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376 results about "Clean environment" patented technology

Clean room energy-saving pressure control method and system based on dynamic pipe network and model predictive control

The invention relates to the technical field of clean environment control, in particular to a dynamic pipe network and model predictive control clean room energy-saving pressure control method and system. Obtaining current pipe network impedance according to the pipe network impedance curve; calculating the current valve impedance according to the valve opening; calculating the total pressure drop of the current pipe network; constructing a fan dynamic model based on a fan similarity law to calculate the air volume at the next moment; a clean room pressure difference dynamic model is constructed, and the clean room pressure difference at the next moment is calculated; constructing a state space model and a target function of a model prediction controller; and when the pressure difference of the clean room is unstable, predicting the change trend of the pressure difference of the clean room in the next time period, and reversely solving the optimal fan frequency and valve opening of the discretization state space model by using the model prediction controller so as to achieve the lowest pipe network impedance and obtain the optimal fan frequency. The control precision and robustness of the pressure difference of the clean room are remarkably improved, and meanwhile energy consumption is reduced.
Owner:SUZHOU UNIV

Intelligent clean air conditioner automatic control system and integrated control method

The invention discloses an intelligent clean air conditioner automatic control system and an integrated control method, and belongs to the technical field of clean environment control. In order to solve the problems of dispersed control, high energy consumption and insufficient dynamic response of an existing clean air conditioning system, an intelligent control algorithm and hardware facilities are integrated, a multi-parameter collaborative optimization model is constructed, and the temperature, humidity, airflow velocity and pressure of a clean workshop are accurately regulated and controlled in real time. The system comprises a central controller, a sensor network, an actuator and a control software module, an air valve and variable air volume equipment are dynamically adjusted through data fusion and a machine learning algorithm, wind resistance and turbulence are reduced, and airflow organization efficiency is optimized. Meanwhile, the system supports remote monitoring, fault self-diagnosis and self-adaptive energy-saving modes, and the operation stability and the energy efficiency ratio are remarkably improved. According to the integrated control method, the problems that a traditional system is insufficient in intelligence and high in maintenance cost are solved, and remarkable energy-saving benefits and environmental adaptability are achieved.
Owner:JIANGSU XINDA CONSTR ENG CO LTD

Intelligent CAR-T cell culture system

The invention relates to the technical field of biological medicine preparation equipment, and discloses an intelligent CAR-T cell culture system, which comprises an intelligent temperature control and cleaning box body, a double sterilization system and a full-automatic preparation process, and the intelligent temperature control and cleaning box body adopts temperature and humidity control and cleanliness control. The double sterilization system comprises hydrogen peroxide fumigation and ultraviolet circulation disinfection, and the full-automatic preparation process comprises a precise pipeline, a modular reaction unit and an automatic control platform. According to the intelligent CAR-T cell culture system, full-process automatic culture of full-automatic CAR-T cells is realized in a C-level environment, a high-requirement clean environment is not needed, the cost can be greatly reduced, the economic benefit is remarkable, a full-closed pipeline system better meets the requirements of laws and regulations, and the system has greater advantages in the supervision level; the full-automatic operation reduces the intervention of personnel, avoids the potential pollution risk in the process, the full-process automatic cultivation can greatly save the cost, and the cost is saved by 40% compared with the traditional process through comprehensive calculation.
Owner:佰俪达医药科技(海南)有限公司

