Oil filtering equipment of high-vacuum oil diffusion pump

Abstract

The utility model discloses a high vacuum oil diffusion pump oil filtering device which comprises an oil drain pump and a filtering cylinder bin, the liquid inlet end of the oil drain pump is communicated with an oil drain pipe of an oil pool at the bottom of a high vacuum oil diffusion pump, and one end of the filtering cylinder bin is connected with the liquid outlet end of the oil drain pump through a liquid inlet valve. The high-vacuum oil diffusion pump relates to the technical field of high-vacuum oil diffusion pumps, and is suitable for filtering working oil by utilizing multiple filtering components under the condition that the dust content in pumped gas is higher, so that granular impurities in the working oil are filtered out, and the working oil can be filtered out by utilizing multiple filtering components. The filtered working oil enters the middle bin and is reinjected into the oil pool of the high-vacuum oil diffusion pump through the reflux pump, and the multiple filtering assemblies can be reversely washed after filtering is completed, so that particle impurities in the working oil can be effectively filtered out, the repeated utilization rate of the oil is increased, and the service life of the working oil is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of high vacuum oil diffusion pumps, in particular to oil filtering equipment for high vacuum oil diffusion pumps. Background Art

[0002] Diffusion pumps are currently one of the most widely used and essential tools for achieving high vacuum. The pumping process involves the pumped gas diffusing into the oil vapor jet and being carried to the pump outlet for removal. Within a specified timeframe, the pump's working oil evaporates and flows along the guide tube, exiting the nozzle at high speed. The pumped gas, driven by the diffusion pump and its entrainment, is carried to the pump wall by the oil vapor jet. The oil vapor condenses and returns to the oil pan, where it is gradually compressed and finally carried to the preceding stage by the jet-stage steam jet, where it is removed by the preceding pump. However, if the pumped gas contains a large amount of dust, particularly if a large amount of particulate matter is observed in the discharged pump oil, this particulate matter can severely impact the normal operation of the pump, necessitating frequent pump oil replacement, significantly increasing oil usage. Consequently, in-depth research into this issue led to the present case. Utility Model Content

[0003] In view of the deficiencies in the prior art, the utility model provides an oil filtering device for a high vacuum oil diffusion pump, which solves the problems raised in the background technology.

[0004] To achieve the above objectives, the present invention is implemented through the following technical solutions: an oil filtration device for a high vacuum oil diffusion pump, comprising an oil drain pump and a filter silo, wherein the liquid inlet end of the oil drain pump is connected to the oil drain pipe of the oil pool at the bottom of the high vacuum oil diffusion pump, one end of the filter silo is connected to the liquid outlet end of the oil drain pump through an inlet valve, the other end of the filter silo is connected to an intermediate bin through a drain valve, the lower part of the intermediate bin is connected to a reflux pump, the liquid outlet end of the reflux pump is connected to the oil replenishing pipe of the oil pool of the high vacuum oil diffusion pump, multiple filter components are arranged in the filter silo, and backwashing mechanisms are connected to both ends of the filter silo;

[0005] The backwash mechanism includes a liquid inlet three-way valve, a liquid return three-way valve, a sewage tank, a clean water tank and a booster pump. The liquid inlet three-way valve and the liquid return three-way valve are respectively arranged on both ends of the filter silo. The sewage tank is arranged at the lower part of the filter silo and connected to the outlet end of the liquid return three-way valve. The clean water tank is arranged on one side of the sewage tank. The liquid inlet end of the booster pump is connected to the clean water tank, and the liquid outlet end is connected to one end of the liquid inlet three-way valve.

[0006] The above-mentioned multiple filter components include a metal grid filter, a PP cotton filter and a sintered ceramic filter, which are sequentially arranged in the filter silo.

[0007] The top of the filter silo is connected to a nitrogen purge assembly.

[0008] The above-mentioned nitrogen purge assembly includes an air inlet valve, a high-pressure nitrogen storage tank, a safety valve and an exhaust valve. The air inlet valve is arranged on the lower side wall of the filter silo, the safety valve is arranged at the outlet position of the high-pressure nitrogen storage tank and is connected to the air inlet valve, and the exhaust valve is arranged on the upper side wall of the filter silo.

[0009] The clean water tank is filled with oil cleaning agent.

[0010] An oil replenishing port is provided on the top of the intermediate bin.

