A method for manufacturing an edge termination structure for a
silicon carbide power semiconductor device having a
central region and an
edge region is provided. The following manufacturing steps are performed: a) providing an n-doped
silicon carbide substrate, b) epitaxially growing a
silicon carbide n-doped drift layer on the substrate, which has a lower
doping concentration than the substrate, c) creating at least one p-doped termination layer by implanting a second
ion up to a maximum termination layer depth and annealing on the first main side, d) forming a
doping reduction layer having a depth range, which
doping reduction layer comprises at least one doping reduction region, wherein a depth of a doping concentration minimum of the doping reduction layer is greater than the maximum termination layer depth, wherein for the creation of each doping reduction region: implanting a first
ion with an implantation energy in the drift layer at least in the
edge region, wherein the first
ion and the at least one implantation energy are chosen such that the doping reduction layer depth range is less than 10 μm, e) annealing the doping reduction layer, wherein step d) and e) are performed such that the doping concentration of the drift layer is reduced in the doping reduction layer.