45 results about "Diffusion pump" patented technology

The invention relates to the technical field of titanium metal smelting, in particular to a precise sponge titanium distillation production process which comprises the following steps: after the sealing performance of an assembled reactor is qualified, heating the first to fourth areas of a distillation furnace to 1000-1050 DEG C; a vacuum unit composed of a roots pump and an oil diffusion pump is opened, the vacuum degree is accurately controlled in the 15th hour, the 30th hour, the 45th hour, the 60th hour, the 75th hour, the 90th hour and the 105th hour in the distillation process, the corresponding vacuum degree ranges are 3000-3500Pa, 1000-1200Pa, 400-450Pa, 50-80Pa, 30-50Pa, 10-15Pa and 3-7Pa in sequence, the vacuum degree is monitored 1h in advance in each stage, and the vacuum degree is maintained by adjusting the rotating speed through a variable frequency motor or starting a standby pump for combined air exhaust; after distillation is finished, an inert gas circulating cooling system is adopted for cooling, and the cooling rate is smaller than or equal to 10 DEG C / min. According to the process, the vacuum degree and the temperature are precisely regulated and controlled in stages, impurities in the sponge titanium can be effectively removed, the product purity is improved, meanwhile, it is guaranteed that the production process is stable and controllable, and the production efficiency and the product quality consistency are improved.

The utility model provides a diffusion pump cooling device, which relates to the technical field of diffusion pumps and comprises a fan and a transmission gear. An electric heating oil pan is installed at the bottom end of the air suction pipe, a fixed ring plate is welded to the outer side face of the electric heating oil pan, an air inlet frame is welded to the upper side face of the fixed ring plate, a rotating fan is rotationally connected to the inner side face of the air inlet frame, and a driving gear is engaged to the inner side face of the rotating fan; the transmission fluted disc is welded to the outer side face of the rotating shaft, and the bottom end of the rotating shaft is installed on a motor shaft of the motor. The fan is connected to the upper side face of the rotating shaft through a bolt. A heat dissipation shell is welded to the lower side face of the fixing ring plate, a bottom frame is welded to the lower side face of the heat dissipation shell, and a dust cover is bonded to the outer side face of the bottom frame. Through the arrangement of the motor, the fan, the driving gear and the rotating fan, air heat dissipation of the electric heating oil pan is achieved, the heat dissipation efficiency of the air suction pipe is improved, and the problems that a traditional diffusion pump oil pan is long in natural heat dissipation time and low in cooling efficiency are solved.

Methods, systems, and apparatus include using an alkali metal as working fluid of a diffusion pump to remove hydrogen and / or helium from a reaction chamber of a nuclear fusion reactor. One example system includes a nuclear fusion reactor, a diffusion pump with a working fluid comprising an alkali metal, the diffusion pump being arranged to remove hydrogen and / or helium from the nuclear fusion reactor during operation of the system.

The present application relates to the technical field of cold trap, and particularly relates to a high-efficiency diffusion pump cold trap, which comprises a cold trap shell, the cold trap shell comprises a cold trap shell body and a cold trap cover body; further comprising a condensing assembly, the condensing assembly comprises a cylindrical main condensing cavity, a plurality of sub-condensing cavities and a coil condensing pipe; the inside of the main condensing cavity forms a main condensing cavity; one end of the sub-condensing cavity extends into the main condensing cavity along the radial direction of the main condensing cavity to form a condensing connecting part, and the other end of the sub-condensing cavity extends out of the condensing diffusion part along the radial direction of the main condensing cavity; the inside of the sub-condensing cavity forms a sub-condensing cavity; the plurality of sub-condensing cavities are respectively communicated with the main condensing cavity; the coil condensing pipe is in contact with the inner wall of the main condensing cavity; and the coil condensing pipe is also respectively in contact with the condensing connecting parts of the plurality of sub-condensing cavities. The present application can efficiently condense the oil vapor and other gas molecules generated by the diffusion pump, and significantly improves the efficiency of the oil vapor trapping, adsorbing and condensing.

