Phosphorus trifluoride impurity component analysis system and method
Through a gas chromatography system combining multi-column and switching valve, the problem of detection of multiple impurity components in phosphorus trifluoride is solved, efficient and accurate impurity component analysis is achieved, and product purity and quality are improved.
Patent Information
- Application Number
- CN202510638984.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-19
- Publication Date
- 2025-09-02
AI Technical Summary
It is difficult for the prior art to comprehensively detect various impurity components in phosphorus trifluoride, which affects their purity and chemical properties, resulting in unstable product quality and performance.
A gas chromatography system combining a multi-chromatographic column and a switching valve was used to detect impurity components such as CO2 and H2, O2, Ar, N2, CH4, CO, and other impurity components respectively through two samples, and accurately detect the concentration using a helium ionization detector.
A comprehensive analysis of various impurity components in phosphorus trifluoride is achieved, which improves the accuracy and efficiency of purity detection and reduces costs.
Smart Images
Figure CN120577418A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of gas chromatography determination, in particular to an impurity component analysis system of phosphorus trifluoride. Background Art
[0002] Phosphorus trifluoride is an important chemical raw material with the chemical formula PF3. It is a colorless and odorless gas at room temperature and pressure and is widely used in semiconductor manufacturing, polymer material synthesis, battery manufacturing and other fields. The presence of impurities in phosphorus trifluoride will affect its chemical properties and reactivity, and thus affect the quality and performance of the final product. At present, there are a small number of manufacturers in China that are able to produce PF3, but due to the stringent requirements for indicators such as metal impurity content, and the limitations of analysis and purification methods, some manufacturers only test one type of impurity gas. Therefore, in order to accurately determine whether PF3 can meet the purity requirements of electronic specialty gas products, there is an urgent need for a system and method that can analyze the multiple impurity components in PF3. Summary of the Invention
[0003] The present invention aims to provide a system and method for analyzing impurity components of phosphorus trifluoride, which can analyze multiple impurity components in phosphorus trifluoride and help improve the accuracy of phosphorus trifluoride purity detection.
[0004] To achieve the above object, the present invention provides the following solutions:
[0005] A phosphorus trifluoride impurity component analysis system, comprising:
[0006] A first sampling device is used to randomly take out a fixed amount of gas from the phosphorus trifluoride to be detected as a first sample;
[0007] A second sampling device is used to randomly take out a fixed amount of gas from the phosphorus trifluoride to be detected as a second sample;
[0008] A first detection component: used to detect the concentration of a first impurity component in the first sample;
[0009] A second detection component: used to detect the concentration of a second impurity component in the second sample;
[0010] Gas pipeline: used to transport gas.
[0011] Preferably, the first impurity component includes CO2, and the second impurity component includes H2, O2 and Ar, N2, CH4 and / or CO;
[0012] The first detection assembly includes a first chromatographic column, a second chromatographic column, a gas detector, a first carrier gas and a second carrier gas;
[0013] The first carrier gas carries the first sample through the first chromatographic column and the second chromatographic column, positively blowing out the light component gas of the first sample; the second carrier gas back-blows out the heavy component of the first sample in the first chromatographic column; the first carrier gas blows the CO2 in the first sample in the first chromatographic column into the second chromatographic column; the first carrier gas carries the CO2 in the second chromatographic column through the gas detector, completing the detection of the CO2 concentration in the first sample;
[0014] The second detection assembly includes a third chromatographic column, a fourth chromatographic column, a gas detector and a third carrier gas;
[0015] The third carrier gas is used to carry the second sample through the third chromatographic column, the fourth chromatographic column and the gas detector; the third chromatographic column is used to pre-separate the second sample into a combined peak of H2, O2 and Ar, N2, CH4, CO; the fourth chromatographic column is used to separate the combined peak of H2, O2 and Ar, N2, CH4, CO into single components of H2, O2 and Ar, N2, CH4, CO; the gas detector is used to detect the concentrations of H2, O2 and Ar, N2, CH4, and CO; the third carrier gas is used to backflush out the heavy components of the second sample in the third chromatographic column.
