Minisize diffusion pump and preparation method thereof

Abstract

The invention discloses a micro disperse pump which comprises a pump chamber, a one-way valve, a pump inlet, a pump outlet and a driving device inside the pump chamber; wherein, the one-way valve is between the pump chamber and the pump inlet, and between the pump chamber and the pump outlet; the one-way valve is a wedge disperse tube with different positive and passive fluxes; the fluid of pump chamber can be expanded and contracted to generate pressure difference, and according to the different pressures of positive and passive fluxes in the wedge disperse tube, to generate one-way continuous fluid transmission. The inventive micro disperse pump can drive fluid via adsorbing fluid or directly drive fluid. The production is based on silicon micro-mechanical processing technique and micro-mould technique, with simple process, lower cost, high reliability and the application for integrating other micro-fluid systems. It has wider application in the micro-fluid control analysis chip.

Description

Technical field [0001] The invention belongs to the technical field of microfluid control, transmission, and microactuators, and relates to a non-movable valve plate type micro diffusion pump and a preparation method thereof. Background technique [0002] The main feature of the microfluidic analysis chip system is that fluid flows in various configurations of microchannels and reaction cells. By controlling the fluid flow, various functions on the chip system are completed. The core of the operation in the microfluidic chip system is the drive of microfluidics, which is the foundation of microfluidic technology. The micropump is a very important microdrive and the core element of the microfluidic control system. At present, micro pumps prepared by micro-machining (MEMS) technology are mainly divided into mechanical fluid control micro pumps and non-mechanical fluid control micro pumps. Both the inlet and outlet of the mechanical micro pump need to match two one-way micro valves ...

AI Technical Summary

Problems solved by technology

[0004] The present invention overcomes the disadvantages of the valved mechanical micropump, such as complex structure, difficult preparation process, and application limitations of non-mechanical micropumps, and provides a valveless microdiffusion pump, thereby improving the reliability and working stability of the micropump. And easy to integrate with most microfluidic systems, suitable for micro-transport of various fluids

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