19 results about "Diffusion pump" patented technology

The invention relates to the technical field of titanium metal smelting, in particular to a precise sponge titanium distillation production process which comprises the following steps: after the sealing performance of an assembled reactor is qualified, heating the first to fourth areas of a distillation furnace to 1000-1050 DEG C; a vacuum unit composed of a roots pump and an oil diffusion pump is opened, the vacuum degree is accurately controlled in the 15th hour, the 30th hour, the 45th hour, the 60th hour, the 75th hour, the 90th hour and the 105th hour in the distillation process, the corresponding vacuum degree ranges are 3000-3500Pa, 1000-1200Pa, 400-450Pa, 50-80Pa, 30-50Pa, 10-15Pa and 3-7Pa in sequence, the vacuum degree is monitored 1h in advance in each stage, and the vacuum degree is maintained by adjusting the rotating speed through a variable frequency motor or starting a standby pump for combined air exhaust; after distillation is finished, an inert gas circulating cooling system is adopted for cooling, and the cooling rate is smaller than or equal to 10 DEG C / min. According to the process, the vacuum degree and the temperature are precisely regulated and controlled in stages, impurities in the sponge titanium can be effectively removed, the product purity is improved, meanwhile, it is guaranteed that the production process is stable and controllable, and the production efficiency and the product quality consistency are improved.

The present application relates to the technical field of cold trap, and particularly relates to a high-efficiency diffusion pump cold trap, which comprises a cold trap shell, the cold trap shell comprises a cold trap shell body and a cold trap cover body; further comprising a condensing assembly, the condensing assembly comprises a cylindrical main condensing cavity, a plurality of sub-condensing cavities and a coil condensing pipe; the inside of the main condensing cavity forms a main condensing cavity; one end of the sub-condensing cavity extends into the main condensing cavity along the radial direction of the main condensing cavity to form a condensing connecting part, and the other end of the sub-condensing cavity extends out of the condensing diffusion part along the radial direction of the main condensing cavity; the inside of the sub-condensing cavity forms a sub-condensing cavity; the plurality of sub-condensing cavities are respectively communicated with the main condensing cavity; the coil condensing pipe is in contact with the inner wall of the main condensing cavity; and the coil condensing pipe is also respectively in contact with the condensing connecting parts of the plurality of sub-condensing cavities. The present application can efficiently condense the oil vapor and other gas molecules generated by the diffusion pump, and significantly improves the efficiency of the oil vapor trapping, adsorbing and condensing.

The utility model discloses a cooling device for a high-vacuum heat treatment furnace. The cooling device comprises a cold trap and a main valve, one end of the cold trap is connected with the closed cavity of the high-vacuum heat treatment furnace through the main valve, and the other end of the cold trap is connected with the oil diffusion pump, so that the closed cavity of the high-vacuum heat treatment furnace can be communicated with the oil diffusion pump through the main valve via the cold trap; and a workpiece is arranged in the closed cavity of the high-vacuum heat treatment furnace. The utility model relates to the technical field of vacuum heat treatment furnaces, and can solve the problem that no device for preventing the oil return phenomenon of a diffusion pump of a high-vacuum heat treatment furnace exists in the prior art.

The utility model discloses a high vacuum oil diffusion pump oil filtering device which comprises an oil drain pump and a filtering cylinder bin, the liquid inlet end of the oil drain pump is communicated with an oil drain pipe of an oil pool at the bottom of a high vacuum oil diffusion pump, and one end of the filtering cylinder bin is connected with the liquid outlet end of the oil drain pump through a liquid inlet valve. The high-vacuum oil diffusion pump relates to the technical field of high-vacuum oil diffusion pumps, and is suitable for filtering working oil by utilizing multiple filtering components under the condition that the dust content in pumped gas is higher, so that granular impurities in the working oil are filtered out, and the working oil can be filtered out by utilizing multiple filtering components. The filtered working oil enters the middle bin and is reinjected into the oil pool of the high-vacuum oil diffusion pump through the reflux pump, and the multiple filtering assemblies can be reversely washed after filtering is completed, so that particle impurities in the working oil can be effectively filtered out, the repeated utilization rate of the oil is increased, and the service life of the working oil is prolonged.

