Vacuum-pumping system of vacuum evaporation device

Abstract

The vacuum-pumping system of the vacuum evaporation device comprises a vacuum cavity, an upper vacuum-pumping set and a lower vacuum-pumping set, the upper vacuum-pumping set is connected with the upper portion of the vacuum cavity, the lower vacuum-pumping set is connected with the lower portion of the vacuum cavity, the lower vacuum-pumping set comprises a mechanical pump and a roots pump, the mechanical pump is communicated with the roots pump, and the roots pump is communicated with the vacuum cavity. The roots pump is communicated with the lower part of the vacuum cavity; the upper vacuum set comprises a mechanical pump and a roots pump, in the upper vacuum set, the mechanical pump is communicated with the roots pump, the roots pump is communicated with the upper portion of the vacuum cavity, and a plurality of molecular pumps connected in parallel and a plurality of diffusion pumps connected in parallel are further arranged between the roots pump of the upper vacuum set and the vacuum cavity. The number of the vacuum pumps of the upper vacuum-pumping set is larger than that of the vacuum pumps of the lower vacuum-pumping set. According to the utility model, the two groups of vacuum pumps are used for carrying out vacuum treatment on corresponding areas, and the molecular pumps and the diffusion pumps are connected with the vacuum cavity, so that a better vacuumizing effect can be achieved, and the effect of saving space can be achieved.

Description

Technical Field

[0001] The utility model relates to the field of vacuum evaporation equipment, in particular to a vacuum pumping system for a vacuum evaporation device. Background Art

[0002] Vacuum evaporation, abbreviated as evaporation coating, refers to a process method in which, under vacuum conditions, a certain heating and evaporation method is used to evaporate a coating material (or film material) and vaporize it, and the particles fly to the surface of the substrate and condense into a film. Evaporation coating is a gas-phase deposition technology that has been used earlier and has a wide range of applications. It has the advantages of simple film-forming method, high purity and density of the film, and unique film structure and performance. The utility model aims to provide a new vacuum pumping system for a vacuum evaporation device to achieve a better vacuum pumping effect. Summary of the Utility Model

[0003] In view of the above technical background of the prior art, the purpose of the utility model is to provide a vacuum pumping system for a vacuum evaporation device. <A

[0004] To solve the above technical purposes, the utility model adopts the following technical solutions:

[0005] The utility model provides a vacuum pumping system for a vacuum evaporation device, including a vacuum chamber, an upper vacuum pumping group and a lower vacuum pumping group. The upper vacuum pumping group is connected to the upper part of the vacuum chamber, and the lower vacuum pumping group is connected to the lower part of the vacuum chamber. The lower vacuum pumping group includes a mechanical pump and a Roots pump. The mechanical pump is communicated with the Roots pump, and the Roots pump is communicated with the lower part of the vacuum chamber. The upper vacuum pumping group includes a mechanical pump and a Roots pump. In the upper vacuum pumping group, the mechanical pump is communicated with the Roots pump, and the Roots pump is communicated with the upper part of the vacuum chamber. Between the Roots pump of the upper vacuum pumping group and the vacuum chamber, a plurality of parallel molecular pumps and a plurality of parallel diffusion pumps are further provided. The number of vacuum pumps in the upper vacuum pumping group is more than that in the lower vacuum pumping group. The utility model performs vacuum treatment on corresponding areas through two groups of vacuum pumps, and is connected with the vacuum chamber through a plurality of molecular pumps and diffusion pumps, which is beneficial to achieving a better vacuum pumping effect. Moreover, the two groups of vacuum pumping groups are separately arranged, which is beneficial to reasonably allocate space and can achieve the effect of saving space.

[0006] Further, for the vacuum pumping system of the vacuum evaporation device,

[0007] The upper vacuum pumping group further includes a holding pump, and the holding pump is connected between the pipeline of the Roots pump and a plurality of parallel molecular pumps and a plurality of parallel diffusion pumps.

[0008] In the upper vacuum pumping group, there are two holding pumps, and the two holding pumps are respectively connected between the pipeline of the Roots pump and a plurality of parallel molecular pumps and a plurality of parallel diffusion pumps.

[0009] In the upper vacuum pumping group, there are two Roots pumps. The mechanical pump is connected in series with the two Roots pumps in sequence, and then is connected to multiple parallel molecular pumps and multiple parallel diffusion pumps. The multiple parallel molecular pumps and the multiple parallel diffusion pumps are further connected to the upper part of the vacuum chamber.

