Phosphorus trifluoride filling equipment

Abstract

The utility model belongs to the technical field of filling equipment, and particularly relates to phosphorus trifluoride filling equipment which comprises a refrigerating chamber and a cart, the cart is arranged on the right side of the refrigerating chamber, and a plurality of groups of filling steel cylinders are placed on the cart. The position deviation of the filled steel cylinder is monitored in real time in the low-temperature refrigerating chamber environment, it is ensured that a liquid inlet and a liquid filling opening of the steel cylinder are accurately aligned, the steel cylinder is accurately grabbed through cooperation of the first sliding module, the second sliding module and the lifting module, the path is calibrated in real time in combination with an image recognition sensor, the physical force risk of manual carrying and the hidden danger that the steel cylinder falls off are eliminated, and the working efficiency is improved. The butt joint mechanism achieves self-adaptive sealing through an electric push rod, spring buffering and gear transmission, butt joint can be completed without manual intervention, and deviation or leakage caused by manual operation is completely eradicated.

Description

Technical Field

[0001] This utility model relates to the field of filling equipment technology, specifically to a phosphorus trifluoride filling equipment. Background Technology

[0002] Phosphorus trifluoride can be used as a fluorinating agent. It can perform ion transfer and is applied in the electronics industry, battery manufacturing, polymer materials, and catalysts. In semiconductor manufacturing, phosphorus trifluoride can be converted into plasma gas under microwave irradiation and doped into semiconductors to significantly improve semiconductor performance. In the field of polymer materials, phosphorus trifluoride can be used as a reactant to synthesize fluorinated organic dithiophosphates, terephthalates, and other polymer materials with excellent anti-corrosion properties. Phosphorus trifluoride is a gas at room temperature and needs to be condensed into a liquid at low temperature before filling. In the chemical industry, the filling process of phosphorus trifluoride has extremely high requirements for safety, accuracy, and automation.

[0003] Traditional filling equipment mainly relies on manual or simple mechanical positioning, which makes it difficult to quickly and accurately align the filling cylinder inlet in complex environments, resulting in low filling efficiency and even leakage risks due to misalignment. In addition, the handling, positioning and docking of cylinders during the filling process require manual assistance, which is labor-intensive and has the possibility of human error, affecting production safety and continuity. To address this, we propose a phosphorus trifluoride filling equipment. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a phosphorus trifluoride filling device. Through a four-corner multi-point positioning system using an infrared transmitter and receiver, it monitors the positional deviation of the filling cylinder in real time within a low-temperature refrigerated environment, ensuring precise alignment between the cylinder's inlet and filling port. The device precisely grips the cylinder through the coordinated action of sliding module one, sliding module two, and a lifting module. Combined with image recognition sensors for real-time path calibration, the docking mechanism achieves adaptive sealing through an electric push rod, spring buffer, and gear transmission, thus solving the problems mentioned earlier.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a phosphorus trifluoride filling device, comprising a refrigerated chamber and a trolley. The trolley is located on the right side of the refrigerated chamber, and several sets of filling cylinders are placed on the trolley. A material-retrieving component is installed on the rear side of the trolley. A filling chamber is located on the right side of the refrigerated chamber. A base plate is fixedly installed on the bottom side of the filling chamber. A sliding box is located on the top of the base plate. A placement groove is located on the top of the sliding box. A sliding component for sliding the sliding box left and right is installed on the base plate. A filling box is slidably installed on the top of the filling chamber. A limit groove is located on the bottom of the filling box. A lifting cylinder is fixedly installed on the top of the refrigerated chamber. The output shaft end of the lifting cylinder is fixedly connected to the top side of the filling box. A positioning component is provided between the sliding box and the filling box. A filling component is installed inside the filling box.

[0006] Preferably, the material handling component includes a mounting frame, which is located at the rear of the trolley. A sliding module one is mounted on the top of the mounting frame, a sliding module two is slidably mounted on the sliding module one, a lifting module is slidably mounted on the sliding module two, and a gripper cylinder is fixedly mounted at the bottom of the lifting module. Grippers are slidably mounted on both the front and rear sides of the bottom of the gripper cylinder.

