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63results about How to "Increase ultimate vacuum" patented technology

Photoelectric detection device transfer manufacturing system and method

The invention provides a photoelectric detection device transfer manufacturing system and method. The photoelectric detection device transfer manufacturing system comprises a cathode cavity, an anode cavity, a working transmission cavity, a transfer transmission system, a drying oven and a vacuum-pumping system, wherein the cathode cavity, the anode cavity and the working transmission cavity are separated through valves, the cathode cavity and the anode cavity are located on the two sides of the working transmission cavity respectively, the transfer transmission system comprises a horizontal transmission system and a lifting system, and the horizontal transmission system comprises an anode assembly containing device, a cathode assembly containing device and a horizontal transmission device. When a photoelectric detection device is manufactured through the manufacturing system, all other technological processes except the anode assembly assembling process are completed in a clean environment with ultrahigh vacuum, and therefore core devices of an MCP can be prevented from being polluted in the manufacturing process; the MCP anode assembly processing process and the photocathode manufacturing process are independent from each other so that non-cathode parts can be prevented from being polluted by cathode alkali metal and the MCP can be kept in a working state with the optimum performance.
Owner:XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI

Leak detection device and leak detection method

The invention provides a leak detection device and a leak detection method. The leak detection device comprises an inflation area, a to-be-detected station area and a test area. The inflation area isused for inflating and deflating the to-be-detected station area. The to-be-detected station area comprises a test container and a first vacuum pump for vacuumizing the test container. The test area comprises a mass spectrum chamber, a molecular pump set, a getter pump, a quadrupole mass spectrometer, liquid nitrogen cold hydrazine, a second vacuum pump, a dynamic leak detection standard leak holeand an accumulated leak detection standard leak hole. The test container is communicated with the mass spectrum chamber through a valve assembly, the quadrupole mass spectrometer is connected with the mass spectrum chamber, the liquid nitrogen cold hydrazine is connected with the mass spectrum chamber, and the molecular pump set, the getter pump, the dynamic leak detection standard leak hole andthe accumulated leak detection standard leak hole are respectively communicated with the mass spectrum chamber through valve assemblies. The beneficial effects are that the vacuum dynamic leakage detection of a to-be-detected component can be realized through the single use of the molecular pump set; and vacuum accumulated leak detection of the to-be-detected component can be realized through cooperation of a getter pump, a molecular pump and the liquid nitrogen cold hydrazine.
Owner:BEIJING INST OF SPACECRAFT ENVIRONMENT ENG

Single-head varying-pitch screw rotor with equal tooth top width

ActiveCN102808771AIncrease ultimate vacuumInspiratory volume between small stagesRotary piston pumpsRotary piston liquid enginesTooth root surfaceEngineering
The invention relates to a single-head varying-pitch screw rotor with equal tooth top width. A tooth form surface of the screw rotor is formed in a manner that a tooth root surface, an oblique tooth surface, a tooth top surface and a transition tooth surface are sequentially connected with one another, the screw lead of the rotor is linearly increased from an exhaust end to a suction end along an axial coordinate, the axial width of the oblique tooth surface is gradually increased along the screw lead, but the width of the tooth top surface always remains unchanged. Compared with various existing single-head varying-pitch screw rotors, the tooth top width of the suction end of the molded line rotor is relative narrow, thus, larger inter-stage suction volume is formed, and the molded line rotor has a larger volume utilization factor, so that the molded line rotor has a higher theoretical pumping speed under the condition of the same structural parameters; and on the other hand, the tooth top width of the exhaust end of the molded line rotor is relatively wide, thus, the molded line rotor has stronger inter-stage blocking capacity and is capable of decreasing the inter-stage gas leakage backflow volume, so that the ultimate vacuum degree and the actual effective pumping speed of a vacuum pump are beneficially improved.
Owner:NORTHEASTERN UNIV LIAONING +1

A two-stage vortex dry vacuum pump

A two-stage vortex dry vacuum pump is disclosed. The outer circumferential side of a first vortex working cavity is communicated with an air inlet in a left vortex fixed disc. At least one airflow channel is disposed along the radial direction in a vortex moving disc. One end of each airflow channel is communicated with the center side of the first vortex working cavity, and the other end is communicated with the outer circumferential side of a second vortex working cavity. The center side of the second vortex working cavity is communicated with an air discharging channel and an air discharging port in a right vortex fixed disc. The outer circumferential side of the vortex moving disc and the outer circumferential side of the right vortex fixed disc are hermetically connected through a corrugated pipe. The outer circumferential side of the first vortex working cavity and the outer circumferential side of the second vortex working cavity are sealed and separated by the corrugated pipe. The corrugated pipe, the vortex moving disc and the right vortex fixed disc are connected through flanges or welding. The two-stage vortex dry vacuum pump breaks the limitation on the compression ratio and the final vacuum of two-side vortex dry vacuum pumps at present, and increases the compression ratio and the final vacuum of the vacuum pump by two-stage continuous compression of the two vortex working cavities connected in series.
Owner:NORTHEASTERN UNIV +1

Screw of screw vacuum pump

The invention provides a screw of a screw vacuum pump, and belongs to the technical field of vacuum pumps. The problem that the screw of the existing screw vacuum pump cannot meet the specific process conditions at present is solved. The number of turns of the upper spiral groove of a suction part, in the screw of the screw vacuum pump, is 0.75-1.25; when the number of turns of the upper spiral groove of a compression transition part is 1, the number of turns of the upper spiral groove of an exhaust part is more than 3; when the number of turns of the upper spiral groove of the compression transition part is more than 1, the number of turns of the upper spiral groove of the exhaust part is 1.75-4. The screw of the screw vacuum pump has the advantages that the vacuum pump is high in ultimate vacuum, is stable in performance while the manufacturing cost is almost not increased, and then more types of screw vacuum pumps are available with a more widespread application domain. In the screw vacuum pump adopting the pitch variable screw provided by the invention, the compression ability is optimized by appropriately increasing the number of turns of the spiral groove as wound, the exhaust efficiency of the exhaust part is improved, the excessive compression phenomenon because the air in the exhaust part cannot be exhausted is alleviated, and then the unit energy consumption is reduced effectively.
Owner:台州市星光真空设备制造有限公司