Subpackaging protection box for medical isotopes and medicines thereof

The utility model provides a sub-packaging protection box for medical isotopes and drugs thereof, which comprises a material front chamber, a sub-packaging main chamber and a packaging rear chamber, the packaging rear chamber is divided into an upper layer space and a lower layer space, the lower layer space comprises a lead tank automatic packaging cabin and a radioactive solid waste temporary storage cabin, a buffer chamber I is arranged between the material front chamber and the sub-packaging main chamber, and a buffer chamber II is arranged between the material front chamber and the sub-packaging main chamber. And a buffer chamber II is arranged between the sub-packaging main chamber and the upper-layer space of the packaging rear chamber. According to the split charging protection box provided by the utility model, each functional zone can keep a reasonable differential pressure gradient, and the split charging protection box has the functions of clean ventilation, sterilization and disinfection, on-line monitoring and the like, and meets the requirements of relevant laws and regulations such as GMP (Good Manufacturing Practice) in China on clean environment, on-line monitoring, data auditing and tracking and the like in the production process. And meanwhile, the automatic lead tank packaging and solid waste collecting and storing functions are achieved, operation convenience and safety are improved, and radiation damage to operators is reduced to the minimum.
Owner:YANTAI DONGCHENG HEJU PHARMACEUTICAL TECHNOLOGY CO LTD

Traditional Chinese medicine workshop cross contamination prevention system and method based on multi-source data fusion and AI dynamic regulation and control

The invention relates to the technical field of plant environment control, and particularly discloses a traditional Chinese medicine plant cross contamination prevention system and method based on multi-source data fusion and AI dynamic regulation, and the system is composed of a sensing layer, a data processing layer, a decision-making layer and an execution layer. BIM space information and MES working condition data are fused, and a digital twinborn and pollution risk thermodynamic diagram of the factory building is constructed; lSTM prediction and reinforcement learning are utilized to generate a cooperative control strategy of the air supply and exhaust rate, the air valve opening degree and the adjustable air opening angle of each area, airflow is guided to be discharged in the direction from a pollution source to an air outlet, early warning and active suppression of dust and solvent gas cross contamination are achieved, the cleanliness reaches the standard, energy is saved, consumption is reduced, and the method is suitable for large-scale popularization and application. The method is suitable for traditional Chinese medicine preparation workshops and similar clean environments.
Owner:BOZHOU VOCATIONAL & TECHNICAL COLLEGE

Clean engineering full-life-cycle intelligent management digital twin platform

The invention relates to the technical field of clean room full-process intelligent management, and discloses a clean project full-life-cycle intelligent management digital twin platform, which comprises a full-cycle data center module, a virtual-real bidirectional interaction engine module, a full-cycle management module and a multi-terminal collaborative interaction module which are connected with one another, the whole life cycle of design, construction, operation and maintenance and decommissioning is covered, whole-course tracing of design-construction-operation-decommissioning is achieved, closed-loop interaction of virtual model rehearsal and entity execution feedback is constructed, and an intelligent decision function is constructed to cover the whole process. Comprising performance rehearsal in a design stage, progress management and control in a construction stage, deep optimization in an operation and maintenance stage and resource evaluation in a decommissioning stage. Through deep fusion of the dynamic BIM model and multi-stage multi-source data, virtual-real two-way interaction and full-period intelligent management, the method is suitable for full-process collaborative management of clean environments such as semiconductors, biological medicines and foods, and full-stage precise management and control from early planning to final decommissioning are realized.
Owner:KESHENGPENG ENVIRONMENTAL TECH CO LTD

Cleaning equipment

The embodiment of the invention provides cleaning equipment, and relates to the technical field of cleaning equipment.The cleaning equipment comprises a control component, a cleaning component and a fan unit which are sequentially arranged from one side to the opposite side, the control component is electrically connected with the cleaning component and the fan unit, and when the control component detects materials in the cleaning component, the fan unit is electrically connected with the cleaning component. A set cleaning environment corresponding to the material information is obtained, the fan unit is controlled to construct the set cleaning environment in a cleaning cavity, containing materials, of the cleaning component, and the set cleaning environment comprises a preset humidity range, a concentration preset value of particulate matter and a dew point preset value; the fan unit is used for filling a cleaning cavity of the cleaning component with first gas for protecting materials and second gas for adjusting humidity to construct a set cleaning environment, and in the cleaning process, the set cleaning environment is maintained based on the control component; and the cleaning part is used for cleaning the materials until the materials meet the cleaning standard of the materials. Therefore, on the premise of protecting the cleaning materials, the cleaning degree is improved.
Owner:KRAUS PRECISION CLEANING EQUIPMENT (SUZHOU) CO LTD