The utility model discloses an efficient vacuum pump set system, including: initialized pump set, molecular pump set and diffusion pump set, the initialized pump set is respectively communicated with the molecular pump set, the winding chamber of vacuum coating machine and the coating chamber of vacuum coating machine, the molecular pump set is communicated with the winding chamber, and the diffusion pump set is communicated with the coating chamber of vacuum coating machine. The diffusion pump set is respectively communicated with the winding chamber and the coating chamber, and the winding chamber is communicated with the coating chamber; a first baffle valve and a fourth baffle valve are respectively arranged on a connecting pipeline of the diffusion pump set and the winding chamber, the first baffle valve is close to one end of the winding chamber, and the fourth baffle valve is close to one end of the diffusion pump set; and a third baffle valve is arranged on a connecting pipeline of the diffusion pump set and the coating chamber. Vacuum pumping is achieved through the multiple stages of pump sets, the diffusion pump sets are matched with the corresponding baffle valves, the number of times of opening and closing of the diffusion pump sets in the continuous production process can be reduced through a self-circulation air pipe channel, and production efficiency is improved.

The invention relates to the technical field of metal purification, in particular to a device and method for purifying metal through cooperation of external field strengthening and horizontal vacuum distillation. Comprising a horizontal vacuum distillation system which comprises a quartz tube, and a raw material graphite boat, a distillation heater, a condensation collection boat and a steam transition tube which are arranged in the quartz tube; the external field strengthening system comprises at least one of an electromagnetic field generator, an ultrasonic field generator and a microwave field generator which are arranged on the outer wall of the quartz tube; the fractional condensation collection system comprises a plurality of condensation heaters arranged in the quartz tube; the vacuum system comprises a mechanical pump and a diffusion pump which are communicated through a vacuum pipeline, and the diffusion pump is communicated with the quartz tube and used for controlling the vacuum degree in the quartz tube. According to the device and method for purifying the metal through cooperation of external field strengthening and horizontal vacuum distillation, the impurity separation efficiency is high.

The invention relates to the technical field of thermal diffusion pumps, in particular to a thermal diffusion pump heating structure and a diffusion pump, and the thermal diffusion pump heating structure comprises a controller which is used for converting alternating current into superaudio current; the heating coil is connected with the controller and used for converting the ultrasonic frequency current into a magnetic field; the vortex plate is connected with the diffusion pump and used for converting the magnetic energy into heat energy to heat an oil pan at the bottom of the diffusion pump. According to the electromagnetic induction principle, the controller is used for generating ultrasonic frequency current to drive the heating coil to generate a high-speed alternating magnetic field, so that heat is directly and quickly generated in the vortex plate due to the vortex effect, and the vortex heat effect is generated in the extremely thin skin depth of the surface of the vortex plate, so that the thermal inertia is extremely small; and the system can quickly start heating.

This utility model relates to the field of high-purity quartz glass processing, and specifically to a high-pressure vacuum electric melting furnace. The utility model includes a furnace body assembly, a hot zone assembly, a vacuum system, a pressurization system, a stirring mechanism, and a rotating mechanism. The furnace body assembly includes an upper furnace body, a lower furnace body, and a locking ring assembly, which seals the upper and lower furnace bodies. The hot zone assembly includes an upper insulation screen assembly, a middle insulation screen assembly, a lower insulation screen assembly, a main heater, and a bottom heater. The lower part of the hot zone assembly is limited by a hot zone fixing bracket, and the lower insulation screen assembly moves up and down via an insulation lifting assembly. The vacuum system includes a dry pump, a diffusion pump, a pre-evacuation valve, a high-pressure butterfly valve, a high-pressure valve, a pre-stage valve, a vacuum gauge, and a filter. The pressurization system includes a low-pressure tank, a high-pressure tank, a mass flow meter, a one-way valve, a high-pressure inlet valve, and a gas source. The stirring component in the stirring mechanism can move up and down to stir the material. The rotating component in the rotating mechanism drives the crucible to rotate via a motor.

1. Name of the product in this design: Oil drum (diffusion pump oil). 2. Purpose of this design: For the outer packaging of diffusion pump oil. 3. The key design features of this product are the combination of shape and pattern. 4. The image or photograph that best illustrates the design's key features: the front view.

The invention provides a device and method for improving the forming quality of a titanium alloy anti-gravity investment casting piece, and belongs to the technical field of titanium alloy anti-gravity investment casting. The problem that a certain amount of inert gas is required to be filled in the smelting process of the titanium alloy, and the contradiction exists between the gas content in the mold shell and the gas content in the mold shell is lower is solved. Wherein the first vacuumizing assembly is used for realizing primary vacuum and secondary vacuum of the upper working tank and the lower working tank; the second vacuumizing assembly is used for achieving ultimate vacuum of the upper working tank and the lower working tank, in the second vacuumizing assembly, a negative pressure vacuum tank is communicated with the upper working tank through a second upper working tank vacuumizing valve, a second sliding valve pump, a second roots pump and a second low valve are sequentially communicated with the negative pressure vacuum tank, and a diffusion pump is communicated with the negative pressure vacuum tank through a second main valve; and the diffusion pump is communicated with the second roots pump through a high valve. The device is high in ultimate vacuum pumping efficiency and high in speed for the anti-gravity investment casting device for the titanium alloy, and the forming quality of castings is improved.