[0007] Preferably, the sliding assembly includes a screw, which is rotatably mounted between the top left and right sides of the base plate. A drive motor is fixedly mounted on the right side of the base plate, and the output shaft of the drive motor is fixedly connected to the right end of the screw. The bottom of the sliding box is threaded onto the screw. Slide rails are fixedly connected to the front and rear sides of the top of the base plate. The front and rear parts of the bottom side of the sliding box are slidably connected to the two sets of slide rails respectively.

[0008] Preferably, the positioning component includes an infrared transmitter and an infrared receiver, and there are four sets of infrared transmitters and infrared receivers. The four sets of infrared transmitters are installed at the four bottom corners of the filling box, and the four sets of infrared receivers are installed at the four top corners of the sliding box.

[0009] Preferably, the filling assembly includes a mounting plate, which is fixedly connected between the front and rear sides of the filling box. A second drive motor is fixedly mounted on the top of the mounting plate, and a rotating plate is fixedly connected to the output shaft end of the second drive motor. Two sets of fixing rods are fixedly connected to the bottom of the rotating plate. Electric push rods are installed on both the front and rear sides of the bottom of the mounting plate. A docking mechanism is installed on the right side of the inside of the filling box.

[0010] Preferably, the docking mechanism includes a push plate, the front and rear parts of which are slidably sleeved on the output shafts of two sets of electric push rods. The output shaft ends of the two sets of electric push rods are fixedly connected to a first limiting plate, and the output shafts of the two sets of electric push rods are fixedly sleeved with a second limiting plate. The output shafts of the two sets of electric push rods are also fixedly sleeved with springs. The left side of the first limiting plate abuts against the right side of the push plate, and the two sides of the spring abut against the right side of the second limiting plate and the left side of the push plate, respectively. A screwing mechanism is installed in the middle of the push plate.

[0011] Preferably, the tightening mechanism includes a rotary joint, which is installed on the right side of the push plate. The output end of the rotary joint is fixedly connected to a threaded sleeve, and a gear one is fixedly sleeved on the threaded sleeve. The input end of the rotary joint is fixedly connected to a liquid inlet pipe. A drive motor three is also fixedly installed on the right side of the push plate. A gear two is fixedly connected to the output shaft end of the drive motor three, and the gear two meshes with the gear one.

[0012] Preferably, the top of the filling cylinder is equipped with a handle, and the top right side of the filling cylinder has a liquid inlet, the outer surface of which has a threaded groove.

[0013] Preferably, an image recognition sensor is installed on the right side of the gripper cylinder.

[0014] Preferably, a rubber pad is fixedly connected to the inner wall of the placement groove.

[0015] This invention provides a phosphorus trifluoride filling device. Compared with the prior art, it has the following advantages:

[0016] 1. This phosphorus trifluoride filling equipment utilizes a four-corner multi-point positioning system with an infrared transmitter and receiver to monitor the positional deviation of the filling cylinder in real time within a low-temperature refrigerated environment, ensuring precise alignment between the cylinder's inlet and filling port. The infrared signal exhibits strong anti-interference capabilities in low-temperature environments, preventing positioning failures caused by condensation or insufficient light, significantly reducing the risk of leakage due to interface misalignment, and ensuring the safety of hazardous gas filling.

[0017] 2. This phosphorus trifluoride filling equipment uses a combination of sliding module one, sliding module two, and lifting module to precisely grab the cylinder. Combined with image recognition sensors to calibrate the path in real time, it eliminates the physical risks of manual handling and the hidden danger of cylinder falling. The docking mechanism achieves adaptive sealing through electric push rod, spring buffer, and gear transmission, and docking can be completed without manual intervention, preventing deviation or leakage caused by manual operation. Attached Figure Description

[0018] Figure 1 This is a front view structural diagram of the main body of this utility model;

[0019] Figure 2 This is a schematic diagram of the sliding component structure of this utility model;

[0020] Figure 3 This is a schematic diagram of the connection structure between the sliding box and the filling box of this utility model;

[0021] Figure 4 This is a schematic diagram of the connection structure between the filling steel cylinder and the filling box of this utility model;

[0022] Figure 5 This is a schematic diagram of the filling component structure of this utility model;

[0023] Figure 6 This utility model Figure 1 Enlarged schematic diagram of the structure at point A in the middle;

[0024] Figure 7 This utility model Figure 3 Enlarged schematic diagram of the structure at point B.

