Patents
Literature
Patsnap Eureka AI that helps you search prior art, draft patents, and assess FTO risks, powered by patent and scientific literature data.

36results about "Discharge tube solid thermionic cathodes" patented technology

Electron source, electron gun and device using same

PendingCN121925726AX-ray tube electrodesDischarge tube solid thermionic cathodesRare-earth elementIridium
The electron source is provided with: an electron emission unit containing an alloy of iridium and a rare earth element; a support part made of metal; and a joining part that joins the electron emission part and the support part. The bonding portion has a coating layer containing iridium and the metal in the support portion, and the coating layer contains iridium and the metal in the support portion.
Owner:HAMAMATSU PHOTONICS KK

Electron source and method for manufacturing same, and emitter and device provided with same

ActiveUS12633487B2Electric discharge tubesDischarge tube solid thermionic cathodesElectron sourceWork function
A method for manufacturing an electron source according to the present disclosure includes steps of: (A) preparing a first member provided with a columnar portion made of a first material having an electron emission characteristic, (B) preparing a second member which has a higher work function and a lower strength than the first material, and in which a hole is formed extending in a direction from one end surface toward the other end surface, and (C) pushing the columnar portion into the hole in the second member, wherein the first member has a cross-sectional shape that is dissimilar to the cross-sectional shape of the hole; and in the step (C), by pressing the columnar portion into the hole, a portion of a side surface of the columnar portion scrapes the inner surface of the hole and bites into the second member, thereby fixing the columnar portion to the second member.
Owner:DENKA CO LTD

Flat emitter with compliant supported end

ActiveUS12653467B2X-ray tube electrodesX-ray tube cathode assembly
Various methods and systems are provided for an emitter assembly for a cathode of an X-ray tube. In one example, an emitter assembly comprises a first end of a substantially flat emitter supported by two rods extending from a two-rod insulator assembly, and a second end of the substantially flat emitter supported by a compliant, single rod insulator assembly.
Owner:GE PRECISION HEALTHCARE LLC

Indirectly heated cathode and method for manufacturing the same

ActiveJP7840785B2Discharge tube solid thermionic cathodesThermionic cathode manufactureMechanical engineeringComposite material
To provide an indirect heated cathode capable of shortening the time up to a start of radiation of thermoelectrons, and a method of manufacturing the indirect heated cathode in which a heat absorption layer which has a uniform thickness can be easily manufactured.SOLUTION: An indirect heated cathode 10 comprises a cathode sleeve 1, a heater 2 arranged at a hollow part of the cathode sleeve 1, a black heat absorption layer 4 covering a hollow part inner surface of the cathode sleeve 1, and a cathode base body 3 carrying an electron emission substance arranged at the cathode sleeve 1. The black heat absorption layer 4 consists of a particulate substance including tungsten and aluminum oxide. The black heat absorption layer 4 is formed by arranging rod-like alumina ceramics, and a first tungsten heater and a second tungsten heater in the hollow part of the cathode sleeve 1 and heating it in a vacuum atmosphere.SELECTED DRAWING: Figure 1
Owner:NISSHINBO MICRO DEVICES INC

Transmitter

PendingCN122003728AElectric discharge tubesDischarge tube solid thermionic cathodesElectron sourceElectrical connection
An emitter (1) having: an electron source tip (10); a first filament (50) connected to a first position (10a) on the side surface of the electron source tip (10); a second filament (60) connected to a second position (10b) on the side surface of the electron source tip (10); two upper positive terminals (20a, b) connected to first side surfaces (50a, b) at two locations of the first filament (50), respectively; two upper negative terminals (20c, d) connected to second side surfaces (60a, b) at two locations of the second filament (60), respectively; one lower positive terminal (30a) electrically connected to the two upper positive terminals (20a, b); one lower negative terminal (30b) electrically connected to the two upper negative terminals (20c, d); and an insulator (40) carrying the upper positive terminals (20a, b), the upper negative terminals (20c, d), the lower positive terminal (30a), and the lower negative terminal (30b), the first position (10a) and the second position (10b) being different positions, the first side surfaces (50a, b) of the first filament (50) being connected to the side surfaces of the upper positive terminals (20a, b), respectively, and the second side surfaces (50a, b) being connected to the side surfaces of the lower positive terminals (30a, b). The second side surfaces (60a, b) of the second filament (60) are connected to the side surfaces of the upper negative terminals (20c, d), respectively.
Owner:DENKA CO LTD

