Heat diffusion pump heating structure and diffusion pump

Abstract

The invention relates to the technical field of thermal diffusion pumps, in particular to a thermal diffusion pump heating structure and a diffusion pump, and the thermal diffusion pump heating structure comprises a controller which is used for converting alternating current into superaudio current; the heating coil is connected with the controller and used for converting the ultrasonic frequency current into a magnetic field; the vortex plate is connected with the diffusion pump and used for converting the magnetic energy into heat energy to heat an oil pan at the bottom of the diffusion pump. According to the electromagnetic induction principle, the controller is used for generating ultrasonic frequency current to drive the heating coil to generate a high-speed alternating magnetic field, so that heat is directly and quickly generated in the vortex plate due to the vortex effect, and the vortex heat effect is generated in the extremely thin skin depth of the surface of the vortex plate, so that the thermal inertia is extremely small; and the system can quickly start heating.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of heat diffusion pump, in particular to a heat diffusion pump heating structure and diffusion pump. BACKGROUND

[0002] Oil diffusion pump is one of the core equipment to obtain high vacuum, which is widely used in vacuum smelting, vacuum coating, space simulation and other fields. Its working principle is to heat the special pump oil in the pump bottom oil pot, so that the high-speed and directional oil vapor jet is generated, thereby the momentum transfer to the pumped gas is realized to achieve the exhaust function. Therefore, the performance and efficiency of the heating system directly determine the pumping speed, ultimate vacuum degree and running stability of the oil diffusion pump.

[0003] The traditional oil diffusion pump generally adopts built-in resistance heating scheme, usually the glass heating tube or resistance wire is directly immersed in the bottom of the oil pot or installed below the pot bottom for heating. This heating method has low thermal efficiency and high energy consumption. SUMMARY

[0004] Some simplification or omission may be made in this part and the abstract and title of the specification of the application to avoid obscuring the purpose of this part, the abstract and the title, and such simplification or omission cannot be used to limit the scope of the application.

[0005] To solve the problems of the prior art, one object of the present application is to provide a heat diffusion pump heating structure and diffusion pump.

[0006] In order to achieve the above object, the present application adopts the following technical scheme: a heat diffusion pump heating structure, comprising a controller for converting alternating current into ultrasonic current; a heating coil connected with the controller for converting the ultrasonic current into a magnetic field; an eddy current plate connected with the diffusion pump for converting the magnetic energy into heat energy to heat the oil pot at the bottom of the diffusion pump.

[0007] As a preferred scheme of the heat diffusion pump heating structure of the present application, wherein: the oil pot comprises a pot body and an oil cavity arranged in the pot body, the pot body comprises a pot wall and a pot bottom arranged on the pot wall, and the eddy current plate is arranged in the oil cavity.

[0008] As a preferred scheme of the heat diffusion pump heating structure of the present application, wherein: the pot bottom is made of ceramic material, the thickness of the eddy current plate is 1-2mm, and the eddy current plate is made of material with ferromagnetic property and high resistivity.

[0009] As a preferred scheme of the heat diffusion pump heating structure of the present application, wherein: the outer periphery of the heating coil is provided with a heat dissipation seat, the top of the heat dissipation seat is provided with a contact plate, and the contact plate is made of ceramic material or stainless steel.

[0010] In a preferred embodiment of the thermal diffusion pump heating structure of the present invention, the vortex plate is disposed on the heating coil, and the diameter of the vortex plate is the same as the diameter of the oil cavity.

[0011] In a preferred embodiment of the thermal diffusion pump heating structure of the present invention, a heat-conducting column is provided on the bottom of the pot, and one end of the heat-conducting column is in close contact with the surface of the vortex plate.

[0012] As a preferred embodiment of the thermal diffusion pump heating structure of the present invention, the heating coil includes a coil and a positive terminal at one end of the coil and a negative terminal at the other end of the coil. Ceramic fixing blocks are provided on the outer periphery of both the positive terminal and the negative terminal, and a mounting plate is provided at the bottom of the coil.

