Vacuum tail gas cold trap

Abstract

The utility model provides a vacuum tail gas cold trap, and belongs to the technical field of tail gas treatment. The problem that an existing tail gas treatment cooling effect is poor is solved. The vacuum tail gas cold trap comprises a shell with a liquid outlet in the bottom, a heat exchange pipe arranged in the shell, a barrel body fixedly connected in the shell and an air inlet pipe, an air outlet is formed in the top of the shell, an air inlet is formed in the bottom of the shell, the top of the barrel body is blocked, and an opening is formed in the bottom of the barrel body. A first gas passing channel for tail gas to pass through is arranged between the outer peripheral wall of the barrel body and the inner peripheral wall of the shell, the bottom of the gas inlet pipe is communicated with the gas inlet of the shell, the top of the gas inlet pipe extends into the top in the barrel body from the bottom of the barrel body, and a second gas passing channel for tail gas to pass through is arranged between the outer peripheral wall of the gas inlet pipe and the inner peripheral wall of the barrel body; part of the heat exchange pipe is located in the first air passing channel, and the other part is located in the second air passing channel. The vacuum tail gas cold trap has the advantage of improving the cooling effect of tail gas.

Description

Technical Field

[0001] The utility model belongs to the technical field of tail gas treatment and relates to a vacuum tail gas cold trap. Background Art

[0002] Exhaust gas treatment refers to the purification of exhaust gases emitted by automobiles, industrial equipment, etc., in order to reduce the emission of harmful substances into the atmosphere and reduce the adverse effects of exhaust gases on the environment and human health.

[0003] Existing exhaust gas treatment structures, for example, Chinese patent literature discloses a special cooling barrel for vacuum pipeline processes used in semiconductor exhaust gas treatment [patent number: 202110478973.6; application publication number: CN113101687A], which includes a cold trap cover and a cold trap body. The cold trap cover is arranged on the top of the cold trap body, and a cold trap clamp is provided on the outside of the cold trap cover and the cold trap body. The top outer end of the cold trap body is inlaid with a cold trap body sealing ring, and the inner upper end of the cold trap body is provided with an inner sealing ring. The top of the cold trap cover is distributed with a cooling water inlet and a cooling water outlet, and the bottoms of the cooling water inlet and the cooling water outlet are connected to cooling pipes. The top side end of the cold trap cover is provided with a gas inlet, and the side end of the cold trap body is fixed with a gas outlet.

[0004] In this type of cooling barrel, cooling water enters through the cooling water inlet, flows along the cooling pipe, and is discharged from the cooling water outlet. Exhaust gas enters through the gas inlet and is discharged through the gas outlet, allowing the exhaust gas to exchange heat with the cooling water, thereby reducing the exhaust gas temperature. However, this type of cooling barrel first cools the baffle through the cooling pipe, and the exhaust gas and the baffle contact to achieve heat exchange. This is indirect contact, with a small contact area, poor heat exchange effect, and low cooling efficiency. At the same time, the exhaust gas flows directly from the top of the cooling barrel to the bottom of the cooling barrel, shortening the cooling distance and time, thereby reducing the cooling effect. Summary of the Invention

[0005] The purpose of the utility model is to solve the above problems existing in the prior art and to propose a vacuum tail gas cold trap, which solves the technical problem of how to improve the cooling effect of the tail gas.

[0006] The purpose of the utility model can be achieved through the following technical solutions: a vacuum exhaust gas cold trap, comprising a shell with a drain port at the bottom and a heat exchange tube arranged in the shell, characterized in that it also includes a barrel body and an air inlet pipe fixedly connected to the shell, the shell having an air outlet at the top and an air inlet at the bottom, the top of the barrel body is sealed and the bottom has an opening, a first air passage for exhaust gas to pass through is provided between the outer peripheral wall of the barrel body and the inner peripheral wall of the shell, the bottom of the inlet pipe is connected to the air inlet of the shell, and the top extends from the bottom of the barrel body to the top of the barrel body, a second air passage for exhaust gas to pass through is provided between the outer peripheral wall of the inlet pipe and the inner peripheral wall of the barrel body, part of the heat exchange tube is located in the first air passage, and the rest is located in the second air passage.

[0007] During operation, cooling water flows in the heat exchange tube, and the exhaust gas enters the intake pipe through the air inlet of the shell, then flows along the intake pipe to the top of the barrel body, then flows along the second air passage and enters the shell through the opening at the bottom of the barrel body, and then flows through the first air passage to the air outlet at the top of the shell and flows out. The air outlet at the top of the shell can be connected to a vacuum pump so that the exhaust gas can flow more smoothly in the set direction. The exhaust gas flows upward along the intake pipe first, then flows downward along the second air passage, and finally flows upward along the first air passage. That is, the exhaust gas has a long flow path in the shell, which increases the heat exchange time. At the same time, part of the heat exchange tube is located in the first air passage and the rest is located in the second air passage, so that the exhaust gas is fully in contact with the heat exchange tube, which increases the contact area, increases the heat exchange time, and improves the cooling effect of the exhaust gas.

