Vacuum automatic oil refining and filling equipment

Abstract

The utility model discloses a kind of vacuum automatic oil refining and oil filling equipment, including workbench and the silicon oil purification mechanism, diffusion pump mechanism, oil filling mechanism, molecular pump mechanism and oil inlet mechanism set on workbench;Silicon oil purification mechanism is used to heat purification of silicon oil, diffusion pump mechanism is used to provide vacuum environment for silicon oil purification mechanism;Oil filling mechanism is used to carry out silicon oil filling to pressure sensor, molecular pump mechanism is used to provide vacuum environment for oil filling mechanism;Oil inlet mechanism is used to provide silicon oil to silicon oil purification mechanism.The utility model realizes multifunctional integration, simultaneously realizes the oil refining and oil filling process of automation, reduces manual operation link, greatly shortens the overall time from silicon oil preparation to filling completion and subsequent detection, effectively improves production efficiency, can better adapt to the rhythm of large-scale modernization production.

Description

TECHNICAL FIELD

[0001] The utility model relates to automatic oil filling technical field, concretely relates to a vacuum automatic oil refining and oil filling equipment. BACKGROUND

[0002] Pressure sensor has a very key role in industrial production and many technical fields. Its working principle is based on a set of ingenious mechanism: the measured pressure is transmitted to the silicon pressure resistance type sensitive element through the isolation diaphragm and the filled silicon oil, realizing the accurate conversion of pressure to electrical signal, so that the subsequent signal processing and data monitoring can be smoothly carried out.

[0003] In the production and manufacturing process of the sensor, the processing and filling of the silicon oil are crucial steps. First, the silicon oil needs to be refined in a vacuum environment, and then the pressure sensor is filled with silicon oil through the oil filling hole in the interior. At present, when filling the silicon oil into the pressure sensor, there are mainly two kinds of traditional operation methods: one is that the worker carefully sucks the refined silicon oil into the oil filling cavity of the pressure sensor by using a needle tube; the other is to directly place the pressure sensor into the refined silicon oil for soaking, so that the silicon oil gradually fills the entire sensor interior under the combined influence of pressure difference and capillary action. However, whether it is needle tube suction or soaking filling, these two traditional manufacturing processes have obvious disadvantages, that is, the time spent is relatively long, and the overall production cycle is lengthened from the silicon oil preparation, filling operation to the final quality detection, etc. Thus, the production efficiency is low, which is difficult to meet the modern production demand of large scale and high efficiency. Therefore, a vacuum automatic oil refining and oil filling equipment is urgently needed. SUMMARY

[0004] In view of the deficiencies in the prior art, the utility model provides a vacuum automatic oil refining and oil filling equipment.

[0005] The utility model discloses a vacuum automatic oil refining and oil filling equipment, including workbench and setting up silicon oil purification mechanism, diffusion pump mechanism, oil filling mechanism, molecular pump mechanism and oil inlet mechanism on the workbench,

[0006] The silicon oil purification mechanism is used for heating and purifying silicon oil, and the diffusion pump mechanism is used for providing a vacuum environment for the silicon oil purification mechanism.

[0007] The oil filling mechanism is used for filling silicon oil into the pressure sensor, and the molecular pump mechanism is used for providing a vacuum environment for the oil filling mechanism.

[0008] The oil inlet mechanism is used for providing silicon oil to the silicon oil purification mechanism.

[0009] As a further improvement of the utility model, further include protective cover device, the protective cover device includes upper protective cover and lower protective cover;

[0010] The lower protective cover is arranged on the foot plate of the workbench, and the upper protective cover is arranged on the lower protective cover; doors for facilitating operation and maintenance are reserved around the upper protective cover and the lower protective cover.

[0011] As a further improvement of the utility model, the silicon oil purification mechanism comprises an oil refining tank and a magnetic stirrer;

[0012] The oil refining tank is fixed on the magnetic stirrer through a cantilever beam load cell, the magnetic stirrer is installed on the workbench, and a heating silica gel sleeve is arranged on the outer side of the oil refining tank;

[0013] The oil inlet of the oil refining tank is connected with the oil inlet mechanism, the oil outlet of the oil refining tank is connected with the oil filling mechanism, and the vacuum hole in the top of the oil refining tank is connected with the diffusion pump mechanism through a telescopic bellows; a liquid level sensor and a first vacuum gauge are further arranged on the top of the oil refining tank; automatic baffle valves are arranged at the oil inlet and the oil outlet, and a butterfly valve is arranged at the vacuum hole.

