An apparatus for providing a thin film and an electronic device including a
display device fabricated by the apparatus are disclosed. The apparatus may include an electrostatic chuck to absorb and support a substrate and a supply
nozzle to supply chemical liquid onto the substrate, and wherein the electrostatic chuck includes a base, at least one first
electrode pattern on the base, at least one second
electrode pattern provided on the base and spaced and / or apart (e.g., spaced apart or separated) from the first
electrode pattern (e.g., the at least one first electrode pattern), and at least one
ground pattern provided on the base and spaced and / or apart (e.g., spaced apart or separated) from the first electrode pattern (e.g., the at least one first electrode pattern) and the second electrode pattern (e.g., the at least one second electrode pattern).