirements.

[0004] Therefore, the research purpose of the present invention is to design a filter for preparing phosphorus trifluoride that can effectively discharge and collect the filtered particulate matter without disassembling the filter, and can effectively improve the structural stability of the filter mechanism to maintain the filtering effect on the particulate matter for a long time. Summary of the Invention

[0005] In view of the technical problems existing in the above-mentioned prior art, the present invention provides a filter for preparing phosphorus trifluoride, which can effectively solve the technical problems existing in the above-mentioned prior art.

[0006] The technical solution of the present invention is:

[0007] A filter for preparing phosphorus trifluoride, comprising:

[0008] A fixed cylinder with closed ends, one end of which is upwardly provided with a feed pipe, and the other end of which is downwardly connected to a discharge pipe;

[0009] The filtering mechanism includes a first sealed bearing fixedly connected to the fixed cylinder and located outside the feed pipe, and a second sealed bearing fixedly connected to the fixed cylinder and located inside the discharge pipe, wherein the inner rings of the first and second sealed bearings are respectively fixedly connected to corresponding fixed ring plates, the fixed ring plates mounted on the first sealed bearing are sealed and fixedly connected to corresponding baffles, and the fixed ring plates mounted on the first and second sealed bearings are fixedly connected in a zigzag pattern to corresponding filter plates;

[0010] The dust removal mechanism includes a dust removal notch provided on the bottom side of the outer ring of the first sealed bearing, a dust removal pipe equipped with a dust removal valve is downwardly connected to the bottom of the fixed cylinder outside the dust removal notch, and a corresponding spiral dust removal plate is fixedly connected to the outer end of the filter plate;

[0011] The driving mechanism is used to drive the baffle to rotate, thereby driving the filtering mechanism to rotate, so that the spiral dust removal plate rotates to output the filtered particulate matter through the dust removal gap and discharge it outward through the dust removal pipe.

[0012] The driving mechanism includes a driving impeller fixedly connected to the center of the baffle, and a high-pressure nitrogen outlet pipe installed on the upper side of the driving impeller. The air inlet end of the high-pressure nitrogen outlet pipe is connected to an external nitrogen source through a first booster pump, and the air outlet end of the high-pressure nitrogen outlet pipe faces the driving impeller.

[0013] A corresponding recoil pipe is sealed and penetrated on the fixed cylinder, and the recoil pipe is connected to an external nitrogen source through a corresponding recoil valve. The recoil pipe is arranged on the outer side of the fixed ring plate to which the baffle is not fixed. The part of the recoil pipe located in the fixed cylinder is folded horizontally, and a first recoil outlet facing the filter plate is arranged downward at intervals.

[0014] Alternatively, the driving mechanism includes a driving air intake pipe that is sealed and connected to the outside of a fixed ring plate to which the baffle is not fixed, the driving air intake pipe is connected to an external nitrogen source through a second booster pump, the portion of the driving air intake pipe located in the fixed cylinder is transversely arranged at the axis of the fixed cylinder, and second recoil air outlets facing the filter plate are arranged downward at intervals, a corresponding driving pipe is sealed and fixed at the center of the baffle, one end of the driving pipe is rotatably sleeved on the driving air intake pipe through a sealed bearing, the other end of the driving pipe is closed and vertically connected to a plurality of arc-shaped jet reverse thrust pipes at intervals outward, and the air outlet ends of the jet reverse thrust pipes are respectively arranged in a constricted shape.

[0015] The fixed ring plate is staggered with corresponding V-shaped metal frames, the filter plates are arranged in a zigzag pattern and fixed between two adjacent V-shaped metal frames, and the spiral dust removal plates are fixed to the V-shaped metal frames.

[0016] The filter pores of the filter plate are no more than 0.3 μm.

[0017] A curved cover for covering the feed end of the dust removal pipe is fixedly connected to the fixed cylinder, and an inner end portion of the curved cover is spaced apart from the first sealing bearing to form an air flow channel.

[0018] A corresponding siphon tube is connected in parallel to the dust removal tube. One end of the siphon tube is not connected to the dust removal tube, and is connected to the fixed cylinder on the lower side of the dust removal notch.

