Vertical constant-current diode and manufacturing method thereof

Abstract

The invention discloses a vertical constant-current diode and a manufacturing method thereof, and belongs to the technical field of semiconductors. The vertical constant-current diode comprises a cellular structure and a terminal structure connected in sequence, wherein the cellular structure comprises a plurality of cells same in structure and connected in sequence; the terminal structure comprises a cut-off ring and a plurality of field limiting rings connected in sequence. The constant-current diode adopts a P-type doped semiconductor material opposite to an epitaxial layer in doping type as a substrate, and a P-type light-doped substrate injects holes to an N-type light-doped epitaxial layer, so that the constant-current diode has two carrier currents, namely hole current and electron current, and the current density of a device is increased; moreover, substrates with different doping types assist in depletion of a channel, accelerate pinching-off of a JFET (junction field-effect transistor) region channel and enable pinch-off voltage to be lower than 4 V.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, and in particular relates to a vertical constant current diode and a manufacturing method thereof. Background technique [0002] The constant current source is a commonly used electronic equipment and device, and it is widely used in electronic circuits. The constant current source is used to protect the entire circuit, even if the voltage is unstable or the load resistance changes greatly, it can ensure the stability of the supply current. A constant current diode (CRD, Current Regulative Diode) is a semiconductor constant current device, that is, a diode is used as a constant current source instead of an ordinary constant current source composed of transistors, Zener tubes and resistors. Currently, constant current diodes The output current is between a few milliamps and tens of milliamperes, which can directly drive the load, achieving the purpose of simple circuit structure, small dev...

AI Technical Summary

Problems solved by technology

[0003] Aiming at the problems of high pinch-off voltage, low breakdown voltage and poor constant current capability of constant current diodes, the present invention proposes a vertical constant current diode and its manufacturing method. The P-type doped semiconductor material with the opposite heterotype is used as the substrate, so that the constant-current diode conducts electricity for both hole and electron carriers, which increases the current density of the device; the constant-current diode of the present invention achieves a lower pinch-off voltage, higher breakdown voltage and better constant current capability, and the terminal structure and cell structure of the constant current diode can be formed at the same time, which simplifies the process and reduces the cost

Images