Rotation type vacuum diffusion pump

Abstract

The invention relates to the field of vacuum pumps, in particular to a rotation type vacuum diffusion pump. The diffusion pump achieves traction and compression of air with rotation type movement by adopting multiple levels of high-velocity vapor steam with each level containing multiple pieces of slice-shaped high-velocity vapor steam, and therefore the vacuum degree is obtained. In addition, an evaporation oil cavity is in a cone shape, by designing the sizes of different oil cavity branch layers, a high jetting velocity of oil vapor is obtained at a jetting opening, and meanwhile light fractions of the outer layer gains a higher flow velocity than heavy fractions of the inner layer. The rotation velocities of nozzles of different levels form a velocity gradient from top to bottom, and therefore gas is continuously extruded to the bottom layers of a pump body and discharged by a mechanical pump. Transmission between the nozzles is achieved through planetary gear mechanisms and the nozzles are driven by a motor. The rotation velocities of the nozzles form the velocity gradient from top to bottom, the fusiform pump body is adopted, the length of a jet stream is increased, and therefore the ultimate vacuum is better.

Description

technical field [0001] The invention relates to the field of vacuum pumps, in particular to a rotary vacuum diffusion pump. Background technique [0002] The equipment used to obtain vacuum is called vacuum pump, which can be divided into two categories according to the working principle: compression vacuum pump and adsorption vacuum pump. The design, manufacture and application of any vacuum pump are aimed at enhancing the pumping effect and suppressing backflow. of. [0003] The vapor flow diffusion pump belongs to the compression type vacuum pump, which uses the phenomenon of gas diffusion to pump air. The traditional vapor flow diffusion pump achieves multiple compressions of the gas through the traction of the gas molecules by the directional, multi-stage, and umbrella-shaped high-temperature jets. Vacuum degree is obtained; there is a high-speed umbrella-shaped steam flow in the pump, and the gas diffuses into the steam flow and is taken to the gas outlet to achieve t...

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Problems solved by technology

[0006] The purpose of the present invention is to provide a new type of vacuum diffusion pump. By optimizing and upgrading the structure of the traditional pumping model, the ultimate vacuum degree of the traditional diffusion pump can not be solved due to the limitation of the spray speed of the high-temperature steam flow and the length of the jet flow. Further improvement, the pumping speed is limited by the traditional pumping model and it is difficult to increase, etc.

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