The utility model discloses a cooling device for a high-vacuum heat treatment furnace. The cooling device comprises a cold trap and a main valve, one end of the cold trap is connected with the closed cavity of the high-vacuum heat treatment furnace through the main valve, and the other end of the cold trap is connected with the oil diffusion pump, so that the closed cavity of the high-vacuum heat treatment furnace can be communicated with the oil diffusion pump through the main valve via the cold trap; and a workpiece is arranged in the closed cavity of the high-vacuum heat treatment furnace. The utility model relates to the technical field of vacuum heat treatment furnaces, and can solve the problem that no device for preventing the oil return phenomenon of a diffusion pump of a high-vacuum heat treatment furnace exists in the prior art.

The utility model discloses a high vacuum oil diffusion pump oil filtering device which comprises an oil drain pump and a filtering cylinder bin, the liquid inlet end of the oil drain pump is communicated with an oil drain pipe of an oil pool at the bottom of a high vacuum oil diffusion pump, and one end of the filtering cylinder bin is connected with the liquid outlet end of the oil drain pump through a liquid inlet valve. The high-vacuum oil diffusion pump relates to the technical field of high-vacuum oil diffusion pumps, and is suitable for filtering working oil by utilizing multiple filtering components under the condition that the dust content in pumped gas is higher, so that granular impurities in the working oil are filtered out, and the working oil can be filtered out by utilizing multiple filtering components. The filtered working oil enters the middle bin and is reinjected into the oil pool of the high-vacuum oil diffusion pump through the reflux pump, and the multiple filtering assemblies can be reversely washed after filtering is completed, so that particle impurities in the working oil can be effectively filtered out, the repeated utilization rate of the oil is increased, and the service life of the working oil is prolonged.

The utility model discloses an efficient vacuum pump set system, including: initialized pump set, molecular pump set and diffusion pump set, the initialized pump set is respectively communicated with the molecular pump set, the winding chamber of vacuum coating machine and the coating chamber of vacuum coating machine, the molecular pump set is communicated with the winding chamber, and the diffusion pump set is communicated with the coating chamber of vacuum coating machine. The diffusion pump set is respectively communicated with the winding chamber and the coating chamber, and the winding chamber is communicated with the coating chamber; a first baffle valve and a fourth baffle valve are respectively arranged on a connecting pipeline of the diffusion pump set and the winding chamber, the first baffle valve is close to one end of the winding chamber, and the fourth baffle valve is close to one end of the diffusion pump set; and a third baffle valve is arranged on a connecting pipeline of the diffusion pump set and the coating chamber. Vacuum pumping is achieved through the multiple stages of pump sets, the diffusion pump sets are matched with the corresponding baffle valves, the number of times of opening and closing of the diffusion pump sets in the continuous production process can be reduced through a self-circulation air pipe channel, and production efficiency is improved.

The vacuum-pumping system of the vacuum evaporation device comprises a vacuum cavity, an upper vacuum-pumping set and a lower vacuum-pumping set, the upper vacuum-pumping set is connected with the upper portion of the vacuum cavity, the lower vacuum-pumping set is connected with the lower portion of the vacuum cavity, the lower vacuum-pumping set comprises a mechanical pump and a roots pump, the mechanical pump is communicated with the roots pump, and the roots pump is communicated with the vacuum cavity. The roots pump is communicated with the lower part of the vacuum cavity; the upper vacuum set comprises a mechanical pump and a roots pump, in the upper vacuum set, the mechanical pump is communicated with the roots pump, the roots pump is communicated with the upper portion of the vacuum cavity, and a plurality of molecular pumps connected in parallel and a plurality of diffusion pumps connected in parallel are further arranged between the roots pump of the upper vacuum set and the vacuum cavity. The number of the vacuum pumps of the upper vacuum-pumping set is larger than that of the vacuum pumps of the lower vacuum-pumping set. According to the utility model, the two groups of vacuum pumps are used for carrying out vacuum treatment on corresponding areas, and the molecular pumps and the diffusion pumps are connected with the vacuum cavity, so that a better vacuumizing effect can be achieved, and the effect of saving space can be achieved.