[0016] Preferably, the first chromatographic column, the second chromatographic column and the third chromatographic column are all polymer chromatographic columns; the fourth chromatographic column is a molecular sieve chromatographic column; and the gas detector is a helium ionization detector.
[0017] Preferably, the helium ionization detector is a pulsed discharge helium ionization detector.
[0018] Preferably, the first carrier gas, the second carrier gas and the third carrier gas are all helium.
[0019] Preferably, the impurity component analysis system of phosphorus trifluoride further includes a first stop valve, a second stop valve and a third stop valve; the heavy components of the first sample in the first chromatographic column are back-flushed out by the first stop valve; the heavy components of the second sample in the third chromatographic column are back-flushed out by the second stop valve; and the light component gas of the first sample is forward-flushed out by the third stop valve.
[0020] Preferably, the first stop valve is a first needle valve; the second stop valve is a second needle valve; and the third stop valve is a third needle valve.
[0021] Preferably, the impurity component analysis system of phosphorus trifluoride further includes a first switching valve, a second switching valve and a third switching valve, wherein the first switching valve and the second switching valve are both ten-way switching valves, and the third switching valve is a six-way switching valve;
[0022] Interface No. 2 of the first switching valve is connected to interface No. 1 of the second switching valve; interface No. 6 of the second switching valve is connected to interface No. 4 of the third switching valve through the fourth chromatographic column; interface No. 6 of the third switching valve is connected to interface No. 8 of the first switching valve through the second chromatographic column.
[0023] Preferably, the first sampling device is a first quantitative ring; the second sampling device is a second quantitative ring.
[0024] The present invention also provides a method for analyzing impurity components of phosphorus trifluoride, comprising:
[0025] Randomly taking out a certain amount of gas from the phosphorus trifluoride to be detected as a first sample;
[0026] Randomly taking out a certain amount of gas from the phosphorus trifluoride to be detected as a second sample;
[0027] During sampling, the No. 1 port and the No. 10 port of the first switching valve are connected, and the No. 1 port and the No. 10 port of the second switching valve are connected. The sample passes through the No. 1 port, the No. 10 port, the first sampling device, the No. 3 port, and the No. 2 port of the first switching valve in sequence, enters the No. 1 port, the No. 10 port, the second sampling device, the No. 3 port, and the No. 2 port of the second switching valve, and is then blown out in a positive direction.
[0028] The concentration of CO2 in the first sample is detected as follows:
[0029] Connect the No. 1 and No. 2 interfaces of the first switching valve, and connect the No. 4 and No. 5 interfaces of the third switching valve; the first carrier gas passes through the No. 9 and No. 10 interfaces of the first switching valve, the first sampling device, the No. 3 interface, the No. 4 interface, the first chromatographic column, the No. 7 interface, the No. 8 interface, the second chromatographic column, the No. 6 interface, the No. 1 interface, the No. 3 interface, and the No. 2 interface of the third switching valve, and then is blown out of the third needle valve to release the light component gas;
[0030] Reset the first switching valve to connect the No. 1 port and the No. 10 port of the first switching valve. The second carrier gas passes through the No. 6 port, the No. 7 port, the first chromatographic column, the No. 4 port, and the No. 5 port of the first switching valve in sequence, and then the heavy components in the first sample are backflushed out through the first needle valve.
[0031] Connect the No. 1 port and the No. 2 port of the first switching valve, and pass the first carrier gas through the No. 9 port, the No. 10 port, the first sampling device, the No. 3 port, the No. 4 port, the first chromatographic column, the No. 7 port, the No. 8 port, and the second chromatographic column in sequence, to blow the CO2 in the first sample in the first chromatographic column into the second chromatographic column;
[0032] Connect port 1 to port 10 of the first switching valve, connect port 5 to port 6 of the third switching valve, and allow the first carrier gas to pass through port 9 and port 8 of the first switching valve, the second chromatographic column, port 6, and port 5 of the third switching valve, and then enter the pulse discharge helium ionization detector to detect the CO2 concentration in the first sample;
[0033] The concentrations of H2, O2, Ar, N2, CH4, and CO in the second sample are detected as follows:
[0034] Connect the No. 1 interface and the No. 2 interface of the second switching valve, connect the No. 4 interface and the No. 5 interface of the third switching valve, and the third carrier gas passes through the No. 4 interface and the No. 3 interface of the second switching valve, the second sampling device, the No. 10 interface and the No. 9 interface, the third chromatographic column, the No. 5 interface, the No. 6 interface, the fourth chromatographic column, the No. 4 interface and the No. 5 interface of the third switching valve, and then enters the pulse discharge helium ionization detector to detect the concentrations of H2, O2, Ar, N2, CH4 and CO in the second sample;
[0035] Connect the No. 1 interface and the No. 10 interface of the second switching valve. After the third carrier gas passes through the No. 4 interface, the No. 5 interface, the third chromatographic column, the No. 9 interface, and the No. 8 interface of the second switching valve in sequence, the heavy components in the second sample are backflushed out through the second needle valve.