[0010] In the upper vacuum group, a switching valve is arranged between the Roots pump and the multiple parallel molecular pumps and the multiple parallel diffusion pumps.

[0011] In the upper vacuum group, switching valves are arranged on both the front and rear pipelines of the molecular pump, and switching valves are arranged on both the front and rear pipelines of the diffusion pump.

[0012] In the lower vacuum group, there are two Roots pumps. The mechanical pump is connected in series with the two Roots pumps and then is connected to the lower part of the vacuum chamber.

[0013] In the lower vacuum pumping group, the lower vacuum group further includes two parallel Roots pumps, and the two parallel Roots pumps are arranged between the latter Roots pump in series and the lower part of the vacuum chamber.

[0014] In the lower vacuum pumping group, a switching valve is arranged on the pipeline between the two series-connected Roots pumps and the two parallel Roots pumps.

[0015] A switching valve is connected between the pipelines of the upper vacuum pumping group and the lower vacuum pumping group. This switching valve is connected between the pipeline from the second Roots pump of the lower vacuum pumping group to the switching valve of the lower vacuum pumping group and the pipeline from the second Roots pump of the upper vacuum pumping group to the first switching valve.

[0016] A vacuum pumping system of a vacuum evaporation device provided by the present utility model includes a vacuum chamber. A winding module is arranged in the vacuum chamber. The winding module includes an unwinding roller and a winding roller. The unwinding rollers are located in the same height area. There is an interval space between the unwinding roller and the winding roller. A front main roller is arranged below the unwinding roller and the winding roller. A film roll is installed on the unwinding roller. The film is released from the unwinding roller, passes through the front main roller below the unwinding roller, and is wound by the winding roller. A blowing port for blowing air downward is arranged above the front roller, in the interval space or above the interval space.

[0017] Further, in the vacuum pumping system of the vacuum evaporation device, the gas output from the blowing port is an inert gas.

[0018] Further, in the vacuum pumping system of the vacuum evaporation device, a main rear roller is further provided below the unwinding roller and the winding roller. The thin film is unwound from the unwinding roller, sequentially passes through the front main roller and the main rear roller below the unwinding roller, and then is wound by the winding roller. The front main roller is located below the unwinding roller, and the rear winding roller is located below the winding roller.

[0019] Further, in the vacuum pumping system of the vacuum evaporation device, a front roller group is provided on the film running path between the unwinding roller and the front main roller.

[0020] Further, in the vacuum pumping system of the vacuum evaporation device, a front bending roller is provided on the film running path between the front roller group and the front main roller.

[0021] Further, in the vacuum pumping system of the vacuum evaporation device, a front rubber roller and a rear bending roller are provided on the film running path between the front main roller and the main rear roller.

[0022] Further, in the vacuum pumping system of the vacuum evaporation device, a swinging roller is further provided on the film running path between the front rubber roller and the rear bending roller.

[0023] Further, in the vacuum pumping system of the vacuum evaporation device, a rear rubber roller is further provided on the film running path between the main rear roller and the winding roller.

[0024] Further, in the vacuum pumping system of the vacuum evaporation device, a tension roller and a rear roller group are further provided on the film running path between the rear rubber roller and the winding roller, and a film surface temperature sensor probe is further provided above the front rubber roller and the tension roller.

[0025] Further, in the vacuum pumping system of the vacuum evaporation device, the blowing port is arranged to blow air obliquely from top to bottom.

[0026] Compared with the prior art, a vacuum pumping system of a vacuum evaporation device provided by the utility model comprises a vacuum chamber, an upper vacuum pumping group and a lower vacuum pumping group. The upper vacuum pumping group is connected to the upper part of the vacuum chamber, and the lower vacuum pumping group is connected to the lower part of the vacuum chamber. The lower vacuum pumping group includes a mechanical pump and a Roots pump. The mechanical pump is communicated with the Roots pump, and the Roots pump is communicated with the lower part of the vacuum chamber. The upper vacuum group includes a mechanical pump and a Roots pump. In the upper vacuum pumping group, the mechanical pump is communicated with the Roots pump, and the Roots pump is communicated with the upper part of the vacuum chamber. Between the Roots pump of the upper vacuum pumping group and the vacuum chamber, a plurality of parallel-connected molecular pumps and a plurality of parallel-connected diffusion pumps are further arranged. The number of vacuum pumps in the upper vacuum pumping group is more than that in the lower vacuum group. The utility model performs vacuum treatment on corresponding areas through two groups of vacuum pumps, and is connected to the vacuum chamber through a plurality of molecular pumps and diffusion pumps, which is beneficial to achieving a better vacuum pumping effect. Moreover, the two groups of vacuum pumping groups are separately arranged, which is beneficial to reasonably allocate space and can achieve the effect of saving space. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the structures shown in these drawings.