[0014] As a further improvement of the utility model, the diffusion pump mechanism comprises a diffusion pump, a flapper valve, a cold well, an adapter pipe, a first mechanical vacuum pump and a first pneumatic baffle valve;

[0015] The gas inlet of the diffusion pump is connected with the gas outlet of the adapter pipe in sequence through the flapper valve and the cold well, the gas inlet of the adapter pipe is connected with the silicon oil purification mechanism, and a first pressure recovery valve is arranged on the adapter pipe;

[0016] The first pneumatic baffle valve is arranged at the pre-extraction port of the diffusion pump, a welded bellows is arranged at the gas inlet of the first pneumatic baffle valve, and the gas inlet of the first pneumatic baffle valve is connected with the gas inlet of the first mechanical vacuum pump through a first differential pressure inflation valve.

[0017] As a further improvement of the utility model, a first resistance gauge is arranged at the pre-extraction port of the diffusion pump, and a first ionization gauge is arranged at the gas inlet of the first pneumatic baffle valve.

[0018] As a further improvement of the utility model, the oil filling mechanism comprises a square cavity, a tray device, a second pneumatic baffle valve, a third pneumatic baffle valve and a vacuum fine adjustment valve;

[0019] The tray device is arranged in the square cavity, a hatch for taking and placing the tray device is arranged on the square cavity, and a plurality of placing grooves for placing the pressure sensor are formed in the tray device;

[0020] The two oil inlets of the top of the square cavity are respectively provided with the vacuum fine adjustment valve and the second pneumatic baffle valve, the outlet end of the vacuum fine adjustment valve and the outlet end of the second pneumatic baffle valve are inserted into the square cavity and are connected with a hose for filling oil into the tray device; the inlet end of the vacuum fine adjustment valve and the inlet end of the second pneumatic baffle valve are connected in parallel and then connected with the silicon oil purification mechanism through a pipeline.

[0021] The gas suction port of the square cavity is connected with the molecular pump mechanism through the third pneumatic baffle valve.

[0022] As a further improvement of the utility model, a second resistance gauge and a second ionization gauge are further arranged on the gas suction port of the square cavity; a second pressure recovery valve is arranged on the gas inlet side of the third pneumatic baffle valve.

[0023] As a further improvement of the utility model, the molecular pump mechanism comprises a molecular pump, a second mechanical vacuum pump, an oil mist filter, a high vacuum baffle valve and a second pressure difference air charging valve.

[0024] The gas inlet of the molecular pump is connected with the oil filling mechanism through the high vacuum baffle valve; the pre-extraction port of the high vacuum baffle valve is connected with the second mechanical vacuum pump through the second pressure difference air charging valve.

[0025] As a further improvement of the utility model, the gas inlet of the second pressure difference air charging valve is further provided with the oil mist filter.

[0026] As a further improvement of the utility model, the oil filling mechanism comprises an oil return tank, an oil supply tank, a filter and a third mechanical vacuum pump.

[0027] A KF interface of the oil return tank is provided with a third pressure recovery valve, and a third pneumatic baffle valve is arranged on the oil extraction interface of the oil return tank; the oil outlet of the oil return tank is connected with the oil inlet of the oil supply tank through a fourth pneumatic baffle valve and the filter in sequence.

[0028] A liquid level switch and a fourth pressure recovery valve are arranged on the KF interface of the oil supply tank, and the oil outlet of the oil supply tank is connected with the silicon oil purification mechanism through a fifth pneumatic baffle valve; a sixth pneumatic baffle valve is arranged on the oil extraction interface of the oil supply tank.

[0029] The gas inlet of the third mechanical vacuum pump is connected with the third pneumatic baffle valve and the sixth pneumatic baffle valve through a third pressure difference air charging valve respectively.