The invention relates to the technical field of metal purification, in particular to a device and method for purifying metal through cooperation of external field strengthening and horizontal vacuum distillation. Comprising a horizontal vacuum distillation system which comprises a quartz tube, and a raw material graphite boat, a distillation heater, a condensation collection boat and a steam transition tube which are arranged in the quartz tube; the external field strengthening system comprises at least one of an electromagnetic field generator, an ultrasonic field generator and a microwave field generator which are arranged on the outer wall of the quartz tube; the fractional condensation collection system comprises a plurality of condensation heaters arranged in the quartz tube; the vacuum system comprises a mechanical pump and a diffusion pump which are communicated through a vacuum pipeline, and the diffusion pump is communicated with the quartz tube and used for controlling the vacuum degree in the quartz tube. According to the device and method for purifying the metal through cooperation of external field strengthening and horizontal vacuum distillation, the impurity separation efficiency is high.

The utility model discloses a diffusion pump heating device which comprises a diffusion pump body and a heating assembly. The diffusion pump body comprises a diffusion pump bottom plate and a barrel plate arranged on the periphery of the diffusion pump bottom plate, and an oil cavity used for containing pump oil is formed in the diffusion pump bottom plate and the barrel plate. The multiple sets of heating assemblies are arranged and comprise arc-shaped stainless steel heating pipes, heating wires are arranged in the stainless steel heating pipes, the stainless steel heating pipes are further filled with heating powder used for fixing the heating wires, the diffusion pump bottom plate is provided with installation holes matched with the two ends of the stainless steel heating pipes, and the installation holes are provided with sealing rings. The two ends of the stainless steel heating pipe extend out of the mounting holes, and the heating wire is connected with a power source through a wire. The stainless steel heating pipe is arranged on the diffusion pump bottom plate, so that the stainless steel heating pipe can be in direct contact with diffusion pump oil in the diffusion pump. Therefore, the heating efficiency can be improved, the electric energy is saved, the production cost is reduced, and the vacuum degree of the product is improved.

The invention belongs to the technical field of film plating machines, and particularly relates to a vacuum system of a winding type film plating machine and a vacuumizing method thereof.The vacuum system of the winding type film plating machine comprises a winding chamber used for film winding, an evaporation chamber used for film plating, a first pump set connected with the evaporation chamber and a second pump set connected with the winding chamber; the first pump set comprises a diffusion pump connected with the evaporation chamber and a plurality of first mechanical pumps connected in series, the second pump set comprises a plurality of second mechanical pumps and is provided with a connecting pipeline, and the two ends of the connecting pipeline are connected between the second pump set and the winding chamber and between the diffusion pump and the first mechanical pumps respectively. Wherein after the winding type coating machine is closed, the connecting pipeline is opened, and the plurality of first mechanical pumps are closed; by arranging the connecting pipeline between the first pump set and the second pump set, after the cabin is closed, the connecting pipeline can be opened, the diffusion pump of the first pump set is connected with the second mechanical pumps in series, then the first mechanical pumps are closed, energy consumption is effectively reduced, and the energy-saving and environment-friendly requirements are met.

The invention relates to the technical field of thermal diffusion pumps, in particular to a thermal diffusion pump heating structure and a diffusion pump, and the thermal diffusion pump heating structure comprises a controller which is used for converting alternating current into superaudio current; the heating coil is connected with the controller and used for converting the ultrasonic frequency current into a magnetic field; the vortex plate is connected with the diffusion pump and used for converting the magnetic energy into heat energy to heat an oil pan at the bottom of the diffusion pump. According to the electromagnetic induction principle, the controller is used for generating ultrasonic frequency current to drive the heating coil to generate a high-speed alternating magnetic field, so that heat is directly and quickly generated in the vortex plate due to the vortex effect, and the vortex heat effect is generated in the extremely thin skin depth of the surface of the vortex plate, so that the thermal inertia is extremely small; and the system can quickly start heating.

This utility model relates to the field of high-purity quartz glass processing, and specifically to a high-pressure vacuum electric melting furnace. The utility model includes a furnace body assembly, a hot zone assembly, a vacuum system, a pressurization system, a stirring mechanism, and a rotating mechanism. The furnace body assembly includes an upper furnace body, a lower furnace body, and a locking ring assembly, which seals the upper and lower furnace bodies. The hot zone assembly includes an upper insulation screen assembly, a middle insulation screen assembly, a lower insulation screen assembly, a main heater, and a bottom heater. The lower part of the hot zone assembly is limited by a hot zone fixing bracket, and the lower insulation screen assembly moves up and down via an insulation lifting assembly. The vacuum system includes a dry pump, a diffusion pump, a pre-evacuation valve, a high-pressure butterfly valve, a high-pressure valve, a pre-stage valve, a vacuum gauge, and a filter. The pressurization system includes a low-pressure tank, a high-pressure tank, a mass flow meter, a one-way valve, a high-pressure inlet valve, and a gas source. The stirring component in the stirring mechanism can move up and down to stir the material. The rotating component in the rotating mechanism drives the crucible to rotate via a motor.