Emitter structures for enhanced thermionic emission

ActiveEP4008019B1Electric discharge tubesDischarge tube solid thermionic cathodes
In one embodiment, a system includes a cathode and a thermionic emitter installed at least partially within the cathode tube of the cathode. The thermionic emitter is in a shape of a hollow cylinder. The hollow cylinder includes an outer surface and an unsmooth inner surface. The outer surface is configured to contact an inner surface of the cathode tube. The unsmooth inner surface includes a plurality of structures that provide an increase in surface area over a smooth surface.
Owner:LOCKHEED MARTIN CORP

Heater-free hollow cathode with built-in tungsten filament electrode

PendingCN121583841AMounting/support/spacing/insulation of electrode assembliesDischarge tube solid thermionic cathodesInsulation layerMiniaturization
The invention provides a heater-free hollow cathode with a built-in tungsten filament electrode, and belongs to the technical field of spaceflight related equipment manufacturing. An emitter is arranged on the upper portion of the inner side wall of a cathode tube and tightly attached to the inner side wall of the cathode tube, the outlet end of the top of the cathode tube is connected with a throttling top in a sealed mode, a first flow channel of the throttling top is communicated with the cathode tube and an emitter cavity, the cathode tube is coaxially sleeved with a touch holding electrode, and the bottom end of the cathode tube is fixedly connected with the top end face of a ceramic base. The built-in tungsten filament electrode is fixed in the second flow channel of the ceramic base, the top end of the built-in tungsten filament electrode is arranged in the cavity of the emitter and does not make contact with the surface of the emitter, the first through hole of the ceramic base is communicated with the third flow channel and sealed, and a ceramic insulating layer is arranged on the bottom end face of the touch holding electrode. And the two conductive columns pass through the two through holes II of the ceramic insulating layer and are fixedly connected with the contact holding electrode. In the cathode starting process, an external heating structure of a traditional cathode can be optimized by means of the heat emission effect of a tungsten filament in the cathode, and therefore miniaturization of the cathode is achieved.
Owner:HARBIN UNIV OF SCI & TECH

Mounted planar filament

ActiveUS12592355B2Unwanted particle removal/diversion trapsX-ray tube electrodesParticle physicsQuantum electrodynamics
A filament assembly 10 for an x-ray tube 20 can include a planar filament 11 electrically-coupled between and substantially-encircled by a pair of collector plates C1 and C2. The pair of collector plates C1 and C2 can support the planar filament 11 so that it does not twist or warp and align the filament assembly 10 within a cathode cup 33. The pair of collector plates C1 and C2 can block electrons emitted from a back side of the filament. Without the collector plates C1 and C2, back side electrons can change direction by about 180°, hit the target, and distort a target electron spot. Each collector plate C1 or C2 can include holes H1 and H2. These holes H1 and H2 can aid in alignment of the collector plates C1 and C2 with electrodes 31 and electrode 32, can allow welding at a lower temperature, and can facilitate weld inspection.
Owner:MOXTEK INC

Monolithic heater for thermionic electron cathode

A monolithic graphite heater for heating a thermionic electron cathode includes first and second electrically conductive arms, each one of the first and second electrically conductive arms having an electrode mount at a proximal end, a thermal apex at a distal end, and a transitional region between the electrode mount and the thermal apex; a cathode mount electrically and mechanically coupling each thermal apex to form a maximum Joule-heating region at or adjacent the cathode mount and decreasing Joule heating along each transitional region; and a press-fit aperture formed in the cathode mount, the press-fit aperture sized to receive at least a portion of the thermionic electron cathode for facilitating thermionic emission produced therefrom in response to operative heat power generation provided by the maximum Joule-heating region.
Owner:APPLIED PHYSICS TECH

Barium tungsten lanthanum hexaboride composite hollow cathode

The application discloses a barium tungsten lanthanum hexaboride composite hollow cathode, which comprises a cathode tube, a gas inlet is arranged at a first end of the cathode tube, a cathode top is arranged at a second end of the cathode tube, and a cathode top through hole is arranged in the cathode top; a touch electrode is arranged outside the cathode tube, an end of the touch electrode is provided with a touch electrode top, a touch electrode through hole is arranged in the touch electrode top, and the touch electrode is coaxial with the cathode tube; an emitter comprises a first emitter and a second emitter, the first emitter and the second emitter are sequentially arranged on an inner wall of the second end of the cathode tube in a direction from the gas inlet to the cathode top; a heater is arranged around an outer wall of the cathode tube; wherein the first emitter is a barium tungsten emitter, the second emitter is a lanthanum hexaboride emitter, and the lanthanum hexaboride emitter is heated by heat generated by self-sustaining work of the barium tungsten emitter, so that the starting power consumption is greatly reduced.
Owner:SHANGHAI AEROSPACE CONTROL TECH INST

