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233results about How to "Large depth of field" patented technology

Method of photolithographically defining three regions with one mask step and self aligned isolation structure formed thereby

The preferred embodiment of the present invention provides a method for defining three regions on a semiconductor substrate using a single masking step. The preferred embodiment uses a photoresist material having, simultaneously, both a positive tone and a negative tone response to exposure. This combination of materials can provide a new type of resist, which we call a hybrid resist. The hybrid resist comprises a positive tone component which acts at a first actinic energy level and a negative tone component which acts at a second actinic energy level, with the first and second actinic energy levels being separated by an intermediate range of actinic energy. When hybrid resist is exposed to actinic energy, areas of the resist which are subject to a full exposure cross link to form a negative tone line pattern, areas which are unexposed form remain photoactive and form a positive tone pattern, and areas which are exposed to intermediate amounts of radiation become soluble and wash away during development. This exposes a first region on the mask. By then blanket exposing the hybrid resist, the positive tone patterns become soluble and will wash away during development. This exposes a second region on the mask, with the third region still be covered by the hybrid resist. Thus, the preferred embodiment is able to define three regions using a single masking step, with no chance for overlay errors.
Owner:IBM CORP

Overlay error detection

An overlay target with gratings thereon is illuminated and radiation scattered by the target is imaged onto detectors. A phase difference is then detected between the outputs of the detectors to find the mis-alignment error. In another aspect, an overlay target with gratings or box-in-box structures is illuminated and radiation scattered by the target is imaged onto detectors located away from the specular reflection direction of the illumination in a dark field detection scheme. Medium numerical aperture optics may be employed for collecting the radiation from the overlay target in a bright or dark field configuration so that the system has a larger depth of focus and so that the two structures of the target at different elevations can be measured accurately at the same time. Analytical functions are constructed for the grating type targets. By finding the phase difference between the two gratings at different elevations, misalignment errors can be detected. Analytical functions are constructed as a model for box-in-box type targets where data points away from the edges of the box or bars can be used in the curve fitting. Symmetrical functions are employed to further reduce noise.
Owner:KLA TENCOR CORP

Array type parallel laser projection three-dimensional scanning method

The invention discloses an array type parallel laser projection three-dimensional scanning method. The array type parallel laser projection three-dimensional scanning method comprises steps that a laser micro-vibration mirror projection device used for projecting line lasers in different directions and a plurality of array type cameras used for data acquisition are provided; laser cutter separation of each acquired image in different directions is carried out, and the laser cutter centers of the laser cutters in various directions are respectively extracted, and according to a triangle relation among the projection device and the cameras, an object surface three-dimensional coordinate of a line laser position is acquired; the projection device is used to move the line laser on the object surface by one pixel each time, and the above mentioned process of extracting the object three-dimensional coordinate on the laser cutter position is repeated until the three-dimensional coordinate of the whole object surface is acquired by the laser cutter. The laser projection device adopts MEMS scanning vibration mirror laser, and compared with a digital light and physical grating technology, field depth is large, scanning speed is fast, a size is small, and scanning precision is high; and at the same time, the system is used to distribute the cameras in an array, and then the sensitivity to complicated step edge measurement is provided, and then the non-contact, high-speed, and object edge step high precision measurement of the object is realized.
Owner:XIAN CHISHINE OPTOELECTRONICS TECH CO LTD

Optimization of space width for hybrid photoresist

A photo resist composition contains at least one photoacid generator (PAG), wherein at least two photoacids are produced upon exposure of the photo resist to actinic energy and wherein the photo resist is capable of producing a hybrid response. The function of providing generation of two photoacids in a hybrid resist is to optimize the use of hybrid resist by varying the hybrid space width. The at least two photoacids may differ in their effectiveness at catalyzing at least one mechanism of the hybrid response. In particular, one photoacid may be a weaker acid and another may be a stronger acid, wherein there exists a difference of at least four orders of magnitude between the acid dissociation constant (Ka) of the weaker acid and the stronger acid. A method for optimizing space width in a hybrid photo resist includes the steps of: 1) selecting a desired space width; 2) selecting at least one photoacid generator (PAG), wherein at least two photoacids will be produced upon exposure to actinic energy in relative proportions sufficient to produce the desired space width in the hybrid photo resist; and 3) forming a hybrid photo resist composition comprising the at least one PAG. The step of selecting at least one PAG may include first determining the space width produced alone by each photoacid in a group of candidate photoacids and then selecting the photoacids and corresponding at least one PAG that will produce the desired space width.
Owner:IBM CORP