1. Name of the product in this design: Oil drum (diffusion pump oil). 2. Purpose of this design: For the outer packaging of diffusion pump oil. 3. The key design features of this product are the combination of shape and pattern. 4. The image or photograph that best illustrates the design's key features: the front view.

The present invention provides a large-scale industrial vacuum machine system, which includes two subsystems: a vacuum pumping system and a box system, including the following steps: after placing the material, the box seat rises and seals with the box cover, valve 120 is opened, the rotary vane pump performs rough pumping, and then the Roots pump starts to work. When the pressure reaches the set value, valve 120 is closed, valves 110 and valve 130 are opened, and the diffusion pump starts to work. After the air extraction is completed, the pumps of each level stop working. The box body is composed of a box cover and a box seat, wherein the box body is fixedly installed, and the box seat is driven by a cylinder to run along a guide rail. In the present invention, a light curtain sensor is installed between the box cover and the box seat. When the box cover moves upward, the light curtain sensor is connected. When encountering an obstacle, the light curtain sensor is activated, and at the same time, the box cover stops moving and resets, thereby improving the safety of the working process.

The invention relates to the technical field of atomic gas chamber manufacturing, in particular to a vacuum heating reduction preparation system for an alkali metal elementary substance. The vacuum heating reduction preparation system of the alkali metal elementary substance comprises a reaction container; the glass vacuum device comprises a glass diffusion pump and a mechanical pump, one side of the glass diffusion pump is connected with the reaction container, and the other side of the glass diffusion pump is connected with the mechanical pump; the first heating element is used for heating a mixed material in the reaction container, and the second heating element is used for baking and degassing the reaction container; and the temperature control device is electrically connected with the first heating piece and the second heating piece. The glass diffusion pump is adopted as the main pump, gas in the system before reaction and gas generated during reduction reaction are discharged, the limit vacuum degree of the system is improved, meanwhile, the alkali metal vapor corrosion resistance of the glass vacuum device is obviously enhanced compared with that of a metal vacuum device, the vacuum degree of the system is reduced slightly after long-term use, and the service life of the system is prolonged. And the high-purity alkali metal elementary substance meeting the requirement of atomic clock atomic air chamber vacuum filling can be stably prepared.

The invention provides a device and method for improving the forming quality of a titanium alloy anti-gravity investment casting piece, and belongs to the technical field of titanium alloy anti-gravity investment casting. The problem that a certain amount of inert gas is required to be filled in the smelting process of the titanium alloy, and the contradiction exists between the gas content in the mold shell and the gas content in the mold shell is lower is solved. Wherein the first vacuumizing assembly is used for realizing primary vacuum and secondary vacuum of the upper working tank and the lower working tank; the second vacuumizing assembly is used for achieving ultimate vacuum of the upper working tank and the lower working tank, in the second vacuumizing assembly, a negative pressure vacuum tank is communicated with the upper working tank through a second upper working tank vacuumizing valve, a second sliding valve pump, a second roots pump and a second low valve are sequentially communicated with the negative pressure vacuum tank, and a diffusion pump is communicated with the negative pressure vacuum tank through a second main valve; and the diffusion pump is communicated with the second roots pump through a high valve. The device is high in ultimate vacuum pumping efficiency and high in speed for the anti-gravity investment casting device for the titanium alloy, and the forming quality of castings is improved.