Electron gun filament power supply isolation device and electron gun equipment

The invention relates to the field of electronic gun power supplies, and discloses an electronic gun filament power supply isolation device and electronic gun equipment, and the electronic gun filament power supply isolation device comprises a driving circuit which is used for outputting a driving signal when receiving a control signal; the first motor is connected with the driving circuit, and the first motor is used for working when receiving the driving signal; the insulation transmission structure is connected with the first motor; the second motor is connected with the insulation transmission structure and is also used for connecting an electron gun filament; the first motor drives the insulation transmission structure to rotate when working so as to drive the second motor to generate alternating current and output the alternating current to the electron gun filament. Through the first motor, the insulation transmission structure and the second motor, conversion from electric energy to mechanical energy and then to the electric energy is achieved, the structural design of a power circuit is simplified while electrical isolation and insulation are achieved, and the energy transmission efficiency is improved.
Owner:HEFEI NATIONAL LABORATORY +1

System and method for introducing aluminum into an ion source

PendingJP2026519775AIon beam tubesDischarge tube solid thermionic cathodes
An ion source is disclosed which may be used to introduce a dopant material into an arc chamber. A component containing the dopant material is placed in the path of the etching gas entering the arc chamber. In some embodiments, the dopant material is in liquid form, and the etching gas moves through the liquid. In several other embodiments, the dopant material is a solid material. In some embodiments, the solid material is formed as a porous structure, thereby allowing the etching gas to flow through the solid material. In several other embodiments, one or more components of the ion source are manufactured using a material containing the dopant material, thereby allowing the etching gas to etch the component to release the dopant material.
Owner:APPLIED MATERIALS INC

emitter

PendingEP4734145A1Discharge tube solid thermionic cathodes
An emitter comprises: an insulator; a pair of terminals extending along a first direction and fixed to the insulator so as to face each other in a second direction perpendicular to the first direction; a filament fixed to the pair of terminals; and a chip part formed of an electron emission material and fixed to the filament. Each of the pair of terminals has an inclined surface that is on one side in a third direction perpendicular to the first direction and the second direction and that is inclined with respect to the first direction so as to slope toward the other side in the third direction as it gets farther from the insulator. The filament is fixed to the pair of terminals at the inclined surface thereof.
Owner:DENKA CO LTD

EMITE STRUCTURES FOR IMPROVED THERMIONIC EMISSION

ActiveDE602020070014T2Discharge tube solid thermionic cathodesThermionic emissionThermal electron
Owner:LOCKHEED MARTIN CORP

Device for enhancing guidance quality of electron emission

ActiveCN224036336UDischarge tube solid thermionic cathodesElectron flowParticle physics
The utility model belongs to the technical field of electron flow emitting devices, and particularly relates to a device for enhancing electron emission guidance quality, which comprises a base, a guide piece column and at least one lamp filament, each pair of conductive columns penetrate through the base and are electrically connected with a power supply, and the lamp filament is electrically connected with the conductive columns. The two ends of the connecting position of the conductive column and the base are respectively provided with an insulating part wrapping the conductive column, and the guiding part is fixedly installed on the base and located behind the lamp filament so as to reduce the phenomenon that electrons emitted by the lamp filament thermally flow to be dissipated in a non-working area. A plurality of independent power supplies can be connected so as to control the density of the electron flow, the use of multiple working areas is met, and the dissipation direction of the electron flow can be controlled through the guide piece.
Owner:R & D AUTOMATION EQUIP (HUIZHOU) CO LTD

Cathode based on the material c12a7:e? (electride) for thermionic electron emission and method for using same