[0036] According to the records of the above scheme, the present invention discloses the following technical effects:
[0037] The present invention randomly takes out two quantitative gases from phosphorus trifluoride to be detected as a first sample and a second sample, and respectively detects the concentration of a first impurity component in the first sample and the concentration of a second impurity component in the second sample. Compared with the prior art which only detects one impurity gas in phosphorus trifluoride, the present invention can detect multiple impurity gases, thereby achieving a more comprehensive analysis of the impurity components in phosphorus trifluoride, and facilitating improved accuracy of phosphorus trifluoride purity detection. BRIEF DESCRIPTION OF THE DRAWINGS
[0038] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.
[0039] Figure 1 A schematic diagram of the sampling process of the impurity component analysis system of phosphorus trifluoride provided in the embodiments of this specification;
[0040] Figure 2A schematic diagram of the analysis process of the impurity component analysis system of phosphorus trifluoride provided in the embodiments of this specification;
[0041] Figure 3 A schematic diagram of the venting process of the impurity component analysis system of phosphorus trifluoride provided in the embodiments of this specification;
[0042] Among them, 1-first switching valve; 2-second switching valve; 3-third switching valve; 4-first quantitative loop; 5-second quantitative loop; 6-sample inlet; 7-sample outlet; 8-first chromatographic column; 9-second chromatographic column; 10-third chromatographic column; 11-fourth chromatographic column; 12-first carrier gas; 13-second carrier gas; 14-third carrier gas; 15-fourth carrier gas; 16-first needle valve; 17-second needle valve; 18-third needle valve; 19-pulsed discharge helium ionization detector. DETAILED DESCRIPTION
[0043] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0044] The embodiments of this specification disclose a system for analyzing impurity components of phosphorus trifluoride, comprising: a first sampling device for randomly extracting a fixed amount of gas from the phosphorus trifluoride to be tested as a first sample; a second sampling device for randomly extracting a fixed amount of gas from the phosphorus trifluoride to be tested as a second sample; a first detection component for detecting the concentration of a first impurity component in the first sample; a second detection component for detecting the concentration of a second impurity component in the second sample; and a gas pipeline for transporting gas. By detecting the concentration of the first impurity component in the first sample and the concentration of the second impurity component in the second sample, compared to the prior art that only detects one impurity gas in phosphorus trifluoride, the embodiments of this specification can detect multiple impurity gases, achieving a more comprehensive analysis of the impurity components in phosphorus trifluoride and facilitating improved accuracy in phosphorus trifluoride purity detection.