Foreign matter detection method, cleaning method and cleaning equipment for semiconductor workpiece storage device to be cleaned

The embodiment of the invention provides a foreign matter detection method, a cleaning method and cleaning equipment for a semiconductor workpiece storage device to be cleaned, and the foreign matter detection method comprises the steps: placing the semiconductor workpiece storage device to be cleaned at a loading station of a loading unit; the cover body of the semiconductor workpiece storage device positioned on the loading station is positioned on the side edge of the box body; a to-be-cleaned semiconductor workpiece storage device is transferred from a loading station to a detection station of a loading unit through a first sliding rail assembly; the unlocking mechanism is used for unlocking; detecting foreign matters in the box body by using a detection assembly, wherein the foreign matters comprise substrates and / or substrate fragments; the unlocking mechanism carries the cover body to move from top to bottom and locks the cover body and the box body, and the cover body is separated from the unlocking mechanism; and determining a next-step processing mode of the semiconductor workpiece storage device based on the foreign matter detection result. According to the detection method, the situation that the substrate fragments fall from the box body can be avoided, and meanwhile pollution to the clean environment is avoided.
Owner:JIANGSU XINMENG SEMICON EQUIP CO LTD

Small-sized annular water tank for sediment starting flow velocity test and arrangement method of small-sized annular water tank

The invention discloses a small annular water tank for a sediment starting flow velocity test and an arrangement method thereof, and belongs to the field of sediment starting flow velocity measurement, the water tank comprises an annular water tank, the annular water tank is provided with a closed flow path, and a water flow pushing paddle plate and a test sand sample are arranged in the flow path; the water flow pushing paddle plate is used for providing power for water in the flowing path, the annular water tank is connected with a pressurizing device, and a laser turbidity meter and a pressure flow velocity sensor are further arranged in the flowing path. The device is convenient to operate, assemble and disassemble, stable and advective hydrodynamic force can be quickly formed, and an efficient, easy-to-operate and easy-to-clean environment is provided for a sediment starting flow velocity test.
Owner:ZHEJIANG INST OF HYDRAULICS & ESTUARY

Dynamic air volume adjusting method of fume hood for clean environment based on multi-source data fusion

PendingCN121953458AGuaranteed suction effectreduce imbalanceMechanical apparatusLighting and heating apparatusData setAir volume
The invention discloses a multi-source data fusion-based air volume dynamic adjustment method of a fume hood for a clean environment, particularly relates to the technical field of clean environment control, and aims at solving the problem that air volume adjustment of an existing fume hood cannot give consideration to front air suction safety, pressure difference stability and overall energy conservation. A basic operation data set is formed by collecting and filtering window opening and cabinet air speed, an air volume demand value and an initial priority parameter are calculated according to the data set and a room use state mark to form a demand data set, and a deviation memory parameter and a fluctuation influence parameter are calculated by fusing room pressure difference data and the availability of an exhaust fan. Obtaining a stable control priority adjustment coefficient through a time decay score learning model, correcting the priority, distributing the target exhaust air rate and the exhaust fan output, forming a target distribution result, comparing the target distribution result with the actual air valve opening degree and the exhaust fan output state, calculating the adjustment amount, and issuing a control instruction according to the priority; and the deviation record feedback updating coefficient and the demand value are verified in the control period to realize self-adaptive adjustment.
Owner:YOUSHANG HEYUE ENVIRONMENTAL TECH CO LTD

Self-adaptive control method and system for cleaning unmanned aerial vehicle based on neural network