Multilevel floating vortex vacuum pumps and usage method thereof

The invention discloses a multilevel floating vortex vacuum pumps and usage method thereof. The multilevel floating vortex vacuum pumps comprise a plurality of vacuum pumps, each of which comprises a fixed scroll base, a fixed scroll located on the base and an orbiting scroll which do orbiting movement with the fixed scroll, wherein an air inlet is formed in the end plate of a scroll element which is located at the outer ring of the fixed scroll; an air outlet is formed in the end plate of the scroll element which is located at the inner ring of the fixed scroll; the air outlet is provided with a row of vent valve components; the air inlet of every downstream vacuum pump is communicated with the air outlet of the adjacent upstream vacuum pump through a pipe. By adopting the multilevel floating vortex vacuum pump and the usage method, the downstream vacuum pump extracts air from the air outlet of the upstream vacuum pump, thereby reducing the pressure in the volume below the air outlet of the upstream vacuum pump; the dynamic balance between the air inlet and the air outlet is interrupted, the backflow from the air outlet to the air inlet is reduced and the air extracted from the air inlet is increased, thereby reducing the air pressure of the upstream air inlet and increasing the ultimate vacuum degree of the air inlet.
Owner:ADVANCED SCROLL TECH HANGZHOU

Three-cavity sliding vane vacuum pump cylinder and type line design method thereof

The invention discloses a three-cavity sliding vane vacuum pump cylinder and a type line design method thereof. A sine spiral line is adopted to form a cylinder type line; a first suction section curved line, a second suction section curved line and a third suction section curved line as well as a first discharge section curved line, a second discharge section curved line and a third discharge section curved line rotate around an original point at 120 degrees so as to be symmetrical, so that the formed curved lines are in completely smooth connection and second derivative continuity; the sizeof a central angle corresponding to the first suction section curved line is alpha, the size of a central angle corresponding to the first discharge section curved line is beta, alpha is smaller thanbeta, and alpha plus beta is equal to 120 degrees; and three same unsymmetrical working cavities are formed between the cylinder and a rotor, so that the displacement volume is reduced, and the interior volume specific ratio is effectively increased. According to the three-cavity sliding vane vacuum pump cylinder provided by the invention, on the premise of ensuring that the top ends of sliding vanes slide on an inner wall of the cylinder in a contacting way, rigid impulse and flexible impulse are avoided; and the interior volume specific ratio of a sliding vane vacuum pump can be increased through changing the sizes of the central angles corresponding to the curved lines, so that the slide vane vacuum pump has a higher limiting vacuum degree.
Owner:CHINA UNIV OF PETROLEUM (EAST CHINA)

Screw of screw vacuum pump

The invention provides a screw of a screw vacuum pump, and belongs to the technical field of vacuum pumps. The problem that an existing screw of the screw vacuum pump can not meet specific technological conditions is solved. The number of circles of a spiral groove in an air intake part in the screw of the screw vacuum pump is 0.75-1.25. When the number of circles of a spiral groove in a compression transition part is 1, the number of circles of a spiral groove in an exhausting part is larger than 3. When the number of circles of the spiral groove in the compression transition part is larger than 1, the number of circles of the spiral groove in the exhausting part is 1.75-4. By means of the screw of the screw vacuum pump, the final vacuum degree of the vacuum pump is higher, the performance is more stable, the manufacturing cost is hardly increased, the screw vacuum pumps have more models, and the application range is wider. According to the screw vacuum pump adopting the variable-pitch screw, by properly increasing the number of winding circles of the spiral grooves, the compression capacity is optimized, the exhausting efficiency of the exhausting part is improved, the phenomenon that air of the exhausting part can not be exhausted and compression is excessive is relieved, and the unit energy consumption is further effectively lowered.
Owner:巫修海 +1

Three-cavity sliding-vane-type vacuum pump

PendingCN108443155AReduced exhaust air pulsationImprove vibrationGeometric CADRotary piston pumpsVacuum pumpAirflow
The invention discloses a three-cavity sliding-vane-type vacuum pump. The vacuum pump comprises an air suction end cover (1), a pump cavity (2), sliding vanes (3), a rotor (4) and an exhaust end cover(5). A three-working-cavity structure is adopted, three identical closed working cavities are formed among the air suction end cover (1), the pump cavity (2), the exhaust end cover (5) and the rotor(4), the formed closed working cavities are asymmetric working cavities, and the volume of the part, near a corresponding exhaust port, of each working cavity is smaller than the volume of the part, near a corresponding air suction port, of each working cavity. In the working process, the relative positions of the sliding vanes in the different working cavities at any moment are different, therefore, the working steps of the working cavities are not consistent, the three working cavities can be prevented from exhausting air at the same time, and the pulsation of the exhaust gas flow can be reduced. According to the vacuum pump, the inner volume ratio of the three-cavity sliding-vane-type vacuum pump is remarkably improved, the limit vacuum degree of the three-cavity sliding-vane-type vacuum pump is effectively improved, and the problems of vibration and noise caused by exhaust flow pulsation are solved.
Owner:CHINA UNIV OF PETROLEUM (EAST CHINA)
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