Method for detecting state of high-speed high-vacuum turbomolecular pump

Abstract

The invention relates to a method for detecting the state of a high-speed high-vacuum turbomolecular pump. The method comprises the following steps: A) sticking an acceleration sensor on the outer shell of the turbomolecular pump; B) starting up the turbomolecular pump, measuring the shake acceleration value of the turbomolecular pump utilizing the acceleration sensor, and transmitting the value to a spectrum analysis instrument; C) acquiring the data of acceleration value spectrum variation in a certain frequency range utilizing the spectrum analysis instrument; and D) judging the bearing running state of the turbomolecular pump utilizing the data of the acceleration value spectrum variation in a certain frequency range: (D1) when in a high frequency state, the acceleration signal value is less and has no mixed frequency, which means that the turbomolecular pump is in a good running state; (D2) when in a high frequency state, the acceleration signal value is great and has mixed frequency, which means that the turbomolecular pump is in a poor running state; and (D3) when in a high frequency state, the acceleration signal value is great and thick, and has much mixed frequency, which means that the turbomolecular pump is in a very poor running state and needs to be maintained. By the method, the state of the turbomolecular pump is convenient and rapid to grasp for users, the conclusions of normal, risk and danger and the like can be obtained, the possible defects of the core component of the turbomolecular pump can be found out timely, the enlargement of the stoppage of the turbomolecular pump can be avoided, unexpected stopping rate of a machine is reduced, and cost is saved.

Description

Technical field: [0001] The invention relates to a method for detecting the state of a high-speed high-vacuum turbomolecular pump. Background technique: [0002] In the manufacture of semiconductor wafers, optical magnetic storage production, solar panel manufacturing, TFT, OLED and other optical high-end coatings, high-end analytical instruments and aerospace research, high vacuum is inseparable. Turbomolecular pumps are currently One of the best equipment for obtaining high vacuum. Its working principle is to use high-speed rotating multi-layer rotors to transmit momentum to gas molecules, so that they can obtain directional speed, and then be compressed, separated by layers of stators, and finally driven to exhaust A high vacuum is obtained behind the mouth for the front-stage pumping. [0003] Molecular pump rotor is a typical high-speed flexible rotor, with as many as ten layers and hundreds of blades, the distance between the rotating blades and the stator is only 0.1...

AI Technical Summary

Problems solved by technology

After a new pump has been used for one to two years, some molecular pumps are still in good condition and do not need to be repaired at all; some are in poor condition or even scrapped

The dismantling and installation of the molecular pump will take a lot of time, and sending it to a foreign country for repair is time-consuming and labor-intensive, and the price is expensive

[0005] The application number is: 20078028225.6, the announcement number is: CN101495760, and the name is: a method for determining the state information of a turbomolecular pump and a turbomolecular pump. Although this patent discloses a method for detecting the state of a high-speed high-vacuum turbomolecular pump, the method Complicated, slow, difficult to operate, difficult to judge quickly and accurately, and the detection effect is not ideal

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