The invention provides a cleaning unmanned aerial vehicle self-adaptive control method and system based on a neural network, and relates to the technical field of cleaning. Multi-source sensing information of a cleaning unmanned aerial vehicle is acquired through a sensor assembly; activating a visual saliency perception center to process and perceive a to-be-cleaned target image in the multi-source sensing information to obtain a to-be-cleaned point location; generating a self-adaptive cleaning path in cooperation with unmanned aerial vehicle attitude data and cleaning environment data in the multi-source sensing information; and taking the to-be-cleaned coefficient of the to-be-cleaned point as a constraint, adjusting the initial cleaning strategy to obtain a target cleaning strategy, and performing cleaning adaptive control on the cleaning unmanned aerial vehicle in combination with the adaptive cleaning path. The technical problems of identification deviation, path rigidity and cleaning strategy imbalance of the cleaning unmanned aerial vehicle in a complex task environment due to lack of an effective information fusion and adaptive decision mechanism in the prior art are solved, and the technical effect of realizing precise and intelligent cleaning operation is achieved.
Owner:INNER MONGOLIA UNIV OF TECH

Novel PI glue drying oven

The utility model discloses a novel PI glue drying oven, which relates to the field of PI glue drying ovens and comprises a drying oven body, a heating source is mounted at the top of an inner cavity of the drying oven body, a placing frame is mounted at the top of the heating source, a heat conducting plate is arranged on the side edge of the placing frame, and an inert gas pipe is mounted on the side edge of the drying oven body. A box door is mounted at the top of the front of the oven body through hinges, a box lock is mounted on the right side of the oven body, universal wheels are symmetrically and fixedly connected to the periphery of the bottom of the oven body, and a switch is arranged at the bottom of the control panel. The novel PI glue drying oven is applied to the former procedure of semiconductor manufacturing, is used for baking and curing PI glue, has a high-temperature environment, a clean environment and a low-oxygen environment, and meets the requirement for high-temperature cleanliness by improving the production technology of materials in the cavity and a heating mode. And through the arrangement of the cavity and the inert gas pipe, inert gas can be introduced, so that the low-oxygen requirement can be met.
Owner:SHANGHAI HENGQIAN ELECTRONIC TECH CO LTD

Automatic blending method for formula type products

The invention discloses an automatic blending method for a formula type product, relates to the technical field of product blending, and aims to solve the problems of long mixing time, low proportioning precision, serious sampling pollution and large waste liquid generation amount in a traditional blending method. The method is implemented based on a closed-loop circulation mixing system and comprises the following steps: 1) presetting formula parameters; (2) dynamically conveying main materials and circularly starting; (3) auxiliary materials are accurately added; 4) dual dynamic mixing reinforcement; 5) online concentration real-time monitoring; and 6) sampling and rechecking in a clean environment. According to the invention, continuous operation of feeding and mixing is realized, accurate batching is realized through mass flow feedback control, sampling times are reduced in combination with online detection, sampling environment is controlled, mixing efficiency and product quality stability are significantly improved, pollution and waste liquid generation are reduced, and the device is especially suitable for mixing products with high purity requirements, such as electronic chemicals.
Owner:DANUOER (HUBEI) MICROELECTRONIC MATERIALS CO LTD

Surface blowing cleaning device for high-cleanliness OLED flexible screen supporting film and using method of surface blowing cleaning device

The invention relates to the technical field of high-cleanliness OLED flexible screen supporting film processing, in particular to a high-cleanliness OLED flexible screen supporting film surface blowing cleaning device and a using method thereof.The high-cleanliness OLED flexible screen supporting film surface blowing cleaning device comprises a conveying belt and height lifting units, the synchronous height lifting units are installed on the two sides of the conveying belt, and a cleaning assembly is installed between the upper ends of the height lifting units; a vacuum positioning assembly is installed on one side of the cleaning assembly. An adjusting assembly is installed on the side face of the cleaning assembly. The cleaning assembly comprises a connecting frame, vertical plates are fixedly connected to the lower end of the connecting frame, and a cleaning air knife and an air exhaust unit are rotationally connected between the vertical plates. Through ingenious combination of a mechanical structure, airflow dynamics and a vacuum technology, a closed, controllable and adjustable efficient clean environment is constructed, dust is not simply blown away, and the cleaning efficiency is improved; in particular, the problems of secondary electrification and rebounding of electrified insulating particles, which are difficult to treat by a traditional method, are solved.
Owner:江苏南锦电子材料有限公司