[0030] Compared with the prior art, the utility model has the beneficial effects that:

[0031] The utility model discloses a silicon oil purification mechanism, diffusion pump mechanism, oil filling mechanism, molecular pump mechanism and oil inlet mechanism are set up, realized multifunctional integration, realized the oil refining and oil filling process of automation simultaneously, reduced manual operation link, greatly shortened the whole time from silicon oil preparation to filling completion and subsequent detection, effectively improved production efficiency, can better adapt the rhythm of large -scale modernization production.

[0032] The utility model discloses a silicon oil purification, diffusion pump vacuumizing, oil filling, molecular pump vacuumizing and oil inlet and so on multiple functions are integrated in one, reduced the floor space of equipment, reduced equipment purchase and maintenance cost, improved the overall integration and cost-effective of equipment.

[0033] The oil return tank in the oil inlet mechanism in the utility model can collect excess or refluxing silicon oil, which can be reused after treatment, saving silicon oil resources and reducing production cost. ACCURACY

[0034] Figure 1 The utility model discloses a structure schematic drawing of vacuum automatic oil refining and oil filling equipment of one embodiment is disclosed;

[0035] Figure 2 The utility model discloses an internal installation schematic drawing of vacuum automatic oil refining and oil filling equipment of one embodiment is disclosed;

[0036] Figure 3 The utility model discloses a structure schematic drawing of silicon oil purification mechanism of vacuum automatic oil refining and oil filling equipment of one embodiment is disclosed;

[0037] Figure 4 The utility model discloses a structure schematic drawing of diffusion pump mechanism of vacuum automatic oil refining and oil filling equipment of one embodiment is disclosed;

[0038] Figure 5 The utility model discloses a structure schematic drawing of oil filling mechanism of vacuum automatic oil refining and oil filling equipment of one embodiment is disclosed;

[0039] Figure 6 The utility model discloses a structure schematic drawing of molecular pump mechanism of vacuum automatic oil refining and oil filling equipment of one embodiment is disclosed;

[0040] Figure 7 The utility model discloses a structure schematic drawing of oil inlet mechanism of vacuum automatic oil refining and oil filling equipment of one embodiment is disclosed;

[0041] Figure 8 The utility model discloses a structure schematic drawing of protective cover device of vacuum automatic oil refining and oil filling equipment of one embodiment is disclosed.

[0042] In the drawing:

[0043] 1, workbench; 2, silicone oil purification mechanism; 2.1, oil refining tank; 2.2, first vacuum gauge; 2.3, cantilever beam load cell; 2.4, magnetic stirrer; 2.5, liquid level sensor; 2.6, telescopic bellows; 2.7, butterfly valve; 2.8, first automatic baffle valve; 2.9, second automatic baffle valve; 2.10, heating silica gel sleeve; 3, diffusion pump mechanism; 3.1, diffusion pump; 3.2, plug valve; 3.3, cold well; 3.4, adapter pipe; 3.5, first pressure recovery valve; 3.6, first resistance gauge; 3.7, first pneumatic baffle valve; 3.8, first ionization gauge; 3.9, welded bellows; 3.10, first differential pressure inflation valve; 3.11, first mechanical vacuum pump; 4, oil filling mechanism; 4.1, square cavity; 4.2, second pneumatic baffle valve; 4.3, vacuum fine adjustment valve; 4.4, second resistance gauge; 4.5, second ionization gauge; 4.6, second pressure recovery valve; 4.7, third pneumatic baffle valve; 4.8, tray device; 5, molecular pump mechanism; 5.1, molecular pump; 5.2, high vacuum baffle valve; 5.3, support; 5.4, second mechanical vacuum pump; 5.5, second differential pressure inflation valve; 5.6, oil mist filter; 6, oil inlet mechanism; 6.1, oil return tank; 6.2, third pressure recovery valve; 6.3, third pneumatic baffle valve; 6.4, fourth pneumatic baffle valve; 6.5, filter; 6.6, oil supply tank; 6.7, fifth pneumatic baffle valve; 6.8, liquid level switch; 6.9, fourth pressure recovery valve; 6.10, oil supply pipe; 6.11, sixth pneumatic baffle valve; 6.12, third differential pressure inflation valve; 6.13, third mechanical vacuum pump; 7, protective cover mechanism; 7.1, upper protective cover; 7.2, lower protective cover. DETAILED DESCRIPTION

[0044] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the present application.