[0025] In the diagram: 1. Refrigerated compartment; 2. Lifting cylinder; 3. Mounting bracket; 4. Sliding module one; 5. Sliding module two; 6. Lifting module; 7. Trolley; 8. Filling cylinder; 9. Sliding box; 10. Filling compartment; 11. Filling box; 12. Base plate; 13. Slide rail; 14. Screw; 15. Liquid inlet; 16. Drive motor one; 17. Infrared emitter; 18. Limiting groove; 19. Mounting plate; 20. Drive motor two 21. Electric push rod; 22. Push plate; 23. Threaded sleeve; 24. Rotary joint; 25. Liquid inlet pipe; 26. Gear 1; 27. Gear 2; 28. Drive motor 3; 29. ​​Grip cylinder; 30. Grip; 31. Handle; 32. Image recognition sensor; 33. Rotating plate; 34. Fixed rod; 35. Infrared receiver; 36. Limiting plate 1; 37. Placement slot; 38. Limiting plate 2; 39. Spring. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Please see Figure 1-7This utility model provides a technical solution: a phosphorus trifluoride filling device, including a cold storage chamber 1 and a trolley 7. The trolley 7 is located on the right side of the cold storage chamber 1, and several sets of filling cylinders 8 are placed on the trolley 7. A material picking component is installed on the rear side of the trolley 7. A filling chamber 10 is opened on the right side of the cold storage chamber 1. A base plate 12 is fixedly installed on the bottom side of the filling chamber 10. A sliding box 9 is set on the top of the base plate 12. A placement groove 37 is opened on the top of the sliding box 9. A sliding component for sliding the sliding box 9 left and right is installed on the base plate 12. A filling box 11 is slidably installed on the top of the filling chamber 10. A limit groove 18 is opened on the bottom of the filling box 11. A lifting cylinder 2 is fixedly installed on the top of the cold storage chamber 1. The output shaft end of the lifting cylinder 2 is fixedly connected to the top side of the filling box 11. A positioning component is set between the sliding box 9 and the filling box 11. A filling component is installed inside the filling box 11.

[0028] When using this phosphorus trifluoride filling equipment, the filling cylinder 8 is placed on the trolley 7. The material picking component grabs the cylinder from the rear of the trolley 7 and transfers it to the placement slot 37 of the sliding box 9. The sliding component drives the sliding box 9 to slide left and right along the bottom plate 12, adjusting the cylinder to be directly below the filling box 11. The positioning component aligns the four corner signals and corrects the relative position of the sliding box 9 and the filling box 11 in real time. The lifting cylinder 2 drives the filling box 11 to move downward, so that the bottom limiting slot 18 is precisely aligned with the placement slot 37 on the top of the sliding box 9. The filling component completes the low-temperature liquid filling of phosphorus trifluoride, and the whole process is automated.

[0029] The material handling assembly includes a mounting frame 3, which is located at the rear of the trolley 7. A sliding module 4 is mounted on the top of the mounting frame 3. A sliding module 5 is slidably mounted on the sliding module 4. A lifting module 6 is slidably mounted on the sliding module 5. A gripper cylinder 29 is fixedly mounted at the bottom of the lifting module 6. Grippers 30 are slidably mounted on both the front and rear sides of the bottom of the gripper cylinder 29.

[0030] The material handling assembly is fixed to the rear of the trolley 7 by the mounting bracket 3. The sliding module 1 4 on its top drives the sliding module 2 5 to move left and right. The sliding module 2 5 drives the lifting module 6 to move back and forth. The lifting module 6 on the sliding module 2 5 further drives the gripper cylinder 29 to lift vertically. When the gripper 30 at the bottom of the gripper cylinder 29 moves directly above the filling cylinder 8, the gripper cylinder 29 drives the gripper 30 to close and grab the cylinder. Then, through the coordinated action of the sliding module 1 4, the sliding module 2 5 and the lifting module 6, the cylinder is transferred to the placement slot 37 of the sliding box 9.

[0031] The sliding assembly includes a screw 14, which is rotatably mounted between the top left and right sides of the base plate 12. A drive motor 16 is fixedly mounted on the right side of the base plate 12, and the output shaft of the drive motor 16 is fixedly connected to the right end of the screw 14. The bottom of the sliding box 9 is threaded onto the screw 14. Slide rails 13 are fixedly connected to the front and rear sides of the top of the base plate 12. The front and rear parts of the bottom side of the sliding box 9 are slidably connected to the two sets of slide rails 13 respectively.

