MEMS technology based multilayer structured rectangular ion trap and preparation method thereof

A rectangular ion trap, multi-layer structure technology, applied in particle separation tubes, discharge tubes, electrical components, etc., can solve problems such as unfavorable control, and achieve the effect of strong bonding strength, low RF loss, and light weight

Active Publication Date: 2016-10-12
TSINGHUA UNIV
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Problems solved by technology

However, this patent does not integrate the ion focusing electrode and the detection electrode. For a miniature ion trap, if an external ion focusing electrode is used, high assembly accuracy is required to ensure ion transmission efficiency, which is not conducive to control

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  • MEMS technology based multilayer structured rectangular ion trap and preparation method thereof
  • MEMS technology based multilayer structured rectangular ion trap and preparation method thereof
  • MEMS technology based multilayer structured rectangular ion trap and preparation method thereof

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Embodiment Construction

[0040] The rectangular ion trap with a multi-layer structure and a preparation method thereof based on the MEMS process provided by the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0041] see figure 1 , figure 2 and image 3 , the multi-layer structure rectangular ion trap based on the MEMS process provided by the present invention includes: an upper glass layer 1, a lower glass layer 5, an upper electrode layer 2 grown on the lower surface of the upper glass layer 1, and a lower glass layer grown on the upper surface of the lower glass layer 5. The electrode layer 4, and the silicon layer 3 bonded between the lower surface of the upper glass layer 1 and the upper surface of the lower glass layer 5; wherein the upper electrode layer 2, the silicon layer 3 and the lower electrode layer 4 form an ion flow channel; the The ion flow channel is followed by an ion focusing region 6 and an ion analysis re...

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Abstract

The invention provides an MEMS technology based multilayer structured rectangular ion trap and preparation method thereof. The rectangular ion trap comprises an upper glass layer, a lower glass layer, an upper electrode layer grown on the lower surface of the upper glass layer, a lower electrode layer grown on the upper surface of the lower glass layer, as well as a silicon layer bonded between the lower surface of the upper glass layer and the upper surface of the lower glass layer. With such a design, a multilayer bonding structure featuring glass-metal-silicon-metal-glass is formed wherein the upper electrode layer, the silicon layer and the lower electrode layer are enclosed to form an ion flow channel. The ion flow channel is successively divided into an ion focal area and an ion analyzing area in the direction of ion current. The preparation method of the invention adopts MEMS technology, has low energy consumption, high processing precision, high yield, strong bonding strength and good long-term stability; in addition, the rectangular ion trap is advantageous in that its size is small and its weight is light. It has wide application prospects in the field of micro-mass spectrometry analysis and detection.

Description

technical field [0001] The invention relates to a rectangular ion trap mass analyzer with a multi-layer structure based on MEMS technology and a preparation method thereof, and belongs to the field of biochemical substance detection using an ion trap mass spectrometer. Background technique [0002] Mass spectrometry is a universal chemical analysis method with high specificity and high sensitivity at the same time. Among them, ion trap mass spectrometry has become an important branch of mass spectrometry instrument by virtue of its relatively simple instrument structure and powerful time cascade mass spectrometry capability. The core device of ion trap mass spectrometer is ion trap mass analyzer, which is mainly divided into three-dimensional ion trap and two-dimensional ion trap. The stable state of ions can be screened and analyzed according to different mass-to-charge ratios of ions. [0003] With the increasing demand for in situ analysis and the rapid development of e...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J49/42
CPCH01J49/0018H01J49/4225H01J49/4235
Inventor 唐飞霍新明王晓浩
Owner TSINGHUA UNIV
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