[0013] As a preferred embodiment of the heat diffusion pump heating structure of the present invention, the heat sink has a heat dissipation cavity inside, a heat dissipation plate is disposed at the bottom of the mounting plate, and heat dissipation holes are disposed on the heat sink. The projection of the heat dissipation plate in the vertical direction coincides with the coil.

[0014] As a preferred embodiment of the heat diffusion pump heating structure of the present invention, the heat sink includes a spiral tube, one end of which is connected to a water inlet pipe and the other end of which is connected to a first water outlet pipe. A first misaligned groove is provided at the bottom of the spiral tube and at the position of the first water outlet pipe, and a second misaligned groove adapted to the first misaligned groove is provided at the top of the first water outlet pipe. A rib is formed between two adjacent second misaligned grooves.

[0015] As a preferred embodiment of the heat diffusion pump heating structure of the present invention, the heat dissipation plate includes a spiral tube, one end of the spiral tube is connected to a water inlet pipe, the other end of the spiral tube is connected to a second water outlet pipe, a first misalignment groove is provided at the bottom of the spiral tube and at the position of the second water outlet pipe, and a third misalignment groove is provided at the top of the second water outlet pipe.

[0016] The present invention also adopts the following technical solution: a diffusion pump, including an oil pan, a heat dissipation base disposed at the bottom of the oil pan, a pump wall disposed at the top of the oil pan, a pump core disposed within the pump wall, and a condenser tube disposed on the pump wall.

[0017] The beneficial effects of the thermal diffusion pump heating structure of the present invention are as follows: The present invention utilizes the principle of electromagnetic induction to generate an ultrasonic current through a controller, which drives the heating coil to generate a high-speed alternating magnetic field, so that heat is directly and quickly generated inside the eddy current plate due to the eddy current effect. Moreover, since the eddy current heating effect is generated within the extremely thin skin depth of the eddy current plate surface, the thermal inertia is extremely small, enabling the system to achieve rapid start-up heating. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the following description of the embodiments will be briefly introduced. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a connection diagram of the controller of the present invention.

[0020] Figure 2 This is a schematic diagram of the diffusion pump of the present invention.

[0021] Figure 3 This is a schematic diagram of the first connection method for the vortex plate of the present invention.

[0022] Figure 4 This is a schematic diagram of the structure of the heat sink of the present invention.

[0023] Figure 5 This is an exploded view of the heat sink of the present invention.

[0024] Figure 6 This is a schematic diagram of a second connection method for the vortex plate of the present invention.

[0025] Figure 7 This is a schematic diagram of the structure of the heat-conducting column of the present invention.

[0026] Figure 8 This is a schematic diagram showing the connection between the bottom of the pot and the heat-conducting column of the present invention.

[0027] Figure 9 This is a schematic diagram of the heat sink structure of the present invention. Detailed Implementation

[0028] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0029] The terminology used in this invention is that which is currently widely used in the art in consideration of the function of the invention; however, these terms may vary according to the intent of those skilled in the art, precedent, or new technology in the art. Furthermore, specific terms may be chosen by the applicant, and in such cases, their detailed meanings will be described in the detailed description of the invention. Therefore, the terms used in this specification should not be construed as simple names, but rather based on their meanings and the overall description of the invention.

[0030] Reference Figure 1 and Figure 2 This embodiment provides a heat diffusion pump heating structure, including a controller 100, a heating coil 200, and a vortex plate 300.

[0031] The controller 100 is used to convert alternating current into ultrasonic current.

[0032] The external mains power (220V / 380V AC) is first connected to the controller 100. The controller 100 first converts the AC power into DC power, and then converts the DC power into an ultra-high frequency (usually above 20kHz) alternating current. The ultra-high frequency alternating current processed by the controller 100 is then sent to the heating coil 200.

[0033] The heating coil 200 is connected to the controller 100 and is used to convert ultrasonic current into a magnetic field.

[0034] The controller 100 generates an ultrasonic alternating current, which flows into the heating coil 200. Since the coil is a conductor, when the ultrasonic current flows through the heating coil 200, according to Faraday's law of electromagnetic induction, a high-speed changing ultrasonic alternating magnetic field with the same frequency as the current will be generated around the heating coil 200.

