We disclose targets for generating x-rays using
electron beams, along with their method of fabrication. The targets comprise a number of microstructures fabricated from an x-
ray target material arranged in close
thermal contact with a substrate such that the heat is more efficiently drawn out of the x-
ray target material. This in turn allows
irradiation of the x-
ray generating substance with higher
electron density or higher energy electrons, which leads to greater x-ray brightness, without inducing damage or melting.The microstructures may comprise conventional x-ray target materials (such as
tungsten) that are patterned at micron-scale dimensions on a thermally conducting substrate, such as
diamond. The microstructures may have any number of geometric shapes to best generate x-rays of high brightness and efficiently disperse heat.In some embodiments, the target comprising microstructures may be incorporated into a rotating
anode geometry, to enhance x-ray generation in such systems.