[0011] The utility model provides an oil filter device for a high vacuum oil diffusion pump. It has the following beneficial effects: the oil filter device for a high vacuum oil diffusion pump is suitable for the case where the dust content in the pumped gas is high. After the high vacuum oil diffusion pump finishes working and the oil temperature reaches room temperature, the liquid inlet end of the oil drain pump is connected to the oil drain pipe of the high vacuum oil diffusion pump, and the liquid outlet end of the reflux pump is connected to the oil replenishment pipe of the high vacuum oil diffusion pump. The liquid inlet valve and the liquid drain valve are opened, and the conduction direction of the liquid inlet three-way valve and the liquid drain valve is adjusted so that the pipelines between the oil drain pump, the filter silo and the intermediate bin remain connected. The oil drain pump is started to extract the working oil in the high vacuum oil diffusion pump and inject it into the filter silo. The working oil is filtered using multiple filter components to remove granular impurities in the working oil. The filtered working oil enters the intermediate bin and is returned to the intermediate bin. The flow pump is returned to the oil pool of the high vacuum oil diffusion pump; after the oil filtration is completed, the liquid inlet valve and the liquid discharge valve are closed, and the conduction direction of the liquid inlet three-way valve and the liquid discharge three-way valve are adjusted to keep the filter silo connected with the sewage tank and the discharge end of the booster pump, start the booster pump, and use the booster pump to extract the cleaning agent in the clean water tank and inject it into the filter silo, thereby reverse flushing the multiple filter components, and the flushed sewage enters the sewage tank through the liquid discharge three-way valve; after cleaning is completed, adjust the liquid inlet three-way valve and the liquid discharge three-way valve to reset, and use the nitrogen purge component to purge the inside of the filter silo for next use. It has a compact structure and a high degree of automation, can effectively filter out particulate impurities in the working oil, improve the oil reuse rate, and extend the service life of the working oil. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic diagram of the main structure of a high vacuum oil diffusion pump oil filtering device described in the utility model.

[0013] Figure 2 This is a schematic cross-sectional structural diagram of the filter silo described in the present invention.

[0014] In the figure: 1. Oil drain pump; 2. Filter silo; 3. Oil drain pipe; 4. Liquid inlet valve; 5. Liquid discharge valve; 6. Intermediate chamber; 7. Reflux pump; 8. Oil supply pipe; 9. Liquid inlet three-way valve; 10. Liquid return three-way valve; 11. Sewage tank; 12. Clean water tank; 13. Booster pump; 14. Metal grid filter; 15. PP cotton filter; 16. Sintered ceramic filter; 17. Inlet valve; 18. High-pressure nitrogen storage tank; 19. Safety valve; 20. Exhaust valve. DETAILED DESCRIPTION

[0015] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0016] Example: In conjunction with the specification Figure 1-2It can be seen that the present application specifically designs an oil filtering device for a high vacuum oil diffusion pump, wherein the liquid inlet end of the oil drain pump 1 is connected to the oil drain pipe 3 of the oil pool at the bottom of the high vacuum oil diffusion pump, one end of the filter silo 2 is connected to the liquid outlet end of the oil drain pump 1 through an inlet valve 4, and the other end of the filter silo 2 is connected to the intermediate bin 6 through a drain valve 5, and the lower part of the intermediate bin 6 is connected to a reflux pump 7, and the liquid outlet end of the reflux pump 7 is connected to the oil pool oil supply pipe 8 of the high vacuum oil diffusion pump, multiple filtering components are arranged in the filter silo 2, and a backwash mechanism is connected to both ends of the filter silo 2; the above-mentioned backwash mechanism includes a liquid inlet three-way valve 9, a liquid return three-way valve 10, a sewage tank 11, a clean water tank 12 and a booster The pump 13, the liquid inlet three-way valve 9 and the liquid return three-way valve 10 are respectively arranged on both ends of the filter silo 2, the sewage tank 11 is arranged at the lower part of the filter silo 2 and is connected to the outlet end of the liquid return three-way valve 10, and the clean water tank 12 is arranged on one side of the sewage tank 11. The liquid inlet end of the booster pump 13 is connected to the clean water tank 12, and the liquid outlet end is connected to one end of the liquid inlet three-way valve 9. The clean water tank 12 is filled with oil cleaning agent; the high vacuum oil diffusion pump oil filtering equipment is suitable for the case where the dust content in the pumped gas is high. After the high vacuum oil diffusion pump is finished working and the oil temperature returns to room temperature, the liquid inlet end of the drain pump 1 is connected to the drain pipe 3 of the high vacuum oil diffusion pump, and the reflux pump 7 is connected to the drain pipe 3 of the high vacuum oil diffusion pump. The liquid outlet end is connected to the oil replenishing pipe 8 of the high vacuum oil diffusion pump, the liquid inlet valve 4 and the liquid discharge valve 5 are opened, and the conduction direction of the liquid inlet three-way valve 9 and the liquid discharge valve is adjusted so that the pipelines between the oil discharge pump 1, the filter silo 2, and the intermediate warehouse 6 remain connected; the oil discharge pump 1 is started to extract the working oil in the high vacuum oil diffusion pump and inject it into the filter silo 2, and the working oil is filtered by multiple filter components to filter out the particulate impurities in the working oil. The filtered working oil enters the intermediate warehouse 6 and is returned to the oil pool of the high vacuum oil diffusion pump through the reflux pump 7; after the oil filtration is completed, the liquid inlet valve 4 and the liquid discharge valve 5 are closed, and the liquid inlet three-way valve 9 and the liquid discharge valve are adjusted. The conduction direction of the liquid three-way valve keeps the filter silo 2 connected with the sewage tank 11 and the discharge end of the booster pump 13. The booster pump 13 is started and the cleaning agent in the clean water tank 12 is extracted by the booster pump 13 and injected into the filter silo 2, thereby reversely flushing the multiple filter components. The flushed sewage enters the sewage tank 11 through the discharge three-way valve; after cleaning, the liquid inlet three-way valve 9 and the discharge three-way valve are adjusted to reset, and the nitrogen purge component is used to purge the inside of the filter silo 2 for the next use. The structure is compact and the degree of automation is high. It can effectively filter out particulate impurities in the working oil, improve the reuse rate of the oil, and extend the service life of the working oil.