[0035] Furthermore, the heating coil 200 adopts a mosquito coil-shaped design and is flat, so that the magnetic field it generates is mainly perpendicular to the plane of the heating coil 200 and concentrated in the area covered by the diameter of the heating coil 200.

[0036] The vortex plate 300 is connected to the diffusion pump 400 and is used to convert magnetic energy into heat energy to heat the oil pot 401 at the bottom of the diffusion pump 400.

[0037] As shown above, the ultrasonic current flows through the heating coil 200, generating a high-speed changing alternating magnetic field around the heating coil 200. This magnetic field acts on the eddy current plate 300, inducing countless rotating closed currents, or "eddy currents," inside the eddy current plate 300. Since the metal itself has resistance, these eddy currents encounter resistance when flowing, thus generating a large amount of heat energy according to Joule's law. Therefore, the eddy current plate 300 generates a large amount of heat energy.

[0038] Reference Figure 3 The oil pan 401 includes a pan body 401a and an oil cavity 401b disposed in the pan body 401a. The pan body 401a includes a pan wall 401a-1 and a pan bottom 401a-2 disposed on the pan wall 401a-1.

[0039] The pot body 401a is made of a material with poor magnetic permeability and extremely low resistivity, such as stainless steel (e.g., type 304) or aluminum alloy. Stainless steel and aluminum alloy are "non-ferromagnetic" or "weakly ferromagnetic" materials. It is difficult for a magnetic field to be established and concentrated in it. Most of the magnetic field will pass through it and act on the material with greater ferromagnetism, thus ensuring that the magnetic field acts on the eddy current plate 300.

[0040] Oil chamber 401b is used to store the oil required for the operation of diffusion pump 400, namely diffusion pump oil. The diffusion pump oil generates vapor when heated, which is used to create and maintain a high vacuum environment during pump operation.

[0041] The eddy plate 300 is made of a material with ferromagnetism and high resistivity.

[0042] The eddy current plate 300 is made of a highly magnetic ferromagnetic material (such as low-carbon steel). This material has low resistance to magnetic fields (magnetic reluctance), allowing the magnetic field to preferentially and concentratedly pass through it. At the same time, ferromagnetic materials have high resistivity; according to Joule's law, under the same induced current, the higher the resistance, the greater the heat generated.

[0043] The thickness of the vortex plate 300 is 1-2mm.

[0044] The skin depth formula is: , in, For skin depth.

[0045] ρ is the resistivity of the conductor.

[0046] ω is the angular frequency.

[0047] μ is the magnetic permeability of the conductor.

[0048] According to the skin depth formula, for ultrasonic frequencies such as above 20kHz, the skin depth is very shallow, only one or two millimeters.

[0049] Therefore, a thickness of 1-2 mm ensures that the eddy plate 300 can effectively sense the magnetic field generated by the heating coil 200, thereby generating strong eddy currents within the eddy plate 300 and achieving efficient heat energy conversion.

[0050] Reference Figure 3 The vortex plate 300 is disposed inside the oil cavity 401b.

[0051] The vortex plate 300 is set inside the oil chamber 401b, so that the heat generated by the vortex plate 300 directly contacts the pump oil, resulting in extremely high efficiency.

[0052] Because the vortex plate 300 is relatively thin, heat can be quickly generated inside the plate and transferred to the oil, thereby achieving rapid heating.

[0053] The bottom of the pot 401a-2 is made of ceramic material.

[0054] In order to prevent heat from flowing downwards, and at the same time ensure that the magnetic field passes through the bottom of the pot 401a-2 and acts on the eddy current plate 300, the preferred material for the bottom of the pot 401a-2 is non-ferromagnetic and a poor conductor of heat. Ceramic materials can meet these two conditions, such as alumina ceramics, zirconia ceramics, ceramic fiber boards, etc.

[0055] Reference Figure 4 and Figure 5 A heat sink 500 is provided on the outer periphery of the heating coil 200.

[0056] The heat sink 500 provides space for the installation of the heating coil 200 and also provides support for the diffusion pump 400.