[0008] In the aforementioned vacuum exhaust cold trap, a conical cap is fixed to the top of the intake pipe via several support rods. An air hole for exhaust gas is located between two adjacent support rods. The bottom surface of the conical cap, facing the intake pipe, features a conical guide surface that is lower in the middle and higher around the edges. The conical cap prevents exhaust gas from directly impacting the barrel, improving the cold trap's stability. The guide surface also ensures exhaust gas flows in a predetermined direction, enabling better heat exchange and enhancing exhaust cooling.

[0009] In the aforementioned vacuum exhaust gas cold trap, a certain distance is provided between the conical cap and the barrel. This structure prevents the conical cap from contacting the barrel, preventing vibrations caused by exhaust gas impact on the conical cap from being transmitted to the entire barrel, thereby improving the stability of the cold trap and thus enhancing the cooling effect of the exhaust gas.

[0010] In the aforementioned vacuum exhaust cold trap, the bottom of the barrel is substantially flush with the bottom of the heat exchange tube, and the top of the barrel is substantially flush with the top of the heat exchange tube. This structure is rationally designed and facilitates installation of the heat exchange tube and barrel. Substantially flush can mean flush with each other, or there can be a certain height difference, for example, a height difference of 10 cm.

[0011] In the aforementioned vacuum exhaust gas cold trap, the intake pipe includes a straight pipe section located within the barrel, and the central axes of the housing, the barrel, and the straight pipe section are aligned. This rational design ensures uniform exhaust gas distribution, improves the stability of the cold trap, and thus enhances the exhaust gas cooling effect.

[0012] In the aforementioned vacuum exhaust cold trap, the intake pipe further comprises a transverse pipe section and an arc-shaped curved pipe section, the transverse pipe section being connected to the straight pipe section via the curved pipe section, and the transverse pipe section being connected to the air inlet of the housing. This structure allows for a reasonable arrangement of the intake pipe.

[0013] In the above-mentioned vacuum tail gas cold trap, the water inlet of the heat exchange tube is located at the bottom of the shell, and the water outlet of the heat exchange tube is located at the top of the shell.

[0014] In the above-mentioned vacuum tail gas cold trap, the bottom of the shell also has an inspection port.

[0015] Compared with the prior art, the vacuum tail gas cold trap provided by the utility model has the following advantages:

[0016] 1. Due to the arrangement of the air inlet pipe and the barrel, the vacuum exhaust cold trap makes the exhaust move in a serpentine shape, thereby improving the exhaust flow path, increasing the cooling time, and thus improving the cooling effect of the exhaust.

[0017] 2. Due to the arrangement of the air inlet pipe and the barrel, the vacuum exhaust cold trap separates the first and second air passages for installing the heat exchange tubes in the shell, thereby increasing the contact area between the exhaust gas and the heat exchange tubes and thus improving the cooling effect of the exhaust gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a cross-sectional view of the overall structure of the vacuum tail gas cold trap.

[0019] Figure 2 This is a vacuum tail gas cold trap Figure 1 Magnified view of area A in center.

[0020] In the figure, 1. Shell; 11. Drain port; 12. Air outlet; 13. Air inlet; 14. Inspection port; 2. Heat exchange tube; 21. Water inlet; 22. Water outlet; 3. Barrel; 4. Air inlet pipe; 41. Straight pipe section; 42. Horizontal pipe section; 43. Curved pipe section; 5. First air passage; 6. Second air passage; 7. Support rod; 8. Conical cap; 81. Guide surface; 9. Air hole. DETAILED DESCRIPTION

[0021] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

[0022] like Figure 1 As shown, the vacuum tail gas cold trap includes a shell 1, a heat exchange tube 2, a barrel 3, an air inlet pipe 4, a support rod 7 and a conical cap 8.

[0023] The top of the shell 1 has an air outlet 12 for connecting to a vacuum pump, the bottom of the shell 1 has a liquid discharge port 11 and an air inlet 13, and the bottom of the shell 1 also has an inspection port 14. The liquid discharge port 11 is located below the air inlet 13, and the inspection port 14 is located above the liquid discharge port 11.

[0024] The barrel 3 is fixed to the shell 1 via rods. The top of the barrel 3 is sealed and the bottom is open. A first air passage 5 for exhaust gas is defined between the outer circumferential wall of the barrel 3 and the inner circumferential wall of the shell 1. The intake pipe 4 includes a straight pipe section 41, a transverse pipe section 42, and an arc-shaped curved pipe section 43. The transverse pipe section 42 is connected to the straight pipe section 41 via the curved pipe section 43. The transverse pipe section 42 is connected to the air inlet 13 of the shell 1. The straight pipe section 41 extends from the bottom of the barrel 3 to the top of the barrel 3 and is located within the barrel 3. The central axes of the shell 1, the barrel 3, and the straight pipe section 41 are aligned.