[0045] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0046] In the description of the utility model, need explanation further, unless another explicit provision and limitation, term " install " " link " " connection " should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can indirectly connect through intermediate medium, can be two element internal communication。For ordinary skilled in the art, can understand the concrete meaning of above-mentioned term in the utility model according to specific circumstances.

[0047] The utility model will be described further in detail below in connection with the drawings:

[0048] As Figures 1-2 As shown in the utility model provides a kind of vacuum automatic oil refining and oil filling equipment, including workbench 1 and the silicon oil purification mechanism 2, diffusion pump mechanism 3, oil filling mechanism 4, molecular pump mechanism 5 and oil inlet mechanism 6 being set on workbench 1;Wherein, silicon oil purification mechanism 2 is used to heat purification of silicon oil, diffusion pump mechanism 3 is used to provide vacuum environment for silicon oil purification mechanism 2;Oil filling mechanism 4 is used to fill silicon oil to pressure sensor, molecular pump mechanism 5 is used to provide vacuum environment for oil filling mechanism 4;Oil inlet mechanism 6 is used to provide silicon oil to silicon oil purification mechanism 2.

[0049] In the embodiment, by setting silicon oil purification mechanism 2, diffusion pump mechanism 3, oil filling mechanism 4, molecular pump mechanism 5 and oil inlet mechanism 6, multifunctional integration is realized, and automatic oil refining and oil filling process is also realized, reduces manual operation link, greatly shortens the overall time from silicon oil preparation to filling completion and subsequent detection, effectively improves production efficiency, can better adapt to the rhythm of large-scale modern production;Silicon oil purification, diffusion pump vacuumizing, oil filling, molecular pump vacuumizing and oil feeding are integrated, reduce the floor area of equipment, reduce equipment procurement and maintenance cost, improve the overall integration and cost-effective of equipment.

[0050] Specifically:

[0051] As Figure 3As shown, in the above embodiment, preferably, the silicone oil purification mechanism includes an oil refining tank 2.1, a first vacuum gauge 2.2, a cantilever beam weighing sensor 2.3, a magnetic stirrer 2.4, a liquid level sensor 2.5, a telescopic bellows 2.6, a butterfly valve 2.7, a first automatic baffle valve 2.8, a second automatic baffle valve 2.9, and a heated silicone sleeve 2.10. The oil refining tank 2.1 is fixed to the magnetic stirrer 2.4 by the cantilever beam weighing sensor 2.3. The magnetic stirrer 2.4 is mounted on the workbench 1. The outer side of the oil refining tank 2.1 is covered with a silicone sleeve. A heating silicone sleeve 2.10 is provided; the oil inlet of the oil refining tank 2.1 is connected to the oil inlet mechanism 6, and the oil outlet of the oil refining tank 2.1 is connected to the oil filling mechanism 4; the vacuum hole at the top of the oil refining tank 2.1 is connected to the diffusion pump mechanism 3 through a telescopic bellows pipe 2.6; a liquid level sensor is provided on the KF25 interface at the top of the oil refining tank 2.1, and a first vacuum gauge 2.2 is also provided on the top of the oil refining tank 2.1; a first automatic baffle valve 2.8 is provided at the oil inlet of the oil refining tank 2.1, and a second automatic baffle valve 2.9 is provided at the oil outlet of the oil refining tank 2.1. In this embodiment, a butterfly valve 2.7 is also provided at the vacuum hole at the top of the oil refining tank 2.1.

[0052] In actual use, after the diffusion pump mechanism 3 is started, the butterfly valve 2.7 is opened, and the refining tank 2.1 begins to enter a vacuum. The first vacuum gauge 2.2 indicates that the set vacuum state has been reached, the first automatic baffle valve 2.8 opens, and silicone oil enters the refining tank 2.1 through the pipeline. When the liquid level sensor 2.5 reaches the upper liquid level, the first automatic baffle valve 2.8 closes, and the magnetic stirrer 2.4 and the heating silicone sleeve 2.10 start working, and the silicone oil refining begins. After the process set time is reached and the first vacuum gauge 2.2 reaches the set value, the silicone oil refining is completed.