[0057] The heat sink 500 is equipped with a cooling water pipe. The cooling water circulates through the cooling water pipe to dissipate heat from the heating coil 200 and prevent the heating coil 200 from overheating and being damaged.

[0058] A support plate is provided at the bottom of the heating coil 200. The support plate is in contact with the cooling water pipe in the heat sink 500, which not only better dissipates heat from the heating coil 200, but also facilitates the installation of the heating coil 200.

[0059] The top of the heat sink 500 is provided with a contact plate 501, which is made of ceramic or stainless steel.

[0060] Contact plate 501 is used to encapsulate heat sink 500. In order to allow the magnetic field to pass through, contact plate 501 is made of ceramic or stainless steel, specifically alumina ceramic, zirconia ceramic, ceramic fiber board, etc.

[0061] The contact plate 501 is used to support the diffusion pump 400. The diffusion pump 400 can be placed directly on the contact plate 501 and assembled by bolts.

[0062] Preferably, the top of the heat sink 500 is provided with a threaded hole, the contact plate 501 is provided with a through hole corresponding to the threaded hole, and the pot wall 401a-1 is provided with a mounting hole corresponding to the through hole. By passing bolts through the mounting hole and the through hole in sequence and matching the threaded hole, the diffusion pump 400 and the contact plate 501 can be fixed and installed at the same time, which is convenient to operate.

[0063] Reference Figure 5 The heating coil 200 includes a coil 201, a positive terminal 202 disposed at one end of the coil 201, a negative terminal 203 disposed at the other end of the coil 201, ceramic fixing blocks 204 are disposed on the outer periphery of both the positive terminal 202 and the negative terminal 203, and a mounting plate 205 is disposed at the bottom of the coil 201.

[0064] The shape and size of the coil 201 are designed according to the heating requirements and magnetic field distribution to ensure that the magnetic field can effectively cover the eddy plate 300 and generate the required heat.

[0065] The positive terminal 202 and the negative terminal 203 are the interfaces connecting the controller 100 and the coil 201, and are made of a metal with good electrical conductivity.

[0066] The ceramic fixing block 204 is used to fix the positive terminal 202 and the negative terminal 203 to ensure the stability of the position when the heating coil 200 is working.

[0067] Working principle: The controller 100 generates an ultrasonic alternating current, which flows into the heating coil 200, generating a high-speed changing alternating magnetic field around the heating coil 200. This magnetic field easily penetrates the contact plate 501 and the bottom of the pot 401a-2 and acts on the eddy current plate 300 in the oil cavity 401b. In this embodiment, both the contact plate 501 and the bottom of the pot 401a-2 are made of materials with very low magnetic permeability. The eddy current plate 300 generates heat due to the eddy currents, which heats the pump oil in the oil cavity 401b.

[0068] Other embodiments of the present invention.

[0069] Below, based on Figure 6~Figure 8 The heating coil 200 and eddy current plate 300 are described in other embodiments of the present invention.

[0070] Reference Figure 6 The eddy plate 300 is mounted on the heating coil 200.

[0071] Specifically, by opening an installation groove on the contact plate 501 that is compatible with the eddy plate 300, the eddy plate 300 is fixedly connected to the contact plate 501, and the contact plate 501 is fixedly mounted on the top of the heat sink 500.

[0072] In this embodiment, a high-speed alternating magnetic field is generated around the heating coil 200. This magnetic field acts on the eddy current plate 300, and the heat generated by the eddy current plate 300 directly heats the bottom of the pot 401a-2, thereby heating the pump oil in the oil chamber 401b.

[0073] The diameter of the vortex plate 300 is the same as the diameter of the oil cavity 401b.

[0074] The design with the same diameter not only maximizes the contact area between the vortex plate 300 and the bottom of the pot 401a-2, improving heat transfer efficiency, but also avoids heat waste.

[0075] Reference Figure 7 and Figure 8A heat-conducting column 401a-3 is provided on the bottom of the pot 401a-2, and one end of the heat-conducting column 401a-3 is in close contact with the surface of the vortex plate 300.