[0028] Figure 1 It is a schematic structural diagram of the vacuum pumping system of the vacuum evaporation device provided by the present utility model.

[0029] Figure 2 It is a schematic structural diagram of the winding module of the vacuum pumping system of the vacuum evaporation device provided by the present utility model.

[0030] Explanation of the reference numerals in the drawings:

[0031] Vacuum chamber 100

[0032] Unwinding roller 11

[0033] Rewinding roller 12

[0034] Front main roller 13

[0035] Rear main roller 14

[0036] Front roller group 15

[0037] Front bending roller 16

[0038] Front rubber roller 17

[0039] Swinging roller 18

[0040] Backward bending roller 19

[0041] Backward rubber roller 20

[0042] Tension roller 21

[0043] Rear roller group 22

[0044] Upper vacuum pumping group 31

[0045] Lower vacuum pumping group 32

[0046] Mechanical pump 33

[0047] Roots pump 34

[0048] Molecular pump 35

[0049] Diffusion pump 36

[0050] Maintenance pump 37

[0051] Switch valve 38 Detailed implementation manners

[0052] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present invention.

[0053] It should be noted that if there are directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention, then the directional indications are only used to explain the relative positional relationship and movement conditions between components in a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indications will also change accordingly.

[0054] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, then the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the fact that those of ordinary skill in the art can implement it. When the combination of technical solutions appears to be contradictory or unable to be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0055] Such as Figure 1 、Figure 2 As shown in the figure, a vacuum pumping system of a vacuum evaporation device provided by the present utility model includes a vacuum chamber 100, an upper vacuum pumping group 31 and a lower vacuum pumping group 32. The upper vacuum pumping group 31 is connected to the upper part of the vacuum chamber 100, and the lower vacuum pumping group 32 is connected to the lower part of the vacuum chamber 100. The lower vacuum pumping group 32 includes a mechanical pump 33 and a Roots pump 34. The mechanical pump 33 is communicated with the Roots pump 34, and the Roots pump 34 is communicated with the lower part of the vacuum chamber 100. The upper vacuum group includes a mechanical pump 33 and a Roots pump 34. In the upper vacuum pumping group 31, the mechanical pump 33 is communicated with the Roots pump 34, and the Roots pump 34 is communicated with the upper part of the vacuum chamber 100. Between the Roots pump 34 of the upper vacuum pumping group 31 and the vacuum chamber 100, a plurality of parallel-connected molecular pumps 35 and a plurality of parallel-connected diffusion pumps 36 are further provided. The number of vacuum pumps in the upper vacuum pumping group 31 is more than that in the lower vacuum group. The present utility model performs vacuum treatment on corresponding areas through two groups of vacuum pumps, and is connected to the vacuum chamber 100 through a plurality of molecular pumps 35 and diffusion pumps 36, which is beneficial to achieving a better vacuum pumping effect. Moreover, the two groups of vacuum pumping groups are separately arranged, which is beneficial to reasonably allocate space and can achieve the effect of saving space.