[0032] The sliding assembly is driven by a drive motor 16 to rotate the screw 14. The screw 14 drives the sliding box 9 to move left and right along the base plate 12 through a threaded connection. The slide rails 13 on the front and rear sides of the base plate 12 provide guidance for the sliding box 9 to ensure that it slides smoothly in a straight line. When the drive motor 16 rotates forward or in reverse, the rotation direction of the screw 14 changes, and the sliding box 9 moves to the left or right accordingly, thereby adjusting the precise position of the cylinder directly below the filling box 11.

[0033] The positioning component includes an infrared transmitter 17 and an infrared receiver 35. There are four sets of infrared transmitters 17 and infrared receivers 35. The four sets of infrared transmitters 17 are installed at the four bottom corners of the filling box 11, and the four sets of infrared receivers 35 are installed at the four top corners of the sliding box 9.

[0034] The positioning component is installed at the four corners of the bottom of the filling box 11 by four sets of infrared transmitters 17, and at the four corners of the top of the sliding box 9 by four sets of infrared receivers 35. During operation, the infrared transmitters 17 emit infrared signals downwards, and the infrared receivers 35 receive the signals and feed back the position deviation data. The system calculates the relative position deviation between the sliding box 9 and the filling box 11 in real time based on the intensity and angle difference of the signals at the four corners, and then makes adjustments accordingly.

[0035] The filling assembly includes a mounting plate 19, which is fixedly connected between the front and rear sides of the filling box 11. A second drive motor 20 is fixedly mounted on the top of the mounting plate 19. A rotating plate 33 is fixedly connected to the output shaft end of the second drive motor 20. Two sets of fixing rods 34 are fixedly connected to the bottom of the rotating plate 33. Electric push rods 21 are installed on both the front and rear sides of the bottom of the mounting plate 19. A docking mechanism is installed on the right side of the inside of the filling box 11.

[0036] The docking mechanism includes a push plate 22, the front and rear parts of which are slidably sleeved on the output shafts of two sets of electric push rods 21. The output shaft ends of the two sets of electric push rods 21 are fixedly connected to a first limit plate 36. The output shafts of the two sets of electric push rods 21 are fixedly sleeved with a second limit plate 38. The output shafts of the two sets of electric push rods 21 are also fixedly sleeved with springs 39. The left side of the first limit plate 36 abuts against the right side of the push plate 22. The two sides of the springs 39 abut against the right side of the second limit plate 38 and the left side of the push plate 22, respectively. A screwing mechanism is installed in the middle of the push plate 22.

[0037] The tightening mechanism includes a rotary joint 24, which is installed on the right side of the push plate 22. The output end of the rotary joint 24 is fixedly connected to a threaded sleeve 23, and a gear 26 is fixedly sleeved on the threaded sleeve 23. The input end of the rotary joint 24 is fixedly connected to an inlet pipe 25. A drive motor 28 is also fixedly installed on the right side of the push plate 22. A gear 27 is fixedly connected to the output shaft end of the drive motor 28, and the gear 27 meshes with the gear 26.

[0038] A handle 31 is installed on the top of the filling cylinder 8, and an inlet 15 is opened on the right side of the top of the filling cylinder 8. A threaded groove is opened on the outer surface of the inlet 15.

[0039] When the filling assembly is in use, the mounting plate 19 is fixed inside the filling box 11. The second drive motor 20 drives the rotating plate 33 to rotate, which in turn drives the fixed rod 34 fixed at the bottom to rotate. The fixed rod 34 pushes the handle 31 on the top of the filling cylinder 8 to rotate and open the cylinder valve. The electric push rod 21 drives the push plate 22 to slide along the output shaft. The push plate 22 is pushed towards the cylinder inlet 15 through the cooperation of the first limit plate 36 and the spring 39. The threaded sleeve 23 on it is aligned with the threaded groove of the inlet 15. The third drive motor 28 drives the threaded sleeve 23 to rotate through the meshing of the second gear 27 and the first gear 26, so that it is tightly screwed into the threaded groove of the inlet 15 to form a seal. The inlet pipe 25 is connected to the threaded sleeve 23 through the rotary joint 24 to complete the cryogenic liquid filling of phosphorus trifluoride.