[0019] A vibration reduction mechanism for reducing the mechanical vibration generated during the dust removal process is fixedly connected to the outer side wall of the fixed cylinder.

[0020] The vibration damping mechanism comprises an annular box body arranged on the fixed cylinder, and the annular box body is filled with corresponding vibration damping material.

[0021] Advantages of the present invention:

[0022] The fixed cylinder of the present invention is sealed at both ends, with a feed pipe positioned upward at one end and a discharge pipe connected downward at the other end. A filtering mechanism is then installed within the fixed cylinder. The mechanism comprises a first sealed bearing secured to the fixed cylinder outside the feed pipe, and a second sealed bearing secured to the fixed cylinder inside the discharge pipe. The inner rings of the first and second sealed bearings are each secured to a corresponding fixed ring plate. A corresponding baffle is sealed and secured to the fixed ring plate mounted on the first sealed bearing. Furthermore, a filter plate is secured in a zigzag pattern between the fixed ring plates mounted on the first and second sealed bearings. Phosphorus trifluoride gas enters through the feed pipe, is filtered by the filter plate, and is discharged through the discharge pipe along the side of the filter mechanism where the baffle is not located, thereby effectively filtering particulate matter from the phosphorus trifluoride gas.

[0023] Based on the improved design of the filtering mechanism, the present invention further adds a dust removal mechanism, which includes a dust removal notch provided on the bottom side of the outer ring of the first sealed bearing. The bottom of the fixed cylinder outside the dust removal notch is downwardly connected to a dust removal pipe equipped with a dust removal valve. Most importantly, the outer end of the filter plate is fixedly connected to a corresponding spiral dust removal plate. When it is necessary to clear and discharge the filtered particulate matter, it is only necessary to replace the phosphorus trifluoride gas in the fixed cylinder with nitrogen gas, and then rotate the baffle through the drive mechanism to drive the filter mechanism to rotate, so that the spiral dust removal plate rotates and transmits the filtered dust through the dust removal notch for external discharge. In this way, the filtered particulate matter can be effectively discharged and collected without disassembling the filter.

[0024] 2) The spiral dust removal plate of the present invention can not only clear the filtered particulate matter while rotating, but also form an overall structural reinforcement on the periphery of the filter mechanism, thereby effectively improving the structural stability of the filter mechanism and maintaining the filtering effect on particulate matter for a long time.

[0025] 3) The driving mechanism of the present invention includes a driving impeller fixedly connected to the center of the baffle, and a high-pressure nitrogen outlet pipe connected to the upper side of the driving impeller. The air inlet end of the high-pressure nitrogen outlet pipe is connected to the external nitrogen source through a first booster pump, and the air outlet end thereof faces the driving impeller. In addition, a recoil pipe connected to the external nitrogen source through a recoil valve is sealed and connected to the fixed cylinder. The recoil pipe is arranged on the outer side of the fixed ring plate to which the baffle is not fixed, and the portion of the recoil pipe located inside the fixed cylinder is arranged transversely and inversely, and is provided with first recoil outlets facing the filter plate at intervals downward. After nitrogen replacement is completed, the first booster pump is started to introduce high-pressure nitrogen to impact the driving impeller, which then rotates and drives the baffle to rotate. At the same time, the backflush valve is opened, and nitrogen is blown downward through the first backflush outlet of the backflush pipe to remove dust particles attached to the filter plate. During this process, the dust removal valve is opened, and the spiral dust removal plate rotates with the rotation of the baffle, transferring the filtered dust through the dust removal gap for external discharge. This further ensures that the present invention can effectively discharge and collect filtered particulate matter without disassembling the filter.

