Disclosed are a (Al, Ga, In) N-based
compound semiconductor device and a method of fabricating the same. The (Al, Ga, In) N-based
compound semiconductor device of the present invention comprises a substrate; a (Al, Ga, In) N-based
compound semiconductor layer grown on the substrate; and an
electrode formed of at least one material or an
alloy thereof selected from the group consisting of Pt, Pd and Au on the (Al, Ga, In) N-based compound
semiconductor layer. Further, the method of fabricating the (Al, Ga, In) N-based compound
semiconductor device comprises the steps of growing a P layer including P type impurities in a growth chamber; discharging
hydrogen and a
hydrogen source gas in the growth chamber; lowering the temperature of the (Al, Ga, In) N-based compound
semiconductor with the P layer formed thereon to such an extent that it can be withdrawn to the outside from the growth chamber; withdrawing the (Al, Ga, In) N-based compound semiconductor from the growth chamber; and forming an
electrode of at least one material or an
alloy thereof selected from the group consisting of Pt, Pd and Au on the P layer. According to the present invention, it is possible to sufficiently secure P type
conductivity and obtain good
ohmic contact characteristics without performing an annealing process. And, no ftrther annealing is necessary when Pt, Pd, Au
electrode are used.