Different-surface low-temperature bonding method for quartz glass component

The invention relates to the technical field of quartz glass processing, in particular to a quartz glass component different-surface low-temperature bonding method which comprises the following steps: S1, putting a quartz glass component into plasma processing equipment for surface activation; s2, the activated quartz glass part is washed with pure water, and attachment is completed in the pure water; s3, flatly placing the fitted quartz glass part sample, and standing for a period of time in an atmospheric environment; and S4, putting the quartz glass part sample after standing into a heating furnace, heating to 150-180 DEG C at a heating rate of 5-10 DEG C / min, and keeping the temperature for a period of time to finish bonding. According to the method, the heat treatment temperature can be effectively reduced, particle pollution on the surface of the quartz glass part can be continuously removed through pure water flushing, attachment of the clean activated surface is achieved, and therefore the requirement for the clean environment is reduced.
Owner:ZHEJIANG FULEDE QUARTZ TECH CO LTD

Wafer cassette docking system

This specification provides a wafer cassette docking system that, through the systematic integration of local environmental control, multimodal sensing, and active compliant adjustment functions, achieves an overall performance improvement in the wafer cassette docking process. It can form a stable positive pressure laminar flow air curtain at the initial stage of docking, effectively isolating external particles and providing a continuous ultra-clean environment for the wafer. Employing a multi-sensor fusion scheme consisting of global vision, laser ranging, and feature recognition, it can quickly and comprehensively acquire the six-degree-of-freedom pose information of the wafer cassette, providing a high-precision data foundation for subsequent fine alignment. A micro-motion adjustment platform based on piezoelectric ceramic actuators, combined with real-time closed-loop feedback control, enables nanometer-level active compliant alignment, significantly improving alignment accuracy and reliability. An electromagnetic locking mechanism ensures the stable maintenance of the final pose. The collaborative work of each module improves docking accuracy and efficiency, and also enhances the system's adaptability and stability under different operating conditions.
Owner:BEIJING HEQI PRECISION TECH LTD

Instrument sterilization transfer cabinet suitable for biological clean environment

The invention relates to the field of biomedical instrument sterilization, and particularly discloses an instrument sterilization transfer cabinet suitable for a biological clean environment, the instrument sterilization transfer cabinet comprises a box body, the box body is internally provided with a disinfection bin, a drying bin and a detection bin, the disinfection bin is internally provided with a disinfection nozzle for spraying a fluorescein-containing disinfectant, and the drying bin is internally provided with a high-temperature gas nozzle; an ultraviolet lamp for enabling fluorescein to emit light and a light sensor for receiving the light emitted by the fluorescein are arranged in the detection bin; a first moving mechanism and a second moving mechanism are also arranged on the box body; the first moving mechanism and the second moving mechanism can clamp and move instruments in the box body, the instruments can rotate in different directions through switching of the first moving mechanism and the second moving mechanism during moving, disinfection dead angles of the instruments are reduced, and the drying effect of the instruments can be improved through rotary centrifugation; when the instrument is detected, if the light sensor detects fluorescent light spots, the drying is incomplete or the cleaning is not thorough.
Owner:WUHAN JIANGHAN MEDICAL PHARM EQUIP CO LTD

Culture container conveying device and method for cell culture

The invention discloses a culture container conveying device and method for cell culture, and belongs to the technical field of cell culture.The culture container conveying device is technically characterized by comprising an incubator and a second supporting seat, culture containers can be limited one by one through an arranged limiting conveying mechanism, meanwhile, automation of the culture container conveying and material taking process is achieved, and the production efficiency is improved. In addition, when the culture container is not grabbed by the material, the culture box is always in a closed state, a clean environment is provided for cell culture, the risk of experiment failure caused by pollution is reduced, automatic opening, closing and positioning of a plurality of limiting rings are realized through an automatic opening, closing and positioning operation mode of the positioning observation mechanism, and the operation efficiency is improved. The device is simple in structure and convenient to operate, does not need manual operation, greatly shortens the positioning time of the culture container, avoids frequent contact of operators with the culture container, reduces the risk that external pollutants are attached to the surface of the culture container, and has the advantages of convenience in closed transmission, automatic material taking and automatic positioning, observation and use.
Owner:SHENZHEN GUANGTAI BIOTECHNOLOGY CO LTD

