Patents
Literature
Hiro is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Hiro

55results about How to "Increase the effective channel length" patented technology

EEPROM device and method of fabricating the same

A memory device comprises a semiconductor substrate of a first conductive type, a memory transistor, a select transistor, a floating junction region, a common source region, and a bit line junction region. The memory transistor positions on the semiconductor substrate and comprises a gate insulating film formed on the semiconductor substrate and a memory transistor gate formed on the gate insulating film. The gate insulating film includes a tunnel insulating film. The select transistor positions on the semiconductor substrate and is separated from the memory transistor gate. The select transistor comprises a gate insulating film formed on the semiconductor substrate and a select transistor gate formed on the gate insulating film. A floating junction region is formed of a second conductive type on the semiconductor substrate below the tunnel insulating film. The common source region of a second conductive type is formed on the semiconductor substrate adjacent to the memory transistor gate and separated from the floating junction region. A bit line junction region of a second conductive type is formed on the semiconductor substrate adjacent to the select transistor gate and is separated from the floating junction region, wherein the common source region includes a single junction region with a first doping concentration, and a depth of the common source region is shallower than a depth of the floating junction region and the bit line junction region.
Owner:SAMSUNG ELECTRONICS CO LTD

SONOS flash memory unit and manufacturing method thereof

ActiveCN101740576AImplementing Substrate BiasingOvercoming the disadvantages of programming difficultiesSolid-state devicesSemiconductor/solid-state device manufacturingComputational physicsIon implantation
The invention discloses an SONOS flash memory unit and a manufacturing method thereof, wherein an SONOS component and a selected transistor both adopt enhanced PMOS components, therefore, the substrate bias of the components can be realized without a deep N-well process. A P-type buried channel on the surface of an N-well can provide a great deal of cavities for the programming of the SONOS component, thereby greatly improving the programming efficiency and overcoming the defects of large effective quality and difficult programming of the cavities. The P-type SONOS component can obtain a programming and erasing threshold voltage which is more symmetrical than that of an N-type SONOS component; furthermore, the invention ensures that the drain electrode implantation volume is larger than that of a source electrode, increases the effective channel length and creates conditions for shortening the size of the components by fully utilizing the characteristic of small grid spacing between the two components of the flash memory unit and adopting source-drain ion implantation with large angle and light dope; and finally, the invention further reduces the short channel effect by carrying out bag-shaped ion implantation on the two components of the flash memory unit.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

High-integration-level and high-mobility-ratio source, drain and gate auxiliary control type junction-free transistor

The invention relates to a high-integration-level and high-mobility-ratio source, drain and gate auxiliary control type junction-free transistor. Two independently-controlled gate electrodes including the source and drain control gate electrode and the gate electrode are adopted, so that the high mobility ratio of the device in a channel with the low doping concentration can be guaranteed, and the device mobility ratio reduction and the device stability reduction caused by strengthening of the random scattering effect under the high doping concentration are avoided; meanwhile, the low source and drain resistance can be obtained through the independent control effect of the source and drain control gate electrode and the gate electrode, and therefore the contradictions that the source and drain resistance will be increased if the doping concentration of a channel of a common junction-free transistor is excessively low, and the device mobility ratio reduction and the device stability reduction will be caused if the doping concentration is excessively high are overcome; in addition, the groove-shaped channel design is adopted; compared with a common plane structure, on the premise that a chip area is not additionally increased, the effective channel length is obviously increased to reduce the short channel effect of the device under the deep nanoscale, and therefore the high-integration-level and high-mobility-ratio source, drain and gate auxiliary control type junction-free transistor is suitable for application and popularization.
Owner:SHENYANG POLYTECHNIC UNIV

Double-vertical-channel transistor, integrated circuit memory and preparation method thereof