[0076] In order to better heat the pump oil in the oil chamber 401b by the heat of the vortex plate 300 and reduce the heat loss at the bottom of the pot 401a-2, a heat-conducting column 401a-3 is designed. The heat-conducting column 401a-3 is T-shaped, with the larger end in contact with the surface of the vortex plate 300 to better transfer heat, and the smaller end in contact with the pump oil to heat the pump oil.

[0077] Furthermore, the heat-conducting pillar 401a-3 is made of materials with good thermal conductivity, such as copper, aluminum, silver, gold, heat pipe, diamond, graphite, etc.

[0078] Working principle: The controller 100 generates an ultrasonic alternating current, which flows into the heating coil 200 and generates a high-speed changing alternating magnetic field around the heating coil 200. This magnetic field directly acts on the eddy current plate 300 above the heating coil 200. The eddy current plate 300 generates heat due to the eddy currents, and the heat is used to heat the pump oil in the oil chamber 401b through the heat-conducting column 401a-3.

[0079] Reference Figure 5 The heat sink 500 has a heat dissipation cavity 502 inside, a heat dissipation plate 503 located at the bottom of the mounting plate 205, and heat dissipation holes 504 located on the heat sink 500.

[0080] The heat dissipation cavity 502 is a closed or semi-closed cavity located inside the heat sink 500. Its main function is to provide installation space for the heat sink 503 and to accommodate the flowing cooling medium (such as water) to establish an efficient liquid cooling circulation path. The heat sink 503 exchanges heat with the heating coil 200 above it through the mounting plate 205. The heat dissipation holes 504 are opened on the side wall or bottom of the heat sink 500, and their function is to promote air convection between the internal cavity of the heat sink 500 and the external environment. On the one hand, it can assist in the air cooling of the heat sink 500 housing itself; on the other hand, when the liquid cooling circulation is not activated or used as a supplement, it can also help dissipate some of the heat in the heat dissipation cavity 502 and on the heat sink 503.

[0081] The projection of the heat sink 503 in the vertical direction coincides with the coil 201.

[0082] The projection of the heat sink 503 in the vertical direction coincides with that of the coil 201. When viewed vertically from directly above or below, the overall outline of the heat sink 503 completely covers or falls within the outline of the coil 201. This ensures that the heat generated by the coil 201 during operation can be fully received by the heat sink 503 directly below it via the shortest, almost vertical downward path through the mounting plate 205 at its bottom, thus avoiding heat loss and delay during lateral transfer and achieving the most efficient directional heat conduction.

[0083] The heat sink 503 coincides with the projection of the heating coil 201 in the vertical direction, ensuring that the heat absorption area of ​​the heat sink 503 strictly corresponds to the entire heat-generating area of ​​the coil 201 in the vertical direction. This not only ensures uniform heat dissipation, but also effectively captures the heat generated by each turn of the coil spiral directly below it, preventing localized overheating. Furthermore, it maximizes heat dissipation efficiency. This layout shortens the heat conduction distance, reduces thermal resistance, and allows heat to be transferred more quickly from the coil 201 to the heat dissipation medium inside the heat sink 503, thus significantly improving the cooling effect on the coil 201.

[0084] Furthermore, the top of the heat sink 503 is flat, increasing the contact area between the heat sink 503 and the mounting plate 205. Unlike traditional circular cross-section water pipes, which can only form "line contact" or minimal "surface contact," this invention optimizes the cross-sectional shape of the spiral tube 503a on the heat sink 503. This spiral tube 503a is not a conventional circular water pipe, but rather a non-circular tube with a flat top, such as a "D"-shaped cross-section or a square / rectangular cross-section water pipe. This makes the contact area between the top of the heat sink 503 and the mounting plate 205 almost equal to its own projected area. When the heat generated by the coil 201 is transferred downwards through the mounting plate 205, almost its entire projected area, i.e., the main heat-generating area, can make full and uniform surface contact with the flat top of the heat sink 503 below, significantly reducing contact thermal resistance. The effective heat absorption area of ​​the heat sink 503, its projected area, and the corresponding area with the coil 201 are all approximately the same. This ensures that the heat transfer path from the heat source to the heat dissipation medium is the shortest and most efficient, and that the heat can be carried away quickly and evenly by the cooling medium.

