Manufacturing method of turbine rotor of large-sized turbine molecular pump

A technology of turbomolecular pump and turbine rotor, which is applied to components, pumps, and pump components of pumping devices for elastic fluids, can solve the problems of high price of turbine rotors, high requirements for processing equipment, and high requirements for uniformity. Achieve the effect of weight reduction, reduction of manufacturing cost and difficulty, and improvement of operating life

Inactive Publication Date: 2008-09-03
KYKY TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The advantages are better overall performance and high-speed performance, but the disadvantages are that the single piece of material is larger, the requirements for uniformity are higher, the requirements for processing equipment are higher, and the turbine rotor is expensive

Method used

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  • Manufacturing method of turbine rotor of large-sized turbine molecular pump
  • Manufacturing method of turbine rotor of large-sized turbine molecular pump
  • Manufacturing method of turbine rotor of large-sized turbine molecular pump

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Embodiment Construction

[0016] The present invention will be further described below in conjunction with accompanying drawings and examples. attached figure 1 It is a flow chart of the manufacturing method. As shown in the figure, the single-stage blades and the inner core connectors are first processed by ordinary lathes and milling machines, and then cleaned before welding. After cleaning, each single-stage blade is installed on the inner core and welded by vacuum electron beams to form An integral turbine rotor approach. attached figure 2 It is a cross-sectional view of the inner core structure. As shown in the figure, the inner core is a cylindrical stepped shaft structure, the stepped thickness is 18-22mm, the diameter difference of the stepped shaft is 6mm, and the center of the stepped shaft is a tapered mounting hole. attached image 3 It is the front view and side view of a single-stage blade. As shown in the figure, the overall structure of the single-click blade is disc-shaped, with...

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Abstract

A manufacture method of turbine rotor for large turbomolecular pump comprises the following steps: (1) processing single-stage blades and inner core connectors by lathe and milling machine, cleaning the single-stage blades and the inner core connector, and arranging each single-stage blade on an inner core; and (2) welding by a vacuum electron beam to form an entire turbine rotor, wherein the welding depth of the vacuum electron beam is 3 to 18 mm.

Description

technical field [0001] The invention relates to the field of gas fluids, and is a method for manufacturing components of vacuum obtaining equipment, more specifically, the invention is a method for manufacturing a turbine rotor for a large turbomolecular pump. Background technique [0002] In the vacuum obtaining equipment, the molecular pump is a high-speed, high-precision vacuum pump. For turbomolecular pumps with the same structure, the higher the speed, the greater the pumping speed, but due to the influence of the rotor structure, moment of inertia and mechanical properties of materials, the ideal speed cannot be achieved. At present, the turbine rotors of large turbomolecular pumps are divided into two categories. One is to decompose the turbine rotor into multiple single pieces, and then rely on screws to fasten each piece in order to form a turbine rotor. The advantage is that the processing cost is low, and the disadvantage is that the assembly variability is large...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23P15/00F04D29/32
Inventor 张勤德邹蒙
Owner KYKY TECH
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