The fin type armored heating assembly of the oil diffusion pump comprises a positioning ring groove, a heating ring bin is arranged on the positioning ring groove, the exterior of the heating ring bin is movably installed on the positioning ring groove through an outer buckle plate to be closed, a plurality of armored heating sleeves are arranged on the inner side wall of the positioning ring groove in a surrounding mode, and electric heating pipes are movably installed in the armored heating sleeves. According to the utility model, the positioning ring groove and the plurality of armored heating sleeves are fixedly installed, and then the electric heating pipes are inserted into the armored heating sleeves from the interior of the heating ring bin for heating, so that the armored heating sleeves can be heated, and the heat conduction fins are movably installed on the plurality of armored heating sleeves. And heat is diffused through the heat conducting fins, indirect energy loss of heating is greatly reduced, the efficiency of the vacuum pump is improved, meanwhile, the electric heating pipe does not make contact with the interior of the diffusion pump, and the problem of exposure of high-voltage electric energy is avoided.

The invention discloses a method and a system for realizing a high-temperature temperature field of a material based on laser-assisted heating. The method comprises the following steps of: prefabricating speckles with proper size, certain density and random degree on the surface of a tested piece; the test piece is tightly attached to the graphite plate in a mode of drilling holes in the graphite plate; fixing the test piece on the clamp through a pin, and closing the furnace door; vacuumizing the high-temperature furnace through a mechanical pump and a diffusion pump until the high-temperature furnace is close to a vacuum state; resistance wire heating is started, and resistance wire input current is slowly increased; when the temperature of the high-temperature furnace reaches 700 DEG C, a heat preservation state is set, and the control cabinet can automatically set the current to maintain the current temperature; starting a laser to start auxiliary heating, setting the output power to be 1%, increasing the power after the laser is stable, increasing the power by not more than 5% every time, and when the power is increased to 41%, enabling the temperature of the test piece to reach 1200 DEG C; and starting a tensile experiment, and measuring speckle deformation on the surface of the test piece through non-contact measurement equipment to obtain test piece deformation data.

The utility model discloses a kind of vacuum automatic oil refining and oil filling equipment, including workbench and the silicon oil purification mechanism, diffusion pump mechanism, oil filling mechanism, molecular pump mechanism and oil inlet mechanism set on workbench;Silicon oil purification mechanism is used to heat purification of silicon oil, diffusion pump mechanism is used to provide vacuum environment for silicon oil purification mechanism;Oil filling mechanism is used to carry out silicon oil filling to pressure sensor, molecular pump mechanism is used to provide vacuum environment for oil filling mechanism;Oil inlet mechanism is used to provide silicon oil to silicon oil purification mechanism.The utility model realizes multifunctional integration, simultaneously realizes the oil refining and oil filling process of automation, reduces manual operation link, greatly shortens the overall time from silicon oil preparation to filling completion and subsequent detection, effectively improves production efficiency, can better adapt to the rhythm of large-scale modernization production.

The invention belongs to the technical field of oil diffusion pumps, and particularly relates to an annular nozzle structure of an oil diffusion pump which comprises a pump shell assembly and a pump core assembly. The pump core assembly is arranged in the pump shell assembly, and a steam channel is formed in the pump core assembly. An air exhaust channel is arranged between the pump shell assembly and the pump core assembly; the air exhaust channel is communicated with the air suction port and the air outlet; the annular nozzle structure is arranged on the radial outer side of the pump core assembly and communicates with the steam channel, and an outlet of the annular nozzle structure is formed in the air exhaust channel and inclines downwards. An inner channel and an outer channel are arranged on the inner side and the outer side of an outlet of the annular nozzle structure respectively so that air can be sucked at the same time through the inner channel and the outer channel. According to the scheme, two air suction surfaces can be formed at the outlet of the annular nozzle structure, so that the air suction rate, the air suction amount and the air suction pressure intensity range of the oil diffusion pump are effectively increased; and the air exhaust stability is improved.

The utility model relates to the technical field of diffusion pumps, in particular to a movable fixing device for a diffusion pump. The device comprises an L-shaped frame, the surface of the L-shaped frame is fixedly connected with a fixing plate, one side of the fixing plate is fixedly connected with a servo motor, the output end of the servo motor is fixedly connected with a threaded rod, the surface of the L-shaped frame is provided with a moving hole, the inner surface of the moving hole is slidably connected with a sliding frame, and the sliding frame is fixedly connected with the L-shaped frame. The sliding frame is in threaded connection with the arc surface of the threaded rod, a round rod is slidably inserted into the sliding frame, the arc surface of the round rod is fixedly connected with a connecting frame, one side of the connecting frame is fixedly connected with a diffusion pump body, two limiting grooves are formed in the inner surface of the moving hole, and limiting rods are slidably connected to the inner surfaces of the limiting grooves. The problems that a diffusion pump body is fixedly connected with an L-shaped frame, the height cannot be adjusted, operation of maintenance personnel is difficult, the maintenance time is prolonged, and the labor intensity is increased are solved.