Fused hybrid resist shapes as a means of modulating hybrid resist space width

The preferred embodiment of the present invention overcomes the limitations of the prior art and provides a method to form spaces in hybrid resist with varying widths. In particular, the preferred method facilitates the formation of spaces with different widths by using mask shapes (either openings or lines) that are smaller than the diffraction limit of the photolithography tool. Diffraction effects at these dimensions reduce the light intensity reaching the resist surface such that the hybrid resist receives an intermediate exposure. These portions of hybrid resist that receive an intermediate exposure are soluble in developer and thus develop away to form spaces in the hybrid resist. Thus, spaces in the hybrid resist of varying widths can be formed.
Owner:IBM CORP

Multi-pulse gate delay range gating laser imaging radar

The invention provides a multi-pulse gate delay range gating laser imaging radar and belongs to the technical field of laser radars, wherein the radar provided by the invention solving the problem of the existing range gating laser imaging radar, such as low range resolution. The multi-pulse gate delay range gating laser imaging radar is characterized in that the clock signal of a clock signal source is output to a synchronous pulse control circuit; the synchronous pulse control circuit transmits a drive pulse signal to a pulse modulation laser, and transmits a delay signal to a control system at the same time; the control system can transmit the ordinal number of drive pulse signals emitted by the synchronous pulse control circuit to an image coding system after the control system transmits the delay signal to a range gate delay circuit; the image coding system numbers the received optical signal images according to the same ordinal number; the optical signal images are collected by an ICCD (intensified charge coupled device) detector; and an optical transmitting antenna and an optical receiving antenna are respectively used for transmitting laser beams and receiving a target laser echo pulse signal. The multi-pulse gate delay range gating laser imaging radar is applicable to the range detection of a target.
Owner:HARBIN INST OF TECH

Surface microdefect fast search and micro-milling repair device for large-diameter KDP crystal elements

The invention relates to a surface microdefect search and repair device for large-diameter KDP crystal elements, in particular to a surface microdefect fast search and micro-milling repair device for large-diameter KDP crystal elements, and aims to solve the problem that presently no device for fast research and micro-milling repair of surface microdefects in large-diameter KDP crystal elements is provided. An integral platform fitting assembly is fixed on a bottom large flat plate. A bottom platform fitting assembly is fixed on the integral platform fitting assembly. A crystal moving platform fitting member is fixed on the integral platform fitting assembly. A crystal microscope moving platform is fixed on the integral platform fitting assembly. First and second drag chains are connected with the crystal moving platform fitting member through guide rail and drag chain connecting blocks. The lower portion of a crystal microscope moving platform support is connected to the upper end face of the integral platform fitting assembly. The crystal microscope moving platform is mounted on the crystal microscope moving platform support. The device is applicable to surface microdefect fast research and micro-milling repair for large-diameter KDP crystal elements.
Owner:HARBIN INST OF TECH

Multispectral imager based on light fieldd imaging technique

The invention relates to a multispectral imager based on the light field imaging technique. The multispectral imager based on the light field imaging technique solves the problem that an existing multispectral imager cannot achieve simultaneous focus imaging of targets with different distances away from the multispectral imager within the field range and cannot recover an image out of focus. The multispectral imager based on the light field imaging technique comprises a visual camera lens, a visual microlens array, a visual image detector, a near-infrared camera lens, a near-infrared microlens array, a near-infrared image detector, an ultraviolet camera lens, an ultraviolet microlens array, an ultraviolet array image detector, an image acquisition and control device, and an image processing and display device. According to the multispectral imager based on the light field imaging technique, due to the fact that the microlens arrays are additionally arranged at the front ends of the image detectors in all wave bands, four-dimensional light field image information instead of traditional two-dimensional image information is recorded and saved, no hardware focusing auxiliary device is needed, refocusing of different targets within the field range can be achieved through reconstruction of a two-dimensional image of an image processing module, and the multi-target and multiband image analyzing performance of the multispectral imager is further improved.
Owner:CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI

Device and method for simultaneously carrying out optical detection on front surface and back surface of object