[0017] In the specific implementation process, as a preferred setting, the above-mentioned multiple filter components include a metal grid filter 14, a PP cotton filter 15 and a sintered ceramic filter 16 which are sequentially arranged in the filter silo 2, which can intercept and filter the particulate impurities in the working oil, and can be backwashed and cleaned. It has a simple structure and a long service life.

[0018] During the specific implementation process, as a preferred setting, a nitrogen purge assembly is connected to the top of the above-mentioned filter silo 2; wherein the nitrogen purge assembly includes an air inlet valve 17, a high-pressure nitrogen storage tank 18, a safety valve 19 and an exhaust valve 20. The air inlet valve 17 is arranged on the lower side wall of the filter silo 2, the safety valve 19 is arranged at the outlet position of the high-pressure nitrogen storage tank 18 and is connected to the air inlet valve 17, and the exhaust valve 20 is arranged on the upper side wall of the filter silo 2. When the backwashing operation is completed, the liquid inlet three-way valve 9 and the liquid discharge three-way valve are adjusted to reset. At this time, the liquid inlet valve 4 and the liquid discharge valve 5 are still in the closed state. After the air inlet valve 17 and the exhaust valve 20 are opened, the high-pressure nitrogen in the high-pressure nitrogen storage tank 18 is injected into the filter silo 2 through the air inlet valve 17 through the safety valve 19, and the residual moisture in the filter silo 2 is discharged to the outside of the filter silo 2 through the exhaust valve 20 by the high-pressure nitrogen, and the inside of the filter silo 2 is kept dry and clean for reuse.

[0019] In the specific implementation process, as a priority setting, an oil replenishing port is opened on the top of the above-mentioned intermediate chamber 6 to replenish the working oil and ensure the total oil volume of the working oil returned to the high vacuum oil diffusion pump.

[0020] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high vacuum oil diffusion pump oil filtration device, comprising an oil discharge pump and a filter silo, characterized in that: The liquid inlet end of the oil drain pump is connected to the oil drain pipe of the oil pool at the bottom of the high vacuum oil diffusion pump, one end of the filter silo is connected to the liquid outlet end of the oil drain pump through an inlet valve, and the other end of the filter silo is connected to the intermediate bin through a drain valve, the lower part of the intermediate bin is connected to a reflux pump, the liquid outlet end of the reflux pump is connected to the oil replenishment pipe of the oil pool of the high vacuum oil diffusion pump, multiple filter components are provided in the filter silo, and backwashing mechanisms are connected to both ends of the filter silo; The backwash mechanism includes a liquid inlet three-way valve, a liquid return three-way valve, a sewage tank, a clean water tank and a booster pump. The liquid inlet three-way valve and the liquid return three-way valve are respectively arranged on both ends of the filter silo. The sewage tank is arranged at the lower part of the filter silo and connected to the outlet end of the liquid return three-way valve. The clean water tank is arranged on one side of the sewage tank. The liquid inlet end of the booster pump is connected to the clean water tank, and the liquid outlet end is connected to one end of the liquid inlet three-way valve.

2. The high vacuum oil diffusion pump oil filtering device according to claim 1, characterized in that: The multiple filter assembly includes a metal grid filter, a PP cotton filter and a sintered ceramic filter which are sequentially arranged in the filter silo.

3. The high vacuum oil diffusion pump oil filtering device according to claim 1, characterized in that: The top of the filter silo is connected to a nitrogen purge assembly.

4. The high vacuum oil diffusion pump oil filtering device according to claim 3, characterized in that: The nitrogen purge assembly includes an air inlet valve, a high-pressure nitrogen storage tank, a safety valve and an exhaust valve. The air inlet valve is arranged on the lower side wall of the filter silo, the safety valve is arranged at the outlet position of the high-pressure nitrogen storage tank and is connected to the air inlet valve, and the exhaust valve is arranged on the upper side wall of the filter silo.

5. The high vacuum oil diffusion pump oil filtering device according to claim 1, characterized in that: The clean water tank is filled with oil cleaning agent.

6. The high vacuum oil diffusion pump oil filtering device according to claim 1, characterized in that: An oil replenishing port is provided on the top of the intermediate bin.

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