[0045] The first impurity component includes CO2, and the second impurity component includes H2, O2 and Ar, N2, CH4 and / or CO; the first detection component includes a first chromatographic column 8, a second chromatographic column 9, a gas detector, a first carrier gas 12 and a second carrier gas 13; the first carrier gas 12 carries the first sample through the first chromatographic column 8 and the second chromatographic column 9, and blows out the light component gas of the first sample, which includes: H2, O2 and Ar, N2, CH4, CO; the second carrier gas 13 back-blows out the heavy components of the first sample in the first chromatographic column 8, and the heavy components in the first sample include phosphorus trifluoride, etc.; the first carrier gas 12 blows the CO2 in the first sample in the first chromatographic column 8 into the second chromatographic column 9; the first carrier gas 12 carries the CO2 in the second chromatographic column 9 through the gas detector to complete the concentration detection of CO2 in the first sample; the second detection The detection component includes a third chromatographic column 10, a fourth chromatographic column 11, a gas detector and a third carrier gas 14; the third carrier gas 14 is used to carry the second sample through the third chromatographic column 10, the fourth chromatographic column 11 and the gas detector; the third chromatographic column 10 is used to pre-separate the second sample into a combined peak of H2, O2 and Ar, N2, CH4, and CO; the fourth chromatographic column 11 is used to separate the combined peak of H2, O2 and Ar, N2, CH4, and CO into single components of H2, O2 and Ar, N2, CH4, and CO; the gas detector is used to detect the concentration of the single components of H2, O2 and Ar, N2, CH4, and CO; the third carrier gas 14 is used to backflush out the heavy components of the second sample in the third chromatographic column 10 to keep the third chromatographic column 10 clean so that the next impurity component analysis can be performed. The heavy components in the second sample include phosphorus trifluoride, etc. By setting up multiple groups of samples for separate impurity component analysis, it is possible to perform component analysis on all types of impurity gases in phosphorus trifluoride, which is beneficial to improving the accuracy of phosphorus trifluoride purity detection.
[0046] The first chromatographic column 8, the second chromatographic column 9 and the third chromatographic column 10 are all polymer chromatographic columns; the fourth chromatographic column 11 is a molecular sieve chromatographic column; the gas detector is preferably a helium ionization detector; the helium ionization detector includes a pulse discharge helium ionization detector 19 and a traditional helium ionization detector, among which the pulse discharge helium ionization detector 19 has higher sensitivity.
[0047] In the embodiment of this specification, the helium ionization detector is a pulsed discharge helium ionization detector 19 ; the separation degree R between the components is ≥ 1.5, the qualitative and quantitative analysis is accurate, and the concentration detection limit can reach the ppb (parts per billion, 1 / 1 billion) level.
[0048] The first carrier gas 12 , the second carrier gas 13 and the third carrier gas 14 are all helium.
[0049] The impurity component analysis system of phosphorus trifluoride also includes a first stop valve, a second stop valve and a third stop valve; the heavy components of the first sample in the first chromatographic column 8 are discharged by backflushing through the first stop valve; the heavy components of the second sample in the third chromatographic column 10 are discharged by backflushing through the second stop valve; and the light component gas of the first sample is discharged by forward blowing through the third stop valve.
[0050] The first stop valve is preferably a first needle valve 16; the second stop valve is preferably a second needle valve 17; the third stop valve is preferably a third needle valve 18. The first stop valve, the second stop valve and the third stop valve may also be other types of stop valves according to actual needs.
[0051] like Figures 1 to 3 As shown, the impurity component analysis system of phosphorus trifluoride in the embodiment of this specification also includes a first switching valve 1, a second switching valve 2 and a third switching valve 3. The first switching valve 1 and the second switching valve 2 are both ten-way switching valves, and the third switching valve 3 is a six-way switching valve; the second interface of the first switching valve 1 is connected to the first interface of the second switching valve 2 through a gas pipeline; the sixth interface of the second switching valve 2 is connected to the fourth interface of the third switching valve 3 through the fourth chromatographic column 11; the sixth interface of the third switching valve 3 is connected to the eighth interface of the first switching valve 1 through the second chromatographic column 9. In this way, by simply changing the different connection states of the three switching valves, the gas component analysis of the first sample and the second sample can be realized. Compared with the existing technology, which repeatedly disassembles and combines various components to analyze the samples, the setting of the three switching valves is conducive to improving the efficiency of the impurity component analysis of phosphorus trifluoride. At the same time, the setting of the three switching valves allows the first sample and the second sample to share a pulsed discharge helium ionization detector 19 for impurity component analysis, which is conducive to reducing the cost of impurity component analysis.
[0052] The first sampling device is preferably a first quantitative ring 4; the second sampling device is preferably a second quantitative ring 5. The first sampling device and the second sampling device can also adopt other quantitative sampling devices commonly used in the art, such as syringes.
