The invention relates to a method for producing flexible capacitor touch sensor, characterized in composed of middle layer preparation of PDMS, preparation of flexible PI substrate, graph metal sensitive electrode and relative electric connection, preparation of a first high-elasticity dielectric layer PDMS and a second flexible dielectric layer PI, graph metal drive electrode and relative electric connection, graph a top flexible insulation protective layer PI, separation of the flexible capacitor touch sensor. The invention optimizes and combines techniques, to realize the compatibility of organic flexible material PDMS, PI and traditional MEMS technique. And the capacitor touch sensor has compact structure, high mechanical strength, and high flexibility, while the product can contact the surface with any curvature to sense the volumes of normal force and tangent force, and be applied for the production of flexile capacitor touch sensor array.