[0026] 4) The drive mechanism of the present invention includes a drive air intake pipe that is sealed and connected to the outside of a fixed ring plate to which a baffle is not fixed. The drive air intake pipe is connected to an external nitrogen source through a second booster pump. The portion of the drive air intake pipe located within the fixed cylinder is laterally flipped and arranged at the axis of the fixed cylinder, and is provided with recoil holes facing downward toward the filter plate at intervals. A corresponding drive pipe is sealed and fixed at the center of the baffle. One end of the drive pipe is rotatably connected to the drive air intake pipe through a sealed bearing. The other end of the drive pipe is sealed and vertically connected to an arc-shaped jet reverse thrust pipe at intervals. After nitrogen replacement is completed, the second booster pump is started to introduce high-pressure nitrogen. A portion of the high-pressure gas is discharged downward through the second backwash outlet to backwash the filter plate to remove dust particles attached to the filter plate; a portion of the high-pressure gas is ejected longitudinally and obliquely through the arc-shaped jet reverse thrust pipe, so that the reaction force generated by the jet drives the drive pipe to rotate, thereby driving the baffle and the filter as a whole to rotate; during this process, the dust removal valve is opened, and the spiral dust removal plate rotates with the rotation of the baffle, so as to transmit the filtered dust through the dust removal gap for external discharge. This further ensures that the present invention can effectively discharge and collect the filtered particulate matter without disassembling the filter.

[0027] 5) The fixed ring plate of this invention is staggered with corresponding V-shaped metal frames. The filter plates are arranged in a zigzag pattern and fixed between two adjacent V-shaped metal frames. The spiral dust removal plate is fixed to the V-shaped metal frames. The V-shaped metal frames provide sufficient support for the filter plates and form a fixed connection with the spiral dust removal plate, further ensuring the overall rigidity of the filtration mechanism.

[0028] 6) Since the high-pressure nitrogen outlet pipe or the jet reverse thrust pipe will cause high-pressure airflow to be generated in the fixed cylinder outside the baffle during the process of spraying nitrogen, the particulate matter will easily roll over in the fixed cylinder outside the baffle and cannot be discharged quickly. Through the setting of the arc cover of the present invention and the adjustment of its installation position, the nitrogen entering the fixed cylinder outside the baffle can flow into the arc cover along the gap between the inner end of the arc cover and the first sealing bearing, and then be discharged along the dust removal pipe. During this process, the material pushed out by the spiral dust removal plate can be carried and discharged with the circulating airflow without entering the fixed cylinder outside the baffle, thereby ensuring that the filtered particulate matter can be discharged smoothly; and the high-pressure airflow can form a siphon on the siphon pipe during the discharge process of the dust removal pipe, thereby extracting the material in the fixed cylinder part located on the lower side of the dust removal gap, so as to further ensure that the filtered particulate matter can be discharged smoothly, thereby ensuring the practical effect of the present invention.

[0029] 7) The present invention has a vibration-damping mechanism fixedly connected to the outer wall of the fixed cylinder for reducing the amount of mechanical vibration generated during the dust removal process. The mechanism includes an annular box body provided on the fixed cylinder body and equipped with the first and second sealed bearings, and the annular box body is filled with corresponding vibration-damping materials. This is because: during the dust removal process, the filter mechanism of the dust removal mechanism of the present invention will rotate as a whole, and the vibration generated by the rotation will be transmitted to the fixed cylinder body along the first and second sealed bearings, thereby increasing the amount of vibration at the connection between the components, that is, increasing the probability of leakage at the connection between the components. To this end, the present invention has a vibration-damping mechanism provided on the fixed cylinder body, the position of which corresponds to the first and second sealed bearings, thereby reducing the amount of vibration transmitted outward along the first and second sealed bearings, so as to overcome the vibration problem caused by dust removal, thereby further ensuring the practical effect of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 This is a structural diagram of embodiment 1 of the present invention.

[0031] Figure 2 It is a cross-sectional view of embodiment 1.

[0032] Figure 3 This is a schematic structural diagram of the filter of Example 1.

[0033] Figure 4This is a schematic structural diagram of the other side of the filter in Example 1.

[0034] Figure 5 This is a structural diagram of embodiment 2 of the present invention.

[0035] Figure 6 It is a cross-sectional view of the second embodiment.

[0036] Figure 7 This is a structural diagram of embodiment 3 of the present invention.