[0056] The number of vacuum pumps in the upper vacuum pumping group 31 is more than that in the lower vacuum pumping group, which can pump out the air in the winding module as much as possible, facilitating the evacuation of the air inside the film and ensuring the coating effect and efficiency. Further, for the vacuum pumping system of the vacuum evaporation device provided by the present utility model, the upper vacuum pumping group 31 further includes a holding pump 37, and the holding pump 37 is connected between the pipeline of the Roots pump 34 and multiple parallel molecular pumps 35 and multiple parallel diffusion pumps 36. Further, for the vacuum pumping system of the vacuum evaporation device provided by the present utility model, in the upper vacuum pumping group 31, there are two holding pumps 37, and the two holding pumps 37 are respectively connected between the pipeline of the Roots pump 34 and multiple parallel molecular pumps 35 and multiple parallel diffusion pumps 36. Further, for the vacuum pumping system of the vacuum evaporation device provided by the present utility model, in the upper vacuum pumping group 31, there are two Roots pumps 34. The mechanical pump 33 is connected in series with the two Roots pumps 34 in sequence, and then is communicated with multiple parallel molecular pumps 35 and multiple parallel diffusion pumps 36. The multiple parallel molecular pumps 35 and multiple parallel diffusion pumps 36 are further communicated with the upper part of the vacuum chamber 100. Further, for the vacuum pumping system of the vacuum evaporation device provided by the present utility model, in the upper vacuum pumping group, a switching valve 38 is provided between the Roots pump 34 and multiple parallel molecular pumps 35 and multiple parallel diffusion pumps 36. Further, for the vacuum pumping system of the vacuum evaporation device provided by the present utility model, in the upper vacuum pumping group, switching valves 38 are provided on both the front and rear pipelines of the molecular pump 35, and switching valves 38 are provided on both the front and rear pipelines of the diffusion pump 36. The lower vacuum pumping group 32 includes a mechanical pump 33 and four Roots pumps 34. The mechanical pump 33 is connected on the outside, then is respectively connected to two Roots pumps 34, and finally two Roots pumps 34 are connected in series. These two Roots pumps 34 are finally connected to the vacuum chamber 100. The mechanical pump 33 is started first, and after reaching an appropriate vacuum degree, the Roots pumps 34 are started in sequence. The multiple Roots pumps 34 are beneficial to pumping the vacuum near the crucible at the lower part of the vacuum chamber 100 to an appropriate value.

[0057] Furthermore, for the vacuum pumping system of the vacuum evaporation device provided by the present utility model, in the lower vacuum group, there are two Roots pumps 34. The mechanical pump 33 is connected in series with the two Roots pumps 34 and then communicates with the lower part of the vacuum chamber 100. Further, for the vacuum pumping system of the vacuum evaporation device provided by the present utility model, in the lower vacuum pumping group 32, the lower vacuum group further includes two parallel-connected Roots pumps 34. The two parallel-connected Roots pumps 34 are arranged between the latter Roots pump 34 in series and the lower part of the vacuum chamber 100. Further, for the vacuum pumping system of the vacuum evaporation device provided by the present utility model, in the lower vacuum pumping group 32, a switching valve 38 is provided on the pipeline between the two series-connected Roots pumps 34 and the two parallel-connected Roots pumps 34. Further, for the vacuum pumping system of the vacuum evaporation device provided by the present utility model, a switching valve 38 is connected between the pipelines of the upper vacuum pumping group 31 and the lower vacuum pumping group 32. This switching valve 38 is connected between the pipeline from the second Roots pump 34 of the lower vacuum pumping group 32 to the switching valve 38 of the lower vacuum pumping group 32 and the pipeline from the second Roots pump 34 of the upper vacuum pumping group 31 to the first switching valve 38. The upper vacuum pumping group 31 includes one mechanical pump 33, two Roots pumps 34, two holding pumps 37, five diffusion pumps 36, and four molecular pumps 35. One mechanical pump 33 and two Roots pumps 34 are connected in series, and five diffusion pumps 36 and four molecular pumps 35 are connected in series. The parallel connection is mainly because the subsequent pump bodies need to reach a certain vacuum degree to be started, and the parallel connection of the previous pump bodies is to first pump the vacuum to reach the working range of the subsequent pump bodies. The series connection is mainly to better exert the effects of each pump body and jointly reach the desired vacuum degree. Through the above settings, the vacuum chamber 100 can reach the appropriate value more quickly, which is beneficial to improving the efficiency.

