The invention discloses a thin film spin-
coating system and method capable of monitoring quality and
viscoelasticity changes in real time. According to the thin film spin-
coating system and method, a
quartz crystal microbalance and a QCM-D are integrated in the spin-
coating system; the
spin coating system comprises a
quartz crystal oscillator, a monitoring unit capable of synchronously detecting frequency and
dissipation factor changes, a heating plate integrated on a non-working face of the
quartz crystal oscillator, and a temperature sensor. The heating sheet is used for carrying out in-situ heating on the quartz crystal oscillation sheet and a
surface film of the quartz crystal oscillation sheet, and the low-
noise conductive
slip ring is used for
signal transmission; according to the method, the
mass change (
delta f) and the
dissipation factor change (
delta D) of the film are synchronously monitored in real time and in situ in the spin-coating process; by analyzing a
coupling curve of
delta f and delta D, the quality of the dry film can be accurately obtained, and viscoelastic evolution and
structural transformation key points of the film can be disclosed; the problem that the mechanical characteristics of the thin film cannot be obtained in real time through a traditional spin-coating process is solved, and a powerful quantitative analysis tool is provided for film forming mechanism research and
process optimization of the thin film prepared through a
perovskite solution method and the like.