PendingEP4386806A4Discharge tube cold cathodesDischarge tube solid thermionic cathodesThermal electronParticle physics
The present invention relates to the specific ways in which the material C12A7:e- ("electride") is used as an electrode and more specifically as a cathode and more specifically as an electron-emitting cathode in all applications capable of using this property, such as electron-emitting cathodes for ion thrusters and neutralizers in aerospace applications, cathodes and electrodes in general that interact with ions, whether in a gaseous (plasma) or liquid (electrolysis, water treatment, hydrogen generation) or a combination of both liquid and gaseous (hydrogen fuel cell) as well as active catalysts (polarized) for the synthesis and decomposition of certain compounds (specifically ammonia). The invention focuses on maximizing the material's properties as a cathode and its stable operation under different conditions, using specific pulsed polarization techniques that are precisely adapted to the nature of the material.
Owner:ADVANCED THERMAL DEVICES SL

Emitter and device comprising same

An emitter includes: an insulator; a pair of conductive terminals attached to the insulator and spaced apart from each other; a heater disposed between tips of the pair of conductive terminals and generating heat when energized; an electron source heated by the heater and made of a first material emitting electrons; a Wehnelt electrode having an inner surface forming an internal space along with a surface of the insulator, and applying a bias voltage across the Wehnelt electrode and the electron source; and a shielding member covering a part of the surface of the insulator in the internal space.
Owner:DENKA CO LTD

Cathode-in-cathode type high power microwave (HPM) vacuum tube source and alignment method

PendingJP2026508590ATransit-tube electron/ion gunsTravelling-wave tubes
A method for precise coaxial alignment of a high-power microwave (HPM) vacuum tube source and its field emission (FE) cathode, cylindrical RF generator tube, and magnetic field includes positioning a low-power thermionic emission (TE) cathode within the FE cathode in a "cathode-in-cathode" configuration. When the HPM source is under vacuum and the FE cathode is deactivated, the TE cathode emits a substitute electron beam through the generator tube. A measurement circuit measures the position of the substitute electron beam relative to the front-to-rear longitudinal axis of the generator tube. The measurement circuit can be, for example, a repositionable fluorescent target or electric field sensor embedded in the cylindrical RF generator tube. The coaxial alignment of the primary cathode, cylindrical RF generator tube, and magnet is adjusted until the position of the substitute electron beam meets the coaxial alignment tolerance.
Owner:RAYTHEON CO

Tungsten carbide alloy filament, its manufacturing method, and heating device

PendingJP2026505917AInorganic material artificial filamentsTransit-tube cathodesAluminium carbideTungsten alloy
The present invention provides an aluminum carbide alloy filament and its manufacturing method, a heating device, and relates to the technical field of filament cathode materials. The aluminum carbide alloy filament includes a matrix (100) and a carbide layer (200) attached to the outer surface of the matrix (100). The carbide layer (200) has a grain width of 1.0 μm to 15.0 μm. The components of both the matrix (100) and the carbide layer (200) include tungsten, carbon, oxygen, and an M element, where the M element is one or a combination of elements selected from the group consisting of La, Y, Sc, Nd, Sm, Lu, Ce, Gd, Tb, Dy, Ho, Pr, Er, Tm, Yb, Eu, Hf, and Zr. The tungsten carbide alloy filament does not include thorium. This material improves the emission stability of tungsten alloy filaments and achieves the stable emission capability of conventional thorium-tungsten filaments without adding thorium, solving the problem of the relatively poor stable emission capability of existing thorium-free tungsten filaments and also eliminating the problem of radioactive contamination that occurs with conventional thorium-tungsten filaments.
Owner:XIAMEN HONGLU TUNGSTEN MOLYBDENUM IND CO LTD

Filament and cathode for an x-ray tube

PCT designated stageWO2026003717A1X-ray tube electrodesDischarge tube solid thermionic cathodesParticle physicsRay
The invention relates to a filament for generating electrons, in particular for an X-ray tube, the filament having an emission body (24) which has an input (27) and an output (28) for a current connection (29), having an emission surface (25) which is formed on the emission body (24), is flat and comprises at least one slot (31, 32) in order to guide at least one current path line (37) from the input (27) along the emission surface (25) to the output (28), and a cross-section of the emission body (24) lies in a sectional plane perpendicular to the flat emission surface (25), which a size of the cross-section of the emission body (24) increases from the input (27) to the middle of the emission surface (25) and a size of the cross-section of the emission body (24) decreases from the middle of the emission surface (25) to the output (28), wherein at least one meandering current path (33), along which the at least one current path line (37) runs, extends from the input (27) to the output (28) of the emission surface (25) of the emission body (24), and the emission surface (25) of the emission body (24) has the shape of an ellipse as seen in plan view.
Owner:HELMUT FISCHER GMBH & CO INSTITUT FUER ELEKTRONIK UND MESTECHNIK