[0053] like Figure 4 As shown, in the above embodiment, preferably, the diffusion pump mechanism includes a diffusion pump 3.1, a gate valve 3.2, a cold well 3.3, a transfer pipe 3.4, a first pressure relief valve 3.5, a first resistance gauge 3.6, a first pneumatic baffle valve 3.7, a first ionization gauge 3.8, a welded bellows 3.9, a first differential pressure charging valve 3.10, and a first mechanical vacuum pump 3.11. The inlet of the diffusion pump 3.1 is connected to the outlet of the gate valve 3.2, the inlet of the gate valve 3.2 is connected to the outlet of the cold well 3.3, the inlet of the cold well 3.3 is connected to the outlet of the transfer pipe 3.4, and the inlet of the transfer pipe 3.4 is connected to the silicone oil purification mechanism 2. In this embodiment, the inlet of the transfer pipe 3.4 is connected to the telescopic bellows 2.6 of the silicone oil purification mechanism 2. A first pressure relief valve 3.5 is provided on the transfer pipe 3.4. In this embodiment, the transfer pipe 3.4 is a 150-60 transfer pipe.

[0054] In the above embodiments, preferably, a first pneumatic baffle valve 3.7 is provided on the pre-extraction port of the diffusion pump 3.1, and a welded bellows pipe 3.9 is provided on the air inlet of the first pneumatic baffle valve 3.7. The welded bellows pipe 3.9 is connected to the air inlet of the first mechanical vacuum pump 3.11 through a first differential pressure charging valve 3.10. In this embodiment, a first resistance gauge 3.6 is provided on the pre-extraction port of the diffusion pump 3.1, and a first ionization gauge 3.8 is provided on the air inlet of the first pneumatic baffle valve 3.7.

[0055] In actual use, after the first mechanical vacuum pump 3.11 is turned on, the first pneumatic baffle valve 3.7 is opened, and the airflow passes through the cold well 3.3 and the 150-63 transfer pipe to pre-vacuum the oil refining tank 2.1 of the silicone oil purification mechanism 2. When the vacuum degree reaches the preset value, the diffusion pump 3.1 is started, the gate valve 3.2 is opened, and the formal vacuuming begins. When the silicone oil purification mechanism 2 completes the silicone oil refining, the gate valve 3.2 is closed, and the diffusion pump 3.1 and the mechanical pump 3.11 also stop running.

[0056] In the above embodiment, preferably, two silicone oil purification mechanisms 2 are provided, and two air inlets are provided for the two silicone oil purification mechanisms 2 corresponding to the 150-63 adapter pipe. The vacuum holes at the top of the oil refining tank 2.1 of the two silicone oil purification mechanisms 2 are respectively connected to the two air inlets of the corresponding 150-63 adapter pipe through the telescopic corrugated pipe 2.6.

[0057] like Figure 5 As shown, in the above embodiment, preferably, the oil filling mechanism 4 includes a square cavity 4.1, a second pneumatic baffle valve 4.2, a vacuum fine-tuning valve 4.3, a second resistance gauge 4.4, a second ionization gauge 4.5, a second pressure relief valve 4.6, a third pneumatic baffle valve 4.7, and a tray device 4.8. The tray device 4.8 is placed inside the square cavity 4.1, and the square cavity 4.1 is provided with a door for easy access to the tray device 4.8. The tray device 4.8 has several slots for placing pressure sensors. Two oil inlets at the top of the square cavity 4.1 are respectively installed with… There is a vacuum fine-tuning valve and a second pneumatic baffle valve 4.2. The outlet ends of the vacuum fine-tuning valve 4.3 and the second pneumatic baffle valve 4.2 both extend into the square cavity 4.1 and are connected to a hose for filling the tray device 4.8 with oil. The inlet end of the vacuum fine-tuning valve 4.3 and the inlet end of the second pneumatic baffle valve 4.2 are connected in parallel and then connected to the oil outlet of the silicone oil purification mechanism 2 through a pipeline. The air extraction port of the square cavity 4.1 is connected to the molecular pump mechanism 5 through a third pneumatic baffle valve 4.7. That is, the third pneumatic baffle valve 4.7 is provided on the side wall of the air extraction port of the square cavity 4.1.