The utility model discloses a kind of vacuum automatic oil refining and oil filling equipment, including workbench and the silicon oil purification mechanism, diffusion pump mechanism, oil filling mechanism, molecular pump mechanism and oil inlet mechanism set on workbench;Silicon oil purification mechanism is used to heat purification of silicon oil, diffusion pump mechanism is used to provide vacuum environment for silicon oil purification mechanism;Oil filling mechanism is used to carry out silicon oil filling to pressure sensor, molecular pump mechanism is used to provide vacuum environment for oil filling mechanism;Oil inlet mechanism is used to provide silicon oil to silicon oil purification mechanism.The utility model realizes multifunctional integration, simultaneously realizes the oil refining and oil filling process of automation, reduces manual operation link, greatly shortens the overall time from silicon oil preparation to filling completion and subsequent detection, effectively improves production efficiency, can better adapt to the rhythm of large-scale modernization production.

The utility model relates to the technical field of diffusion pumps, in particular to a movable fixing device for a diffusion pump. The device comprises an L-shaped frame, the surface of the L-shaped frame is fixedly connected with a fixing plate, one side of the fixing plate is fixedly connected with a servo motor, the output end of the servo motor is fixedly connected with a threaded rod, the surface of the L-shaped frame is provided with a moving hole, the inner surface of the moving hole is slidably connected with a sliding frame, and the sliding frame is fixedly connected with the L-shaped frame. The sliding frame is in threaded connection with the arc surface of the threaded rod, a round rod is slidably inserted into the sliding frame, the arc surface of the round rod is fixedly connected with a connecting frame, one side of the connecting frame is fixedly connected with a diffusion pump body, two limiting grooves are formed in the inner surface of the moving hole, and limiting rods are slidably connected to the inner surfaces of the limiting grooves. The problems that a diffusion pump body is fixedly connected with an L-shaped frame, the height cannot be adjusted, operation of maintenance personnel is difficult, the maintenance time is prolonged, and the labor intensity is increased are solved.

The application discloses a diffusion pump lubricating oil composition, which comprises the following components in percentage by mass: ionic liquid 0.2-3%; anti-foaming agent 0.005-0.03%; and the balance is base oil. The diffusion pump lubricating oil composition has the following advantages: on the one hand, the main component of the diffusion pump lubricating oil is ionic liquid, which has good solubility in methylphenyl silicone oil; on the other hand, the diffusion pump lubricating oil has excellent corrosion resistance (the corrosion grade of copper sheet at 100 DEG C for 3 hours is less than or equal to 1), rust resistance (liquid phase rusting is qualified) and anti-foaming property (foam tendency / foam stability is less than or equal to 10 / 0 mL / mL), especially excellent corrosion resistance. The diffusion pump lubricating oil is used in bearings and shaft seals in the cavity of a diffusion pump, can play an excellent lubricating role, prolong the service life of the diffusion pump and broaden the use range of the diffusion pump.

The utility model discloses a high vacuum diffusion pump used for molecular distillation equipment, which relates to the technical field of high vacuum systems, and comprises a diffusion pump device, the diffusion pump device comprises a pump body, an exhaust pipe, a fan and an air inlet pipe, the high vacuum diffusion pump effectively increases air flow speed through multi-time compression in the diffusion pump in a staged manner, and the air flow speed is increased. The diffusion pump not only solves the problem that a current rotary vane vacuum pump cannot meet the high vacuum requirement, but also can meet the condition that a molecular pump cannot be used in an environment with material steam, can continuously and stably provide an ultra-low vacuum environment for specific equipment, and can achieve the ultra-low vacuum degree by additionally arranging an oil return prevention device. When part of oil vapor molecules move towards the air inlet, the centrifugal disc and the cooling plate can enable the oil vapor molecules to drop on the filter, the filter is made of multilayer filter materials with special apertures and adsorption performance, oil drops are prevented from polluting distilled materials, the oil return prevention device prevents oil drops from returning in real time, and stable operation of the system is guaranteed.

The invention relates to the technical field of molecular distillation, in particular to a multi-stage series feed preheating system of molecular distillation equipment, which comprises a material conveying module, a pretreatment module, a gradient preheating module and a waste heat recovery, the material conveying module realizes material split-flow conveying through a material conveying pipeline, a feeding pipe, a material box and double main pipes; the pretreatment module is used for cooperatively adjusting the material viscosity through a stirrer, a speed reducer and a viscosity sensor; the gradient preheating module comprises a low-stage preheating unit, a middle-stage preheating unit and a high-stage preheating unit, each stage is provided with an independent preheater and is connected in series, the low-stage preheating unit is provided with a waste heat recovery tank, the middle-stage preheating unit is provided with a conduction oil cooling tank with a conduction oil branching valve, the high-stage preheating unit is provided with a heat exchanger, and the molecular distillation retort is provided with a condenser and a diffusion pump. And a condensation heat exchange coil pipe between the condenser and the diffusion pump is connected with a waste heat recovery tank. According to the system, the temperature is accurately controlled through three-stage gradient preheating, and the distillation separation purity and yield are improved; and multi-path waste heat recovery is achieved, and energy consumption is reduced.