[0040] An image recognition sensor 32 is installed on the right side of the gripper cylinder 29. The image recognition sensor 32 is installed on the right side of the gripper cylinder 29 and is used to capture the position and posture of the filling cylinder 8 in real time.

[0041] A rubber pad is fixedly connected to the inner wall of the placement groove 37. The position of the filling steel cylinder 8 in the placement groove 37 is fixed by the friction of the flexible material, so as to prevent the steel cylinder from slipping due to vibration or tilting during the movement of the sliding box 9.

[0042] Working principle: When using this phosphorus trifluoride filling equipment, the filling cylinder 8 is placed on the trolley 7, and the mounting frame 3 is set at the rear of the trolley 7. The sliding module 1 4 on the top of the trolley 7 drives the sliding module 2 5 to move left and right. The sliding module 2 5 drives the lifting module 6 to move back and forth. The lifting module 6 on the sliding module 2 5 further drives the gripper cylinder 29 to move vertically. When the gripper 30 at the bottom of the gripper cylinder 29 moves to directly above the filling cylinder 8, the gripper cylinder 29 drives the gripper 30 to close and grab the cylinder. Then, the cylinder is moved through the sliding module 1 4 and the sliding module 2 5. The coordinated action of module 2 5 and lifting module 6 transfers the cylinder into the placement slot 37 of the sliding box 9, and drives motor 16 to drive screw 14 to rotate. Screw 14 drives the sliding box 9 to move left and right along the base plate 12 through threaded connection. The slide rails 13 on the front and rear sides of the base plate 12 provide guidance for the sliding box 9 to ensure that it slides smoothly in a straight line. When the drive motor 16 rotates forward or reverse, the rotation direction of screw 14 changes, and the sliding box 9 moves to the left or right accordingly, thereby adjusting the precise position of the cylinder directly below the filling box 11.

[0043] During the adjustment process, four sets of infrared transmitters 17 are installed at the four corners of the bottom of the filling box 11, and four sets of infrared receivers 35 are installed at the four corners of the top of the sliding box 9. During operation, the infrared transmitters 17 emit infrared signals downwards, and the infrared receivers 35 receive the signals and feed back position deviation data. The system calculates the relative position deviation between the sliding box 9 and the filling box 11 in real time based on the intensity and angle difference of the signals at the four corners, and then makes adjustments. The lifting cylinder 2 drives the filling box 11 to move downwards, so that the limiting groove 18 at its bottom precisely aligns with the placement groove 37 at the top of the sliding box 9. Since the mounting plate 19 is fixed inside the filling box 11, the drive motor 20 drives the rotating plate. Rotation of motor 33 causes the fixed rod 34 at the bottom to rotate, which in turn pushes the handle 31 at the top of the filling cylinder 8 to rotate and open the cylinder valve. The electric push rod 21 drives the push plate 22 to slide along the output shaft. The push plate 22 is pushed towards the cylinder inlet 15 through the cooperation of the limit plate 36 and the spring 39. The threaded sleeve 23 on the push plate 22 is aligned with the threaded groove of the inlet 15. The drive motor 28 drives the threaded sleeve 23 to rotate through the meshing of gear 27 and gear 26, so that it is tightly screwed into the threaded groove of the inlet 15 to form a seal. The inlet pipe 25 is connected to the threaded sleeve 23 through the rotary joint 24 to complete the low-temperature liquid filling of phosphorus trifluoride. The whole process is automated.

[0044] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0045] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A phosphorus trifluoride filling device, comprising a cold storage compartment (1) and a trolley (7), characterized in that: The trolley (7) is located on the right side of the cold storage compartment (1). Several sets of filling cylinders (8) are placed on the trolley (7). A material handling assembly is installed on the rear side of the trolley (7). A filling compartment (10) is opened on the right side of the cold storage compartment (1). A base plate (12) is fixedly installed on the bottom side of the filling compartment (10). A sliding box (9) is provided on the top of the base plate (12). A placement slot (37) is opened on the top of the sliding box (9). A device for... The sliding box (9) has a sliding component that slides left and right. A filling box (11) is slidably installed on the top of the filling chamber (10). A limiting groove (18) is opened at the bottom of the filling box (11). A lifting cylinder (2) is fixedly installed on the top of the cold storage chamber (1). The output shaft end of the lifting cylinder (2) is fixedly connected to the top side of the filling box (11). A positioning component is provided between the sliding box (9) and the filling box (11). A filling component is installed inside the filling box (11).