[0053] The present invention also provides a method for analyzing impurity components of phosphorus trifluoride, comprising:
[0054] Randomly taking out a certain amount of gas from the phosphorus trifluoride to be detected as a first sample;
[0055] Randomly taking out a certain amount of gas from the phosphorus trifluoride to be detected as a second sample;
[0056] like Figure 1As shown, during sampling, interface No. 1 and interface No. 10 of the first switching valve 1 are connected, and interface No. 1 and interface No. 10 of the second switching valve 2 are connected. The sample passes through the sample inlet 6, interface No. 1, interface No. 10, the first sampling device, interface No. 3, and interface No. 2 of the first switching valve 1 in sequence, and enters interface No. 1, interface No. 10, the second sampling device, interface No. 3, and interface No. 2 of the second switching valve 2, and is then blown out from the sample outlet 7 to complete the sampling.
[0057] The concentration of CO2 in the first sample is detected as follows:
[0058] like Figure 2 As shown, the No. 1 interface and the No. 2 interface of the first switching valve 1 are connected, and the No. 4 interface and the No. 5 interface of the third switching valve 3 are connected; the first carrier gas 12 passes through the No. 9 interface, the No. 10 interface, the first sampling device, the No. 3 interface, the No. 4 interface, the first chromatographic column 8, the No. 7 interface, the No. 8 interface, the second chromatographic column 9, the No. 6 interface, the No. 1 interface, the No. 3 interface, and the No. 2 interface of the third switching valve 3 in sequence, and then blows out the light component gas from the third needle valve 18. The light component gas includes: H2, O2 and Ar, N2, CH4, CO.
[0059] like Figure 1 As shown, the first switching valve 1 is reset so that the No. 1 interface and the No. 10 interface of the first switching valve 1 are connected. The second carrier gas 13 passes through the No. 6 interface, the No. 7 interface, the first chromatographic column 8, the No. 4 interface, and the No. 5 interface of the first switching valve 1 in sequence, and then the heavy components in the first sample are back-flushed out by the first needle valve 16. The heavy components in the first sample include phosphorus trifluoride and the like.
[0060] like Figure 2 As shown, the No. 1 interface and the No. 2 interface of the first switching valve 1 are connected, and the first carrier gas 12 passes through the No. 9 interface, the No. 10 interface, the first sampling device, the No. 3 interface, the No. 4 interface, the first chromatographic column 8, the No. 7 interface, the No. 8 interface and the second chromatographic column 9 of the first switching valve 1 in sequence, and the CO2 in the first sample in the first chromatographic column 8 is blown into the second chromatographic column 9; as shown Figure 1 As shown, the No. 1 interface and the No. 10 interface of the first switching valve 1 are connected, and the No. 5 interface and the No. 6 interface of the third switching valve 3 are connected. The first carrier gas 12 passes through the No. 9 interface and the No. 8 interface of the first switching valve 1, the second chromatographic column 9, the No. 6 interface and the No. 5 interface of the third switching valve 3 in sequence, and then enters the pulse discharge helium ionization detector 19 to detect the concentration of CO2 in the first sample.
[0061] The concentrations of H2, O2, Ar, N2, CH4, and CO in the second sample are detected as follows:
[0062] like Figure 2As shown, the No. 1 interface and the No. 2 interface of the second switching valve 2 are connected, and the No. 4 interface and the No. 5 interface of the third switching valve 3 are connected. The third carrier gas 14 passes through the No. 4 interface, the No. 3 interface, the second sampling device, the No. 10 interface, the No. 9 interface, the third chromatographic column 10, the No. 5 interface, the No. 6 interface, the fourth chromatographic column 11, the No. 4 interface and the No. 5 interface of the third switching valve 3 in sequence, and then enters the pulse discharge helium ionization detector 19 to detect the concentrations of H2, O2 and Ar, N2, CH4, and CO in the second sample.