[0025] A second air passage 6 for exhaust gas to pass through is defined between the outer circumferential wall of the intake pipe 4 and the inner circumferential wall of the barrel 3. The heat exchange tube 2 is disposed within the shell 1, with a portion of the heat exchange tube 2 located within the first air passage 5 and the remainder located within the second air passage 6. The water inlet 21 of the heat exchange tube 2 is located at the bottom of the shell 1, and the water outlet 22 of the heat exchange tube 2 is located at the top of the shell 1. The bottom of the barrel 3 is substantially flush with the bottom of the heat exchange tube 2, and the top of the barrel 3 is substantially flush with the top of the heat exchange tube 2.

[0026] like Figure 2 As shown, the top of the intake pipe 4 is fixedly connected with a conical cap 8 through four support rods 7. There is a certain distance between the conical cap 8 and the barrel body 3. There is an air hole 9 for the exhaust gas to pass through between two adjacent support rods 7. The bottom surface of the conical cap 8 facing the intake pipe 4 is a conical guide surface 81 with a low middle and high sides.

[0027] During operation, cooling water flows in the heat exchange tube 2, and the exhaust gas enters the intake pipe 4 through the air inlet 13 of the shell 1, then flows to the second air passage 6 through the air hole 9, and then enters the shell 1 through the opening at the bottom of the barrel 3, and then flows to the air outlet 12 at the top of the shell 1 through the first air passage 5 and flows out. In this process, the exhaust gas exchanges heat with the heat exchange tube 2 to achieve exhaust gas cooling.

[0028] The specific embodiments described herein are merely illustrative of the spirit of the present invention. Persons skilled in the art may make various modifications, additions, or substitutions to the described specific embodiments without departing from the spirit of the present invention or exceeding the scope defined by the appended claims.

[0029] Although this document frequently uses terms such as housing 1, drain port 11, air outlet 12, air inlet 13, inspection port 14, heat exchange tube 2, water inlet 21, water outlet 22, barrel 3, air inlet pipe 4, straight pipe section 41, transverse pipe section 42, curved pipe section 43, first air passage 5, second air passage 6, support rod 7, conical cap 8, guide surface 81, and air hole 9, the use of other terms is not excluded. These terms are used solely to more conveniently describe and explain the essence of the present invention; interpreting them as any additional limitations would be contrary to the spirit of the present invention.

Claims

1. A vacuum tail gas cold trap, comprising a shell (1) having a drain port (11) at the bottom and a heat exchange tube (2) arranged in the shell (1), characterized in that: It also includes a barrel body (3) and an air inlet pipe (4) fixedly connected to the shell (1), the shell (1) has an air outlet (12) at the top and an air inlet (13) at the bottom, the barrel body (3) is sealed at the top and has an opening at the bottom, a first air passage (5) for exhaust gas to pass through is provided between the outer peripheral wall of the barrel body (3) and the inner peripheral wall of the shell (1), the bottom of the air inlet pipe (4) is connected to the air inlet (13) of the shell (1), and the top extends from the bottom of the barrel body (3) to the top of the barrel body (3), a second air passage (6) for exhaust gas to pass through is provided between the outer peripheral wall of the air inlet pipe (4) and the inner peripheral wall of the barrel body (3), and a portion of the heat exchange tube (2) is located in the first air passage (5) and the remaining portion is located in the second air passage (6).

2. A vacuum tail gas cold trap according to claim 1, characterized in that: The top of the intake pipe (4) is fixedly connected to a conical cap (8) via a plurality of support rods (7), and an air hole (9) for exhaust gas to pass through is provided between two adjacent support rods (7). The bottom surface of the conical cap (8) facing the intake pipe (4) is a conical guide surface (81) with a lower middle and higher sides.

3. A vacuum tail gas cold trap according to claim 2, characterized in that: There is a certain distance between the conical cap (8) and the barrel body (3).

4. A vacuum tail gas cold trap according to claim 1, 2 or 3, characterized in that: The bottom of the barrel body (3) is substantially flush with the bottom of the heat exchange tube (2), and the top of the barrel body (3) is substantially flush with the top of the heat exchange tube (2).

5. A vacuum tail gas cold trap according to claim 1, 2 or 3, characterized in that: The air inlet pipe (4) comprises a straight pipe section (41) located in the barrel (3), and the central axis of the shell (1), the central axis of the barrel (3), and the central axis of the straight pipe section (41) are located on the same straight line.

6. A vacuum tail gas cold trap according to claim 5, characterized in that: The air inlet pipe (4) further comprises a transverse pipe section (42) and an arc-shaped curved pipe section (43); the transverse pipe section (42) is connected to the straight pipe section (41) via the curved pipe section (43); and the transverse pipe section (42) is connected to the air inlet (13) of the housing (1).

7. A vacuum tail gas cold trap according to claim 1, 2 or 3, characterized in that: The water inlet (21) of the heat exchange tube (2) is located at the bottom of the shell (1), and the water outlet (22) of the heat exchange tube (2) is located at the top of the shell (1).

8. A vacuum tail gas cold trap according to claim 1, 2 or 3, characterized in that: The bottom of the housing (1) also has an inspection port (14).

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