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1112results about How to "Accurate temperature" patented technology

Plasma processing apparatus and mounting unit thereof

A parallel plate type plasma processing apparatus including a RF feed rod for applying a high frequency power to a susceptor and a temperature detection unit for detecting the temperature of a substrate on the susceptor is configured to reduce an effect that high frequency current flowing in the RF feed rod has on temperature detection of the temperature detection unit. A surface portion of the susceptor serves as a mounting unit including an electrostatic chuck and a heater. A shaft, which is a protection pipe extracted downward from the processing chamber, is provided under the mounting unit. A chuck electrode of the electrostatic chuck serves as an electrode for applying a high frequency voltage. Provided in the shaft are two RF feed rod for supplying a power to the electrode and an optical fiber, i.e., a temperature detection unit, having a dielectric fluorescent material is disposed in a leading end thereof. Then, the two RF feed rods and bar type conductive leads for the heater are alternately arranged at equal intervals in a circumferential direction on a circle having the optical fiber at the center thereof such that the region having therein the optical fiber is an electromagnetic wave-free region since the electric force lines respectively traveling from the RF feed rods to bar type conductive leads are offset with each other.
Owner:TOKYO ELECTRON LTD

Electric cooker and control method thereof

The invention provides an electric cooker and a control method thereof. The control method comprises the following steps: after the electric cooker is started, the electric cooker is controlled to be heated at the first average power; when the temperature in the electric cooker reaches a first preset temperature, heating of the electric cooker is controlled to be stopped temporarily; first preset time later, the electric cooker is controlled to be continuously heated at the first average power; when the temperature in the electric cooker reaches a second preset temperature, the electric cooker is controlled to be heated at the second average power, wherein the first preset temperature is larger than the second preset temperature, the power regulation ratio of the second average power is smaller than that of the first average power and the power regulation cycle of the second average power is larger than that of the first average power; when the temperature in the electric cooker reaches a boiling balance temperature point, the electric cooker is controlled to be heated at the third average power so as to keep boiling; and second preset time later, heating of the electric cooker is controlled to be stopped. According to the electric cooker and the control method thereof, the fact that the electric cooker reaches boiling temperature and material in the electric cooker does not overflow can be guaranteed and temperature control is more accurate.
Owner:FOSHAN SHUNDE MIDEA ELECTRICAL HEATING APPLIANCES MFG CO LTD +1

Refrigerator and its temperature control method

The invention discloses a refrigerator and its temperature control method. The method comprises the following steps: detecting the current temperature of a variable-temperature chamber; judging whether a difference between a shutdown temperature of the variable-temperature chamber and the current temperature is not lower than a first difference temperature; if yes, detecting an ambient temperature of the refrigerator, and judging whether the ambient temperature is not higher than a preset ambient temperature; and if yes, controlling a temperature compensation heater in a first preset mode to heat the variable-temperature chamber, otherwise controlling the temperature compensation heater to operate in a second preset mode. The refrigerator temperature control method of the inventive embodiment can precisely control the temperature compensation heater to carry out temperature micro-adjustment on the variable-temperature chamber in different modes when the set temperature of the variable-temperature chamber is relatively high (usually used for a refrigerating chamber), to make the temperature of the variable-temperature chamber quickly reach the set temperature, and has advantage of high control accuracy, thus contributing to food storage in the variable-temperature chamber and improving practicability of the refrigerator.
Owner:HEFEI MIDEA REFRIGERATOR CO LTD +1
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