[0037] In the accompanying drawings: fixed cylinder 1, feed pipe 101, discharge pipe 102, filtering mechanism 2, first sealed bearing 201, second sealed bearing 202, fixed ring plate 203, baffle 204, filter plate 205, dust removal mechanism 3, dust removal gap 301, dust removal pipe 302, spiral dust removal plate 303, dust removal valve 4, driving mechanism 5, driving impeller 501, high-pressure nitrogen outlet pipe 502, driving air inlet pipe 503, driving pipe 504, sealed bearing 505, jet reverse thrust pipe 506, recoil pipe 6, recoil valve 601, first recoil outlet 7, recoil outlet 8, V-shaped metal frame 9, arc cover 10, siphon 11, vibration reduction mechanism 12, annular box body 1201, vibration reduction material 1202. DETAILED DESCRIPTION

[0038] In order to facilitate understanding by those skilled in the art, the structure of the present invention is further described in detail with reference to the embodiments and the accompanying drawings:

[0039] Example 1:

[0040] refer to Figure 1-4 , a filter for preparing phosphorus trifluoride, comprising:

[0041] The fixed cylinder 1 is closed at both ends. One end of the fixed cylinder 1 is upwardly provided with a feed pipe 101, and the other end of the fixed cylinder 1 is downwardly connected to a discharge pipe 102;

[0042] The filtering mechanism 2 includes a first sealed bearing 201 fixedly connected to the fixed cylinder 1 and located outside the feed pipe 101, and a second sealed bearing 202 fixedly connected to the fixed cylinder 1 and located inside the discharge pipe 102. The inner rings of the first sealed bearing 201 and the second sealed bearing 202 are respectively fixedly connected to corresponding fixed ring plates 203. The fixed ring plates 203 mounted on the first sealed bearing 201 are sealed and fixedly connected to the corresponding baffles 204. The corresponding filter plates 205 are fixedly connected in a zigzag pattern between the fixed ring plates 203 mounted on the first sealed bearing 201 and the second sealed bearing 202.

[0043] The dust removal mechanism 3 includes a dust removal notch 301 provided on the bottom side of the outer ring of the first sealed bearing 201. A dust removal pipe 302 equipped with a dust removal valve 4 is downwardly connected to the bottom of the fixed cylinder 1 outside the dust removal notch 301. The outer end of the filter plate 205 is fixedly connected to a corresponding spiral dust removal plate 303.

[0044] The driving mechanism 5 is used to drive the baffle 204 to rotate, thereby driving the filter mechanism 2 to rotate, so that the spiral dust removal plate 303 rotates to output the filtered particulate matter through the dust removal gap 301 and discharge it to the outside through the dust removal pipe 302.

[0045] The fixed cylinder 1 of the present invention is sealed at both ends. One end is provided with an upwardly directed feed pipe 101, and the other end is connected downwardly to a discharge pipe 102. A filter mechanism 2 is then located within the fixed cylinder 1. During filtration, phosphorus trifluoride gas enters through the feed pipe 101, is filtered by the filter plate 205, and is discharged through the discharge pipe 102 along the side of the filter mechanism 2 where the baffle 204 is not provided, effectively filtering out particulate matter in the phosphorus trifluoride gas.

[0046] Based on the improved design of the filter mechanism 2, the present invention further adds a dust removal mechanism 3, which includes a dust removal notch 301 provided on the bottom side of the outer ring of the first sealed bearing 201. The bottom of the fixed cylinder 1 outside the dust removal notch 301 is downwardly connected to a dust removal pipe 302 equipped with a dust removal valve 4. The most important thing is that the outer end of the filter plate 205 is fixedly connected to a corresponding spiral dust removal plate 303. When it is necessary to clear and discharge the filtered particulate matter, it is only necessary to replace the phosphorus trifluoride gas in the fixed cylinder 1 with nitrogen gas, and then rotate the baffle 204 through the drive mechanism 5 to drive the filter mechanism 2 to rotate, so that the spiral dust removal plate 303 rotates and transmits the filtered dust through the dust removal notch 301 for external discharge. In this way, the filtered particulate matter can be effectively discharged and collected without disassembling the filter.

[0047] The spiral dust removal plate 303 of the present invention can not only clear the filtered particulate matter while rotating, but also form an overall structural reinforcement on the periphery of the filter mechanism 2, thereby effectively improving the structural stability of the filter mechanism 2 and maintaining the filtering effect on particulate matter for a long time.