The invention provides a device and a method for simultaneously carrying out optical detection on the front surface and the back surface of an object. The device is characterized by comprising a transparent object stage, a right-angle prism arranged on one side of the transparent object stage, a light source, a telecentric imaging lens and a camera, wherein the light source, the telecentric imaging lens and the camera are arranged on the other side of the transparent object stage; the inclined plane of the right-angle prism faces the transparent object stage and is parallel to the transparentobject stage; the right-angle prism, the telecentric imaging lens and the camera are coaxial. The method mainly adopts the secondary reflection of the right-angle prism to realize the simultaneous detection of the front surface and the back surface of the same object to be detected, and simultaneously adopts the machine vision telecentric optical imaging lens to obtain a depth of field that is large enough, so that the front surface and the back surface of the object to be detected can be clearly imaged. According to the scheme, the two surfaces of the object to be detected can be detected byone light source and one camera, the detection cost is greatly reduced on the premise of guaranteed efficiency, and the device is simple in structure, easy to install and debug and high in practical and popularization values.
Owner:QUANZHOU NORMAL UNIV

Method, optical module and system for extended field depth three-dimensional nanoscale-resolution imaging

The invention belongs to the technical field of microimaging and provides a method, an optical module and a system for extended field depth three-dimensional nanoscale-resolution imaging. The method comprises the following steps of 1, building the optical module having a double-helix point spread function and defocusing grating multistage imaging properties, 2, carrying out imaging of a molecule needing to be detected by the optical module to obtain a double-helix image, 3, determining a horizontal position of the molecule needing to be detected according to positions of middle points of double-helix sidelobes of the double-helix image, and 4, determining an axial position of the molecule needing to be detected according to a rotation angle of a connection line of centers of the double-helix sidelobes of the double-helix image, and the positions of the middle points of the double-helix sidelobes. Through combination of double effects of the double-helix point spread function and the defocusing grating multistage imaging, the method extends a field depth and improves a resolution ratio. The method can be used for dynamic range imaging of subcellular fractions having any depth values in a whole cell, can produce dynamic function images of multiple moving molecules, and has an important meaning for high-level understanding of a rule and a relationship between a subcellular structure and a cell function change.
Owner:SHENZHEN UNIV

Method of acquiring microscopic image with super field depth

The invention provides a method of acquiring a microscopic image with super field depth. The method comprises the steps: adding a liquid lens with focal length controlled by voltage in a digital microscope light path, performing a series of focusing on the continuous depth range of an observed object by utilizing the liquid lens as a variable focal length element, shooting a series of continuous local focusing pictures, and fusing a super-field-depth clear image including focus information of all heights by utilizing an image fusion processing means. The position where the liquid lens is optimized so as to maintain the amplification factor unchanged in the focus variation process. According to the method, the problems that the traditional optical microscope is excessively small in field depth and objects in a certain depth range cannot be clearly imaged can be effectively solved.
Owner:BEIHANG UNIV

Method, equipment and device for AR (augmented reality) display

The invention provides a method, equipment and a device for AR (augmented reality) display. The device comprises a display assembly, a lens and a micro-reflector array, wherein the micro-reflector array is arranged on the lens; the display assembly comprises a display screen and a projection assembly, and the projection assembly is arranged between the display screen and the micro-reflector array;the micro-reflector array comprises a plurality of micro-reflection units which are arranged according to the setting arrangement dimension and line distance, and the multiple micro-reflection unitsare arranged on the propagation path of light emitted out by the display assembly; the display screen comprises a plurality of effective display areas, the multiple effective display areas are rectangular areas, and the arrangement dimension and arrangement distance of the multiple effective display areas respectively correspond to the arrangement dimension and line distance of the micro-reflectorarray. By adopting the technical scheme, the device has the advantage that the depth of field of the virtual image is increased, so that when a user visually watches the reality scenes at different space depths, the virtual images can be clearly displayed in a rectangular field of view.
Owner:GOERTEK OPTICAL TECH CO LTD

Industrial overhead pipeline measurement method based on ground LIDAR (Light Detection And Ranging)

The invention discloses an industrial overhead pipeline measurement method based on a ground LIDAR (Light Detection And Ranging). The industrial overhead pipeline measurement method comprises the following steps of: collecting three-dimensional point cloud data of an industrial overhead pipeline; carrying out index management on the mass point cloud data according to a space position; performing model extraction of the industrial overhead pipeline and combining model data; extracting the center line and characteristic point of the industrial overhead pipeline; editing professional attribution information (such as a pipe diameter, a pipe wall thickness, a thermal insulation material, a valve type, a carrier property and the like) by using GIS (Geographic Information System) software; and realizing three-dimensional visualization. According to the invention, based on high-precision three-dimensional point cloud data, the industrial overhead pipeline data collection and management applied to GIS is finally realized by fitting the dispersed point cloud data to obtain the real mathematical model of the industrial overhead pipeline and combining the GIS software with the three-dimensional design and display software.
Owner:南京市测绘勘察研究院股份有限公司
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