Photoelectric detection device transfer manufacturing system and method

A photodetector and transfer system technology, applied in the manufacture of electrode systems, electrical components, discharge tubes/lamps, etc., can solve problems affecting the performance of photocathode and the life of the whole tube, and achieve strong economic benefits and social significance. Avoid the effect of desensitization and prevent contamination

Active Publication Date: 2014-04-09
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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  • Application Information

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Problems solved by technology

[0011] In order to solve the technical problem that the existing photomultiplier tube manufacturing method affects the performance of the photocathode and the life of the whole tube, the invention provides a photodetector device transfer manufacturing system

Method used

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  • Photoelectric detection device transfer manufacturing system and method
  • Photoelectric detection device transfer manufacturing system and method
  • Photoelectric detection device transfer manufacturing system and method

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Embodiment Construction

[0052] The present invention will be described below in conjunction with the accompanying drawings.

[0053] Such as figure 1 As shown, the present invention adopts the structure of three independent vacuum chambers according to the characteristics of the microchannel plate type large-area photomultiplier tube. There is a flapper valve.

[0054] The schematic diagram of the production system is shown in figure 2 , the functions of each main part are as follows:

[0055] 1) Cathode cavity 15: place the cathode alkali source material and the photoelectron collector for testing cathode sensitivity, glow discharge components and other components. Multiple stations can be set inside to store the cathode component 16 and supply power to the cathode component.

[0056] 2) Anode chamber 23: store the anode MCP assembly 22, install the tungsten halogen lamp and the electron gun, bake and degas the MCP, and also set up multiple stations inside, store the anode assembly to improve ef...

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Abstract

The invention provides a photoelectric detection device transfer manufacturing system and method. The photoelectric detection device transfer manufacturing system comprises a cathode cavity, an anode cavity, a working transmission cavity, a transfer transmission system, a drying oven and a vacuum-pumping system, wherein the cathode cavity, the anode cavity and the working transmission cavity are separated through valves, the cathode cavity and the anode cavity are located on the two sides of the working transmission cavity respectively, the transfer transmission system comprises a horizontal transmission system and a lifting system, and the horizontal transmission system comprises an anode assembly containing device, a cathode assembly containing device and a horizontal transmission device. When a photoelectric detection device is manufactured through the manufacturing system, all other technological processes except the anode assembly assembling process are completed in a clean environment with ultrahigh vacuum, and therefore core devices of an MCP can be prevented from being polluted in the manufacturing process; the MCP anode assembly processing process and the photocathode manufacturing process are independent from each other so that non-cathode parts can be prevented from being polluted by cathode alkali metal and the MCP can be kept in a working state with the optimum performance.

Description

technical field [0001] The invention relates to a photoelectric detection and imaging device transfer manufacturing system, in particular to a transfer manufacturing system of a micro-channel plate-type large-area photomultiplier tube (MCP-PMT). Background technique [0002] The photomultiplier tube is a vacuum device that converts extremely weak optical signals into electrical signals. It is widely used in optical analysis instruments, medical instruments, oil logging, space exploration, high-energy physics, laser applications and other fields. It involves the national economy. multiple industries. [0003] The invention of this patent is mainly aimed at the manufacture of microchannel plate-type large-area photomultiplier tubes for neutrino detection. The schematic diagram of the structure principle of the microchannel plate type large-area photomultiplier tube is as follows: figure 1 , mainly composed of glass shell 1 (about Ф500mm), photocathode, anode assembly (includ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J9/00
Inventor 卢裕刘虎林田进寿赛小锋韦永林徐向晏王俊锋
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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