[0058] Preferably, the present utility model provides a vacuum pumping system for a vacuum evaporation device, including a vacuum chamber 100. A winding module is arranged inside the vacuum chamber 100. The winding module includes an unwinding roller 11 and a winding roller 12. The unwinding roller 11 and the winding roller 12 are located in the same height region. There is an interval space between the unwinding roller 11 and the winding roller 12. A front main roller 13 is arranged below the unwinding roller 11 and the winding roller 12. A film roll is installed on the unwinding roller 11. The film is unwound from the unwinding roller 11, passes through the front main roller 13 below the unwinding roller 11, and is wound by the winding roller 12. A blowing port (not shown in the figure) for blowing air downward is arranged above the front main roller 13, above the rear main roller 14, in the interval space or above the interval space. By arranging each roller and setting a blowing port above the main roller for coating, the present utility model allows gas to fill the gap between the film and the roller, which helps to make the contact between the film and the roller more flat and is beneficial to solving the problem of empty plating lines. The unwinding roller 11 and the winding roller 12 of the present utility model are located at the same height or in the same height region, and there may be a certain height difference between their positions, and this height difference does not exceed 10 cm. Further, in the vacuum pumping system of the vacuum evaporation device provided by the present utility model, the gas output from the blowing port is an inert gas. The blown gas is an inert gas such as nitrogen. The blown nitrogen can help the film fit more closely with the main roller and is beneficial to reducing empty plating lines. The blowing port can be supplied with gas by an external air press.

[0059] Further, in the vacuum pumping system of the vacuum evaporation device provided by the present utility model, a rear main roller 14 is also arranged below the unwinding roller 11 and the winding roller 12. The film is unwound from the unwinding roller 11, passes through the front main roller 13 and the rear main roller 14 below the unwinding roller 11 in sequence, and then is wound by the winding roller 12. The front main roller 13 is located below the unwinding roller 11, and the rear roller is located below the winding roller 12. Further, in the vacuum pumping system of the vacuum evaporation device provided by the present utility model, a front roller group 15 is arranged on the film running path between the unwinding roller 11 and the front main roller 13. The front roller group 15 is composed of multiple guide rollers.

[0060] Further, in the vacuum pumping system of the vacuum evaporation device provided by the present utility model, a front bending roller 16 is arranged on the film running path between the front roller group 15 and the front main roller 13. On the one hand, the front bending roller 16 can flatten the film for convenient coating, and on the other hand, it can also provide a certain tension to the film, so that the film has a greater adhesion force with the front main roller 13 during coating. Preferably, the surface roughness of the front bending roller 16 is greater than that of other guide rollers, which is beneficial to ensuring the adhesion force between the film and the main roller while preventing the film from being scratched when moving over the guide rollers. The front main roller 13 is a cooling roller and can be used to cool the film. A crucible can be arranged below the front main roller 13. Generally, there are multiple crucibles, which are arranged in two columns.

[0061] Furthermore, in the evacuation system of the vacuum evaporation device provided by the present utility model, a front rubber roller 17 and a rear bending roller 19 are arranged on the film running path between the front main roller 13 and the rear main roller 14. The front rubber roller 17 can also be a roller with roughness, which can prevent the film from slipping after coating and can also increase the wrap angle between the film and the front main roller 13. Furthermore, in the evacuation system of the vacuum evaporation device provided by the present utility model, a swing roller 18 is also arranged on the film running path between the front rubber roller 17 and the rear bending roller 19. The swing roller 18 can play a role in maintaining a constant tension between the two main rollers. Furthermore, in the evacuation system of the vacuum evaporation device provided by the present utility model, a rear rubber roller 20 is also arranged on the film running path between the rear main roller 14 and the winding roller 12. The rear main roller 14 is a cooling roller and can also be used to cool the film. A crucible can also be arranged below the rear main roller 14 for evaporating aluminum plating. The roughness of the rear rubber roller 20 can also be greater than that of other passing rollers, which helps prevent the film from slipping and can also make the film fit more closely to the main roller.

[0062] Furthermore, in the evacuation system of the vacuum evaporation device provided by the present utility model, a tension roller 21 and a rear roller group 22 are also arranged on the film running path between the rear rubber roller 20 and the winding roller 12. Above the front rubber roller 17 and the tension roller 21, a film surface temperature sensor (not shown in the figure) is arranged. The film surface temperature sensor is mainly arranged above the rear main roller 14 and can be used to detect the temperature of the film surface in real time after coating is completed on the main roller. The rear roller group 22 is composed of multiple passing rollers. The tension roller 21 mainly controls the tension of the film. The film coming out of the tension roller 21 passes through multiple passing rollers and finally reaches the winding roller 12. Furthermore, in the evacuation system of the vacuum evaporation device provided by the present utility model, the blowing port is arranged to blow air obliquely from top to bottom, preferably blowing at an inclination angle with respect to the plane where the two main rollers are located, so that the film fits better with the two main rollers, such as a blowing angle of 45° to 90°. The present utility model can be provided with a high-speed camera at the top of the vacuum chamber 100 for detecting the film surface condition in real time.

