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71results about "Diffusion pumps" patented technology

Anti-explosion oil diffusion pump vacuum system and anti-explosion control method thereof

The invention relates to an anti-explosion oil diffusion pump vacuum system and an anti-explosion control method of the vacuum system. The anti-explosion oil diffusion pump vacuum system comprises an oil diffusion pump system, wherein the oil diffusion pump system is provided with an oil diffusion pump, an air extraction opening of the oil diffusion pump is communicated with an air outlet of a vacuum chamber through a pipeline; the anti-explosion oil diffusion pump vacuum system further comprises a control system; the control system comprises a pressure detecting device which is arranged at a front-stage air exhaust pipeline of the oil diffusion pump, a temperature measuring device which is arranged inside the oil diffusion pump and which is used for detecting the oil temperature in real time, and a pressure measuring device for measuring the pressure inside the vacuum chamber; the control system is provided with a critical pressure Pq and an anti-explosion pressure Pfb; and the opening and closing of pump packages and valve groups in the oil diffusion pump system are controlled by the control system by acquiring real-time data measured by the pressure detecting device, the temperature measuring device and the pressure measuring device. According to the vacuum system, the oil temperature, the front stage pressure and the pressure of the vacuum chamber are monitored in real time through the control system, and are compared with the set critical pressure and the anti-explosion pressure, and corresponding measures are taken if a danger is detected, so that the oil diffusion pump is prevented against explosion.
Owner:常州大成绿色镀膜科技有限公司 +2
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