The invention provides a double-vertical-channel transistor, an integrated circuit memory and a preparation method thereof. A first trench extending along a first direction is formed in the vertical fin; first source/drain regions are formed in the fins at the tops of the two sides of the first trench; a second source/drain region is formed in the fin at the bottom of the first trench; a first gate structure is filled in the first trench and extends along the first direction; the embedded wires are filled in the second trench in the side wall, extending along the second direction, of the vertical fins, so that the first source/drain regions on the two sides of the first trench and the second source/drain region at the bottoms of the first trench respectively form double vertical L-shaped channels, the effective channel length is increased, and the short channel effect is overcome; and the second source/drain region and the electric connection embedded wire thereof are positioned at thebottom of the transistor and do not need to be directly led out from the upper surface, so that isolation at the periphery of the transistor is easier to form, the device area is reduced, the processis simplified and the performance is improved.
Owner:CHANGXIN MEMORY TECH INC

High-integration-level source, drain and gate auxiliary control U-shaped channel high-mobility-ratio junction-free transistor shaped like Chinese character 'ri'

The invention relates to a high-integration-level source, drain and gate auxiliary control U-shaped channel high-mobility-ratio junction-free transistor shaped like the Chinese character 'ri'. Two independently-controlled gate electrodes including the auxiliary control gate electrode shaped like the Chinese character 'ri' and the gate electrode are adopted, it is guaranteed that the dosing concentration of the device is reduced to improve the mobility ratio, and the device mobility ratio reduction and the device stability reduction caused by strengthening of the random scattering effect under the high doping concentration are avoided; meanwhile, the resistance of source and drain areas is effectively reduced through the auxiliary control gate electrode shaped like the Chinese character 'ri', so that the contradictions that the source and drain resistance will be increased if the doping concentration of a channel of a common junction-free transistor is excessively low, and the device mobility ratio reduction and the device stability reduction will be caused if the doping concentration is excessively high are overcome; meanwhile, U-shaped monocrystalline silicon serves a channel part of the device; compared with a common plane structure, on the premise that the chip area is not additionally increased, the effective channel length is obviously increased to reduce the short channel effect of the device under the deep nanoscale, and therefore the high-integration-level source, drain and gate auxiliary control U-shaped channel high-mobility-ratio junction-free transistor shaped like the Chinese character 'ri' is suitable for application and popularization.
Owner:SHENYANG POLYTECHNIC UNIV

Method for increasing length of effective channel of PMOS

The invention provides a method for increasing the length of an effective channel of a PMOS, which comprises the following steps of: making an n-well and a p-well in a substrate; making a first polysilicon gate on the n-well and making a second polysilicon gate on the p-well; growing a first oxidation layer; injecting lightly doped source / drain in an n-well area; respectively growing a second oxidation layer on the surface of the n-well and the p-well; injecting lightly doped source / drain in a p-well area; respectively growing a silicon nitride layer and a third oxidation layer in the n-well and the p-well areas; etching the first oxidation layer, the second oxidation layer, the silicon nitride layer and the third oxidation layer; respectively forming a side wall around the polysilicon gates of the n-well and the p-well; injecting heavily doped source / drain in the n-well area; and injecting heavily doped source / drain in the p-well area. The method moves the step of injecting the lightly doped source / drain in the p-well area between the step of growing the second oxidation layer and the step of growing the silicon nitride layer and increases the length of the effective channel of the PMOS by using the second oxidation layer.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

MOSFET structure

The invention discloses a MOSFET structure which belongs to the technical field of semiconductor devices and comprises a substrate electrode, a substrate, a channel region, a source region, a drain region, a source electrode, a drain electrode, a gate oxide layer and a gate electrode. The channel region with a non-planar surface is formed in a substrate region built in the substrate, and the source region and the drain region are arranged on both sides of the channel region respectively. The source electrode and the drain electrode are correspondingly arranged in the source region and the drain region respectively. The gate oxide layer covers the surface of the non-planar channel region. The gate electrode is arranged on the surface of the gate oxide layer, and both ends of the gate electrode are spaced from the source electrode and the drain electrode. Both ends of the gate electrode respectively extend to the source region and the drain region to form overlap. According to the invention, the non-planar channel MOSFET structure is used to reduce the electric field peak of the drain region and increase the effective channel length of a device; a leakage-induced barrier reducing effect is improve and suppressed; a short channel effect is suppressed; the high electric field of the drain region is reduced; the generation of hot carriers is suppressed; and the stability of the device is improved.
Owner:NANJING UNIV OF POSTS & TELECOMM
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products