[0058] In the above embodiments, preferably, the front of the square cavity 4.1 is provided with a hatch, the top of the square cavity 4.1 is provided with two oil inlets, and the back of the square cavity 4.1 is provided with an air extraction port; in this embodiment, the air extraction port on the square cavity 4.1 is also provided with a second resistance gauge 4.4 and a second ionization gauge 4.5; the air inlet side of the third pneumatic baffle valve 4.7 is provided with a second pressure relief valve 4.6.

[0059] In actual use, open the hatch of the square cavity 4.1, place the pressure sensor product into the tray device 4.8, and close the hatch. At this time, the molecular pump mechanism 5 starts to evacuate the square cavity 4.1 through the air extraction port. When the set vacuum degree is reached inside the square cavity 4.1, the silicone oil from the oil refining tank 2.1 enters the tray device 4.8 through the vacuum fine-tuning valve 4.3 and begins to fill the pressure sensor product with oil through the hose. When the set time is reached and the second ionization gauge 4.5 shows that the vacuum degree of the filling chamber has reached the set value, the filling is completed. At this time, open the second pneumatic baffle valve 4.2 to quickly discharge the remaining silicone oil in the pipeline into the tray device 4.8; open the third pneumatic baffle valve 4.7, and the airflow enters through the second pressure return valve 4.6, and the entire filling process of the square cavity 4.1 returns to normal pressure is completed.

[0060] In the above embodiments, preferably, in order to ensure that the silicone oil provided by the silicone oil purification mechanism 2 can flow smoothly into the container 4.1, the silicone oil purification mechanism 2 is set at a higher height than the oil filling mechanism 4 in this embodiment.

[0061] like Figure 6 As shown, in the above embodiment, preferably, the molecular pump mechanism 5 includes a molecular pump 5.1, a high-vacuum baffle valve 5.2, a bracket 5.3, a second mechanical vacuum pump 5.4, a second differential pressure charging valve 5.5, and an oil mist filter 5.6. The molecular pump 5.1 is mounted on the workbench 1 via the bracket 5.3. The high-vacuum baffle valve 5.2 is located at the inlet of the molecular pump 5.1, meaning the outlet of the high-vacuum baffle valve 5.2 is connected to the inlet of the molecular pump 5.1. The inlet of the high-vacuum baffle valve 5.2 is connected to the evacuation port of the container 4.1 of the oil filling mechanism 4. The pre-evacuation port of the high-vacuum baffle valve 5.2 is connected to the second mechanical vacuum pump 5.4 via the second differential pressure charging valve 5.5. In this embodiment, the inlet of the second differential pressure charging valve 5.5 is also equipped with an oil mist filter 5.6.

[0062] In actual use, the second mechanical vacuum pump 5.4 is turned on, and the airflow enters the second differential pressure charging valve 5.5 through the pre-extraction port of the high vacuum baffle valve 5.2, and is drawn away by the second mechanical vacuum pump 5.4, and discharged into the external pipeline through the oil mist filter 5.6; when the vacuum degree in the container 4.1 of the oil filling mechanism 4 reaches the vacuum degree required for the molecular pump 5.1 to start, the molecular pump 5.1 starts, the molecular pump mechanism 5 enters the normal working state, and after the oil filling mechanism 4 completes the oil filling, the molecular pump 5.1 mechanism stops working.

[0063] As Figure 7 shown in the above embodiment, preferably, the oil feeding mechanism 6 comprises an oil return tank 6.1, a third pressure recovery valve 6.2, a third pneumatic flap valve 6.3, a fourth pneumatic flap valve 6.4, a filter 6.5, an oil supply tank 6.6, a fifth pneumatic flap valve 6.7, a liquid level switch 6.8, a fourth pressure recovery valve 6.9, an oil supply pipe 6.10, a sixth pneumatic flap valve 6.11, a third differential pressure charging valve 6.12 and a third mechanical vacuum pump 6.13; wherein a KF16 interface of a tank cover of the oil return tank 6.1 is provided with the third pressure recovery valve 6.2, and an evacuation interface of the oil return tank 6.1 is provided with the third pneumatic flap valve 6.3; an oil outlet of the oil return tank 6.1 is connected with an oil inlet of the oil supply tank 6.6 in sequence through the fourth pneumatic flap valve 6.4 and the filter 6.5; a KF25 interface of a tank cover of the oil supply tank 6.6 is provided with the liquid level switch 6.8 and the fourth pressure recovery valve 6.9, and an oil outlet of the oil supply tank 6.6 is connected with an oil inlet of the silicone oil purification mechanism 2 through the fifth pneumatic flap valve 6.7 and the oil supply pipe 6.10; an evacuation interface of the oil supply tank 6.6 is provided with the sixth pneumatic flap valve 6.11; and an air inlet of the third mechanical vacuum pump 6.13 is connected with the third pneumatic flap valve 6.3 and the sixth pneumatic flap valve 6.11 respectively through the third differential pressure charging valve 6.12.