[0063] like Figure 1 As shown, the first and tenth ports of the second switching valve 2 are connected. The third carrier gas 14 passes through ports 4 and 5 of the second switching valve 2, the third chromatographic column 10, port 9, and port 8, and then backflushes the heavy components in the second sample through the second needle valve 17. The heavy components in the second sample, including phosphorus trifluoride, are then released for the next impurity component analysis. Port 7 of the second switching valve 2 is connected to the fourth carrier gas 15 via a gas pipeline. The fourth carrier gas 15 passes through ports 7 and 6 of the second switching valve 2, the fourth chromatographic column 11, ports 4 and 5 of the third switching valve 3, and then enters the pulsed discharge helium ionization detector 19 to detect the concentrations of the individual components H2, O2, Ar, N2, CH4, and CO in the second sample. The function of the fourth carrier gas 15 is to blow the individual components H2, O2, Ar, N2, CH4, and CO in the second sample into the pulsed discharge helium ionization detector 19. The fourth carrier gas 15 is helium.
[0064] In the embodiments of this specification, positive blowing means that the discharged sample is used for subsequent further testing; reverse blowing means that the discharged sample is used for waste collection.
[0065] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. Reference can be made to the common and similar parts between the various embodiments. For the systems disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the description is relatively simple, and the relevant parts can be referred to the method description.
[0066] This document uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only intended to help understand the method and core concept of the present invention. At the same time, those skilled in the art will find that the specific implementation methods and application scopes may vary based on the concept of the present invention. In summary, the contents of this specification should not be construed as limiting the present invention.
Claims
1. A system for analyzing impurity components of phosphorus trifluoride, characterized in that: include: A first sampling device is used to randomly take out a fixed amount of gas from the phosphorus trifluoride to be detected as a first sample; A second sampling device is used to randomly take out a fixed amount of gas from the phosphorus trifluoride to be detected as a second sample; A first detection component: used to detect the concentration of a first impurity component in the first sample; A second detection component: used to detect the concentration of a second impurity component in the second sample; Gas pipeline: used to transport gas.
2. The impurity component analysis system of phosphorus trifluoride according to claim 1, characterized in that: The first impurity component includes CO2, and the second impurity component includes H2, O2, Ar, N2, CH4 and / or CO; The first detection assembly includes a first chromatographic column, a second chromatographic column, a gas detector, a first carrier gas and a second carrier gas; The first carrier gas carries the first sample through the first chromatographic column and the second chromatographic column, and blows out the light component gas of the first sample; the second carrier gas back-blows out the heavy component of the first sample in the first chromatographic column; the first carrier gas blows CO2 in the first sample in the first chromatographic column into the second chromatographic column; The first carrier gas carries the CO2 in the second chromatographic column through the gas detector to complete the concentration detection of CO2 in the first sample; The second detection component includes a third chromatographic column, a fourth chromatographic column, the gas detector and a third carrier gas; the third carrier gas is used to carry the second sample through the third chromatographic column, the fourth chromatographic column and the gas detector; the third chromatographic column is used to pre-separate the second sample into a combined peak of H2, O2 and Ar, N2, CH4, CO; the fourth chromatographic column is used to separate the combined peak of H2, O2 and Ar, N2, CH4, CO into single components of H2, O2 and Ar, N2, CH4, CO; the gas detector is used to detect the concentrations of H2, O2 and Ar, N2, CH4, and CO; the third carrier gas is used to backflush out the heavy components of the second sample in the third chromatographic column.
3. The impurity component analysis system of phosphorus trifluoride according to claim 2, characterized in that: The first chromatographic column, the second chromatographic column and the third chromatographic column are all polymer chromatographic columns; the fourth chromatographic column is a molecular sieve chromatographic column; and the gas detector is a helium ionization detector.
4. The impurity component analysis system of phosphorus trifluoride according to claim 3, characterized in that: The helium ionization detector is a pulsed discharge helium ionization detector.
5. The impurity component analysis system of phosphorus trifluoride according to claim 2, characterized in that: The first carrier gas, the second carrier gas, and the third carrier gas are all helium.
6. The impurity component analysis system of phosphorus trifluoride according to claim 2, characterized in that: The impurity component analysis system of phosphorus trifluoride also includes a first stop valve, a second stop valve and a third stop valve; the heavy components of the first sample in the first chromatographic column are discharged by backflushing through the first stop valve; the heavy components of the second sample in the third chromatographic column are discharged by backflushing through the second stop valve; and the light component gas of the first sample is discharged by forward blowing through the third stop valve.
7. The impurity component analysis system of phosphorus trifluoride according to claim 6, characterized in that: The first stop valve is a first needle valve; the second stop valve is a second needle valve; and the third stop valve is a third needle valve.
