The utility model belongs to the technical field of
wafer inserting machines, and particularly relates to a three-head
wafer inserting
machine layout structure which comprises conveying production lines, a full basket conveying line, a basket returning
production line and a carrying device, each conveying
production line is used for conveying
silicon wafers in the y-axis direction, and the
tail end of each conveying
production line is provided with a
wafer inserting device. The wafer inserting device is provided with flower baskets used for loading
silicon wafers, the full-basket conveying line is used for conveying the flower baskets loaded with the
silicon wafers in the y-axis direction, the basket returning production line is used for conveying unloaded flower baskets in the y-axis direction, and the carrying device is arranged above the three conveying production lines, the full-basket conveying line and the basket returning production line in a crossing mode in the x-axis direction. And the carrying
manipulator is used for carrying the flower baskets among the basket returning production line, the full basket conveying line and the sheet inserting device. According to the utility model, through the reasonable equipment
layout and the automatic operation process, the technical problems of damage to silicon wafers or equipment bodies and low production efficiency caused by improper
layout in the prior art are effectively solved, and the improvement of the production efficiency and the reduction of the fragment rate are realized.