[0085] Reference Figure 9 The heat sink 503 can be implemented in two different ways.

[0086] Implementation method one.

[0087] The heat sink 503 includes a spiral tube 503a, one end of which is connected to a water inlet pipe 503b, and the other end of which is connected to a first water outlet pipe 503c. A first misaligned groove 503d is provided at the bottom of the spiral tube 503a and at the position of the first water outlet pipe 503c. A second misaligned groove 503e adapted to the first misaligned groove 503d is provided at the top of the first water outlet pipe 503c. A rib 503f is formed between two adjacent second misaligned grooves 503e.

[0088] The bottom of the spiral tube 503a, corresponding to the position where it connects with the first outlet tube 503c, is machined with a first misaligned groove 503d; correspondingly, the top of the first outlet tube 503c is provided with a second misaligned groove 503e that matches the shape and size of the first misaligned groove 503d. When the two are connected, the first misaligned groove 503d and the second misaligned groove 503e fit together. A raised structure, namely a rib 503f, is naturally formed between two adjacent second misaligned grooves 503e.

[0089] By setting the first misaligned slot 503d, when the heat dissipation medium passes through the first misaligned slot 503d, the flow rate increases due to the reduced flow area. The faster the flow rate, the more total heat can be carried away. The position where the first misaligned slot 503d is set is the intersection of coils 201 in the vertical projection. The current generates more heat at the intersection of coils 201. Therefore, the setting of the first misaligned slot 503d can better dissipate heat at this location.

[0090] The protruding rib 503f further increases the contact area with the mounting plate 205, thereby increasing the heat dissipation effect at the corresponding position of the first water outlet pipe 503c.

[0091] Implementation method two.

[0092] The heat sink 503 includes a spiral tube 503a, one end of which is connected to a water inlet pipe 503b, and the other end of which is connected to a second water outlet pipe 503g. A first misaligned groove 503d is provided at the bottom of the spiral tube 503a and at the position of the second water outlet pipe 503g, and a third misaligned groove 503h is provided at the top of the second water outlet pipe 503g.

[0093] The length of the third misaligned groove 503h is greater than the distance between the first misaligned groove 503d and the last misaligned groove 503d, which facilitates the manufacture of the second water outlet pipe 503g and allows the heat dissipation medium that has absorbed heat to be discharged more quickly.

[0094] Reference Figure 2This embodiment provides a diffusion pump 400, including an oil pan 401, a heat sink 500 disposed at the bottom of the oil pan 401, a pump wall 402 disposed at the top of the oil pan 401, a pump core 403 disposed within the pump wall 402, and a condenser tube 404 disposed on the pump wall 402.

[0095] The oil pan 401, located at the bottom of the diffusion pump 400, is used for oil storage and heating. Inside the oil pan 401 is an oil chamber 401b to hold the diffusion pump oil. The bottom of the oil pan 401 is connected to the heat sink 500, and the top is sealed to the pump wall 402, forming a vacuum chamber. The heat sink 500, installed below the oil pan 401, not only provides a mounting and support platform for the heating coil 200, but also achieves active cooling through the internally integrated heat sink 502 and heat dissipation plate 503, ensuring that the temperature of the heating coil 200 is controllable during long-term operation and preventing overheating from affecting performance or lifespan. The pump wall 402 is a cylindrical structure made of stainless steel, and its inner surface must be smooth and airtight to maintain a high vacuum environment. The upper end of the pump wall 402 is connected to the vacuum system, and the lower end is sealed to the oil pan 401. The pump core 403, installed inside the pump wall 402, consists of multi-stage nozzles or guide vanes. Its function is to guide the pump oil vapor that evaporates in the oil pan 401 to form a high-speed, directional steam jet, achieving the pumping effect through the momentum transfer of gas molecules. The condenser pipe 404 is arranged around the outside of the pump wall 402, and is circulated with cooling water or other cooling medium, so that the oil vapor rising to the top of the pump wall 402 is quickly condensed and flows back to the oil pan 401, forming a circulation of pump oil, while maintaining the required temperature gradient inside the pump to ensure pumping efficiency.