[0048] The driving mechanism 5 includes a driving impeller 501 fixed to the center of the baffle 204, and a high-pressure nitrogen outlet pipe 502 installed on the upper side of the driving impeller 501. The air inlet end of the high-pressure nitrogen outlet pipe 502 is connected to an external nitrogen source through a first booster pump, and the air outlet end of the high-pressure nitrogen outlet pipe 502 faces the driving impeller 501.

[0049] A corresponding recoil pipe 6 is sealed and penetrated on the fixed cylinder 1. The recoil pipe 6 is connected to the external nitrogen source through a corresponding recoil valve 601. The recoil pipe 6 is arranged on the outer side of the fixed ring plate 203 to which the baffle 204 is not fixed. The part of the recoil pipe 6 located in the fixed cylinder 1 is folded horizontally and has first recoil outlets 7 facing the filter plate 205 at intervals.

[0050] After nitrogen replacement is completed, the first booster pump is started to introduce high-pressure nitrogen to impact the driving impeller 501, which then rotates and drives the baffle 204 to rotate. At the same time, the backflush valve 601 is opened, and nitrogen is blown downward through the first backflush outlet 7 of the backflush pipe 6 to remove dust particles attached to the filter plate 205. During this process, the dust removal valve 4 is opened, and the spiral dust removal plate 303 rotates as the baffle 204 rotates, transferring the filtered dust through the dust removal gap 301 for external discharge. This further ensures that the present invention can effectively discharge and collect filtered particulate matter without disassembling the filter.

[0051] The fixed ring plate 203 is staggered with corresponding V-shaped metal frames 9, the filter plates 205 are arranged in a zigzag pattern and fixed between two adjacent V-shaped metal frames 9, and the spiral dust removal plate 303 is fixed to the V-shaped metal frames 9. The filter pores of the filter plates 205 do not exceed 0.3 μm.

[0052] The V-shaped metal skeleton 9 can provide sufficient support for the filter plate 205 and can form a fixed connection with the spiral dust removal plate 303, thereby further ensuring the overall rigidity of the filter mechanism 2.

[0053] A vibration reduction mechanism 12 is fixed to the outer wall of the fixed cylinder 1 for reducing the mechanical vibration generated during the dust removal process.

[0054] The vibration damping mechanism 12 comprises an annular box body 1201 disposed on the fixed cylinder 1 , and the annular box body 1201 is filled with corresponding vibration damping material 1202 .

[0055] Since the filter mechanism 2 of the dust removal mechanism of the present invention rotates as a whole during the dust removal process, the vibration generated by the rotation is transmitted to the fixed cylinder 1 along the first sealed bearing 201 and the second sealed bearing 202, thereby increasing the vibration amount at the connection between the components, that is, increasing the probability of leakage at the connection between the components. To this end, the present invention is provided with a vibration reduction mechanism 12 on the fixed cylinder 1, which is positioned corresponding to the first sealed bearing 201 and the second sealed bearing 202, thereby reducing the vibration amount transmitted outward along the first sealed bearing 201 and the second sealed bearing 202, so as to overcome the vibration problem caused by dust removal, thereby further ensuring the practical effect of the present invention.

[0056] Example 2:

[0057] refer to Figure 5-6 The difference between this embodiment and the first embodiment is that the driving mechanism 5 includes a driving air inlet pipe 503 that is sealed and connected to the outside of the fixed ring plate 203 to which the baffle 204 is not fixed. The driving air inlet pipe 503 is connected to an external nitrogen source via a second booster pump. The portion of the driving air inlet pipe 503 located within the fixed cylinder 1 is transversely arranged at the axis of the fixed cylinder 1 and is provided with second recoil air outlets 8 facing downward toward the filter plate 205 at intervals. A corresponding driving pipe 504 is sealed and fixedly connected to the center of the baffle 204. One end of the driving pipe 504 is rotatably sleeved on the driving air inlet pipe 503 via a sealed bearing 505. The other end of the driving pipe 504 is sealed and vertically connected to a plurality of arc-shaped jet reverse thrust pipes 506 at intervals. The outlet ends of the jet reverse thrust pipes 506 are respectively configured in a constricted shape.