The present application belongs to the technical field of oil diffusion pump, and particularly relates to an annular nozzle structure of an oil diffusion pump, which comprises a pump shell assembly and a pump core assembly; the pump core assembly is arranged in the pump shell assembly, and a vapor channel is arranged in the pump core assembly; a gas suction channel is arranged between the pump shell assembly and the pump core assembly; the gas suction channel is in communication with a gas suction port and a gas outlet; the annular nozzle structure is arranged on the radial outer side of the pump core assembly and is in communication with the vapor channel, and the outlet of the annular nozzle structure is arranged in the gas suction channel and is inclined downward; an inner channel and an outer channel are arranged on the inner side and the outer side of the outlet of the annular nozzle structure respectively, so that air is sucked through the inner channel and the outer channel simultaneously. The outlet of the annular nozzle structure can form two air suction surfaces, effectively increasing the air suction rate, the air suction amount and the air suction pressure range of the oil diffusion pump, and improving the air suction stability.

The application relates to the technical field of atomic gas chamber manufacturing, in particular to a vacuum heating reduction preparation system of alkali metal elements. The vacuum heating reduction preparation system of alkali metal elements comprises a reaction container, a glass vacuum device, a first heating piece, a second heating piece and a temperature control device. The glass vacuum device comprises a glass diffusion pump and a mechanical pump, one side of the glass diffusion pump is connected with the reaction container, and the other side is connected with the mechanical pump. The first heating piece is used for heating the mixed materials in the reaction container, and the second heating piece is used for baking and degassing the reaction container. The temperature control device is electrically connected with the first heating piece and the second heating piece. The glass diffusion pump is used as a main pump, which is beneficial to removing the gas in the system before the reaction and the gas generated during the reduction reaction, improves the ultimate vacuum degree of the system, and obviously enhances the alkali metal vapor corrosion resistance of the glass vacuum device compared with the metal vacuum device. After long-term use, the vacuum degree of the system is reduced little, and the high-purity alkali metal elements meeting the vacuum filling of the atomic clock atomic gas chamber can be stably prepared.

The invention discloses an air exhaust control method and system of a vacuum system, and belongs to the technical field of vacuum. According to the method, the starting and stopping sequence of the pre-pumping valve and the pre-pumping pump set is intelligently decided by monitoring the initial pressure state of the main working chamber, so that pressure difference impact is eliminated. When the system is shut down, the system leakage rate is acquired, and a shutdown strategy is dynamically selected according to the leakage rate: the system is directly shut down when the leakage rate is low; and when the leakage rate is high, the cold trap is firstly closed, and the high valve and the diffusion pump are closed after the temperature of the cold trap returns to the safe temperature, so that the cold trap is effectively prevented from freezing. In addition, the method supports short-time cabin door opening operation without completely closing the diffusion pump, and the system restarting time is greatly saved by controlling the cold trap temperature returning and recooling process. The system adopts double absolute pressure gauges to monitor the pressure difference, and the difference value is used as the criterion of inflation completion and door opening safety, so that the operation safety is remarkably improved. The problems that in the prior art, equipment is prone to being damaged, efficiency is low, and safety is insufficient are solved.

This invention relates to the field of cold trap technology, and more particularly to a cold trap device for an oil diffusion pump in a vacuum coating machine. The device includes a housing and a condensation assembly, comprising a cold trap shell, a cooling tank, and a liquid storage container. The cold trap shell is disposed within the housing, and its interior forms a receiving cavity. An air inlet pipe is located at the top of the cold trap shell, and its inlet is connected to a steam inlet. The cooling tank is installed at the top of the receiving cavity, and its interior forms a cooling chamber. The upper part of the cooling chamber is connected to the lower outlet of the air inlet pipe via a guide pipe, and the lower part of the cooling chamber forms a drain outlet. A coiled condenser tube is disposed on the outer wall of the cooling tank. A spray assembly is used to atomize cooling water and spray it into the cooling chamber, ensuring sufficient contact between the atomized cooling water and steam. The liquid storage container is used to collect condensate. A water cooling assembly is disposed within the housing and connected to the coiled condenser tube to provide cooling water. This invention achieves efficient steam condensation and recovery.