Thorium-free cathode for short arc discharge lamp as well as preparation method and application of thorium-free cathode

PendingCN121726293ADischarge tube solid thermionic cathodesThermionic cathode manufactureCompression moldingElectric light
The invention belongs to the technical field of electric light source materials and manufacturing, and discloses a thorium-free cathode for a short arc discharge lamp and a preparation method and application of the thorium-free cathode. The preparation method of the thorium-free cathode for the short-arc discharge lamp comprises the following steps: S1, mixing raw materials and carrying out drying treatment; s2, the dried mixed powder is subjected to reduction treatment in a reducing atmosphere, and tungsten alloy powder is obtained; s3, the tungsten alloy powder is subjected to compression molding, sintering and vertical sintering, and a cathode blank is obtained; s4, the cathode blank is forged, and a cathode base body is obtained; and S5, a groove with an inverted triangular cross section is machined in the middle section of the cathode base body in the direction of the center axis of the cathode base body, and the thorium-free cathode for the short arc discharge lamp is obtained. According to the preparation method of the thorium-free cathode for the short-arc discharge lamp, through collaborative optimization of a material system and structural design, comprehensive improvement of the electron emission performance, the thermal stability and the service life of the cathode is achieved.
Owner:GUANGDONG GREATER BAY AREA INST OF INTEGRATED CIRCUIT & SYST +1

Thorium-tungsten cathode for short arc discharge lamp and preparation method and application of thorium-tungsten cathode

PendingCN121726294ADischarge tube solid thermionic cathodesThermionic cathode manufactureElectric lightTungsten cathode
The invention belongs to the technical field of electric light source manufacturing, and discloses a thorium-tungsten cathode for a short-arc discharge lamp and a preparation method and application of the thorium-tungsten cathode. The preparation method of the thorium-tungsten cathode for the short arc discharge lamp comprises the following steps: S1, coating the surface of a thorium-tungsten cathode substrate with a heat treatment solution to obtain the thorium-tungsten cathode comprising a carbon source coating; and S2, carrying out segmented heat treatment on the thorium-tungsten cathode comprising the carbon source coating, and cooling to obtain the thorium-tungsten cathode for the short arc discharge lamp. According to the preparation method of the thorium-tungsten cathode for the short-arc discharge lamp, through specific material and process design, the surface components and the structure of the thorium-tungsten cathode are synergistically optimized on the microscopic level, the emission capability, the thermal erosion resistance and the long-term structural stability of the thorium-tungsten cathode are enhanced, and the comprehensive improvement of the short-arc discharge light output performance is jointly realized.
Owner:GUANGDONG GREATER BAY AREA INST OF INTEGRATED CIRCUIT & SYST +1

Field emission electron source and preparation method thereof

PendingCN121662682AMounting/support/spacing/insulation of electrode assembliesDischarge tube solid thermionic cathodesStress concentrationElectron source
The invention relates to the technical field of electronic optical equipment and micro-nano machining, and discloses a field emission electron source. The field emission electron source is mainly composed of a filament base, a binding post, a welding post, a welding groove, a tungsten sheet, an emission tungsten needle and the like. During welding, the tungsten sheet is in direct contact with the side wall of the welding groove, so that original point contact between the tungsten filament and the welding column is replaced by surface contact by contact between the tungsten sheet and the side wall of the welding groove, the welding area is increased, the conditions of pseudo soldering, unsoldering and the like are reduced, and the welding quality and reliability are greatly improved; and two or more tungsten sheet welding structures can disperse thermal stress generated in the heating process to a plurality of welding spots, deformation of a single welding spot due to stress concentration can be avoided, the position offset of the emission tungsten needle is prevented, and then the emission stability of the electron source can still be ensured in a long-term heating environment.
Owner:NARI SCI INSTR (JIANGSU) CO LTD

Axial electron gun and method for stabilization of the electron beam in the axial electron gun

