The invention discloses a
MOSFET structure which belongs to the technical field of
semiconductor devices and comprises a substrate
electrode, a substrate, a channel region, a source region, a drain region, a source
electrode, a drain
electrode, a
gate oxide layer and a gate electrode. The channel region with a non-planar surface is formed in a substrate region built in the substrate, and the source region and the drain region are arranged on both sides of the channel region respectively. The source electrode and the drain electrode are correspondingly arranged in the source region and the drain region respectively. The
gate oxide layer covers the surface of the non-
planar channel region. The gate electrode is arranged on the surface of the
gate oxide layer, and both ends of the gate electrode are spaced from the source electrode and the drain electrode. Both ends of the gate electrode respectively extend to the source region and the drain region to form overlap. According to the invention, the non-
planar channel MOSFET structure is used to reduce the
electric field peak of the drain region and increase the effective channel length of a device; a leakage-induced barrier reducing effect is improve and suppressed; a
short channel effect is suppressed; the high
electric field of the drain region is reduced; the generation of hot carriers is suppressed; and the stability of the device is improved.