The application discloses a diffusion pump lubricating oil composition, which comprises the following components in percentage by mass: ionic liquid 0.2-3%; anti-foaming agent 0.005-0.03%; and the balance is base oil. The diffusion pump lubricating oil composition has the following advantages: on the one hand, the main component of the diffusion pump lubricating oil is ionic liquid, which has good solubility in methylphenyl silicone oil; on the other hand, the diffusion pump lubricating oil has excellent corrosion resistance (the corrosion grade of copper sheet at 100 DEG C for 3 hours is less than or equal to 1), rust resistance (liquid phase rusting is qualified) and anti-foaming property (foam tendency / foam stability is less than or equal to 10 / 0 mL / mL), especially excellent corrosion resistance. The diffusion pump lubricating oil is used in bearings and shaft seals in the cavity of a diffusion pump, can play an excellent lubricating role, prolong the service life of the diffusion pump and broaden the use range of the diffusion pump.

The utility model discloses a high vacuum diffusion pump used for molecular distillation equipment, which relates to the technical field of high vacuum systems, and comprises a diffusion pump device, the diffusion pump device comprises a pump body, an exhaust pipe, a fan and an air inlet pipe, the high vacuum diffusion pump effectively increases air flow speed through multi-time compression in the diffusion pump in a staged manner, and the air flow speed is increased. The diffusion pump not only solves the problem that a current rotary vane vacuum pump cannot meet the high vacuum requirement, but also can meet the condition that a molecular pump cannot be used in an environment with material steam, can continuously and stably provide an ultra-low vacuum environment for specific equipment, and can achieve the ultra-low vacuum degree by additionally arranging an oil return prevention device. When part of oil vapor molecules move towards the air inlet, the centrifugal disc and the cooling plate can enable the oil vapor molecules to drop on the filter, the filter is made of multilayer filter materials with special apertures and adsorption performance, oil drops are prevented from polluting distilled materials, the oil return prevention device prevents oil drops from returning in real time, and stable operation of the system is guaranteed.

The invention provides a method for preparing a beryllium-titanium alloy rod through suspension smelting. The method comprises the following steps that raw material titanium and raw material beryllium blocks are put into a crucible according to the proportion of 30-90 wt% of beryllium and 10-70 wt% of titanium; the smelting chamber is vacuumized, heating is started when the vacuum degree reaches 100 Pa or below, the heating power is increased at the speed of 10 KW / 10 min, and materials in the crucible are melted; when the materials are heated to a preset temperature range of 700-1000 DEG C, the roots pump, the diffusion pump and the mechanical pump are sequentially closed; when the material is heated to a preset temperature of 1000 DEG C, argon with preset purity is filled for protection; the heating power is increased by a preset value, so that the temperature of the melt is increased to 1400-1450 DEG C, refining melting down is kept for 5-10 minutes, and the melt is fully stirred; cooling and controlling the temperature of the melt to be 1200-1350 DEG C, and casting the melt into a metal ingot mold; and processing the cast ingot obtained by pouring into an electrode bar.

The utility model provides semi-automatic exhausting and inflating equipment for an infrared heating lamp tube, which comprises a diffusion pump set, an operation panel box, a first drag chain unit, a second drag chain unit, a forming gas cylinder, a protective gas cylinder, a supporting plate and a controller which are integrated on a rack, the supporting plate is arranged on the front side, the first drag chain unit is arranged on the rear side of the supporting plate, the guide rail and the first drag chain unit are connected with the second drag chain unit to drive the second drag chain unit to move transversely, the second drag chain unit is provided with a flame projector used for baking a lamp tube, and a pipeline used for exhausting and inflating the lamp tube is arranged in the locking hoop. The two ends of the supporting plate are provided with clamping blocks used for clamping the ends of the lamp tube and electrifying the lamp tube. The device has the advantages of being reasonable in structural design, high in automation degree, high in machining precision and capable of guaranteeing safety and saving labor cost.

