Heater of oil diffusion pump

Abstract

The invention relates to a heater of an oil diffusion pump. The heater comprises a casing and an electric heating tube, wherein the electric heating tube is arranged in the casing, closely contacts the casting, extends out of the casting and is externally connected with a power cord. The invention provides an electric heating device of a high vacuum diffusion pump, which can effectively heat the diffusion pump at a high efficiency in a centralized mode and is convenient to maintain.

Description

technical field [0001] The invention provides an electric heating device for a vacuum oil diffusion pump, in particular an electric heating device for a high vacuum oil diffusion pump or an oil booster pump. Background technique [0002] At present, many domestic high-vacuum oil diffusion pumps and non-booster pumps need to heat the oil in their cavity to a certain temperature to maintain their normal work. There are about three electric heating methods used by existing diffusion pumps. One is to directly use ordinary Disadvantages of using a resistance furnace to heat with a resistance furnace (1) Heating with a resistance furnace firstly exposes the surface-charged resistance wire directly in the air, and the high-temperature oxidation phenomenon is serious, which leads to a short service life of the resistance wire and is heavy It is not easy to replace the electric hob. (2) While heating the diffusion pump with a resistance furnace, it is also wasteful to heat the surro...

AI Technical Summary

Problems solved by technology

[0002] At present, many domestic high-vacuum oil diffusion pumps and non-booster pumps need to heat the oil in their cavity to a certain temperature to maintain their normal work. There are about three electric heating methods used by existing diffusion pumps. One is to directly use ordinary Disadvantages of using a resistance furnace to heat with a resistance furnace (1) Heating with a resistance furnace firstly exposes the surface-charged resistance wire directly in the air, and the high-temperature oxidation phenomenon is serious, which leads to a short service life of the resistance wire and is heavy It is not easy to replace the electric hob

(2) While heating the diffusion pump with a resistance furnace, it also heats the surrounding air to waste. (3) In some special environments, it is difficult to install the electric furnace plate, so that the construction cannot be carried out

(4) Because the heating wire is exposed, safety issues cannot be guaranteed

The second is the electric heating plate, which is realized by close contact with heat conduction. The disadvantages of using the electric heating plate (1) Due to the relatively heavy weight of the electric heating plate, it will soften when the temperature of the heating plate itself reaches a certain level during the heating process. , so that some parts will be separated from the bottom of the pump first, which seriously affects the heat transfer effect of the electric heating plate, and the temperature of the body will become higher and higher. Once separated, the life of the heating plate will end

The third is the built-in single-head heating rod for heating. The disadvantages of the single-head heating rod are (1) In order to insert and pull out the built-in single-head heating rod smoothly, the outer diameter of the heating rod and the There is a certain gap in the hole, so that the gap is carried out by air for heat conduction, and the thermal efficiency is relatively low. Under the action of stress, it will be deformed, and the stress deformation force is very large, and the sealing sleeve of the oil guide will soon be deformed. It is difficult to pull out when the heating rod needs to be replaced.

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