Workpiece cleaning device for friction stir welding

The utility model discloses a workpiece cleaning device for friction stir welding, particularly relates to the technical field of friction welding, and comprises a base, and two positioning seats are symmetrically mounted on the top surface of the base. Welding is conducted through the sliding stirring needle, the protective frame is driven to move together, the protective frame covers and protects a welding area and is in a sealed state, it is guaranteed that the clean environment is not interfered by the outside world, then the cleaning roller conducts rotating friction on a welding seam, metal filings generated in the welding process and impurities such as oxide on the surface are removed, and the welding quality is improved. After rotary cleaning, the brush sweeps and scrapes cleaned metal chips to the edge of the base, cleaning is facilitated, the sleeve and the mounting base are driven by the transmission plate to rotate synchronously, the cleaning roller and the brush rotate to the other side of the stirring needle at the moment, the cleaning roller and the brush clean the weld joint on the other side of the workpiece at the moment, and the cleaning efficiency is improved. And cleaning is more thorough through two times of cleaning in different directions.
Owner:SHIJIABO (KUNSHAN) MASCH MFG CO LTD

Textile compression packaging equipment and use method thereof

The invention discloses textile compression packaging equipment and a using method thereof.The textile compression packaging equipment comprises a packaging box body, an air cylinder is fixedly connected to the upper portion of the packaging box body, a lower pressing plate is fixedly connected to the output end of the air cylinder, a toothed plate is arranged above the lower pressing plate, the toothed plate is in meshed connection with a gear rod, and the gear rod is in transmission connection with a threaded rod; when the equipment works, firstly, the control box drives the tooth column to rotate, the sliding plate is driven to slide along the supporting frame, an opening of the packaging box body is quickly closed, and dust carried by outside air is prevented from entering the packaging box body; and then, a dust suction pump forms a directional dust suction channel through exclusive holes in the side face of the packaging box body and the connecting box, scraps in the box and on the surfaces of the textiles are actively sucked, impurities are filtered in cooperation with a filter plate, dust is effectively prevented from being accumulated for a long time, the problem that the impurities enter the machine along with airflow is fundamentally solved, and a clean environment is provided for follow-up packaging.
Owner:YICHENG CHENGXIONG WEAVING CO LTD

Method for manufacturing optical fiber

To provide a method for manufacturing an optical fiber, in which generation of spikes is prevented.SOLUTION: A method includes a drawing step to manufacture an optical fiber by drawing while feeding a glass preform into a heating furnace. The glass preform has a core rod and a clad tube into which the core rod is inserted, a support tube is joined to an upper end of the clad tube so as to communicate with a gap between the core rod and the clad tube. During the drawing step, the gap and an internal space of the support tube are brought into a state where pressure is lower than atmospheric pressure. An atmosphere within 1 m around the glass preform is set to a clean environment in which the number of particles having a size of 0.3 μm or more and less than 0.5 μm is 15000 per CF or less, and the number of particles having a size of 0.5 μm or more but less than 1.0 μm is 3500 per CF or less.SELECTED DRAWING: Figure 1
Owner:SUMITOMO ELECTRIC INDUSTRIES LTD

