Turbo Molecular Pump with Improved Blade Structures

a technology of molecular pump and blade structure, which is applied in the direction of machines/engines, stators, liquid fuel engines, etc., can solve the problems of poor pumping efficiency and achieve the effect of improving the blade structure, enhancing the pumping speed and stability of the turbo molecular pump

Inactive Publication Date: 2012-06-14
PROSOL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0010]The major objective of the present invention is to provide the turbo molecular pump with improved blade structures, wherein several parameters of rotor blades and stator blades of the turbo molecular pump are adjusted to optimal conditions, so as to significantly elevate the pumping speed and stability of the turbo molecular pump.

Problems solved by technology

However, although the turbo molecular pump has been improved by many researchers constantly, the pumping efficiency and the stability of the turbo molecular pump are not excellent enough yet.

Method used

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  • Turbo Molecular Pump with Improved Blade Structures
  • Turbo Molecular Pump with Improved Blade Structures
  • Turbo Molecular Pump with Improved Blade Structures

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Embodiment Construction

[0017]To achieve the foregoing objectives and effects, the inventors adjust several parameters of rotor blades and stator blades of a turbo molecular pump to optimal conditions, thus achieving a turbo molecular pump with improved blade structures.

[0018]The turbo molecular pump of the present invention is composed of a rotor and a stator, wherein the rotor and the stator are primarily made of pure aluminum or aluminum alloy, which has advantages of lightweight, corrosion prevention, manufacturing easily, and moderate strength and toughness. The rotor and the stator also can be made of copper or gold, however, the copper and the gold have higher cost, softer texture, higher weight, and lower strength and toughness than aluminum. Additionally, steel, iron, cast metal, and stainless steel also can be the material of the rotor and the stator, but these materials have disadvantages of rigid texture, heavy weight, susceptible to corrosion, and difficult to be manufactured.

[0019]Referring t...

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Abstract

The present invention discloses a turbo molecular pump with improved blade structures. The turbo molecular pump comprises a rotor and a stator, wherein the rotor includes five rotor blade assemblies and the stator includes five stator blade assemblies, and wherein the blade number and the blade angle of each rotor blade assembly and stator blade assembly are adjusted to optimization, so as to enhance the pumping speed and the stability of the turbo molecular pump as well as to reduce the difficulty for manufacturing the turbo molecular pump.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The present invention relates to a turbo molecular pump with improved blade structures, and more particularly to a turbo molecular pump having rotor blades and stator blades which are optimally adjusted for several parameters.[0003]2. Description of the Prior Art[0004]In recent years, semiconductor industries are developed rapidly, so that the requirement of the related apparatuses in front-end stage of the semiconductor is largely increased, and wherein a turbo molecular pump, the major device in the high vacuum system, has a great demand.[0005]The turbo molecular pump is originated in 1912 and improved from a molecular drag pump invented by a German, Gaede. Referring to FIG. 1, which is a cross-sectional view of a conventional turbo molecular pump. The conventional turbo molecular pump A includes a rotor A1 and a stator A2, wherein the rotor A1 includes a rotor shaft A10 and a plurality of rotor blades A11, and the st...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): F01D1/04
CPCF04D29/384F04D19/042
Inventor HSU, KUO-HSUNLI, CHAO-HUANTAI, WEI-CHENGHSU, CHIH-NENGCHIANG, HSIAO-WEI D.
Owner PROSOL
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