2. The phosphorus trifluoride filling equipment according to claim 1, characterized in that: The material handling assembly includes a mounting frame (3), which is located on the rear side of the trolley (7). A sliding module one (4) is mounted on the top of the mounting frame (3). A sliding module two (5) is slidably mounted on the sliding module one (4). A lifting module (6) is slidably mounted on the sliding module two (5). A gripper cylinder (29) is fixedly mounted on the bottom of the lifting module (6). Grippers (30) are slidably mounted on both the front and rear sides of the bottom of the gripper cylinder (29).

3. The phosphorus trifluoride filling equipment according to claim 1, characterized in that: The sliding assembly includes a screw (14), which is rotatably mounted between the top left and right sides of the base plate (12). A drive motor (16) is fixedly mounted on the right side of the base plate (12). The output shaft of the drive motor (16) is fixedly connected to the right end of the screw (14). The bottom of the sliding box (9) is threaded onto the screw (14). The top front and rear sides of the base plate (12) are fixedly connected to slide rails (13). The bottom front and rear parts of the sliding box (9) are slidably connected to the two sets of slide rails (13).

4. The phosphorus trifluoride filling equipment according to claim 1, characterized in that: The positioning component includes an infrared transmitter (17) and an infrared receiver (35), each of which is provided in four sets. The four sets of infrared transmitters (17) are installed at the bottom four corners of the filling box (11), and the four sets of infrared receivers (35) are installed at the top four corners of the sliding box (9).

5. The phosphorus trifluoride filling equipment according to claim 1, characterized in that: The filling assembly includes a mounting plate (19), which is fixedly connected between the front and rear sides of the filling box (11). A second drive motor (20) is fixedly installed on the top of the mounting plate (19). A rotating plate (33) is fixedly connected to the output shaft end of the second drive motor (20). Two sets of fixing rods (34) are fixedly connected to the bottom of the rotating plate (33). Electric push rods (21) are installed on both the front and rear sides of the bottom of the mounting plate (19). A docking mechanism is installed on the right side of the inside of the filling box (11).

6. The phosphorus trifluoride filling equipment according to claim 5, characterized in that: The docking mechanism includes a push plate (22), the front and rear parts of which are slidably sleeved on the output shafts of two sets of electric push rods (21). The output shaft ends of the two sets of electric push rods (21) are fixedly connected to a first limiting plate (36). The output shafts of the two sets of electric push rods (21) are fixedly sleeved with a second limiting plate (38). The output shafts of the two sets of electric push rods (21) are also fixedly sleeved with springs (39). The left side of the first limiting plate (36) abuts against the right side of the push plate (22). The two sides of the springs (39) abut against the right side of the second limiting plate (38) and the left side of the push plate (22), respectively. A screwing mechanism is installed in the middle of the push plate (22).

7. A phosphorus trifluoride filling device according to claim 6, characterized in that: The screwing mechanism includes a rotary joint (24), which is installed on the right side of the push plate (22). The output end of the rotary joint (24) is fixedly connected to a threaded sleeve (23), and a gear (26) is fixedly sleeved on the threaded sleeve (23). The input end of the rotary joint (24) is fixedly connected to an inlet pipe (25). A drive motor (28) is also fixedly installed on the right side of the push plate (22). A gear (27) is fixedly connected to the output shaft end of the drive motor (28), and the gear (27) meshes with the gear (26).

8. A phosphorus trifluoride filling device according to claim 1, characterized in that: The top of the filling cylinder (8) is equipped with a handle (31), and the right side of the top of the filling cylinder (8) is provided with a liquid inlet (15), and the outer surface of the liquid inlet (15) is provided with a threaded groove.

9. A phosphorus trifluoride filling device according to claim 2, characterized in that: An image recognition sensor (32) is installed on the right side of the gripper cylinder (29).

10. A phosphorus trifluoride filling device according to claim 1, characterized in that: A rubber pad is fixedly connected to the inner wall of the placement groove (37).

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