[0096] Finally, it should be noted that the methods and devices described in detail above are merely embodiments, and those skilled in the art can modify these embodiments in different ways as long as they do not depart from the scope of the present invention.

Claims

1. A heating structure for a thermal diffusion pump, characterized in that: include, A controller (100) is used to convert alternating current into ultrasonic current; A heating coil (200), which is connected to a controller (100), is used to convert ultrasonic current into a magnetic field; A vortex plate (300), which is connected to a diffusion pump (400), is used to convert magnetic energy into thermal energy to heat the oil pan (401) at the bottom of the diffusion pump (400).

2. The thermal diffusion pump heating structure as described in claim 1, characterized in that: The oil pot (401) includes a pot body (401a) and an oil cavity (401b) disposed within the pot body (401a). The pot body (401a) includes a pot wall (401a-1) and a pot bottom (401a-2) disposed on the pot wall (401a-1). The vortex plate (300) is disposed within the oil cavity (401b).

3. The thermal diffusion pump heating structure as described in claim 2, characterized in that: The bottom of the pot (401a-2) is made of ceramic material, and the vortex plate (300) is 1-2mm thick and is made of a material with ferromagnetism and high resistivity.

4. The thermal diffusion pump heating structure as described in claim 3, characterized in that: The heating coil (200) is provided with a heat sink (500) on its outer periphery, and a contact plate (501) is provided on the top of the heat sink (500). The contact plate (501) is made of ceramic material or stainless steel.

5. The thermal diffusion pump heating structure as described in any one of claims 1 to 4, characterized in that: The vortex plate (300) is disposed on the heating coil (200), and the diameter of the vortex plate (300) is the same as the diameter of the oil cavity (401b).

6. The thermal diffusion pump heating structure as described in claim 5, characterized in that: A heat-conducting column (401a-3) is provided on the bottom of the pot (401a-2), and one end of the heat-conducting column (401a-3) is in close contact with the surface of the vortex plate (300).

7. The thermal diffusion pump heating structure as described in claim 2, characterized in that: The heating coil (200) includes a coil (201), a positive terminal (202) disposed at one end of the coil (201), and a negative terminal (203) disposed at the other end of the coil (201). Ceramic fixing blocks (204) are disposed on the outer periphery of both the positive terminal (202) and the negative terminal (203), and a mounting plate (205) is disposed at the bottom of the coil (201).

8. The thermal diffusion pump heating structure as described in claim 7, characterized in that: The heat sink (500) has a heat dissipation cavity (502) inside, a heat dissipation plate (503) is provided at the bottom of the mounting plate (205), and a heat dissipation hole (504) is provided on the heat sink (500). The projection of the heat dissipation plate (503) in the vertical direction coincides with the coil (201).

9. The thermal diffusion pump heating structure as described in claim 8, characterized in that: The heat sink (503) includes a spiral tube (503a), one end of which is connected to a water inlet pipe (503b), and the other end of which is connected to a first water outlet pipe (503c). A first misaligned groove (503d) is provided at the bottom of the spiral tube (503a) and at the position of the first water outlet pipe (503c). A second misaligned groove (503e) adapted to the first misaligned groove (503d) is provided at the top of the first water outlet pipe (503c). A rib (503f) is formed between two adjacent second misaligned grooves (503e).

10. The heat diffusion pump heating structure as described in any one of claims 1-4 or 6-9, characterized in that: The heat sink (503) includes a spiral tube (503a), one end of which is connected to a water inlet pipe (503b), and the other end of which is connected to a second water outlet pipe (503g). A first misaligned groove (503d) is provided at the bottom of the spiral tube (503a) and at the position of the second water outlet pipe (503g), and a third misaligned groove (503h) is provided at the top of the second water outlet pipe (503g).

11. A diffusion pump (400), characterized in that: It includes an oil pan (401), a heat sink (500) disposed at the bottom of the oil pan (401), a pump wall (402) disposed at the top of the oil pan (401), a pump core (403) disposed inside the pump wall (402), and a condenser tube (404) disposed on the pump wall (402).

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