A wood grooving mechanism

This utility model relates to the field of wood processing technology and discloses a wood grooving mechanism, including: a cutting blade mounted on a workbench via a mounting bracket; a protective cover located around the outer ring of the cutting blade; a compression device mounted on a base plate; and multiple nozzles, all connected to the compression device via connecting pipes, with the nozzles located inside the protective cover. In this utility model, by incorporating a protective cover, compression device, nozzles, a dust collection device, a dust collection hood, a telescopic component, and a push plate, the protective cover prevents wood chips from splashing, maintaining a clean environment and ensuring operator safety. The compression device and nozzles generate high-speed airflow to blow away wood chips from the cutting blade, keeping the blade sharp, reducing energy consumption, and extending its lifespan. The dust collection device and dust collection hood efficiently collect wood chips, optimizing the environment and reducing the impact of wood chips on the environment and human health. The telescopic component and push plate assist in cleaning debris from the workbench, ensuring effective collection and improving the mechanism's versatility and practicality.
Owner:WUHAN XINTIANDI PLASTIC WOOD PACKING CO LTD

Substrate container system and method of cleaning substrate container

Support devices for use with substrate containers for holding or transporting substrates in a clean environment, and associated systems and methods of using the support devices and substrate containers, are described. A substrate container support system includes a base having a horizontal base surface; the nozzle vertically extends from the surface of the base, and the nozzle can vertically move relative to the surface of the base; a pressure sensor adapted to sense a fluid pressure of a fluid passing through the nozzle; and a control system including a hardware processor and a memory, the control system configured to adjust a vertical position of the nozzle based on the fluid pressure.
Owner:ENTEGRIS INC

Chemical filter for removing IPA pollution in clean environment

The invention relates to the technical field of chemical filters, in particular to a chemical filter for removing IPA pollution in a clean environment, which comprises a flange box, a quick release structure, a sealing structure, a fan filter unit, a filter structure and a dustproof structure. The quick-release structure is used in cooperation with the sealing structure, overall disassembly and assembly of the chemical filter can be conveniently and quickly achieved, repeated screwing of bolts is avoided, firmness is high after installation, the sealing effect is good, the locking structure is installed on the filtering structure, quick assembly and disassembly of the filtering material can be conveniently and quickly achieved, and the practicability is high. The problem that filtering materials are inconvenient to fix due to narrow internal space of the flange box is solved, meanwhile, independent disassembly of the multiple filtering materials is achieved, flexibility is high, a dustproof net at a flange connector is convenient to disassemble due to the arrangement of a dustproof structure, the problem that the flange connector and a pipeline are integrally disassembled is solved, the dustproof net is convenient to disassemble and clean, and the working efficiency is improved. And the disassembly and assembly efficiency is improved.
Owner:SHENZHEN ESKY CLEAROOMS TECH CO LTD

Dustproof movable workbench

The dustproof movable workbench comprises a first movable assembly, a second movable assembly, a movable platform and a transmission assembly, and the second movable assembly is installed on the first movable assembly in a sealed mode and reciprocates in the extending direction of the first movable assembly; the moving platform is installed on the second moving assembly in a sealed mode and reciprocates in the extending direction of the second moving assembly, and the transmission assembly is connected with one end of the second moving assembly and drives the moving platform to move in the extending direction of the second moving assembly. The driving part is installed outside the clean environment by arranging the transmission assembly, and a sealing connection mode is adopted, so that particles generated by friction are effectively reduced, the maintenance effect of the clean environment is improved, the pollution risk is reduced, and meanwhile, the transmission efficiency and the dustproof performance are improved.
Owner:SHANGHAI TOFFLON SCI & TECH CO LTD

Pressure control device of loading cavity, wafer transmission device and method and equipment thereof

The invention discloses a pressure control device of a loading cavity, a wafer transmission device and a method and equipment thereof, the pressure control device comprises a backfilling pipeline, a valve, a flow limiter and a diffuser, an air inlet of the backfilling pipeline is connected with an air source, an air outlet of the backfilling pipeline is communicated with the loading cavity, and the valve is connected with the flow limiter. The valve, the flow limiter and the diffuser are sequentially arranged on the backfilling pipeline in the direction from the air inlet to the air outlet. According to the invention, under the action of the flow limiter and the diffuser, the flow velocity of the air flow is reduced, the uniformity is improved, and slow backfilling of the loading cavity is realized, so that the pressure in the loading cavity is always kept greater than the pressure of the front-end module in the subsequent wafer transfer process, and the air flow always flows from the loading cavity to the front-end module; the environment in the loading cavity is effectively protected from being affected by the outside, the clean environment in the cavity is guaranteed, and the particle effect is improved.
Owner:PIOTECH (SHANGHAI) CO LTD