The invention relates to the technical field of cold traps, in particular to an efficient diffusion pump cold trap which comprises a cold trap shell, and the cold trap shell comprises a cold trap shell body and a cold trap cover body. The condensation assembly comprises a cylindrical main condensation cavity, a plurality of sub condensation cavities and a coiled pipe type condensation pipe; a main condensation cavity is formed in the main condensation cavity; one end of each sub-condensation cavity extends into the main condensation cavity in the radial direction of the main condensation cavity to form a condensation connecting part, and the other end of each sub-condensation cavity extends outwards in the radial direction of the main condensation cavity to form a condensation diffusion part; an edge condensation sub-cavity is formed in the condensation sub-cavity; the plurality of sub condensation cavities are respectively communicated with the main condensation cavity; the coiled pipe type condensation pipe is in contact with the inner wall of the main condensation cavity; and the coil pipe type condensation pipe is also respectively contacted with the condensation connecting parts of the plurality of sub condensation cavities. Oil vapor and other gas molecules generated by the diffusion pump can be efficiently condensed, and the trapping, adsorption and condensation efficiency of the oil vapor is remarkably improved.

The utility model discloses a double-layer chamber magnetron sputtering coating equipment, comprising: a chamber door, a first chamber, a second chamber, an argon gas bottle, a diffusion pump, a vacuum pump, and a water chiller; the first chamber comprises: a first shell, an air inlet pipe, a vacuum valve, and a pressure relief valve; the second chamber comprises: a second shell, a mounting column, a magnet, a rotating disk, a bearing platform for bearing a substrate, and a target material platform for mounting a target material; the mounting column is fixedly connected to the first shell and the second shell; the magnet is fixedly mounted on the top of the second shell; the bearing platform is fixedly connected to the rotating disk; the double-layer coating chamber adopted by the utility model utilizes the temperature difference between the first chamber and the second chamber during the coating process to increase the contact rate between the plasma and the substrate, improve the deposition rate of target atoms, improve the coating efficiency, and reduce the consumption of argon gas.

The utility model discloses a drying device for preparing high-purity expandable graphite, and belongs to the technical field of expanded graphite processing. A pressing cover is opened, expanded graphite needing to be dried is placed in a bearing box, after placing is completed, the pressing cover is closed, a diffusion pump of a drying mechanism is started, hot air is conveyed to a bent pipe, a pneumatic butterfly valve is adjusted, the hot air inlet amount can be adjusted according to the use requirement, and the hot air enters a connecting pipe and is conveyed to the bearing box; an inner cylinder is installed on the outer side of the bearing box and supported by the inner cylinder, the inner cylinder is sleeved with an outer cylinder, a certain gap is formed between the outer cylinder and the inner cylinder, heat removal treatment can be conducted in time, a connecting pipe is communicated with the inner cylinder, a plurality of ventilation holes are formed in a longitudinal side plate of the bearing box, and hot air enters the bearing box through the ventilation holes. Expanded graphite can be evenly dried, the position of the expanded graphite does not need to be manually adjusted, and the machining efficiency is improved.

The utility model discloses a polishing device for the inner surface of a diffusion pump shell. The polishing device comprises a mounting mechanism and a polishing mechanism. The mounting mechanism is used for mounting the diffusion pump shell and comprises a guide rail, a sliding table, a moving module, a rolling wheel set and a rolling motor, the moving module is used for driving the sliding table to move along the guide rail, the rolling wheel set is arranged on the sliding table and used for rolling, abutting and mounting the diffusion pump shell, and the rolling motor drives the rolling wheel set to rotate so as to drive the diffusion pump shell to rotate; the polishing mechanism is arranged at one end of the guide rail and comprises a lifting assembly and a polishing assembly, the polishing assembly is installed on the lifting assembly, the lifting assembly is used for driving the polishing assembly to ascend and descend, the polishing assembly comprises a cantilever, a polishing wheel set and a grinding motor, the cantilever is arranged in the opening direction of the diffusion pump shell, and the grinding motor is installed at the front end of the cantilever. The polishing motor is provided with the polishing wheel set for polishing the inner surface of the diffusion pump shell. Therefore, the inner surface of the diffusion pump shell can be automatically polished, the labor intensity is reduced, and the machining efficiency is improved.