[0063] In summary, the present utility model performs vacuum treatment on corresponding areas through two groups of vacuum pumps, and is connected to the vacuum chamber through multiple molecular pumps and diffusion pumps, which is beneficial to achieving a better vacuum pumping effect and can save space.

[0064] The above are only the preferred embodiments of the present utility model, and do not limit the patent scope of the present utility model. Any equivalent structural transformation made under the inventive concept of the present utility model by using the content of the specification and drawings of the present utility model, or any direct / indirect application in other related technical fields, is included in the patent protection scope of the present utility model.

Claims

1. A vacuum pumping system for a vacuum evaporation device, characterized in that, It includes a vacuum chamber, an upper vacuum pumping group and a lower vacuum pumping group. The upper vacuum pumping group is connected to the upper part of the vacuum chamber, and the lower vacuum pumping group is connected to the lower part of the vacuum chamber. The lower vacuum pumping group includes a mechanical pump and a Roots pump. The mechanical pump is communicated with the Roots pump, and the Roots pump is communicated with the lower part of the vacuum chamber. The upper vacuum pumping group includes a mechanical pump and a Roots pump. In the upper vacuum pumping group, the mechanical pump is communicated with the Roots pump, and the Roots pump is communicated with the upper part of the vacuum chamber. Between the Roots pump of the upper vacuum pumping group and the vacuum chamber, there are also provided multiple molecular pumps connected in parallel and multiple diffusion pumps connected in parallel. The number of vacuum pumps in the upper vacuum pumping group is more than that in the lower vacuum pumping group.

2. The vacuum pumping system of the vacuum evaporation device according to claim 1, characterized in that, The upper vacuum pumping group further includes a holding pump, and the holding pump is connected between the pipeline of the Roots pump and the pipelines of multiple molecular pumps connected in parallel and multiple diffusion pumps connected in parallel.

3. The evacuation system of the vacuum evaporation apparatus according to claim 2, characterized in that, In the upper vacuum pumping group, there are two holding pumps, and the two holding pumps are respectively connected between the pipeline of the Roots pump and the pipelines of multiple molecular pumps connected in parallel and multiple diffusion pumps connected in parallel.

4. The evacuation system of the vacuum evaporation apparatus according to claim 3, characterized in that, In the upper vacuum pumping group, there are two Roots pumps. The mechanical pump is connected in series with the two Roots pumps in sequence, and then is communicated with multiple molecular pumps connected in parallel and multiple diffusion pumps connected in parallel. The multiple molecular pumps connected in parallel and multiple diffusion pumps connected in parallel are then communicated with the upper part of the vacuum chamber.

5. The evacuation system of the vacuum evaporation apparatus according to claim 4, characterized in that, In the upper vacuum pumping group, there is a switching valve arranged between the Roots pump and multiple molecular pumps connected in parallel and multiple diffusion pumps connected in parallel.

6. The evacuation system of the vacuum evaporation apparatus according to claim 5, characterized in that, In the upper vacuum pumping group, switching valves are arranged on the front and rear pipelines of the molecular pump, and switching valves are arranged on the front and rear pipelines of the diffusion pump.

7. The evacuation system of the vacuum evaporation apparatus according to claim 6, characterized in that, In the lower vacuum pumping group, there are two Roots pumps. The mechanical pump is connected in series with the two Roots pumps, and then is communicated with the lower part of the vacuum chamber.

8. The evacuation system of the vacuum evaporation apparatus according to claim 7, characterized in that, In the lower vacuum pumping group, the lower vacuum pumping group further includes two Roots pumps connected in parallel, and the two Roots pumps connected in parallel are arranged between the latter Roots pump in series and the lower part of the vacuum chamber.

9. The evacuation system of the vacuum evaporation apparatus according to claim 8, characterized in that, In the lower vacuum pumping group, there is a switching valve arranged on the pipeline between the two Roots pumps connected in series and the two Roots pumps connected in parallel.

10. The evacuation system of the vacuum evaporation apparatus according to claim 9, characterized in that, There is a switching valve communicated between the pipelines of the upper vacuum pumping group and the lower vacuum pumping group. This switching valve is communicated between the pipeline from the second Roots pump of the lower vacuum pumping group to the switching valve of the lower vacuum pumping group and the pipeline from the second Roots pump of the upper vacuum pumping group to the first switching valve.

Images