[0058] After nitrogen replacement is completed, the second booster pump is started to introduce high-pressure nitrogen. A portion of the high-pressure gas is discharged downward through the second backwash outlet 8 to backwash the filter plate 205, thereby removing dust particles attached to the filter plate 205. A portion of the high-pressure gas is ejected longitudinally and obliquely through the arc-shaped jet reverse thrust pipe 506, so that the driving force generated by the jet drives the driving pipe 504 to rotate, thereby driving the baffle 204 and the filter as a whole to rotate. During this process, the dust removal valve 4 is opened, and the spiral dust removal plate 303 rotates with the rotation of the baffle 204, so as to transmit the filtered dust through the dust removal gap 301 for external discharge. This further ensures that the present invention can effectively discharge and collect the filtered particulate matter without disassembling the filter.

[0059] It should be noted that the implementation principle and technical effects of this embodiment are the same as those of the first embodiment. For the sake of brief description, for matters not mentioned in this embodiment, reference may be made to the corresponding contents in the first embodiment.

[0060] Example 3:

[0061] refer to Figure 7 The difference between this embodiment and embodiment 1 and embodiment 2 is that a curved cover 10 for covering the feed end of the dust removal pipe 302 is fixedly connected to the fixed cylinder 1, and the inner end of the curved cover 10 is spaced apart from the first sealing bearing 201 to form an airflow channel.

[0062] The dust removal pipe 302 is connected in parallel with a corresponding siphon pipe 11 . The end of the siphon pipe 11 that is not connected to the dust removal pipe 302 is connected to the fixed cylinder 1 on the lower side of the dust removal notch 301 .

[0063] Since the high-pressure nitrogen outlet pipe or the jet reverse thrust pipe will cause high-pressure airflow in the fixed cylinder outside the baffle during the process of spraying nitrogen, the particulate matter is likely to roll in the fixed cylinder outside the baffle and cannot be quickly discharged. By setting the arc cover of the present invention and adjusting its installation position, the nitrogen entering the fixed cylinder outside the baffle can flow into the arc cover along the gap between the inner end of the arc cover and the first sealing bearing, and then be discharged outside along the dust removal pipe. During this process, the material pushed out by the spiral dust removal plate can be carried and discharged with the circulating airflow without entering the fixed cylinder outside the baffle, thereby ensuring that the filtered particulate matter can be discharged smoothly; and the high-pressure airflow can form a siphon on the siphon pipe during the discharge process of the dust removal pipe, thereby sucking away the material in the fixed cylinder part located below the dust removal gap, further ensuring that the filtered particulate matter can be discharged smoothly, thereby ensuring the practical effect of the present invention.

[0064] It should be pointed out that the implementation principle and technical effects of this embodiment are the same as those of Embodiment 1 and Embodiment 2. For the sake of brief description, for matters not mentioned in this embodiment, reference may be made to the corresponding contents of Embodiment 1 and Embodiment 2.