Method for reducing content of metal copper in silicon wafer body at low cost

PendingCN121646289ACu2 ionsCopper ion transport
The invention relates to the technical field of semiconductors, in particular to a method for reducing the content of metal copper in a silicon wafer body at low cost. The method comprises the following steps of: firstly, promoting copper ions in a silicon wafer body to migrate to the surface through one of two pretreatment modes of natural storage or low-temperature heating; wherein the natural storage refers to sealing placement in a clean environment of 25-50 DEG C for more than 1 year, and the low-temperature heating refers to heating in an inert atmosphere of 300-400 DEG C for not less than 2 hours; afterwards, the pretreated silicon wafer is conveyed to a cleaning operation room by using AGV equipment, and the silicon wafer is cleaned by using a full-automatic cleaning machine through SC-1, pure water, SC-2, an ozone solution and HF liquid medicine in sequence and dried, so that copper impurities on the surface of the silicon wafer are thoroughly removed; according to the method, the migration characteristic of copper ions in silicon is utilized, a conventional cleaning process is combined, efficient, low-cost and large-scale reduction of the copper content in the silicon wafer body is achieved, the geometrical characteristics and the surface quality of the silicon wafer are not damaged, and the method has wide industrial applicability.
Owner:SHANGHAI SEMICON WAFER TECH CO LTD

Cleaning equipment for sulfonate composite calcium-based lubricating grease

The utility model relates to cleaning equipment for sulfonate composite calcium-based lubricating grease in the technical field of lubricating grease cleaning, which comprises an oil storage barrel, a connecting valve for connecting a water pump and a spray gun assembly, and the spray gun assembly comprises a mounting head, a connecting rod, a reversing head and a vertical spray head; according to the utility model, multi-angle and multi-direction spraying is realized, the cleaning work of auxiliary lubricating grease is ensured, the lubricating grease on the inner wall of the oil storage barrel is washed through impact formed by high-pressure water flow, and the water flow is effectively distributed by adopting a multi-stage stepped progressive flow channel structure, so that each spraying head can obtain enough water pressure; due to the fact that the structure is connected with the inner wall of the top cover to form a sealing structure, leakage or liquid splashing is prevented, most cleaning procedures can be completed in the barrel, cleanliness of the cleaning environment is reduced to the maximum extent, cleaning and caring work is reduced, the phenomenon that the ground slips due to grease is reduced, personal safety of operators is guaranteed, and the service life of the operators is prolonged. And the working efficiency is improved, and meanwhile, the manpower expenditure is reduced.
Owner:DONGGUAN XINYOU LUBRICATION TECH CO LTD

Application method of phycomycete synergy in livestock and poultry breeding wastewater treatment

The invention provides an application method of phycomycete synergy in livestock and poultry breeding wastewater treatment, which comprises the following steps: S1, strengthening pretreatment: sequentially carrying out solid-liquid separation, demulsification and oil removal and water quality balance adjustment on livestock and poultry breeding wastewater; grease and refractory pollutants are removed through enhanced pretreatment, and a clean environment is created for metabolism of phycomycetes; the modified carrier and the composite flora improve the stability and the synergistic effect of the system; the photovoltaic system is matched with intelligent regulation and control and accurately adapts to the growth requirements of phycomycetes, so that efficient utilization of clean energy is realized, the influence caused by fluctuation of factors such as illumination and temperature is avoided, the wastewater treatment process is always kept in an efficient metabolic state, external energy consumption input is greatly reduced, and breakthrough optimization of a technical route is achieved.
Owner:SOUTH CHINA UNIV OF TECH