A diffusion pump lubricating oil composition
By adding ionic liquid and antifoaming agent methyl silicone ester T903 to the diffusion pump lubricating oil, the resulting composition significantly improves corrosion resistance and antifoaming properties, solves the problem of insufficient performance of existing lubricating oils, extends the service life of diffusion pumps, and broadens the application range.
Patent Information
- Application Number
- CN202210964508.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-08-11
- Publication Date
- 2026-05-01
- Estimated Expiration
- 2042-08-11
AI Technical Summary
The existing diffusion pump lubricating oils have limited improvement in corrosion resistance, rust prevention, and anti-foaming properties, making it difficult to meet the wider application and longer service life requirements of diffusion pumps in fields such as vacuum smelting and vacuum coating.
A diffusion pump lubricating oil composition is formed by combining ionic liquid and antifoaming agent methyl silicone ester T903 with base oil methyl phenyl silicone oil. The ionic liquid content is 0.2-3%, the antifoaming agent content is 0.005-0.03%, and the balance is base oil.
The diffusion pump lubricating oil composition exhibits a copper strip corrosion rating of less than or equal to 1 at 100℃, meets liquid phase corrosion standards, and has a foaming tendency of less than or equal to 10/0 mL/mL, thus extending the service life of the diffusion pump and broadening its application range.