Overlay error detection
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[0036]For simplicity in description, identical components are labeled by the same numerals in this application.
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[0037]FIG. 1 is a cross-sectional view of a polychromatic (e.g. white light) or laser dark field imaging system to illustrate one embodiment of the invention. As shown in FIG. 1, the imaging system 20 includes a source (not shown) which supplies a laser beam 22 or a beam 22 of polychromatic radiation such as white light, where the beam 22 is reflected by a mirror 26 towards overlay target 24. Target 24 has two structures thereon: one on a current layer at a higher elevation than the other one on a previous layer. The two structures may be two gratings (they can also be the type that includes box(es) or bar(s), though not shown as such in FIG. 1), located on two different planes and are substantially parallel to the planes, where one of the two planes such as plane 34 (or any plane parallel thereto) may serve as a reference plane. Radia...
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