[0064] In the above embodiment, preferably, a hose is connected at an oil inlet of the oil return tank 6.1, which can be used to manually extract and recycle residual silicone oil of the tray device 4.8 in the cabin 4.1 when the equipment is in a stop state.

[0065] In actual use, the third mechanical vacuum pump 6.13 and the third pneumatic flap valve 6.3 are opened, the oil return tank 6.1 enters a vacuum state, manual pumping of residual silicone oil or new oil on the tray device 4.8 is started, the oil return tank 6.1 is in a full tank state, and the third pneumatic flap valve 6.3 is closed; when the oil return tank 6.1 needs to discharge oil, the third mechanical vacuum pump 6.13 is started, the sixth pneumatic flap valve 6.11 is opened, the oil supply tank 6.6 enters a vacuum state, the fourth pneumatic flap valve 6.4 is opened, and silicone oil enters the oil supply tank 6.6 through the filter 6.5.

[0066] When the liquid level switch 6.8 prompts that the oil supply tank 6.6 is full, the sixth pneumatic flap valve 6.11 is closed, and the third mechanical vacuum pump 6.13 stops working.

[0067] When the oil feeding mechanism 4 needs to supply oil, the fourth pressure recovery valve 6.9 is opened to make the oil supply tank 6.6 recover to normal pressure, the fifth pneumatic flap valve 6.7 is opened, and silicone oil enters the oil refining tank 2.1 of the silicone oil purification mechanism 2 through the oil supply pipe 6.10.

[0068] As Figure 8As shown in the above embodiment, preferably, the workbench 1 further comprises a protective cover device 7, the protective cover device 7 comprising an upper protective cover 7.1 and a lower protective cover 7.2; the lower protective cover 7.2 is arranged on the foot plate of the workbench 1, and the upper protective cover 7.1 is arranged on the lower protective cover 7.2; doors are arranged on the periphery of the upper protective cover and the lower protective cover 7.2 for facilitating operation and maintenance.

[0069] In the above embodiment, preferably, the workbench 1 is in a rectangular frame structure.

[0070] The above only is the preferred embodiment of the present application, and is not used for limiting the present application, for the person skilled in the art, the present application can have various changes and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A vacuum automatic oil refining and filling apparatus, characterized by comprising: The device comprises a workbench and a silicon oil purification mechanism, a diffusion pump mechanism, an oil filling mechanism, a molecular pump mechanism and an oil inlet mechanism arranged on the workbench. The silicon oil purification mechanism is used for heating and purifying silicon oil, and the diffusion pump mechanism is used for providing a vacuum environment for the silicon oil purification mechanism. The oil filling mechanism is used for filling silicon oil into a pressure sensor, and the molecular pump mechanism is used for providing a vacuum environment for the oil filling mechanism. The oil inlet mechanism is used for providing silicon oil for the silicon oil purification mechanism.

2. The vacuum automatic oil refining and filling apparatus according to claim 1, wherein The device further comprises a protective cover device comprising an upper protective cover and a lower protective cover, wherein the lower protective cover is arranged on a foot plate of the workbench, and the upper protective cover is arranged on the lower protective cover; doors are arranged around the upper protective cover and the lower protective cover for facilitating operation and maintenance.