8. The impurity component analysis system of phosphorus trifluoride according to claim 2, characterized in that: The impurity component analysis system of phosphorus trifluoride also includes a first switching valve, a second switching valve and a third switching valve, the first switching valve and the second switching valve are both ten-way switching valves, and the third switching valve is a six-way switching valve; the No. 2 interface of the first switching valve is connected to the No. 1 interface of the second switching valve; the No. 6 interface of the second switching valve is connected to the No. 4 interface of the third switching valve through the fourth chromatographic column; the No. 6 interface of the third switching valve is connected to the No. 8 interface of the first switching valve through the second chromatographic column.
9. The impurity component analysis system of phosphorus trifluoride according to claim 1, characterized in that: The first sampling device is a first quantitative ring; the second sampling device is a second quantitative ring.
10. A method for analyzing impurity components of phosphorus trifluoride, characterized in that: include: Randomly taking out a certain amount of gas from the phosphorus trifluoride to be detected as a first sample; Randomly taking out a certain amount of gas from the phosphorus trifluoride to be detected as a second sample; During sampling, the No. 1 port and the No. 10 port of the first switching valve are connected, and the No. 1 port and the No. 10 port of the second switching valve are connected. The sample passes through the No. 1 port, the No. 10 port, the first sampling device, the No. 3 port, and the No. 2 port of the first switching valve in sequence, enters the No. 1 port, the No. 10 port, the second sampling device, the No. 3 port, and the No. 2 port of the second switching valve, and is then blown out in a positive direction. The concentration of CO2 in the first sample is detected as follows: Connect the No. 1 and No. 2 interfaces of the first switching valve, and connect the No. 4 and No. 5 interfaces of the third switching valve; the first carrier gas passes through the No. 9 and No. 10 interfaces of the first switching valve, the first sampling device, the No. 3 interface, the No. 4 interface, the first chromatographic column, the No. 7 interface, the No. 8 interface, the second chromatographic column, the No. 6 interface, the No. 1 interface, the No. 3 interface, and the No. 2 interface of the third switching valve, and then is blown out of the third needle valve to release the light component gas; Reset the first switching valve to connect the No. 1 port and the No. 10 port of the first switching valve. The second carrier gas passes through the No. 6 port, the No. 7 port, the first chromatographic column, the No. 4 port, and the No. 5 port of the first switching valve in sequence, and then the heavy components in the first sample are backflushed out through the first needle valve. Connect the No. 1 port and the No. 2 port of the first switching valve, and pass the first carrier gas through the No. 9 port, the No. 10 port, the first sampling device, the No. 3 port, the No. 4 port, the first chromatographic column, the No. 7 port, the No. 8 port, and the second chromatographic column in sequence, to blow the CO2 in the first sample in the first chromatographic column into the second chromatographic column; Connect port 1 to port 10 of the first switching valve, connect port 5 to port 6 of the third switching valve, and allow the first carrier gas to pass through port 9 and port 8 of the first switching valve, the second chromatographic column, port 6, and port 5 of the third switching valve, and then enter the pulse discharge helium ionization detector to detect the CO2 concentration in the first sample; The concentrations of H2, O2, Ar, N2, CH4, and CO in the second sample are detected as follows: Connect the No. 1 interface and the No. 2 interface of the second switching valve, connect the No. 4 interface and the No. 5 interface of the third switching valve, and the third carrier gas passes through the No. 4 interface and the No. 3 interface of the second switching valve, the second sampling device, the No. 10 interface and the No. 9 interface, the third chromatographic column, the No. 5 interface, the No. 6 interface, the fourth chromatographic column, the No. 4 interface and the No. 5 interface of the third switching valve, and then enters the pulse discharge helium ionization detector to detect the concentrations of H2, O2, Ar, N2, CH4 and CO in the second sample; Connect the No. 1 interface and the No. 10 interface of the second switching valve. After the third carrier gas passes through the No. 4 interface, the No. 5 interface, the third chromatographic column, the No. 9 interface, and the No. 8 interface of the second switching valve in sequence, the heavy components in the second sample are backflushed out through the second needle valve.