The invention discloses a
waveguide integrated superconductive heat electronic
bolometer, a preparation method thereof and a testing device, the
waveguide integrated superconductive heat electronic
bolometer comprises a
silicon-based
ridge waveguide used for transmitting terahertz signals; the terahertz coupler is prepared on the upper surface of the
silicon-based
ridge waveguide, the terahertz coupler is of a
metal coupling structure capable of being coupled with TM-mode terahertz
waves, and the terahertz coupler is used for
coupling out energy of TM-mode terahertz signals transmitted in the
silicon-based
ridge waveguide and converging the energy to the central area of the terahertz signals to form local enhancement of an
electric field; and the superconductive heat electronic
bolometer is fixed on the silicon-based ridge waveguide through a
chip mounting process, and a heat sensing part of the superconductive heat electronic bolometer is accurately positioned in a central area of the terahertz coupler and is used for absorbing converged terahertz energy. According to the invention, a high-performance superconducting
detector is combined with a silicon-based terahertz device, the space
coupling alignment problem of a terahertz
frequency band and the process compatibility problem of heterogeneous materials are solved, and the terahertz
terahertz detector has the advantages of small size, high
coupling efficiency, easiness in large-scale on-
chip integration, good polarization selectivity and the like.