3. The vacuum automatic oil refining and filling apparatus according to claim 1, wherein The silicon oil purification mechanism comprises an oil refining tank and a magnetic stirrer. The oil refining tank is fixed to the magnetic stirrer through a cantilever beam load cell, the magnetic stirrer is installed on the workbench, and a heating silica gel sleeve is arranged outside the oil refining tank. An oil inlet of the oil refining tank is connected to the oil inlet mechanism, an oil outlet of the oil refining tank is connected to the oil filling mechanism, and a vacuum hole at the top of the oil refining tank is connected to the diffusion pump mechanism through an elastic bellows.

4. The vacuum automatic oil refining and filling apparatus according to claim 1, wherein A liquid level sensor and a first vacuum gauge are arranged on the top of the oil refining tank, automatic baffle valves are arranged at the oil inlet and the oil outlet, and a butterfly valve is arranged at the vacuum hole. The diffusion pump mechanism comprises a diffusion pump, a plug valve, a cold well, an adapter pipe, a first mechanical vacuum pump and a first pneumatic baffle valve.

5. The vacuum automatic oil refining and filling apparatus according to claim 4, wherein An air inlet of the diffusion pump is connected to an air outlet of the adapter pipe through the plug valve and the cold well in sequence, an air inlet of the adapter pipe is connected to the silicon oil purification mechanism, and a first pressure recovery valve is arranged on the adapter pipe.

6. The vacuum automatic oil refining and filling apparatus according to claim 1, wherein A first resistance gauge is arranged on the pre-evacuation port of the diffusion pump, and a first ionization gauge is arranged on the air inlet of the first pneumatic baffle valve. The oil filling mechanism comprises a square cavity, a tray device, a second pneumatic baffle valve, a third pneumatic baffle valve and a vacuum fine adjustment valve. The tray device is arranged in the square cavity, a hatch is arranged on the square cavity for facilitating taking and placing the tray device, and a plurality of placing grooves for placing the pressure sensor are formed in the tray device.

7. The vacuum automatic oil refining and filling apparatus according to claim 6, wherein Two oil inlets at the top of the square cavity are respectively provided with the vacuum fine adjustment valve and the second pneumatic baffle valve, outlet ends of the vacuum fine adjustment valve and the second pneumatic baffle valve extend into the square cavity and are connected with a hose for filling oil into the tray device, and an inlet end of the vacuum fine adjustment valve and an inlet end of the second pneumatic baffle valve are connected with the silicon oil purification mechanism through a pipeline in parallel. An air outlet of the square cavity is connected to the molecular pump mechanism through the third pneumatic baffle valve. A second resistance gauge and a second ionization gauge are arranged on the air outlet of the square cavity, and a second pressure recovery valve is arranged on the air inlet side of the third pneumatic baffle valve.

8. The vacuum automatic oil refining and filling apparatus according to claim 1, wherein The molecular pump mechanism comprises a molecular pump, a second mechanical vacuum pump, an oil mist filter, a high vacuum flapper valve and a second pressure difference air charging valve; The gas inlet of the molecular pump is connected with the oil charging mechanism through the high vacuum flapper valve; the pre-extraction port of the high vacuum flapper valve is connected with the second mechanical vacuum pump through the second pressure difference air charging valve.

9. The vacuum automatic oil refining and filling apparatus according to claim 8, wherein The gas inlet of the second pressure difference air charging valve is further provided with the oil mist filter.

10. The vacuum automatic oil refining and filling apparatus according to claim 1, characterized by The oil charging mechanism comprises an oil return tank, an oil supply tank, a filter and a third mechanical vacuum pump; A third pressure relief valve is arranged on the KF interface of the oil return tank, and a third pneumatic flapper valve is arranged on the air extraction interface of the oil return tank; the oil outlet of the oil return tank is connected with the oil inlet of the oil supply tank through a fourth pneumatic flapper valve and the filter in sequence; A liquid level switch and a fourth pressure relief valve are arranged on the KF interface of the oil supply tank, and the oil outlet of the oil supply tank is connected with the silicon oil purification mechanism through a fifth pneumatic flapper valve; a sixth pneumatic flapper valve is arranged on the air extraction interface of the oil supply tank; The gas inlet of the third mechanical vacuum pump is connected with the third pneumatic flapper valve and the sixth pneumatic flapper valve through a third pressure difference air charging valve respectively.

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