[0065] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A filter for preparing phosphorus trifluoride, characterized in that: include: A fixed cylinder (1) with closed ends, one end of the fixed cylinder (1) being upwardly provided with a feed pipe (101), and the other end of the fixed cylinder (1) being downwardly connected to a discharge pipe (102); The filtering mechanism (2) comprises a first sealed bearing (201) fixedly connected to the fixed cylinder (1) and located outside the feed pipe (101), and a second sealed bearing (202) fixedly connected to the fixed cylinder (1) and located inside the discharge pipe (102), wherein the inner rings of the first sealed bearing (201) and the second sealed bearing (202) are respectively fixedly connected to corresponding fixed ring plates (203), a corresponding baffle (204) is sealed and fixedly connected to the fixed ring plate (203) mounted on the first sealed bearing (201), and a corresponding filter plate (205) is fixedly connected in a serrated manner between the fixed ring plates (203) mounted on the first sealed bearing (201) and the second sealed bearing (202); The dust removal mechanism (3) comprises a dust removal notch (301) provided on the bottom side of the outer ring of the first sealed bearing (201); a dust removal pipe (302) equipped with a dust removal valve (4) is connected downwardly to the bottom of the fixed cylinder (1) outside the dust removal notch (301); and a corresponding spiral dust removal plate (303) is fixedly connected to the outer end of the filter plate (205); A driving mechanism (5) is used to drive the baffle (204) to rotate, thereby driving the filter mechanism (2) to rotate, causing the spiral dust removal plate (303) to rotate and output the filtered particulate matter through the dust removal gap (301) to the outside and discharge it through the dust removal pipe (302); The driving mechanism (5) comprises a driving air inlet pipe (503) which is sealed and connected to the outside of a fixed ring plate (203) to which the baffle (204) is not fixed. The driving air inlet pipe (503) is provided with second recoil air outlets (8) facing downwards at intervals and directed towards the filter plate (205). A corresponding driving pipe (504) is sealed and fixedly connected at the center of the baffle (204). One end of the driving pipe (504) is rotatably sleeved onto the driving air inlet pipe (503) via a sealing bearing (505). The other end of the driving pipe (504) is sealed and vertically connected to a plurality of arc-shaped jet reverse thrust pipes (506) at intervals and directed outwards. The outlet ends of the jet reverse thrust pipes (506) are respectively provided in a constricted shape. Alternatively, the driving mechanism (5) comprises a driving impeller (501) fixedly connected to the center of the baffle (204), and a high-pressure nitrogen outlet pipe (502) installed on the upper side of the driving impeller (501), the inlet end of the high-pressure nitrogen outlet pipe (502) is connected to an external nitrogen source through a first booster pump, and the outlet end of the high-pressure nitrogen outlet pipe (502) faces the driving impeller (501).

2. A filter for preparing phosphorus trifluoride according to claim 1, characterized in that: A corresponding recoil pipe (6) is provided through and sealed on the fixed cylinder (1). The recoil pipe (6) is connected to an external nitrogen source through a corresponding recoil valve (601). The recoil pipe (6) is provided on the outside of the fixed ring plate (203) to which the baffle (204) is not fixed. The recoil pipe (6) is laterally folded in the portion located inside the fixed cylinder (1) and is provided with first recoil outlets (7) facing downwards at intervals and directed towards the filter plate (205).

3. A filter for preparing phosphorus trifluoride according to claim 1, characterized in that: The driving air intake pipe (503) is connected to an external nitrogen source via a second booster pump, and the portion of the driving air intake pipe (503) located inside the fixed cylinder (1) is transversely arranged at the axis of the fixed cylinder (1).

4. A filter for preparing phosphorus trifluoride according to claim 1, characterized in that: Corresponding V-shaped metal frames (9) are arranged at intervals and staggered on the fixed ring plate (203); the filter plates (205) are arranged in a zigzag pattern and fixed between two adjacent V-shaped metal frames (9); and the spiral dust removal plates (303) are fixed to the V-shaped metal frames (9).

5. A filter for preparing phosphorus trifluoride according to claim 1, characterized in that: The filter pores of the filter plate (205) do not exceed 0.3 μm.

6. A filter for preparing phosphorus trifluoride according to claim 1, characterized in that: A curved cover (10) for covering the feed end of the dust removal pipe (302) is fixedly connected to the fixed cylinder (1), and an inner end of the curved cover (10) is spaced apart from the first sealing bearing (201) to form an airflow channel.

7. A filter for preparing phosphorus trifluoride according to claim 1, characterized in that: A corresponding siphon tube (11) is connected in parallel to the dust removal tube (302); one end of the siphon tube (11) is not connected to the dust removal tube (302), but is connected to the fixed cylinder (1) on the lower side of the dust removal notch (301).

8. The filter for preparing phosphorus trifluoride according to claim 1, characterized in that: A vibration reduction mechanism (12) is fixedly connected to the outer side wall of the fixed cylinder (1) for reducing the mechanical vibration generated during the dust removal process.

9. A filter for preparing phosphorus trifluoride according to claim 8, characterized in that: The vibration damping mechanism (12) comprises an annular box body (1201) arranged on the fixed cylinder (1), and the annular box body (1201) is filled with corresponding vibration damping material (1202).

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