ActiveEP3474307B1Electric discharge tubesDischarge tube solid thermionic cathodes
The invention relates to the field of fabrication of new materials and coatings and may be used in plants designed for electron-beam heating, melting and evaporating of materials in vacuum or reactive gas atmosphere. The disclosed axial electron gun that comprises, in particular, the primary and secondary cathodes and features the figure-shaped holder used for maintaining a stable position of the secondary cathode relative to the electron-beam axis of the axial gun and the pulsing voltage that is applied between the cathodes for electron bombardment of the secondary cathode. The invention ensures an improved stability of process parameters and operation of the electron gun.
Owner:SIGMATECH LTD

Transmitter

PendingCN121359233AElectric discharge tubesDischarge tube solid thermionic cathodesEngineering physicsMaterials science
This transmitter is provided with: an insulator; a pair of terminals extending in a first direction and fixed to the insulator so as to face each other in a second direction perpendicular to the first direction; a filament fixed to the pair of terminals; and a chip part formed of an electron emission material and fixed to the filament. Each of the pair of terminals has an inclined surface on one side in a third direction perpendicular to the first direction and the second direction, the inclined surface being inclined with respect to the first direction so as to face the other side in the third direction further away from the insulator. The filament is fixed to the pair of terminals on the inclined surface.
Owner:DENKA CO LTD

Lateral heat dissipation structure for refrigeration of electric vacuum detector and electric vacuum detector

PendingCN121983483Aimprove performancesuppress thermal noiseMultiplier cathode arrangementsTransit-tube cathodesOptical instrumentMechanical engineering
The invention belongs to the technical field of optical instruments, and particularly relates to a lateral heat dissipation structure for refrigeration of an electric vacuum detector and the electric vacuum detector. The lateral heat dissipation structure for refrigeration of the electric vacuum detection device comprises a refrigeration module and a lateral heat dissipation module, and the refrigeration module is connected with a cathode of the electric vacuum detection device and used for conducting refrigeration and heat conduction on the cathode; and the lateral heat dissipation module is connected with the refrigeration module, is parallel to the axial direction of the cathode, is arranged at the lateral position of the electric vacuum detection device, and is used for laterally conducting and dissipating heat generated by the refrigeration module. The lateral heat dissipation structure for refrigeration of the electric vacuum detection device is a refrigeration structure which is compact in structure, efficient in heat conduction and adaptive to various electric vacuum detection devices, thermal noise and hot electron emission of a core component are remarkably restrained, and the overall performance of the device is improved.
Owner:XIAN INST OF OPTICS & PRECISION MECHANICS CHINESE ACAD OF SCI

System and apparatus for stabilizing electron sources in charged particle systems

ActiveUS12573580B2Electric discharge tubesDischarge tube solid thermionic cathodesElectron sourceParticle beam
Apparatuses and systems for stabilizing electron sources in charged particle beam inspection systems are provided. In some embodiments, a system may include an electron source comprising an emitting tip electrically connected to two electrodes and configured to emit an electron; and a base coupled to the emitting tip, wherein the base is configured to stabilize the emitting tip via the coupling.
Owner:ASML NETHERLANDS BV

Stepped indirect heating cathode with improved shielding

ActiveCN115769333BIon beam tubesDischarge tube solid thermionic cathodesParticle physicsMaterials science
An ion source for forming a plasma has a cathode having a cavity and a cathode surface defining a cathode step. A filament is disposed within the cavity. A cathode shield has a cathode shield surface that at least partially surrounds the cathode surface. A cathode gap is formed between the cathode surface and the cathode shield surface, defining a tortuous path for restricting the plasma from passing through the gap. The cathode surface may have a stepped cylindrical surface defined by a first cathode diameter and a second cathode diameter, which are different from each other to define the cathode step. The stepped cylindrical surface may be an outer surface or an inner surface. The first cathode diameter and the second cathode diameter may be concentric or axially eccentric.
Owner:AXCELIS TECHNOLOGIES INC

Emitter, manufacturing method thereof, electron gun using same, and electronic device using same

To provide an emitter that emits electrons stably with high efficiency, a manufacturing method thereof, an electron gun using the same, and electronic equipment using the same.SOLUTION: An emitter according to the present invention includes nanoneedles made of a compound represented by the general formula REOx (where RE is a rare earth element and x is 1 or more and less than 1.5). A method for manufacturing an emitter according to the present invention includes oxidizing the surface of a metal containing RE to form a thin film made of a compound represented by the general formula REOx (where x is 1 or more and less than 1.5), and processing the thin film into a needle shape using a focused ion beam.SELECTED DRAWING: Figure 1
Owner:NAT INST FOR MATERIALS SCI