The invention provides an MEMS technology based multilayer structured rectangular
ion trap and preparation method thereof. The rectangular
ion trap comprises an upper glass layer, a lower glass layer, an upper
electrode layer grown on the lower surface of the upper glass layer, a lower
electrode layer grown on the upper surface of the lower glass layer, as well as a
silicon layer bonded between the lower surface of the upper glass layer and the upper surface of the lower glass layer. With such a design, a multilayer bonding structure featuring glass-
metal-
silicon-
metal-glass is formed wherein the upper
electrode layer, the
silicon layer and the lower electrode layer are enclosed to form an
ion flow channel. The
ion flow channel is successively divided into an ion
focal area and an ion analyzing area in the direction of
ion current. The preparation method of the invention adopts MEMS technology, has low
energy consumption, high
processing precision, high yield, strong
bonding strength and good long-term stability; in addition, the rectangular
ion trap is advantageous in that its size is small and its weight is light. It has wide application prospects in the field of micro-
mass spectrometry analysis and detection.